CN2206792Y - Inner isntalled cooling water joint for magnetic controlled splash source - Google Patents
Inner isntalled cooling water joint for magnetic controlled splash source Download PDFInfo
- Publication number
- CN2206792Y CN2206792Y CN 94242223 CN94242223U CN2206792Y CN 2206792 Y CN2206792 Y CN 2206792Y CN 94242223 CN94242223 CN 94242223 CN 94242223 U CN94242223 U CN 94242223U CN 2206792 Y CN2206792 Y CN 2206792Y
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- head
- conical head
- conical
- plastics
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Abstract
The utility model discloses an inner installed cooling water joint for a magnetic controlled splash source, which is composed of a plastic conical head, a locking head, and a water intake head. The conical surface of the plastic conical head is provided with screw threads, the conical head is also provided with a flange, stepped through holes are arranged in the locking head, the diameter of the small hole of the stepped through holes is larger than the external diameter of the conical head, and is smaller than the external diameter of the flange. The interior of the big hole of the stepped through holes is provided with internal screw threads, one end of the water intake head is provided with external screw threads matched with the internal screw threads of the big hole, the end face is provided with a convex ring, the conical head is connected with the water intake head through the locking head, and water flow holes which are mutually communicated are arranged in the conical head, the water intake head, and the locking head. The utility model has the advantages of good insulating property and vacuum tightness.
Description
The utility model relates to a kind of warter connection that built-in magnetic blocks sputtering source that is used for.
Controlled sputtering source warter connection commonly used at present is an external placed type, adopts rubber tubing is inserted on the tube stub that has pawl, if this joint is inserted in the vacuum chamber with magnetron sputtering target, then can destroy vacuum environment, and equipment can't be moved.
Goal of the invention of the present utility model is to provide the built-in controlled sputtering source warter connection that uses in a kind of vacuum chamber.
The utility model adopts following technical proposals to realize its goal of the invention:
The utility model is by plastics conical head (1), locking head (2) and water inlet head (3) are formed, on the conical surface of conical plastics head (1), be provided with screw thread, on plastics conical head (1), also be provided with flange (4), in locking head (2), be provided with ladder hole, its hole diameter is greater than the external diameter of plastics conical head (1) and less than the external diameter of its flange (4), in the macropore of ladder hole, be provided with internal thread, end at water inlet head (3) is provided with the outside screw that can match with above-mentioned macropore internal thread, and on this end face, be provided with bulge loop (5), plastics conical head (1) tightens up by locking head (2) with water inlet head (3) and is connected, and is respectively equipped with water flow hole (6) and (7) that can communicate in the inside of plastics conical head (1) and water inlet head (3).
Compared with prior art, the utlity model has following advantage:
Plastics conical head of the present utility model has the excellent electric insulating energy, thereby makes the advantage that the utlity model has good insulation preformance; Because the utility model has adopted the plastics conical head, especially adopts engineering plastics conical heads such as nylon, make it when screwing, can produce the distortion of appropriateness with controlled sputtering source, guaranteed vacuum-sealing; And be coated in the gap that Resins, epoxy on the conical surface has further been filled up screw connection point, improved sealing property.Because the effect of locking head makes the into bulge loop of water head, especially the taper bulge loop can tightly be pressed into the plastics conical head, has realized vacuum-sealing.In addition, the utility model is applicable to that plane magnetic controlled sputtering target, garden post magnetic control spatter target and S rifle, so have widely applicable advantage.
Fig. 1 is a structural representation of the present utility model.
The contrast accompanying drawing is made a detailed description to the novel embodiment of this usefulness below:
The utility model is made up of plastics conical head (1), locking head (2) and water inlet head (3), plastics conical head (1) can adopt the engineering plastics conical head, especially can preferentially adopt nylon, polytetroxide ethene, polyethylene cone head, also can select toughness and plastics good engineering plastics conical head for use, select the nylon conical head in the present embodiment, the nylon conical head strength of materials is moderate, can appropriateness be out of shape under stressed effect, thereby can improve the vacuum-sealing performance.On the conical surface of this conical head, be provided with screw thread, this screw thread adopts gas thread in the present embodiment, on conical head, also be provided with flange (4), in locking head (2), be provided with ladder hole, its hole diameter is greater than the external diameter of conical head (1) and less than the external diameter of its flange (4), in the macropore of ladder hole, be provided with internal thread, end at water inlet head (3) is provided with the outside screw that can match with above-mentioned macropore internal thread, on the end face of the male end of water inlet head (3), be provided with bulge loop (5), bulge loop (5) adopts the taper bulge loop in the present embodiment, the water inlet head adopts mechanically resistant material to make, for example: conical head (1) tightens up by locking head (2) with water inlet head (5) and is connected, and is respectively equipped with water flow hole (6) and (7) that can communicate in the inside of conical head (1) and water inlet head (5).In use, earlier plastics conical head (1) is inserted in locking head (2); And at the threaded portion of conical head (1) coating one deck Resins, epoxy, firmly the plastics conical head is screwed in sputter target stand (8) then, by the appropriateness distortion of plastics conical head and the Resins, epoxy after the curing, fill up the gap of tapered thread connection portion, to realize the vacuum-sealing at this position.Sealing between plastics conical head (1) and the water inlet head (3) then relies on tightening up of locking head (2), and when screwing locking head (2), the bulge loop of water inlet head (3) can embed the plastics conical head, thereby realizes vacuum-sealing.
Claims (6)
1, a kind of built-in controlled sputtering source warter connection, it is characterized in that this warter connection is by plastics conical head (1), locking head (2) and water inlet head (3) are formed, on the conical surface of plastics conical head (1), establish screw thread, on plastics conical head (1), also be provided with flange (4), in locking head (2), be provided with ladder hole, its hole diameter is greater than the external diameter of plastics conical head (1) and less than the external diameter of its flange (4), in the macropore of ladder hole, be provided with internal thread, end at water inlet head (3) is provided with the outside screw that can match with above-mentioned macropore internal thread, and on this end face, be provided with bulge loop (5), plastics conical head (1) tightens up by locking head (2) with water inlet head (3) and is connected, and is respectively equipped with water flow hole (6) and (7) that can communicate in the inside of plastics conical head (1) and water inlet head (3).
2, built-in controlled sputtering source warter connection according to claim 1 is characterized in that plastics conical head (1) adopts the engineering plastics taper joint.
3, built-in controlled sputtering source warter connection according to claim 2 is characterized in that conical head (1) adopts the nylon conical head.
4, built-in controlled sputtering source warter connection according to claim 2 is characterized in that conical head (1) adopts the taper joint of polytetroxide ethene.
5, built-in controlled sputtering source warter connection according to claim 2 is characterized in that conical head (1) adopts the polyethylene cone joint.
6, built-in controlled sputtering source warter connection according to claim 1 and 2 is characterized in that bulge loop (5) is the taper bulge loop.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94242223 CN2206792Y (en) | 1994-07-16 | 1994-07-16 | Inner isntalled cooling water joint for magnetic controlled splash source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94242223 CN2206792Y (en) | 1994-07-16 | 1994-07-16 | Inner isntalled cooling water joint for magnetic controlled splash source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2206792Y true CN2206792Y (en) | 1995-09-06 |
Family
ID=33848856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94242223 Expired - Fee Related CN2206792Y (en) | 1994-07-16 | 1994-07-16 | Inner isntalled cooling water joint for magnetic controlled splash source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2206792Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112144034A (en) * | 2019-06-27 | 2020-12-29 | 昆山世高新材料科技有限公司 | Cooling back plate |
-
1994
- 1994-07-16 CN CN 94242223 patent/CN2206792Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112144034A (en) * | 2019-06-27 | 2020-12-29 | 昆山世高新材料科技有限公司 | Cooling back plate |
| CN112144034B (en) * | 2019-06-27 | 2022-12-30 | 昆山世高新材料科技有限公司 | Cooling back plate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |