CN220665446U

CN220665446U - Reaction furnace and coating equipment with same

Info

Publication number: CN220665446U
Application number: CN202321447275.0U
Authority: CN
Inventors: 李学文; 刘兵吉; 王凯; 王郴意; 张文
Original assignee: Shenzhen Headquarter SC New Energy Technology Corp
Current assignee: Shenzhen Headquarter SC New Energy Technology Corp
Priority date: 2023-06-07
Filing date: 2023-06-07
Publication date: 2024-03-26
Anticipated expiration: 2033-06-07

Abstract

The utility model discloses a reaction furnace and a coating device with the reaction furnace, wherein the reaction furnace comprises: the furnace unit comprises a furnace body and an end cover arranged at the end part of the furnace body, and the end cover is provided with an assembly hole; the pipe unit comprises a pipe fitting, a SiC sheath and an insulating sealing component, wherein the pipe fitting penetrates through the inside of the furnace body, penetrates through the assembly hole and stretches out of the inside of the furnace body, the SiC sheath is sleeved outside the pipe fitting, the SiC sheath penetrates through the inside of the furnace body, penetrates through the assembly hole and stretches out of the inside of the furnace body, the SiC sheath is spaced from the furnace unit, the insulating sealing component is sleeved outside the SiC sheath and is positioned outside the furnace body, and the insulating sealing component is connected with the end cover and seals the assembly hole. The SiC sheath is made of SiC, and at normal temperature, the thermal conductivity of the SiC is about 120W/(m.K), so that the heat conduction is easier and faster; and the SiC material has strong hardness and bearing capacity, is not easy to deform and break under the condition of high-temperature cooling, and has long service life and high reliability.

Description

Reaction furnace and coating equipment with same

Technical Field

The utility model relates to the technical field of coating equipment, in particular to a reaction furnace and coating equipment with the reaction furnace.

Background

In the conventional film plating reaction of the tubular PECVD (plasma enhanced chemical vapor deposition ), since the graphite boat is not heated uniformly by the furnace body, a heating pipe needs to be added to the interior of the furnace body to assist the heating, and a temperature monitoring pipe needs to be added to monitor the temperature in the furnace body.

In the related art, a protective sleeve made of quartz is often used for protecting a heating pipe and/or a temperature monitoring pipe, however, in the heating and cooling processes, the quartz protective sleeve is easy to deform and is damaged in a furnace, so that the reliability is poor.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides a reaction furnace with high reliability.

The utility model also provides a coating device with the reaction furnace.

According to an embodiment of the first aspect of the present utility model, a reaction furnace includes: the furnace unit comprises a furnace body and an end cover arranged at the end part of the furnace body, and the end cover is provided with an assembly hole; the pipe unit comprises a pipe fitting, a SiC sheath and an insulating sealing component, wherein the pipe fitting penetrates through the inside of the furnace body, penetrates through the assembly hole and stretches out of the inside of the furnace body, the SiC sheath is sleeved outside the pipe fitting, the SiC sheath penetrates through the inside of the furnace body, penetrates through the assembly hole and stretches out of the inside of the furnace body, the SiC sheath is spaced from the furnace unit, the insulating sealing component is sleeved outside the SiC sheath and is positioned outside the furnace body, and the insulating sealing component is connected with the end cover and seals the assembly hole; wherein the pipe fitting is a heating pipe or a temperature monitoring pipe.

The reaction furnace provided by the embodiment of the utility model has at least the following beneficial effects:

in the reaction furnace, the furnace body is used for heating the graphite boat placed in the furnace body, and the end cover is used for sealing and protecting the end part of the furnace body. The pipe fitting is a heating pipe or a temperature monitoring pipe; under the condition that the pipe fitting is a heating pipe, the pipe fitting can carry out auxiliary heating to the graphite boat in the furnace body, and under the condition that the pipe fitting is a temperature monitoring pipe, the pipe fitting can detect the temperature in the furnace body. The SiC sheath is made of SiC, and at normal temperature, the thermal conductivity of the SiC is about 120W/(m.K), so that the heat conduction is easier and faster; moreover, the SiC material has strong hardness and bearing capacity, is not easy to deform and break under the condition of high-temperature cooling, and has long service time and high reliability; the SiC sheath is used for being sleeved outside the pipe fitting, and plays a role in protecting the pipe fitting; the insulating seal assembly is sleeved outside the SiC sheath and connected with the end cover, so that the SiC sheath can be supported, in addition, the insulating seal assembly can also seal the assembly hole, and the risk that heat in the furnace body leaks out through the assembly hole can be reduced. The SiC is conductive, the insulating sealing assembly can play an insulating role, and under the condition that the SiC sheath is spaced from the furnace unit, the SiC sheath is connected with the end cover by the insulating sealing assembly, so that electricity on the pipe unit can be prevented from being transferred to the furnace unit, and the safety is improved.

According to some embodiments of the utility model, the insulating sealing assembly comprises a support tube and an insulating sealing module, wherein the support tube is sleeved outside the SiC sheath and is spaced from the SiC sheath, one end of the support tube is fixedly connected with the outer side wall of the end cover and surrounds the outer end of the assembly hole, and the insulating sealing module is sleeved outside the SiC sheath and seals a gap between the support tube and the SiC sheath.

According to some embodiments of the utility model, a positioning groove is formed in the outer side wall of the end cover and surrounds the assembly hole, and one end of the supporting tube is inserted into the positioning groove.

According to some embodiments of the utility model, the insulating seal module includes a first insulating sleeve that is sleeved outside the SiC jacket and is held against between an inner wall of the support tube and an outer wall of the SiC jacket.

According to some embodiments of the utility model, a protrusion extending toward the inner side of the support tube is provided at an end of the support tube away from the end cap, and the outer side wall of the first insulating sleeve abuts against the protrusion.

According to some embodiments of the utility model, the insulating sealing module further comprises a second insulating sleeve and a pressing cap, the second insulating sleeve is sleeved outside the SiC sheath, the second insulating sleeve is located on one side, away from the end cover, of the first insulating sleeve, the pressing cap is fixedly connected with one end, away from the end cover, of the supporting tube, and the pressing cap is pressed outside the second insulating sleeve.

According to some embodiments of the utility model, the insulating sealing module further comprises a first sealing ring sleeved outside the SiC sheath and held against between the first insulating sleeve and the second insulating sleeve.

According to some embodiments of the utility model, the compression cap is sleeved outside the first insulating sleeve, and the insulating sealing module further comprises a second sealing ring, and the second sealing ring is abutted between the first insulating sleeve and the compression cap.

According to some embodiments of the utility model, the end cover is disposed at one end of the furnace body, a supporting seat is disposed at the other end of the furnace body, an insulating supporting member is disposed on the supporting seat, and one end of the SiC sheath, which is far away from the end cover, is disposed on the insulating supporting member.

The coating equipment according to the embodiment of the second aspect of the utility model comprises the reaction furnace.

The film plating equipment provided by the embodiment of the utility model has at least the following beneficial effects:

in the coating equipment, the furnace body is used for heating the graphite boat placed in the furnace body, and the end cover is used for sealing and protecting the end part of the furnace body. The pipe fitting is a heating pipe or a temperature monitoring pipe; under the condition that the pipe fitting is a heating pipe, the pipe fitting can carry out auxiliary heating to the graphite boat in the furnace body, and under the condition that the pipe fitting is a temperature monitoring pipe, the pipe fitting can detect the temperature in the furnace body. The SiC sheath is made of SiC, and at normal temperature, the thermal conductivity of the SiC is about 120W/(m.K), so that the heat conduction is easier and faster; moreover, the SiC material has strong hardness and bearing capacity, is not easy to deform and break under the condition of high-temperature cooling, and has long service time and high reliability; the SiC sheath is used for being sleeved outside the pipe fitting, and plays a role in protecting the pipe fitting; the insulating seal assembly is sleeved outside the SiC sheath and connected with the end cover, so that the SiC sheath can be supported, in addition, the insulating seal assembly can also seal the assembly hole, and the risk that heat in the furnace body leaks out through the assembly hole can be reduced. The SiC is conductive, the insulating sealing assembly can play an insulating role, and under the condition that the SiC sheath is spaced from the furnace unit, the SiC sheath is connected with the end cover by the insulating sealing assembly, so that electricity on the pipe unit can be prevented from being transferred to the furnace unit, and the safety is improved.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a schematic diagram showing the front view of a reaction furnace according to an embodiment of the present utility model;

FIG. 2 is a schematic view showing a partial structure of a reaction furnace according to an embodiment of the present utility model;

FIG. 3 is a schematic view showing a partial sectional structure of a reaction furnace according to an embodiment of the present utility model;

FIG. 4 is an enlarged view of FIG. 3 at A;

fig. 5 is an enlarged view at B in fig. 2.

Reference numerals:

100. a furnace unit; 110. an end cap; 111. a fitting hole; 112. a positioning groove; 120. a support bracket; 130. an insulating support;

200. a pipe unit; 210. a pipe fitting; 220. a SiC sheath; 230. an insulating seal assembly; 231. a support tube; 2311. a protrusion; 232. a first insulating sleeve; 233. a second insulating sleeve; 234. a compression cap; 235. a first seal ring; 236. and a second sealing ring.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and to simplify the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

As shown in fig. 1, a reaction furnace according to an embodiment of the present utility model includes a furnace unit 100 and a pipe unit 200.

Referring to fig. 1 and 2, the furnace unit 100 includes a furnace body (not shown) and an end cap 110 provided at an end of the furnace body.

Specifically, the furnace body is used for heating the graphite boat placed in the furnace body, and the end cover 110 is used for sealing and protecting the end part of the furnace body;

it should be noted that, the end cover 110 may be fixed to one end of the furnace body by using a screw, and in other embodiments, the end cover 110 may be fixed to one end of the furnace body by using a clamping manner.

Referring to fig. 3 and 4, the end cap 110 is provided with a fitting hole 111, wherein the fitting hole 111 on the end cap 110 communicates with the inside of the furnace body.

Referring to fig. 3 and 4, the pipe unit 200 includes a pipe 210, a SiC sheath 220, and an insulating seal member 230, the pipe 210 is inserted into the interior of the furnace body, inserted into the assembly hole 111, and extended from the interior of the furnace body, the SiC sheath 220 is inserted into the exterior of the pipe 210, the SiC sheath 220 is inserted into the interior of the furnace body, inserted into the assembly hole 111, extended from the interior of the furnace body, the SiC sheath 220 is spaced from the furnace unit 100, the insulating seal member 230 is inserted into the exterior of the SiC sheath 220, and positioned outside the furnace body, and the insulating seal member 230 is connected to the end cap 110, and seals the assembly hole 111.

Wherein the pipe fitting 210 is a heating pipe or a temperature monitoring pipe; in the case that the pipe fitting 210 is a heating pipe, the pipe fitting 210 can perform auxiliary heating on the graphite boat inside the furnace body; in the case where the pipe 210 is a temperature monitoring pipe, the pipe 210 can detect the temperature inside the furnace body.

In particular, in the present embodiment, the number of the pipe units 200 is plural, at least one pipe member 210 of the pipe units 200 is a heating pipe, and at least one pipe member 210 of the pipe units 200 is a temperature detecting pipe, wherein the temperature detecting pipe may be an armoured thermocouple.

The SiC sheath 220 is made of SiC, and at normal temperature, the thermal conductivity of SiC is about 120W/(m·k), so that the thermal conductivity is easier and faster; moreover, the SiC material has strong hardness and strong bearing capacity, is not easy to deform and break under the condition of high-temperature cooling, and has long service life. SiC sheath 220 is used to cover outside of tube 210 and protect tube 210, wherein the thickness of SiC sheath 220 may be set between 1.5mm and 6 mm.

The insulating sealing component 230 is sleeved outside the SiC sheath 220 and connected with the end cover 110, so that the SiC sheath 220 can be supported, in addition, the insulating sealing component 230 can also seal the assembly hole 111, and the risk that heat in the furnace body leaks out through the assembly hole 111 can be reduced. Wherein, since SiC is conductive, the insulating sealing member 230 can perform an insulating function, and in the case that the SiC sheath 220 is spaced apart from the furnace unit 100, the SiC sheath 220 is connected to the end cap 110 by the insulating sealing member 230, it is possible to prevent the current on the pipe unit 200 from being transferred to the furnace unit 100, thereby improving safety.

In some embodiments, insulating seal assembly 230 includes a support tube 231 that is sleeved outside SiC sheath 220 and spaced apart from SiC sheath 220, and an end of support tube 231 is fixedly connected to an outer sidewall of end cap 110 and surrounds an outer end of assembly hole 111, and an insulating seal module that is sleeved outside SiC sheath 220 and seals a gap between support tube 231 and SiC sheath 220.

It will be appreciated that the support tube 231 is sleeved outside the SiC sheath 220 and spaced from the SiC sheath 220, so that the current on the SiC sheath 220 can be prevented from being directly transmitted to the support tube 231 and transmitted to the furnace unit 100, while the support tube 231 is fixedly connected with the outer side wall of the end cover 110 and surrounds the outer end of the assembly hole 111, and by sleeving the insulating sealing module outside the SiC sheath 220 and sealing the gap between the support tube 231 and the SiC sheath 220, the risk of heat in the furnace body leaking out through the assembly hole 111 can be reduced.

Specifically, the support pipe 231 is a steel pipe, the support pipe 231 is used for supporting the SiC sheath 220, the SiC sheath 220 can be prevented from being in direct contact with the furnace unit 100, the insulating sealing module can block current on the SiC sheath 220 from flowing to the support pipe 231, and the insulating sealing module is abutted between the outer side wall of the SiC sheath 220 and the inner side wall of the support pipe 231, so that a gap between the support pipe 231 and the SiC sheath 220 can be sealed.

Further, the outer sidewall of the end cap 110 is provided with a positioning groove 112 provided around the assembly hole 111, and one end of the support tube 231 is inserted into the positioning groove 112. The positioning groove 112 is used for positioning the support pipe 231, so that the matching precision of the support pipe 231 and the end cover 110 is improved, and the sealing effect between the support pipe 231 and the end cover 110 is ensured.

Wherein the support tube 231 and the end cap 110 may be fixed by welding or screwing.

It will be appreciated that the sealing effect between the support tube 231 and the end cap 110 may be further enhanced by stuffing a sealant or other sealing member into the locating slot 112.

As shown in fig. 4, in some embodiments, the insulating seal module includes a first insulating sleeve 232, the first insulating sleeve 232 being sleeved outside of SiC sheath 220 and held against the inner wall of support tube 231 and the outer wall of SiC sheath 220.

It will be appreciated that the material of the first insulating sleeve 232 is an insulating material, such as insulating ceramic, and the first insulating sleeve 232 abuts between the inner wall of the support tube 231 and the outer wall of the SiC sheath 220, so that the SiC sheath 220 can be supported on one hand, and the gap between the inner wall of the support tube 231 and the SiC sheath 220 can be sealed on the other hand.

Further, the end of the support tube 231 remote from the end cap 110 is provided with a protrusion 2311 extending toward the inside of the support tube 231, and the outer sidewall of the first insulating sleeve 232 abuts against the protrusion 2311.

It will be appreciated that the provision of protrusions 2311 enables, on the one hand, support tube 231 to engage first insulating sleeve 232 more tightly, and, on the other hand, also enables the distance between the inner wall of support tube 231 and the outer wall of SiC sheath 220 to be increased, thereby reducing the risk of current on SiC sheath 220 being transferred to support tube 231.

Specifically, the protrusion 2311 is annular, and the protrusion 2311 is disposed on an inner sidewall of the support tube 231 and abuts against an outer wall of the SiC sheath 220.

In some embodiments, the insulating sealing module further includes a second insulating sleeve 233 and a compression cap 234, the second insulating sleeve 233 is sleeved outside the SiC sheath 220, the second insulating sleeve 233 is located on a side of the first insulating sleeve 232 away from the end cover 110, the compression cap 234 is fixedly connected with an end of the support tube 231 away from the end cover 110, and the compression cap 234 is pressed outside the second insulating sleeve 233.

It is understood that the second insulating sheath 233 is made of an insulating material, such as polytetrafluoroethylene, and the pressing cap 234 is used to fix the second insulating sheath 233, so that the second insulating sheath 233 can prevent the pressing cap 234 from directly contacting the SiC sheath 220, and in addition, the second insulating sheath 233 can also play a limiting role on the first insulating sheath 232 to prevent the first insulating sheath 232 from falling out.

Wherein, the end of the pressing cap 234 near the end cover 110 is fixedly sleeved on the end of the supporting tube 231 far away from the end cover 110, and the end of the pressing cap 234 far away from the end cover 110 is pressed on the second insulating sleeve 233.

In some embodiments, the insulating sealing module further includes a first sealing ring 235, where the first sealing ring 235 is sleeved outside the SiC sheath 220 and is abutted between the first insulating sleeve 232 and the second insulating sleeve 233.

It will be appreciated that the first sealing ring 235 can be limited by the first insulating sleeve 232 and the second insulating sleeve 233, and that the first sealing ring 235 can also further reduce the risk of heat leakage inside the furnace.

Further, the compression cap 234 is sleeved outside the first insulation sleeve 232, and the insulation sealing module further comprises a second sealing ring 236, wherein the second sealing ring 236 is abutted between the first insulation sleeve 232 and the compression cap 234.

It will be appreciated that the compression cap 234 also conceals the first insulating sleeve 232 for protection and that by providing a second seal 236 between the first insulating sleeve 232 and the compression cap 234, the risk of heat leakage inside the furnace can be further reduced.

Referring to fig. 2 and 5, it should be noted that the end cover 110 is disposed at one end of the furnace body, the other end of the furnace body is provided with the supporting seat 120, the insulating supporting member 130 is disposed on the supporting seat 120, and one end of the sic sheath 220 away from the end cover 110 is disposed on the insulating supporting member 130.

It will be appreciated that the support base 120 is used to support the end of the pipe unit 200 away from the end cap 110, and that the insulating support 130 is provided on the support base 120, and that the end of the SiC sheath 220 away from the end cap 110 is provided on the insulating support 130, so that the current on the pipe unit 200 can be prevented from being transferred to the furnace unit 100, thereby improving the safety.

The insulating support 130 is made of an insulating material, such as insulating ceramic.

In the reaction furnace of the utility model, the furnace body is used for heating the graphite boat placed in the furnace body, and the end cover 110 is used for sealing and protecting the end part of the furnace body. The pipe fitting 210 is a heating pipe or a temperature monitoring pipe; in the case that the pipe fitting 210 is a heating pipe, the pipe fitting 210 can perform auxiliary heating on the graphite boat inside the furnace body, and in the case that the pipe fitting 210 is a temperature monitoring pipe, the pipe fitting 210 can detect the temperature inside the furnace body. The SiC sheath 220 is made of SiC, and at normal temperature, the thermal conductivity of SiC is about 120W/(m·k), so that the thermal conductivity is easier and faster; moreover, the SiC material has strong hardness and bearing capacity, is not easy to deform and break under the condition of high-temperature cooling, and has long service time and high reliability; siC sheath 220 is used for sleeving outside pipe fitting 210, and protecting pipe fitting 210; the insulating sealing component 230 is sleeved outside the SiC sheath 220 and connected with the end cover 110, so that the SiC sheath 220 can be supported, in addition, the insulating sealing component 230 can also seal the assembly hole 111, and the risk that heat in the furnace body leaks out through the assembly hole 111 can be reduced. Wherein, since SiC is conductive, the insulating sealing member 230 can perform an insulating function, and in the case that the SiC sheath 220 is spaced apart from the furnace unit 100, the SiC sheath 220 is connected to the end cap 110 by the insulating sealing member 230, it is possible to prevent electricity on the pipe unit 200 from being transferred to the furnace unit 100, thereby improving safety.

The utility model also relates to a coating device comprising the reaction furnace.

The coating equipment of the utility model is provided with the reaction furnace, wherein the furnace body is used for heating the graphite boat in the furnace body, and the end cover 110 is used for sealing and protecting the end part of the furnace body. The pipe fitting 210 is a heating pipe or a temperature monitoring pipe; in the case that the pipe fitting 210 is a heating pipe, the pipe fitting 210 can perform auxiliary heating on the graphite boat inside the furnace body, and in the case that the pipe fitting 210 is a temperature monitoring pipe, the pipe fitting 210 can detect the temperature inside the furnace body. The SiC sheath 220 is made of SiC, and at normal temperature, the thermal conductivity of SiC is about 120W/(m·k), so that the thermal conductivity is easier and faster; moreover, the SiC material has strong hardness and strong bearing capacity, is not easy to deform and break under the condition of high-temperature cooling, and has long service life; siC sheath 220 is used for sleeving outside pipe fitting 210, and protecting pipe fitting 210; the insulating sealing component 230 is sleeved outside the SiC sheath 220 and connected with the end cover 110, so that the SiC sheath 220 can be supported, in addition, the insulating sealing component 230 can also seal the assembly hole 111, and the risk that heat in the furnace body leaks out through the assembly hole 111 can be reduced. Wherein, since SiC is conductive, the insulating sealing member 230 can perform an insulating function, and in the case that the SiC sheath 220 is spaced apart from the furnace unit 100, the SiC sheath 220 is connected to the end cap 110 by the insulating sealing member 230, it is possible to prevent electricity on the pipe unit 200 from being transferred to the furnace unit 100, thereby improving safety.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims

1. A reaction furnace, characterized by comprising:

the furnace unit comprises a furnace body and an end cover arranged at the end part of the furnace body, and the end cover is provided with an assembly hole;

the pipe unit comprises a pipe fitting, a SiC sheath and an insulating sealing component, wherein the pipe fitting penetrates through the inside of the furnace body, penetrates through the assembly hole and stretches out of the inside of the furnace body, the SiC sheath is sleeved outside the pipe fitting, the SiC sheath penetrates through the inside of the furnace body, penetrates through the assembly hole and stretches out of the inside of the furnace body, the SiC sheath is spaced from the furnace unit, the insulating sealing component is sleeved outside the SiC sheath and is positioned outside the furnace body, and the insulating sealing component is connected with the end cover and seals the assembly hole;

wherein the pipe fitting is a heating pipe or a temperature monitoring pipe.

2. The reactor according to claim 1, wherein the insulating sealing assembly comprises a support tube and an insulating sealing module, the support tube is sleeved outside the SiC sheath and is spaced apart from the SiC sheath, one end of the support tube is fixedly connected with the outer side wall of the end cover and surrounds the outer end of the assembly hole, and the insulating sealing module is sleeved outside the SiC sheath and seals a gap between the support tube and the SiC sheath.

3. The reactor according to claim 2, wherein the outer side wall of the end cover is provided with a positioning groove provided around the assembly hole, and one end of the support tube is inserted into the positioning groove.

4. The reactor according to claim 2, wherein the insulating sealing module comprises a first insulating sleeve sleeved outside the SiC sheath and abutting between an inner wall of the support tube and an outer wall of the SiC sheath.

5. The reactor according to claim 4, wherein the end of the support tube away from the end cap is provided with a projection extending toward the inside of the support tube, and the outer side wall of the first insulating sleeve abuts against the projection.

6. The reactor according to claim 4, wherein the insulating sealing module further comprises a second insulating sleeve and a pressing cap, the second insulating sleeve is sleeved outside the SiC sheath, the second insulating sleeve is located at one side of the first insulating sleeve away from the end cover, the pressing cap is fixedly connected with one end of the support tube away from the end cover, and the pressing cap is pressed outside the second insulating sleeve.

7. The reactor of claim 6, wherein said insulating seal module further comprises a first seal ring sleeved outside said SiC jacket and abutting between said first insulating sleeve and said second insulating sleeve.

8. The reactor according to claim 6, wherein the compression cap is sleeved outside the first insulating sleeve, and the insulating sealing module further comprises a second sealing ring, and the second sealing ring is abutted between the first insulating sleeve and the compression cap.

9. The reactor according to claim 1, wherein the end cap is disposed at one end of the furnace body, a support bracket is disposed at the other end of the furnace body, an insulating support is disposed on the support bracket, and an end of the SiC sheath remote from the end cap is disposed on the insulating support.

10. A coating apparatus comprising a reaction furnace as claimed in any one of claims 1 to 9.