CN220703780U - Large-stroke arc striking device with stable contact force - Google Patents
Large-stroke arc striking device with stable contact force Download PDFInfo
- Publication number
- CN220703780U CN220703780U CN202322282570.1U CN202322282570U CN220703780U CN 220703780 U CN220703780 U CN 220703780U CN 202322282570 U CN202322282570 U CN 202322282570U CN 220703780 U CN220703780 U CN 220703780U
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- arc striking
- fixed sleeve
- needle
- rod
- arc
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- 230000006835 compression Effects 0.000 claims abstract description 17
- 238000007906 compression Methods 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims description 15
- 230000006641 stabilisation Effects 0.000 claims description 7
- 238000011105 stabilization Methods 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 4
- 210000004907 gland Anatomy 0.000 claims description 3
- 239000013077 target material Substances 0.000 abstract description 9
- 238000012423 maintenance Methods 0.000 abstract description 4
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 238000010891 electric arc Methods 0.000 description 10
- 238000007733 ion plating Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- Percussive Tools And Related Accessories (AREA)
Abstract
The utility model discloses a touch force stable large-stroke arc striking device which comprises an arc striking needle, a lengthening rod, an arc striking rod, a fixed sleeve, a guide rod cylinder, a cylinder fixing seat and a target material, wherein the guide rod cylinder is arranged on the cylinder fixing seat, the fixed sleeve is fixedly arranged on the fixing seat, a straight column type oil-free bushing is arranged in the fixed sleeve and forms a sliding pair with the arc striking rod, the guide rod cylinder is connected with the arc striking rod through an insulating connecting block, the arc striking rod penetrates through the fixed sleeve, and the tail end of the arc striking rod is connected with the lengthening rod and the arc striking needle in series. The arc striking needle adopts the drive of compound power supply, makes the contact of target through spring compression force drive arc striking needle, and impact force is little, can improve the life of arc striking needle by a wide margin to effectively improve equipment availability factor and reduce maintenance cost, drive the arc striking needle through the guide arm cylinder simultaneously and make its target break away from, can reduce the emergence of sticking needle phenomenon when striking, avoid causing the short circuit.
Description
Technical Field
The utility model relates to the field of ion coating equipment, in particular to a contact force stable large-stroke arc striking device.
Background
The ion plating technology is a latest vacuum plating technology developed in recent decades and comprises secondary ion plating, hollow cathode ion plating, hot wire arc ion plating, cathode arc ion plating, multi-arc ion plating and the like. Among the ion plating techniques, multi-arc ion plating is most widely used.
The multi-arc ion plating is a process of evaporating target metal by controlling an electric arc to move on the surface of a target under a vacuum condition and applying a high bias voltage on a substrate so that target particles evaporated by the electric arc bombard the substrate at a high speed to form a film. Because the electric arc on the surface of the target material is supplied by a low-voltage and high-current direct-current power supply, the electric arc can only be maintained and can not be spontaneously generated, and a special arc striking device is needed to generate the electric arc. When the arc is started, anode electricity is applied through the arc starting needle, cathode electricity is applied to the target, the arc starting needle is in short contact with the target for short circuit of the cathode and the anode, then when the arc starting needle leaves the surface of the target, the arc is broken down in the cathode and the anode circuit, and stable low-voltage and high-current output is provided through the arc power supply, so that self-maintenance of the arc is realized.
The current common arc striking device is mainly two kinds, namely an electric arc striking device, a magnetic field is generated by electrifying a coil to drive an arc striking needle to move, after the arc striking is successful, the coil is powered off and the arc striking needle is reset through a spring to realize the reciprocating motion of the arc striking needle, although the scheme can ensure the tightness, the magnetic force generated by electrifying the coil is smaller, the elastic force of the spring matched with the coil is smaller, so that the movement stroke of the arc striking needle is shorter, the phenomenon of sticking the needle is extremely easy to occur due to the heating of the arc striking needle, and the arc striking needle cannot rebound to cause short circuit; the other is a pneumatic arc striking device, and the arc striking needle is driven to reciprocate by controlling the action of the air cylinder, so that the scheme has the advantages that the arc striking needle is high in power and difficult to stick to the target material when being separated, but the impact force is high when the arc striking needle is contacted with the target material, the service life of the arc striking needle is short, frequent replacement is needed, and the contact force stability of the arc striking needle is insufficient, or is too large or too small especially in a large-stroke arc striking range.
Aiming at the problems of the existing electric arc striking device and pneumatic arc striking device, the utility model aims to solve the problems of small spring force, small stroke, easy sticking of the arc striking needle, large impact force when the arc striking needle of the pneumatic arc striking device contacts with a target material, unstable contact force in a large stroke range, short service life of the arc striking needle and the like of the arc striking needle of the electric arc striking device.
Disclosure of Invention
Aiming at the problems, the utility model provides a touch force stable large-stroke arc striking device driven by a compound power source for an arc striking needle.
In order to solve the technical problems, the utility model adopts the following technical scheme: the utility model provides a touch force stable large stroke arc striking device, includes arc striking needle, extension bar, arc striking rod, fixed sleeve, guide arm cylinder, cylinder fixing base, target, the guide arm cylinder is installed on the cylinder fixing base, fixed sleeve fixed mounting is on the fixing base, install straight column type oilless bush in the fixed sleeve to spacing its non-drunkenness with the circlip, form the sliding pair with the arc striking rod, be close to and install adjusting washer and compression spring and withhold the shaft shoulder of arc striking rod between fixed sleeve and the arc striking rod on one side of the atmosphere, make the arc striking rod receive less spring compression force and not popped up under the free loading state, be close to and install skeleton oil blanket, U type sealing washer combination sealing element between fixed sleeve and the arc striking rod on one side of vacuum to compress tightly fixedly with sealing gland, still install shoulder type oilless bush on the fixed sleeve, and compress tightly with the baffle and make it can not the epaxial drunkenness, the guide arm cylinder passes through insulating connecting block and arc striking rod to be connected, install two guide shafts on the oilless insulating connecting block, and form the sliding pair with the cooperation of rod head, the arc striking rod has a recess to cut into for the arc striking rod, the end is connected in series with the arc striking rod, the extension bar has a groove to match, and the arc striking rod has the end to be connected in series.
Furthermore, the striking needle adopts a tungsten electrode.
Furthermore, a second plating prevention shade is arranged at the position of the arc striking rod penetrating through the fixed sleeve.
Furthermore, a plating-preventing shade I is arranged at the connecting and fixing position of the long rod and the arc striking needle.
Further, the fixed sleeve is locked on the fixed seat through the pin, an insulating gasket is arranged between the fixed sleeve and the fixed seat, a first sealing ring and a second sealing ring are respectively arranged on the upper portion and the lower portion of the insulating gasket, and the pin and the fixed sleeve are directly provided with an insulating sleeve.
Further, an anode terminal for grounding is arranged above the fixed sleeve.
As can be seen from the above description of the structure of the present utility model, compared with the prior art, the present utility model has the following advantages:
the utility model discloses the arc striking needle adopts compound power supply drive, and the contact motion of arc striking needle and target is driven the arc striking needle by compression spring's compression elasticity and is retracted to produce, and the motion of breaking away from of arc striking needle and target is stretched out by the guide arm cylinder and is driven the arc striking needle and stretch out to produce. The arc striking needle is driven by the compression force of the spring to make the target contact, the impact force is small, the service life of the arc striking needle can be greatly prolonged, the service efficiency of equipment is effectively improved, the maintenance cost is reduced, meanwhile, the arc striking needle is driven by the guide rod cylinder to separate the target, the occurrence of the phenomenon of sticking the needle during arc striking can be reduced, and the short circuit is avoided.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model. In the drawings:
FIG. 1 is a schematic view of a touch force stabilization large-stroke arc striking device;
FIG. 2 is a cross-sectional view A-A of a touch force stabilization large stroke arc striking device of the present utility model.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
Examples
Referring to fig. 1 and 2, a contact force stable large-stroke arc striking device comprises an arc striking needle 1, a lengthening rod 3, an arc striking rod 4, a fixed sleeve 7, a guide rod cylinder 24, a cylinder fixing seat 25 and a target 26, wherein the guide rod cylinder 24 is arranged on the cylinder fixing seat 25, the fixed sleeve 7 is fixedly arranged on the fixing seat 15, a straight-column type oilless bushing 11 is arranged in the fixed sleeve 7 and is limited by an elastic retainer ring 10 to prevent the bushing from moving, a sliding pair is formed with the arc striking rod 4, the arc striking rod 4 can reciprocate smoothly along the axial direction, an adjusting washer 12 and a compression spring 13 are arranged between the fixed sleeve 7 and the arc striking rod 4 near one side of the atmosphere and are used for propping up the shaft shoulder of the arc striking rod 4 by a baffle 21, the arc striking rod 4 is subjected to smaller spring compression force and is not popped up in a free loading state, the adjusting washer 12 and the compression spring 13 facilitate the adjustment of the maximum rebound force of the arc striking rod 4, the adjustable vacuum arc starting rod can be adjusted by reducing or increasing the number of the adjusting washers 12, also can be adjusted by changing different spring constants or spring wire diameters, a framework oil seal 8 and a U-shaped sealing ring 9 combined sealing element are arranged between a fixed sleeve 7 on one side close to vacuum and an arc starting rod 4, and are tightly pressed and fixed by a sealing gland 6, so that the arc starting rod 4 is ensured to be always and effectively isolated from vacuum and atmosphere in the moving process, meanwhile, a high-temperature-resistant sealing ring material is selected, the service life is effectively ensured, a shoulder-type oil-free bushing 20 is also arranged on the fixed sleeve 7 and is tightly pressed by a baffle 21 so that the shoulder-type oil-free bushing cannot move on the shaft, a guide rod cylinder 24 is connected with the arc starting rod 4 through an insulating connecting block 23, two guide shafts 16 are fixedly arranged on the insulating connecting block 23 and are matched with the oil-free bushing 20 to form a sliding pair, a flat groove is milled at the rod head end of the arc starting rod 4, the insulation connecting block 23 is milled with a groove and is matched with the groove to form a whole, so that the arc striking needle 1 of the arc striking device is guaranteed not to rotate randomly in the working process, the arc striking rod 4 penetrates through the fixed sleeve 7, the tail end of the arc striking rod 4 is connected with the extension rod 3 and the arc striking needle 1 in series, and the arc striking needle 1 adopts a tungsten electrode to guarantee stable arc striking.
The arc striking rod 4 passes through the fixed sleeve 7 and is provided with the plating prevention shade II 5, and the connection and fixation position of the long rod 3 and the arc striking needle 1 is provided with the plating prevention shade I2, so that the arc striking needle 1 is convenient to assemble, disassemble and replace and is not influenced by film plating deposition.
The fixed sleeve 7 is locked on the fixed seat 15 through a pin 27, an insulating gasket 14 is arranged between the fixed sleeve 7 and the fixed seat 15, a first sealing ring 17 and a second sealing ring 18 are respectively arranged on the upper portion and the lower portion of the insulating gasket 14, the pin 27 and the fixed sleeve 7 are directly provided with an insulating sleeve 19, and an anode terminal 22 for grounding is further arranged above the fixed sleeve 7.
When the arc striking device works, the anode wiring end 22 is grounded, the guide rod cylinder 24 is in an initial state of extending, the end face of the cylinder props against the insulating connecting block 23 to drive the arc striking rod 4 to extend out of the arc striking needle 1 to be far away from the target material and be in non-contact with the target material, and at the moment, the compression spring between the guide shaft and the cylinder seat is in a compression state. When the arc striking signal is received, the guide rod cylinder 24 acts and retracts, and at the moment, the arc striking rod 4 also retracts under the drive of the compression force of the spring, so that the arc striking needle 1 is driven to touch the target. The tungsten electrode is driven to touch the target 26 by the compression force of the spring, so that the damage to the target caused by overlarge impact force during arc striking can be ensured, meanwhile, the cylinder is retracted faster than the tungsten electrode is touched with the target 26, and the tungsten electrode can be ejected out faster to be separated from the target 26 instantaneously, so that a better arc striking effect is achieved. After the arc discharge is ignited, the arc striking device is automatically cut off (the arc striking device for the arc discharge is not ignited to repeatedly act), and the stable discharge between the cathode arc source and the coating chamber is maintained by the arc power supply.
The arc striking needle is driven by a composite power source, the contact movement of the arc striking needle and the target material is generated by the retraction of the arc striking needle driven by the compression elastic force of the compression spring, and the separation movement of the arc striking needle and the target material is generated by the extension of the guide rod cylinder to drive the arc striking needle to extend. The arc striking needle is driven by the compression force of the spring to make the target contact, the impact force is small, the service life of the arc striking needle can be greatly prolonged, the service efficiency of equipment is effectively improved, the maintenance cost is reduced, meanwhile, the arc striking needle is driven by the guide rod cylinder to separate the target, the occurrence of the phenomenon of sticking the needle during arc striking can be reduced, and the short circuit is avoided.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (6)
1. The utility model provides a touch stable large stroke arc striking device which characterized in that: including arc striking needle, extension bar, arc striking pole, fixed sleeve, guide arm cylinder, cylinder fixing base, target, the guide arm cylinder is installed on the cylinder fixing base, fixed sleeve fixed mounting is on the fixing base, install straight column formula oilless bush in the fixed sleeve to make it not float with the circlip spacing, form the sliding pair with the arc striking pole, be close to and install adjusting washer and compression spring and withhold the shaft shoulder of arc striking pole with the baffle between atmospheric side fixed sleeve, be close to and install skeleton oil blanket, U type sealing washer combination seal element between vacuum side fixed sleeve and the arc striking pole to compress tightly fixedly with sealing gland, still install shoulder formula oilless bush on the fixed sleeve, and compress tightly with the baffle and make it can not the epaxial float, the guide arm cylinder passes through the insulation connecting block and is connected with the arc striking pole, install two guide shafts on the insulation connecting block, and form the sliding pair with oilless bush cooperation, the arc striking pole head end mills the flat groove, and the insulation mill is synthesized as a whole with it, the arc striking pole passes fixed sleeve, terminal and arc striking pole concatenates with the arc striking pole.
2. The touch force stabilization large stroke arc striking device according to claim 1, wherein: the arc striking needle adopts a tungsten electrode.
3. The touch force stabilization large stroke arc striking device according to claim 1, wherein: the arc striking rod passes through the fixed sleeve and is provided with a plating-preventing shade II.
4. The touch force stabilization large stroke arc striking device according to claim 1, wherein: the connecting and fixing part of the long rod and the arc striking needle is provided with a plating prevention shade I.
5. The touch force stabilization large stroke arc striking device according to claim 1, wherein: the fixed sleeve is locked on the fixed seat through a pin, an insulating gasket is arranged between the fixed sleeve and the fixed seat, a first sealing ring and a second sealing ring are respectively arranged on the upper portion and the lower portion of the insulating gasket, and an insulating sleeve is directly arranged between the pin and the fixed sleeve.
6. The touch force stabilization large stroke arc striking device according to claim 1, wherein: and an anode terminal used for grounding is arranged above the fixed sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322282570.1U CN220703780U (en) | 2023-08-24 | 2023-08-24 | Large-stroke arc striking device with stable contact force |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322282570.1U CN220703780U (en) | 2023-08-24 | 2023-08-24 | Large-stroke arc striking device with stable contact force |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220703780U true CN220703780U (en) | 2024-04-02 |
Family
ID=90441324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322282570.1U Active CN220703780U (en) | 2023-08-24 | 2023-08-24 | Large-stroke arc striking device with stable contact force |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220703780U (en) |
-
2023
- 2023-08-24 CN CN202322282570.1U patent/CN220703780U/en active Active
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| GR01 | Patent grant |