CN220685241U - Direction correcting device of raw material gas device - Google Patents
Direction correcting device of raw material gas device Download PDFInfo
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- CN220685241U CN220685241U CN202322280189.1U CN202322280189U CN220685241U CN 220685241 U CN220685241 U CN 220685241U CN 202322280189 U CN202322280189 U CN 202322280189U CN 220685241 U CN220685241 U CN 220685241U
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- 239000002994 raw material Substances 0.000 title claims abstract description 71
- 238000009434 installation Methods 0.000 claims description 70
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 81
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Abstract
The utility model provides a direction correction device of a raw material gas device, which comprises a positioning mechanism and a correction mechanism, wherein the positioning mechanism comprises a first positioning piece and a second positioning piece, the first positioning piece is connected with the second positioning piece, the front side surface of the first positioning piece comprises a positioning abutting surface, and the bottom surface of the second positioning piece comprises a positioning supporting surface; the second locating piece is provided with a locating unit, the correcting mechanism is arranged on the locating unit and is positioned above the second locating piece. According to the utility model, the accurate positioning of the correction mechanism on the raw material gas device mounting structure is realized through the matching of the positioning abutting surface and the positioning supporting surface, whether the direction of the gas outlet channel of the raw material gas device is correct or not is tested through the correction mechanism, and the raw material gas device is rotated to conduct direction fine adjustment correction until the result measured by the correction mechanism is that the direction of the gas outlet channel of the raw material gas device is correct, so that the effective correction of the gas outlet direction of the raw material gas device in extremely limited space is realized.
Description
Technical Field
The utility model relates to the technical field of raw material gas device correction, in particular to a direction correction device of a raw material gas device.
Background
Chemical Vapor Deposition (CVD) is a deposition method in which one or more raw gases (gas-phase compounds or simple substances) are used to perform chemical reaction on the surface of a substrate to generate a thin film, and the raw gases are generally introduced into a deposition chamber through an outlet channel of a raw gas device, so that once the direction of the outlet channel of the raw gas device is not opposite, the direction of introducing the raw gases is offset, the whole deposition process is greatly affected, and finally, the quality of a product is disqualified. Therefore, it is important to ensure that the direction of the gas outlet channel is correct when the feed gas device is installed. However, due to the limitation of equipment, when the raw material gas device (particularly the raw material gas device used for producing CVDZnS) is installed, the raw material gas device is operated in extremely limited space and cannot be visually observed, and the raw material gas device belongs to blind operation and can be operated only by means of handfeel and experience, so that the raw material gas device has extremely large error and error rate, and the direction of an air outlet channel of the raw material gas device is difficult to ensure. Therefore, there is a need in the art for a direction correction device for a feed gas device.
Disclosure of Invention
In order to solve the above problems, an object of the present utility model is to provide a direction correction device for a raw gas device.
In one aspect, the utility model provides a direction correction device of a raw gas device, which comprises a positioning mechanism and a correction mechanism, wherein the positioning mechanism comprises a first positioning piece and a second positioning piece, the first positioning piece is connected with the second positioning piece, the front side surface of the first positioning piece comprises a positioning abutting surface, and the bottom surface of the second positioning piece comprises a positioning supporting surface; the second locating piece is provided with a locating unit, the correcting mechanism is arranged on the locating unit and is positioned above the second locating piece.
Compared with the prior art, the utility model has the following beneficial effects: according to the utility model, the positioning abutting surface abuts against the side surface of the raw gas device mounting structure, the positioning supporting surface supports the direction correcting device on the upper surface of the raw gas device mounting structure, the positioning abutting surface is matched with the positioning supporting surface, the correcting mechanism is accurately positioned on the raw gas device mounting structure, whether the direction of the gas outlet channel of the raw gas device mounted on the raw gas device mounting structure is correct or not is measured through the correcting mechanism, and the raw gas device is rotated to conduct direction fine adjustment correction if the direction of the gas outlet channel of the raw gas device mounted on the raw gas device mounting structure is incorrect, until the result measured by the correcting mechanism is that the direction of the gas outlet channel of the raw gas device is correct, and the effective correction of the gas outlet direction of the raw gas device is realized even in extremely limited space.
In some embodiments of the present utility model, the first positioning member is fixedly connected to the second positioning member, and the first positioning member is fixedly connected to the second positioning member through the top surface of the first positioning member and the bottom end of the second positioning member; or the first positioning piece and the second positioning piece are fixedly connected with the rear side surface of the second positioning piece through the upper part of the front side surface of the first positioning piece; or, the upper part of the first positioning piece is provided with a mounting channel penetrating through the first positioning piece along the front-back direction of the first positioning piece, and the second positioning piece penetrates through the mounting channel to be fixedly connected with the first positioning piece.
The technical scheme has the beneficial effects that the first locating piece is fixedly connected with the second locating piece, and the stability of the locating mechanism is high.
In some embodiments of the present utility model, the first positioning member is slidably connected with the second positioning member, the left end and the right end of the top surface of the first positioning member are respectively connected with a first installation seat and a second installation seat which are oppositely arranged, a blind hole is formed in the first installation seat, an opening is formed in the second installation seat, the blind hole is opposite to the opening, and the first installation seat and the second installation seat are rotationally connected with a first screw rod through the blind hole and the opening; the end part of the bottom surface of the second positioning piece is provided with a third installation seat, a first threaded hole is formed in the third installation seat, and the second positioning piece is connected with the first screw rod through the first threaded hole in the third installation seat.
The technical scheme has the advantages that when the correction mechanism detects that the direction of the air outlet channel of the raw material gas device installed on the raw material gas device installation structure is incorrect, the second positioning piece can slide relative to the first positioning piece to adjust the raw material gas device to avoid the space, so that the raw material gas device can be conveniently rotated in extremely limited space to correct the air outlet direction; the screw rod structure controls the second positioning piece to stably slide relative to the first positioning piece, even under the condition of sliding connection, the positioning mechanism can be ensured to have enough stability, and the second positioning piece cannot slide due to other external forces when the position of the second positioning piece relative to the first positioning piece is required to be fixed.
In some embodiments of the present utility model, the positioning unit includes a mounting groove formed at the top of the second positioning member, and the mounting groove is adapted to the shape of the correction mechanism.
The technical scheme has the beneficial effects that the installation groove is convenient for the installation and positioning of the correction mechanism.
In some embodiments of the utility model, the correction mechanism is a right angle laser collimator; the mounting groove is arranged along the width direction of the second locating piece and forms a first opening end and a second opening end along the width direction of the second locating piece respectively, one side groove wall of the mounting groove is linear, the other side groove wall is V-shaped, and the inclination angles of two sides of the V-shaped groove wall are identical to the inclination angle of the hypotenuse of the right-angle laser collimator.
The technical scheme has the advantages that the two open ends are convenient to install the correction mechanism in the installation groove, the design of the side wall corresponds to the shape of the right-angle laser collimator, the right-angle laser collimator is convenient to position, the V-shaped groove wall can slide into the installation groove from any one of the two open ends, and the application of the right-angle laser collimator in laser collimation can be realized in two directions corresponding to the two open ends.
In some embodiments of the present utility model, the left and right side walls of the second positioning member are provided with sliding rails extending along the length direction of the second positioning member; the positioning unit comprises a positioning seat, the positioning seat comprises a bottom plate and side plates connected to the left side and the right side of the bottom plate, a plurality of pulley mounting seats which are arranged at intervals along the length direction of the inner side wall of the side plate are connected to the inner side wall of the side plate, pulleys matched with the sliding rail are rotationally connected to the pulley mounting seats, and the positioning unit is in sliding connection with the second positioning piece through the pulleys.
The technical proposal has the advantages that the sliding rail plays a guiding role, the inner side wall of the side plate is provided with the pulley mounting seat and the pulley, the whole height of the correcting device can be reduced as much as possible, and the occupied area is reduced; the pulley cooperation slide rail reduces sliding resistance, makes positioning unit slide along the slide rail, and the correction mechanism of being convenient for on the one hand is in the counterpoint of the raw material gas device that has installed on the raw material gas device mounting structure, and on the other hand is adapted to the raw material gas device mounting structure of various model specifications, can adjust correction mechanism's position according to the raw material gas device at different specification raw material gas device mounting structure's mounted position, and on the other hand accessible positioning unit is dodged for the adjustment of raw material gas device for the slip of second setting element space, and the convenience rotates the raw material gas device in extremely limited space in order to correct the direction of giving vent to anger.
In some embodiments of the present utility model, the front end and the rear end of the top surface of the second positioning element are respectively connected with a fourth installation seat and a fifth installation seat which are oppositely arranged, a blind hole is arranged on the fourth installation seat, an opening is arranged on the fifth installation seat, the blind hole is opposite to the opening, and the fourth installation seat and the fifth installation seat are rotationally connected with a second screw rod through the blind hole and the opening; the bottom surface of the bottom plate is provided with a sixth installation seat, a second threaded hole is formed in the sixth installation seat, and the positioning unit is connected with a second screw rod through the second threaded hole in the sixth installation seat.
The technical scheme has the advantages that the screw rod structure controls the positioning unit to stably slide relative to the second positioning piece, the positioning unit can be ensured to have enough stability even under the condition of sliding connection, and the positioning unit cannot slide due to other external forces when the position of the positioning unit relative to the second positioning piece is required to be fixed.
In some embodiments of the present utility model, the positioning unit includes a mounting groove formed at the top of the base plate, and the mounting groove is adapted to the shape of the correction mechanism.
The technical scheme has the beneficial effects that the installation groove is convenient for the installation and positioning of the correction mechanism.
In some embodiments of the present utility model, the positioning unit further comprises an image acquisition mechanism, wherein the positioning unit is provided with an image acquisition mechanism positioning seat, the image acquisition mechanism is arranged on the image acquisition mechanism positioning seat, and the image acquisition mechanism is positioned above the correction mechanism; the image acquisition mechanism is electrically connected with external equipment.
The technical scheme has the advantages that the straight line where the correct air outlet direction of the air outlet end of the raw material air device is located is marked in advance before the raw material air device is installed on the raw material air device installation structure, the raw material air device and the correction mechanism are collected through the image collection mechanism after installation and are transmitted to external equipment, the image is convenient to check, whether correction light rays emitted by the correction mechanism which are aligned with the position of the raw material air device are matched with the marking direction made in advance or not is observed from the image, the raw material air device is rotated to conduct direction fine adjustment correction based on the offset condition if the correction light rays are not matched, until the newly collected image shows that the correction light rays are matched with the marking direction made in advance, and effective correction on the air outlet direction of the raw material air device is achieved even in extremely limited space. Compared with manual shooting or other modes, the setting of the image acquisition mechanism is more convenient in acquiring the states of the raw gas device and the correction mechanism, so that blind guess correction is avoided, and correction efficiency and accuracy are improved.
In some embodiments of the utility model, the positioning mechanism is T-shaped and/or the correction mechanism is a collimator and/or the first positioning member is plate-shaped and/or the second positioning member is plate-shaped.
The technical proposal has the advantages that the T-shaped positioning mechanism is convenient for positioning; the collimator can compare the air outlet direction of the raw material gas device with the air outlet direction of the laser, so that the correction is convenient; the plate-shaped first positioning piece and/or the plate-shaped second positioning piece are simple in structure, and the installation of each structure is realized under the condition of reducing occupied space as much as possible.
Drawings
In order to more clearly describe the technical solution in the embodiments of the present utility model, the drawings required to be used in the embodiments of the present utility model will be described below.
FIG. 1 is a schematic view showing a direction correcting apparatus of a raw gas apparatus in an installed state according to an embodiment of the present utility model, in which a correcting mechanism is not shown;
FIG. 2 is a schematic view showing a direction correcting means of the raw gas apparatus in an installed state according to an embodiment of the present utility model, wherein a correcting mechanism is shown;
FIG. 3 is a schematic diagram showing a positioning mechanism of a direction correcting device of a feed gas device according to an embodiment of the present utility model;
FIG. 4 is a second schematic view of a positioning mechanism of a direction correcting device of a feed gas device according to an embodiment of the present utility model;
FIG. 5 is a third schematic view of a positioning mechanism of a direction correcting device of a feed gas device according to an embodiment of the present utility model;
FIG. 6 is a schematic view showing a three-dimensional angle structure of a direction correcting device of a feed gas device according to an embodiment of the present utility model, wherein a correcting mechanism is not shown, and a positioning mechanism is another structural form different from that of FIGS. 3-5;
FIG. 7 is a schematic view of the direction correcting device of the feed gas device shown in FIG. 6 in use;
fig. 8 is a schematic view showing a structure of a three-dimensional angle of a direction correcting device of a raw material gas device in an installed state according to another embodiment of the present utility model, wherein a correcting mechanism is not shown.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, various aspects related to the present utility model will be described in detail with reference to the following specific embodiments, which are only for illustrating the present utility model, but do not limit the scope and spirit of the present utility model in any way.
Example 1:
the present embodiment provides a direction correction device for a raw material gas device.
As shown in fig. 1 to 2, the direction correcting device of the raw material gas device of the present embodiment includes a positioning mechanism 1 and a correcting mechanism 2. The positioning mechanism 1 comprises a first positioning piece 11 and a second positioning piece 12, the first positioning piece 11 is connected with the second positioning piece 12, the front side surface of the first positioning piece 11 comprises a positioning abutting surface, and the bottom surface of the second positioning piece 12 comprises a positioning supporting surface. The first positioning member 11 abuts against the side surface of the raw gas device mounting structure 4 through a positioning abutting surface, and the second positioning member 12 supports the direction correcting device on the upper surface of the raw gas device mounting structure 4 through a positioning supporting surface. The second positioning piece 12 is provided with a positioning unit 3, the correction mechanism 2 is arranged on the positioning unit 3, and the correction mechanism 2 is positioned above the second positioning piece 12.
In this embodiment, the first positioning member 11 and the second positioning member 12 may be fixedly connected, and a specific fixed connection manner is not limited, for example, the first positioning member 11 and the second positioning member 12 shown in fig. 5 may be fixedly connected through top surfaces of the first positioning member 11 and bottom surface end portions of the second positioning member 12; or, the first positioning piece 11 and the second positioning piece 12 shown in fig. 3 may be fixedly connected through the upper part of the front side surface of the first positioning piece 11 and the rear side surface of the second positioning piece 12; alternatively, an installation channel penetrating the first positioning member 11 along the front-rear direction of the first positioning member 11 may be provided at the upper portion of the first positioning member 11 as shown in fig. 4, and the second positioning member 12 is fixedly connected with the first positioning member 11 through the installation channel. In this embodiment, as shown in fig. 6-7, the first positioning member 11 and the second positioning member 12 may also be in sliding connection, specifically, the left end and the right end of the top surface of the first positioning member 11 are respectively connected with a first mounting seat 111 and a second mounting seat 112 that are oppositely arranged, a blind hole is arranged on the first mounting seat 111, an opening is arranged on the second mounting seat 112, the blind hole and the opening are oppositely arranged, and the first mounting seat 111 and the second mounting seat 112 are rotationally connected with a first lead screw 113 through the blind hole and the opening; the bottom end of the second positioning piece 12 is provided with a third installation seat 121, the third installation seat 121 is provided with a first threaded hole, and the second positioning piece 12 is connected with the first screw rod 113 through the first threaded hole on the third installation seat 121.
In this embodiment, as shown in fig. 1-2 and fig. 6, the positioning unit 3 includes a mounting groove formed on the top of the second positioning member 12, and the mounting groove is adapted to the shape of the correction mechanism. In the present embodiment, the correction mechanism 2 is preferably a right-angle laser collimator; the mounting groove is arranged along the width direction of the second positioning piece 12 and forms a first opening end 31 and a second opening end 32 along the width direction of the second positioning piece 12 respectively, one side groove wall of the mounting groove is linear, the other side groove wall is V-shaped, and the inclination angles of two sides of the V-shaped groove wall are the same as the inclination angle of the hypotenuse of the right-angle laser collimator.
In the present embodiment, the positioning mechanism 1 is preferably T-shaped and/or the first positioning member 11 is plate-shaped and/or the second positioning member 12 is plate-shaped.
The working principle of the direction correction device of the raw material gas device of this embodiment is as follows: the method comprises the steps of marking a straight line 51 where the gas outlet end of the raw material gas device 5 is correctly positioned, installing the raw material gas device 5 at the installation position of the raw material gas device installation structure 4 of the deposition equipment 6 in advance at the gas outlet end of the raw material gas device 5, positioning the direction correction device on the raw material gas device installation structure 4, enabling the first positioning piece 11 to be abutted to the side surface of the raw material gas device installation structure 4 through a positioning abutting surface, enabling the second positioning piece 12 to support the direction correction device on the upper surface of the raw material gas device installation structure 4 through a positioning supporting surface, starting the correction mechanism 2, enabling the correction mechanism 2 (such as a right-angle laser collimator) to emit laser, manually shooting images of the raw material gas device 5 and the correction mechanism 2, observing whether laser rays 21 coincide with the marked straight line 51 made in advance or not, rotating the raw material gas device 5 based on the offset condition if the laser rays 21 coincide with the marked straight line 51, and then moving the second positioning piece 12 for direction fine adjustment (if the first positioning piece 11 and the second positioning piece 12 are connected in a sliding mode is adopted, performing space avoidance for adjustment of the raw material gas device 5) until a new image display laser rays 21 coincide with the marked straight line 51, and correction is completed. When it is necessary to calibrate the other raw gas device (on the other side of the direction calibration device with respect to the direction calibration device), the calibration mechanism 2 is taken out of the mounting groove, and the calibration mechanism 2 is slid into the mounting groove from the other opening end, thereby performing calibration.
Example 2:
the present embodiment provides a direction correction device for a raw material gas device.
As shown in fig. 8, the direction correcting device of the raw material gas apparatus of the present embodiment includes a positioning mechanism 1' and a correcting mechanism (not shown in the figure). The positioning mechanism 1' comprises a first positioning piece 11' and a second positioning piece 12', the first positioning piece 11' is connected with the second positioning piece 12', the front side surface of the first positioning piece 11' comprises a positioning abutting surface, and the bottom surface of the second positioning piece 12' comprises a positioning supporting surface. The first positioning piece 11 'abuts against the side face of the raw material gas device mounting structure 4' through a positioning abutting face, and the second positioning piece 12 'supports the direction correcting device on the upper surface of the raw material gas device mounting structure 4' through a positioning supporting face. The second positioning piece 12 'is provided with a positioning unit 3', the correction mechanism is arranged on the positioning unit 3', and the correction mechanism is positioned above the second positioning piece 12'.
In this embodiment, the first positioning member 11 'and the second positioning member 12' may be fixedly connected, but preferably, the first positioning member 11 'and the second positioning member 12' are slidably connected, specifically, the left end and the right end of the top surface of the first positioning member 11 'are respectively connected with a first mounting seat 111' and a second mounting seat 112 'which are oppositely arranged, a blind hole is formed in the first mounting seat 111', an opening is formed in the second mounting seat 112', the blind hole is oppositely arranged with the opening, and the first mounting seat 111' and the second mounting seat 112 'are rotationally connected with a first lead screw 113' through the blind hole and the opening; the bottom end of the second positioning piece 12 'is provided with a third installation seat 121', the third installation seat 121 'is provided with a first threaded hole, and the second positioning piece 12' is connected with the first screw 113 'through the first threaded hole on the third installation seat 121'.
In the present embodiment, the left and right side walls of the second positioning member 12' are provided with sliding rails 122' extending along the length direction of the second positioning member 12 '; the positioning unit 3' comprises a positioning seat, the positioning seat comprises a bottom plate 31' and side plates 32' connected to the left side and the right side of the bottom plate 31', a plurality of pulley mounting seats which are arranged at intervals along the length direction of the inner side walls of the side plates 32' are connected to the inner side walls of the side plates 32', pulleys matched with the sliding rails 122' are rotatably connected to the pulley mounting seats, and the positioning unit 3' is in sliding connection with the second positioning piece 12' through the pulleys. In this embodiment, preferably, the front end and the rear end of the top surface of the second positioning member 12 'are respectively connected with a fourth installation seat 123' and a fifth installation seat 124 'which are oppositely arranged, a blind hole is formed in the fourth installation seat 123', an opening is formed in the fifth installation seat 124', the blind hole is opposite to the opening, and the fourth installation seat 123' and the fifth installation seat 124 'are rotationally connected with a second lead screw 125' through the blind hole and the opening; the bottom surface of the bottom plate 31' is provided with a sixth mounting seat (not shown in the figure), the sixth mounting seat is provided with a second threaded opening, and the positioning unit 3' is connected with the second screw rod 125' through the second threaded opening on the sixth mounting seat.
In this embodiment, the positioning unit 3 'includes a mounting groove 311' formed at the top of the bottom plate 31', and the mounting groove 311' is adapted to the shape of the correction mechanism. In the present embodiment, it is preferable that the mounting groove 311 'is arranged in the width direction of the bottom plate 31' and forms the first open end 312 'and the second open end 313' in the width direction of the bottom plate 31', respectively, one side groove wall of the mounting groove 311' is linear and the other side groove wall is V-shaped.
In this embodiment, the direction correcting device of the raw material gas apparatus of this embodiment further includes an image capturing mechanism 7'. The positioning unit 3 'is provided with an image acquisition mechanism positioning seat 8' (preferably arranged on the top surface of the bottom plate 31 '), the image acquisition mechanism 7' is arranged on the image acquisition mechanism positioning seat 8', and the image acquisition mechanism 7' is arranged above the correction mechanism; the image acquisition mechanism 7' is electrically connected with external equipment. In this embodiment, preferably, the image capturing mechanism 7 'is connected to the image capturing mechanism positioning seat 8' through a supporting rod, and the supporting rod can rotate relative to the image capturing mechanism positioning seat 8', so that the position of the image capturing mechanism 7' can be conveniently adjusted, and the same image capturing mechanism 7 'can be satisfied to capture images in multiple directions, and when another raw gas device (relative to the direction correction device, located on the other side of the direction correction device) needs to be corrected, the images can also be captured by the same image capturing mechanism 7'. In the present embodiment, the image pickup mechanism 7' may preferably be a small camera or the like.
In the present embodiment, preferably, the positioning mechanism 1' is T-shaped and/or the correction mechanism is a collimator and/or the first positioning member 11' is plate-shaped and/or the second positioning member 12' is plate-shaped. Further preferably, the correction mechanism is a right-angle laser collimator, and the inclination angles of two sides of the V-shaped groove wall are the same as the inclination angle of the hypotenuse of the right-angle laser collimator.
The working principle of the direction correction device of the raw material gas device of this embodiment is as follows: the method comprises the steps of marking a straight line where the correct air outlet direction of an air outlet end of a raw material air device 5' is located at the air outlet end of the raw material air device in advance, installing the raw material air device 5' at the installation position of a raw material air device installation structure 4' of deposition equipment, installing a direction correction device on the raw material air device installation structure 4', enabling a first positioning piece 11' to be abutted to the side face of the raw material air device installation structure 4' through a positioning abutting face, supporting the direction correction device on the upper surface of the raw material air device installation structure 4' through a positioning supporting face by a second positioning piece 12', adjusting the position of a correction mechanism through the movement of the second positioning piece 12' and the movement of a positioning unit 3', starting the correction mechanism, enabling the correction mechanism (such as a laser collimator) to emit laser, acquiring images of the raw material air device 5' and the correction mechanism, observing whether laser rays coincide with the marked straight line in advance or not from the images, moving the second positioning piece 12' and the positioning unit 3', performing space avoidance for adjustment of the raw material air device 5', rotating the raw material air device 5' based on offset conditions to perform direction correction on the basis of the offset conditions, performing new alignment correction of the image registration of the laser acquisition mechanism, and completing alignment correction of the image registration of the laser light. When another raw gas device (on the other side of the direction correction device with respect to the direction correction device) needs to be corrected, the correction mechanism is taken out of the mounting groove, slid into the mounting groove from the other opening end, and the image pickup mechanism 7' is rotated to face the raw gas device to be corrected, thereby performing correction.
The present utility model has been described with reference to specific embodiments, which are merely illustrative, and not intended to limit the scope of the utility model, and those skilled in the art can make various modifications, changes or substitutions without departing from the spirit of the utility model. Thus, various equivalent changes may be made according to this utility model, which still fall within the scope of the utility model.
Claims (10)
1. A direction correction device of a raw material gas device is characterized by comprising a positioning mechanism and a correction mechanism,
the positioning mechanism comprises a first positioning piece and a second positioning piece, the first positioning piece is connected with the second positioning piece, the front side surface of the first positioning piece comprises a positioning abutting surface, and the bottom surface of the second positioning piece comprises a positioning supporting surface;
the second locating piece is provided with a locating unit, the correcting mechanism is arranged on the locating unit and is positioned above the second locating piece.
2. The apparatus for aligning a feed gas device according to claim 1, wherein the first positioning member is fixedly connected to the second positioning member,
the first positioning piece is fixedly connected with the second positioning piece through the top surface of the first positioning piece and the end part of the bottom surface of the second positioning piece; or the first positioning piece and the second positioning piece are fixedly connected with the rear side surface of the second positioning piece through the upper part of the front side surface of the first positioning piece; or, the upper part of the first positioning piece is provided with a mounting channel penetrating through the first positioning piece along the front-back direction of the first positioning piece, and the second positioning piece penetrates through the mounting channel to be fixedly connected with the first positioning piece.
3. The apparatus according to claim 1, wherein the first positioning member is slidably connected to the second positioning member,
the left end and the right end of the top surface of the first positioning piece are respectively connected with a first installation seat and a second installation seat which are oppositely arranged, a blind hole is formed in the first installation seat, an opening is formed in the second installation seat, the blind hole and the opening are oppositely arranged, and the first installation seat and the second installation seat are rotationally connected with a first screw rod through the blind hole and the opening;
the end part of the bottom surface of the second positioning piece is provided with a third installation seat, a first threaded hole is formed in the third installation seat, and the second positioning piece is connected with the first screw rod through the first threaded hole in the third installation seat.
4. The direction correcting device of the raw material gas device as claimed in claim 1, wherein the positioning unit comprises a mounting groove formed at the top of the second positioning member, and the mounting groove is adapted to the shape of the correcting mechanism.
5. The direction correcting device of the feed gas device according to claim 4, wherein the correcting mechanism is a right angle laser collimator;
the mounting groove is arranged along the width direction of the second locating piece and forms a first opening end and a second opening end along the width direction of the second locating piece respectively, one side groove wall of the mounting groove is linear, the other side groove wall is V-shaped, and the inclination angles of two sides of the V-shaped groove wall are identical to the inclination angle of the hypotenuse of the right-angle laser collimator.
6. The direction correcting device of the raw material gas device as claimed in claim 1, wherein the left and right side walls of the second positioning member are provided with slide rails extending along the length direction of the second positioning member;
the positioning unit comprises a positioning seat, the positioning seat comprises a bottom plate and side plates connected to the left side and the right side of the bottom plate, a plurality of pulley mounting seats which are arranged at intervals along the length direction of the inner side wall of the side plate are connected to the inner side wall of the side plate, pulleys matched with the sliding rail are rotationally connected to the pulley mounting seats, and the positioning unit is in sliding connection with the second positioning piece through the pulleys.
7. The direction correcting device of the raw material gas device according to claim 6, wherein the front end and the rear end of the top surface of the second positioning piece are respectively connected with a fourth installation seat and a fifth installation seat which are oppositely arranged, a blind hole is formed in the fourth installation seat, an opening is formed in the fifth installation seat, the blind hole is opposite to the opening, and the fourth installation seat and the fifth installation seat are rotationally connected with a second screw rod through the blind hole and the opening;
the bottom surface of the bottom plate is provided with a sixth installation seat, a second threaded hole is formed in the sixth installation seat, and the positioning unit is connected with a second screw rod through the second threaded hole in the sixth installation seat.
8. The direction correcting device of the raw material gas device as claimed in claim 6, wherein the positioning unit comprises a mounting groove formed on the top of the bottom plate, and the mounting groove is adapted to the shape of the correcting mechanism.
9. The direction correcting device of the raw material gas device as claimed in claim 1, further comprising an image acquisition mechanism, wherein the positioning unit is provided with an image acquisition mechanism positioning seat, the image acquisition mechanism is arranged on the image acquisition mechanism positioning seat, and the image acquisition mechanism is arranged above the correcting mechanism;
the image acquisition mechanism is electrically connected with external equipment.
10. The direction correcting device of a feed gas apparatus according to claim 1, wherein the positioning means is T-shaped and/or the correcting means is a collimator and/or the first positioning member is plate-shaped and/or the second positioning member is plate-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322280189.1U CN220685241U (en) | 2023-08-24 | 2023-08-24 | Direction correcting device of raw material gas device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322280189.1U CN220685241U (en) | 2023-08-24 | 2023-08-24 | Direction correcting device of raw material gas device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220685241U true CN220685241U (en) | 2024-03-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322280189.1U Active CN220685241U (en) | 2023-08-24 | 2023-08-24 | Direction correcting device of raw material gas device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220685241U (en) |
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2023
- 2023-08-24 CN CN202322280189.1U patent/CN220685241U/en active Active
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