CN220696325U - Chlorosilane waste gas treatment system - Google Patents
Chlorosilane waste gas treatment system Download PDFInfo
- Publication number
- CN220696325U CN220696325U CN202322294615.7U CN202322294615U CN220696325U CN 220696325 U CN220696325 U CN 220696325U CN 202322294615 U CN202322294615 U CN 202322294615U CN 220696325 U CN220696325 U CN 220696325U
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- Prior art keywords
- tank
- sludge
- pipeline
- waste gas
- clean water
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- 239000002912 waste gas Substances 0.000 title claims abstract description 41
- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 19
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 19
- 239000010802 sludge Substances 0.000 claims abstract description 65
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 45
- 238000005406 washing Methods 0.000 claims abstract description 23
- 239000002351 wastewater Substances 0.000 claims abstract description 20
- 238000001704 evaporation Methods 0.000 claims abstract description 11
- 230000008020 evaporation Effects 0.000 claims abstract description 11
- 238000004065 wastewater treatment Methods 0.000 claims abstract description 8
- 238000002386 leaching Methods 0.000 claims description 41
- 239000007788 liquid Substances 0.000 claims description 32
- 238000005345 coagulation Methods 0.000 claims description 24
- 230000015271 coagulation Effects 0.000 claims description 24
- 238000003756 stirring Methods 0.000 claims description 23
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 21
- 238000004062 sedimentation Methods 0.000 claims description 17
- 230000000694 effects Effects 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 8
- 238000002425 crystallisation Methods 0.000 claims description 7
- 230000008025 crystallization Effects 0.000 claims description 7
- 238000003860 storage Methods 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract description 5
- 150000003839 salts Chemical class 0.000 description 6
- 239000003814 drug Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 241000282414 Homo sapiens Species 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000701 coagulant Substances 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000002910 solid waste Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000006228 supernatant Substances 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model relates to the technical field of waste gas treatment, in particular to a chlorosilane waste gas treatment system, which comprises a waste gas washing device, a waste water treatment device, a sludge treatment device, a clean water tank, a salinity meter and a three-effect evaporation device, wherein the waste gas washing device, the waste water treatment device, the sludge treatment device, the clean water tank, the salinity meter and the three-effect evaporation device are sequentially connected; the utility model provides a chlorosilane waste gas treatment system which can realize zero discharge of chloride ions and has no wastewater discharge while purifying waste gas.
Description
Technical Field
The utility model relates to the technical field of waste gas treatment, in particular to a chlorosilane waste gas treatment system.
Background
A large amount of waste gas is generated in the production process of the polysilicon, and the waste gas contains monosilane, silicon tetrachloride, trichlorosilane, dichlorosilane, chlorosilane and the like. If the waste gas is directly discharged into the atmosphere, the atmosphere environment is polluted, and the physical health of human beings is affected. Therefore, the exhaust gas needs to be purified before being discharged to the atmosphere, and a common treatment method is an alkaline washing process.
At present, most purification treatment devices are used for treating waste gas, and no chloride ion removal treatment is carried out on waste water generated in the treatment process, so that the salt content in the waste water is too high (reaching 15% or more), and the waste water discharge requirement of national regulations is not met.
Disclosure of Invention
The utility model aims to solve the technical problems that: overcomes the defects in the prior art, and provides a chlorosilane waste gas treatment system which can realize zero discharge of chloride ions and has no wastewater discharge while purifying waste gas.
The technical scheme adopted for solving the technical problems is as follows: the utility model provides a chlorosilane exhaust-gas treatment system, includes waste gas washing device, effluent treatment plant and the sludge treatment device who connects gradually, still includes clean water basin, salinity meter and triple effect evaporation plant, the clean water basin is connected with effluent treatment plant and sludge treatment device respectively, the salinity meter is established in the clean water basin, triple effect evaporation plant is including triple effect evaporator, crystallization kettle, the centrifuge that connects gradually, triple effect evaporator is connected with the clean water basin, the liquid outlet and the waste gas washing device of centrifuge are connected.
Further, the waste gas washing device comprises a two-stage leaching tower, a leaching pool and a liquid seal tank, wherein the leaching pool is arranged at the bottom of the two-stage leaching tower, the liquid seal tank is connected with an exhaust port of the two-stage leaching tower, the leaching pool is connected with a spraying mechanism in the two-stage leaching tower through a circulating pipeline, a liquid outlet of the liquid seal tank is connected with the leaching pool, the leaching pool is connected with a liquid outlet of a centrifugal machine, and a circulating pump is arranged on the circulating pipeline.
Further, the wastewater treatment device comprises a coagulation tank, a sedimentation tank and a dispensing assembly, wherein the coagulation tank is connected with the leaching tank through an outer discharge pipeline, the coagulation tank is connected with the sludge treatment device through the sedimentation tank, a liquid outlet of the sedimentation tank is connected with a clean water tank, the dispensing assembly is connected with the coagulation tank, and a wastewater pump is arranged on the outer discharge pipeline.
Further, the dispensing assembly comprises a NaOH storage tank, a PAM dosing tank and a PAC dosing tank, wherein the NaOH storage tank, the PAM dosing tank and the PAC dosing tank are connected with the coagulation tank through dosing pipelines respectively, and metering pumps are arranged on the dosing pipelines.
Further, the sludge treatment device comprises a sludge tank and a plurality of automatic plate-and-frame filter presses, the sludge tank is connected with a sludge discharge port of the sedimentation tank through a sludge discharge pipeline, a sludge outlet of the sludge tank is connected with the plurality of automatic plate-and-frame filter presses through sludge pipelines respectively, a liquid outlet of the automatic plate-and-frame filter presses is connected with a clean water tank, and a sludge pump is arranged on the sludge pipeline.
Further, the device also comprises a water return pipeline, the clean water tank is connected with the leaching tank through the water return pipeline, and a pump for water return is arranged on the water return pipeline.
Further, the device also comprises instrument air, a backflushing pipeline and an air supply pipeline, wherein the instrument air is connected with the sludge discharge pipeline through the backflushing pipeline, and the instrument air is connected with the sludge pump through the air supply pipeline.
Further, the PAM dosing tank, the PAC dosing tank, the coagulation tank and the sludge tank are respectively provided with a stirring mechanism, the stirring mechanism comprises a motor, a stirring shaft and stirring blades, the top end of the stirring shaft is connected with the output end of the motor, and the bottom end of the stirring shaft is connected with the stirring blades.
The beneficial effects of the utility model are as follows:
(1) The utility model carries out evaporation concentration on the wastewater after mud removal through the triple-effect evaporator, then conveys the wastewater into a crystallization kettle for cooling crystallization, finally enters a centrifugal machine for solid-liquid separation, realizes zero discharge of chloride ions, and returns the liquid separated by the centrifugal machine to a leaching tank for recycling by combining the connection of a liquid outlet of the centrifugal machine and a waste gas washing device, thereby realizing closed-loop operation of the whole system without wastewater discharge;
(2) According to the utility model, through the arrangement of the water return pipeline, the cyclic utilization of the waste water in the leaching pool is realized, and the utilization rate of the waste water is improved;
(3) According to the utility model, the dredge pipeline is dredged through the arrangement of the backflushing pipeline, so that the dredge pipeline is prevented from being blocked.
Drawings
The utility model will be further described with reference to the drawings and embodiments.
Fig. 1 is a schematic diagram of the present utility model.
In the figure: 1. an exhaust gas washing device; 1a, a two-stage leaching tower; 1b, a leaching pool; 1c, a liquid seal tank; 1d, a circulating pipeline; 2. a wastewater treatment device; 2a, a coagulation pool; 2b, a sedimentation tank; 2c, a dispensing assembly; 2c1, a NaOH storage tank; 2c2, a PAM dosing tank; 2c3, PAC dosing tank; 2c4, a dosing pipeline; 2d, an outer pipeline; 3. a sludge treatment device; 3a, a sludge tank; 3b, an automatic plate-and-frame filter press; 3c, a mud discharge pipeline; 3d, a sludge pipeline; 4. a clean water tank; 5. a salinity meter; 6. a triple effect evaporation device; 6a, a triple effect evaporator; 6b, crystallizing the kettle; 6c, a centrifuge; 7. a water return line; 8. instrument air; 9. a backflushing pipeline; 10. an air supply line; 11. and a stirring mechanism.
Detailed Description
The utility model will now be further described with reference to the accompanying drawings. These drawings are simplified schematic views illustrating the basic structure of the present utility model by way of illustration only, and thus show only the constitution related to the present utility model.
As shown in fig. 1, the chlorosilane waste gas treatment system comprises a waste gas washing device 1, a waste water treatment device 2 and a sludge treatment device 3 which are sequentially connected, and further comprises a clean water tank 4, a salinity meter 5 and a three-effect evaporation device 6, wherein the clean water tank 4 is respectively connected with the waste water treatment device 2 and the sludge treatment device 3, the salinity meter 5 is arranged in the clean water tank 4, the three-effect evaporation device 6 comprises a three-effect evaporator 6a, a crystallization kettle 6b and a centrifugal machine 6c which are sequentially connected, the three-effect evaporator 6a is connected with the clean water tank 4, and a liquid outlet of the centrifugal machine 6c is connected with the waste gas washing device 1. The waste water after mud removal is evaporated and concentrated through the triple-effect evaporator 6a, then is conveyed into the crystallization kettle 6b for cooling and crystallization, finally enters the centrifugal machine 6c for solid-liquid separation, zero discharge of chloride ions is achieved, the liquid outlet of the centrifugal machine 6c is connected with the waste gas washing device 1, liquid separated by the centrifugal machine 6c is returned to the leaching tank 1b for recycling, closed-loop operation of the whole system is achieved, and no waste water is discharged. Specifically, the exhaust gas washing devices 1 are divided into two groups to improve the treatment efficiency of the exhaust gas; condensed water generated by the triple effect evaporator 6a can also be returned to the leaching pool 1b for reuse; the immobilization produced by the centrifuge 6c is recovered.
The waste gas washing device 1 comprises a two-stage leaching tower 1a, a leaching tank 1b and a liquid seal tank 1c, wherein the leaching tank 1b is arranged at the bottom of the two-stage leaching tower 1a, the liquid seal tank 1c is connected with an exhaust port of the two-stage leaching tower 1a, the leaching tank 1b is connected with a spraying mechanism in the two-stage leaching tower 1a through a circulating pipeline 1d, a liquid outlet of the liquid seal tank 1c is connected with the leaching tank 1b, the leaching tank 1b is connected with a liquid outlet of a centrifugal machine 6c, and a circulating pump is arranged on the circulating pipeline 1 d. Through the arrangement of the circulating pipeline 1d, the waste water in the leaching tank 1b is recycled, and the utilization rate of the waste water is improved. Specifically, the two-stage leaching tower 1a is formed by connecting two leaching towers in series; the spray mechanism is prior art and will not be described in any great detail herein.
The wastewater treatment device 2 comprises a coagulation tank 2a, a sedimentation tank 2b and a dispensing component 2c, wherein the coagulation tank 2a is connected with a leaching tank 1b through an outer discharge pipeline 2d, the coagulation tank 2a is connected with a sludge treatment device 3 through the sedimentation tank 2b, a liquid outlet of the sedimentation tank 2b is connected with a clean water tank 4, the dispensing component 2c is connected with the coagulation tank 2a, and a wastewater pump is arranged on the outer discharge pipeline 2 d. By the arrangement of the dispensing component 2c, a proper amount of coagulating agent is dispensed according to the pH value in the coagulating basin 2a, so that the waste of the medicament is avoided. Specifically, the sedimentation tank 2b is an inclined tube sedimentation tank.
The dispensing assembly 2c comprises a NaOH storage tank 2c1, a PAM dosing tank 2c2 and a PAC dosing tank 2c3, wherein the NaOH storage tank 2c1, the PAM dosing tank 2c2 and the PAC dosing tank 2c3 are respectively connected with a coagulation tank 2a through dosing pipelines 2c4, and metering pumps are arranged on the dosing pipelines 2c 4. Through the arrangement of the metering pump, the adding amount of each medicament can be accurately controlled.
The sludge treatment device 3 comprises a sludge tank 3a and a plurality of automatic plate-and-frame filter presses 3b, the sludge tank 3a is connected with a sludge discharge port of the sedimentation tank 2b through a sludge discharge pipeline 3c, a sludge outlet of the sludge tank 3a is connected with the plurality of automatic plate-and-frame filter presses 3b through sludge pipelines 3d respectively, a liquid outlet of the automatic plate-and-frame filter presses 3b is connected with a clean water tank 4, and a sludge pump is arranged on the sludge pipeline 3 d. The automatic plate-and-frame filter press 3b performs filter pressing on the sludge discharged from the sludge tank 3a, and the sludge after filter pressing is transported and discharged. Specifically, the number of the automatic plate-and-frame filter presses 3b is three; the sludge pump is a diaphragm pump.
The chlorosilane waste gas treatment system further comprises a water return pipeline 7, the clean water tank 4 is connected with the leaching tank 1b through the water return pipeline 7, and a pump for water return is arranged on the water return pipeline 7. Through the arrangement of the water return pipeline 7, the liquid (the salt concentration is lower than 15%) in the leaching tank 1b is conveyed into the leaching tank 1b for the cyclic utilization of the spraying mechanism.
The chlorosilane waste gas treatment system further comprises instrument air 8, a backflushing pipeline 9 and an air supply pipeline 10, wherein the instrument air 8 is connected with the sludge discharge pipeline 3c through the backflushing pipeline 9, and the instrument air 8 is connected with the sludge pump through the air supply pipeline 10. The dredge of the sludge discharge pipeline 3c is realized through the arrangement of the backflushing pipeline 9, so that the sludge discharge pipeline 3c is prevented from being blocked; the sludge pump is supplied with air by the arrangement of the air supply line 10.
And the PAM dosing tank 2c2, the PAC dosing tank 2c3, the coagulation tank 2a and the sludge tank 3a are respectively provided with a stirring mechanism 11, the stirring mechanism 11 comprises a motor, a stirring shaft and stirring blades, the top end of the stirring shaft is connected with the output end of the motor, and the bottom end of the stirring shaft is connected with the stirring blades. Through the setting of rabbling mechanism 11, guaranteed the homogeneity of the medicament in PAM dosing tank 2c2 and PAC dosing tank 2c3, the coagulation effect in the coagulation basin 2a and to the stirring in the mud groove 3 a.
It should be noted that, valves for controlling on-off are installed on each pipeline in the system, and will not be described in detail here.
During operation, waste gas discharged from each process section in the production process is conveyed into a buffer tank (not shown in the figure), the waste gas is respectively conveyed into a two-stage leaching tower 1a through an exhaust port of the buffer tank to be sprayed and washed, most of acid gas in the waste gas is removed, the treated waste gas enters a liquid seal tank 1c to be sealed with clean water again and then is discharged outwards, waste water generated by washing in the two-stage leaching tower 1a enters a leaching tank 1b, then is conveyed into a coagulation tank 2a through an outer discharge pipeline 2d, a dispensing component 2c dispenses according to the PH value in the coagulation tank 2a and is added into the coagulation tank 2a, the waste water after adding the medicine enters a sedimentation tank 2b to be precipitated, supernatant in the sedimentation tank 2b overflows into a clean water tank 4 to be collected, sludge deposited at the bottom is regularly discharged into a sludge tank 3a, the sludge in the sludge tank 3a is stirred and then is conveyed into an automatic plate-frame filter press 3b through a sludge pipeline 3d, the produced solid waste after being filtered and concentrated and transported outwards, the produced salt-containing waste water is conveyed into the clean water tank 4 to be collected through an outer discharge pipeline 2d, and conveyed into the clear water tank 4 to be recycled through a recycling pipeline 7 to be subjected to a multi-effect evaporation device (when the salt concentration of 6% is realized, and the salt concentration is discharged into a clear water tank is 15% after the salt concentration is detected).
The above embodiments are only for illustrating the technical concept and features of the present utility model, and are intended to enable those skilled in the art to understand the content of the present utility model and to implement the same, but are not intended to limit the scope of the present utility model, and all equivalent changes or modifications made according to the spirit of the present utility model should be included in the scope of the present utility model.
Claims (8)
1. The utility model provides a chlorosilane exhaust-gas treatment system, includes waste gas washing device (1), effluent treatment plant (2) and sludge treatment apparatus (3) that connect gradually, its characterized in that: still include clean water basin (4), salinity meter (5) and triple effect evaporation plant (6), clean water basin (4) are connected with effluent treatment plant (2) and sludge treatment device (3) respectively, salinity meter (5) are established in clean water basin (4), triple effect evaporation plant (6) are including triple effect evaporator (6 a), crystallization kettle (6 b), centrifuge (6 c) that connect gradually, triple effect evaporator (6 a) are connected with clean water basin (4), the liquid outlet of centrifuge (6 c) is connected with waste gas washing device (1).
2. The chlorosilane waste gas treatment system of claim 1 wherein: waste gas washing device (1) include two-stage leaching tower (1 a), drip washing pond (1 b) and liquid seal jar (1 c), the bottom at two-stage leaching tower (1 a) is established in drip washing pond (1 b), liquid seal jar (1 c) is connected with the gas vent of two-stage leaching tower (1 a), drip washing pond (1 b) are connected with the spraying mechanism in two-stage leaching tower (1 a) through circulation pipeline (1 d), the leakage fluid dram of liquid seal jar (1 c) is connected with drip washing pond (1 b), liquid exit linkage of drip washing pond (1 b) and centrifuge (6 c), install the circulating pump on circulation pipeline (1 d).
3. The chlorosilane waste gas treatment system of claim 2 wherein: the wastewater treatment device (2) comprises a coagulation tank (2 a), a sedimentation tank (2 b) and a dispensing component (2 c), wherein the coagulation tank (2 a) is connected with a leaching tank (1 b) through an outer pipeline (2 d), the coagulation tank (2 a) is connected with a sludge treatment device (3) through the sedimentation tank (2 b), a liquid outlet of the sedimentation tank (2 b) is connected with a clean water tank (4), the dispensing component (2 c) is connected with the coagulation tank (2 a), and a wastewater pump is arranged on the outer pipeline (2 d).
4. A chlorosilane waste gas processing system as in claim 3 wherein: the dosing assembly (2 c) comprises a NaOH storage tank (2 c 1), a PAM dosing tank (2 c 2) and a PAC dosing tank (2 c 3), wherein the NaOH storage tank (2 c 1), the PAM dosing tank (2 c 2) and the PAC dosing tank (2 c 3) are connected with the coagulation tank (2 a) through dosing pipelines (2 c 4) respectively, and metering pumps are arranged on the dosing pipelines (2 c 4).
5. The chlorosilane waste gas processing system of claim 4 wherein: the sludge treatment device (3) comprises a sludge tank (3 a) and a plurality of automatic plate-and-frame filter presses (3 b), the sludge tank (3 a) is connected with a sludge discharge port of a sedimentation tank (2 b) through a sludge discharge pipeline (3 c), a sludge outlet of the sludge tank (3 a) is connected with the plurality of automatic plate-and-frame filter presses (3 b) through a sludge pipeline (3 d) respectively, a liquid outlet of the automatic plate-and-frame filter presses (3 b) is connected with a clean water tank (4), and a sludge pump is arranged on the sludge pipeline (3 d).
6. The chlorosilane waste gas treatment system of claim 2 wherein: still include return water pipeline (7), clean water pond (4) are connected with drip washing pond (1 b) through return water pipeline (7), install the pump for the return water on return water pipeline (7).
7. The chlorosilane waste gas treatment system of claim 5 wherein: the device further comprises instrument air (8), a backflushing pipeline (9) and an air supply pipeline (10), wherein the instrument air (8) is connected with the sludge discharge pipeline (3 c) through the backflushing pipeline (9), and the instrument air (8) is connected with the sludge pump through the air supply pipeline (10).
8. The chlorosilane waste gas treatment system of claim 5 wherein: the PAM dosing tank (2 c 2), the PAC dosing tank (2 c 3), the coagulation tank (2 a) and the sludge tank (3 a) are respectively provided with a stirring mechanism (11), the stirring mechanism (11) comprises a motor, a stirring shaft and stirring blades, the top end of the stirring shaft is connected with the output end of the motor, and the bottom end of the stirring shaft is connected with the stirring blades.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322294615.7U CN220696325U (en) | 2023-08-25 | 2023-08-25 | Chlorosilane waste gas treatment system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322294615.7U CN220696325U (en) | 2023-08-25 | 2023-08-25 | Chlorosilane waste gas treatment system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220696325U true CN220696325U (en) | 2024-04-02 |
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ID=90435733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322294615.7U Active CN220696325U (en) | 2023-08-25 | 2023-08-25 | Chlorosilane waste gas treatment system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220696325U (en) |
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2023
- 2023-08-25 CN CN202322294615.7U patent/CN220696325U/en active Active
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