CN220660614U

CN220660614U - Novel ion thinning device

Info

Publication number: CN220660614U
Application number: CN202322314575.8U
Authority: CN
Inventors: 李鹏飞; 林思宇; 段勇锋
Original assignee: Beijing Zhongke Baice Testing Technology Co ltd
Current assignee: Beijing Zhongke Baice Testing Technology Co ltd
Priority date: 2023-08-28
Filing date: 2023-08-28
Publication date: 2024-03-26
Anticipated expiration: 2033-08-28

Abstract

The utility model discloses a novel ion thinning device, which comprises a supporting component and a bearing component rotatably mounted at the top of the supporting component, wherein the bearing component comprises a mounting seat, a bearing groove is formed in the middle of the top end of the mounting seat, through holes for rotating and mounting a shaft rod are formed in two sides in the bearing groove, a hexagon adjusting button is fixedly mounted at one end of one shaft rod passing through the through holes in the two shaft rods, a sample table is fixedly mounted between opposite ends of the two shaft rods, a plurality of positioning components for clamping and positioning samples are constructed in an annular array in the sample table, the positioning components comprise a base, the base is constructed on one side of the inner wall of the sample table, and movable keys are slidably arranged in the base. This novel ion attenuate device has reduced the blocking to the ion, and the sample of being convenient for carries out even attenuate, has shortened the time of attenuate, has improved the efficiency of sample attenuate greatly, and applicable fixed of different diameter samples, the practicality is stronger.

Description

Novel ion thinning device

Technical Field

The utility model belongs to the technical field of ion thinning, and particularly relates to a novel ion thinning device.

Background

The ion thinning technique is a thinning technique for gradually thinning a thicker material to a desired thickness by the impact of a high-speed ion beam. The thickness of the sample to be thinned and the area of the thinned area are the most important indexes for measuring the technical conditions of the ion thinning instrument. These two criteria are in turn determined by the magnitude of the minimum tilt angle between the sample being thinned and the ion beam, the smaller the tilt angle the greater the area of the thin region in which the sample is thinned.

Therefore, when the current ion thinning device performs ion thinning, a sample needs to be clamped and fixed through a sample table.

The sample table in the prior art can shield ions, so that the uniform thinning of the sample is seriously influenced, the time required by thinning is longer, the efficiency of sample thinning is greatly reduced, and the practicability is lower.

Disclosure of Invention

The utility model aims to provide a novel ion thinning device for solving the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

a novel ion thinning device comprises a supporting component and a bearing component rotatably arranged at the top of the supporting component;

the bearing assembly comprises an installation seat, a bearing groove is formed in the middle of the top end of the installation seat, through holes for rotating and installing the shaft rods are formed in two sides in the bearing groove, an inner hexagonal adjusting button is fixedly arranged at one end of one shaft rod, penetrating through the through holes, of the shaft rods, a sample table is fixedly arranged between opposite ends of the shaft rods, and a plurality of positioning assemblies for clamping and positioning samples are arranged in the sample table in an annular array structure.

Further, the positioning assembly comprises a base, wherein the base is constructed on one side of the inner wall of the sample table, and a movable key is arranged in the base in a sliding manner.

Further, one side of the movable key is provided with a plurality of composite springs in a rectangular array, and one side of the composite springs, which is far away from the movable key, is fixedly connected with the base.

Further, one end of the movable key extending out of the base is provided with an arc-shaped plate, one end top of the arc-shaped plate, which is far away from the base, is provided with a positioning key, and one end of the positioning key, which is far away from the movable key, is provided with a positioning groove.

Further, the supporting component comprises a bottom plate, a mounting groove for fixing the miniature speed reducer is formed in the middle of the top end of the bottom plate, and an output shaft of the miniature speed reducer is fixedly connected to the mounting seat.

Further, one side of the bottom plate is fixedly provided with a servo motor connected to the input shaft of the miniature speed reducer, the bottoms of the two sides of the bottom plate are respectively provided with an extension lug, and the top ends of the extension lugs are equidistantly provided with a plurality of through holes for the movable arrangement of fastening bolts.

Compared with the prior art, the utility model has the following beneficial effects:

thanks to the arrangement of the bearing assembly, the sample platform connected with the two shaft rods is driven to rotate by screwing the inner hexagonal adjusting knob, so that the inclination angle of the sample platform is adjusted, the sample is clamped and fixed by the four positioning assemblies, the sample is subjected to ion thinning processing by the equipment, the sample is clamped and fixed by the sample platform and the positioning assemblies, the blocking of ions is reduced, the sample is convenient to uniformly thin, the thinning time is shortened, the sample thinning efficiency is greatly improved, and the practicability is higher;

thanks to the arrangement of a plurality of locating components in the sample table, the sample is pressed into the locating grooves on the four locating keys, the four movable keys with arc plates are extruded to enter the four bases respectively, and then the extrusion shrinkage of a plurality of compound springs is completed, so that the clamping and fixing of the sample are completed, the sample clamping device is applicable to the fixing of samples with different diameters, and the practicability is higher.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic diagram of the present utility model;

fig. 3 is an enlarged schematic view of the structure of fig. 2 a according to the present utility model.

In the figure: 1. a support assembly; 101. a bottom plate; 102. a miniature speed reducer; 103. a servo motor; 104. extending the ears; 105. a fastening bolt; 2. a carrier assembly; 201. a mounting base; 202. a shaft lever; 203. an inner hexagonal adjusting knob; 204. a sample stage; 3. a positioning assembly; 301. a base; 302. a movable key; 303. a compound spring; 304. an arc-shaped plate; 305. a positioning key; 306. and a positioning groove.

Detailed Description

The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.

As shown in fig. 1, fig. 2, fig. 3, a novel ion attenuate device, including supporting component 1 and rotate and install in the bearing component 2 at supporting component 1 top, bearing component 2 includes mount pad 201, the top of mount pad 201 has offered the loading tank in the middle, and bears the inslot both sides and all offered the through-hole that supplies axostylus axostyle 202 to rotate the installation, two one axostylus axostyle 202 in the axostylus axostyle 202 passes the one end fixed mounting of through-hole has interior hexagonal adjusting knob 203, two fixed mounting has sample platform 204 between the opposite ends of axostylus axostyle 202, and is a plurality of locating component 3 that are used for carrying out the centre gripping location to the sample in the sample platform 204 in the annular array structure, rotates sample platform 204 in order to drive being connected with two axostylus axostyle 202 through twisting interior hexagonal adjusting knob 203 to realize to the inclination adjustment to sample platform 204, thereby cooperate four locating component 3 to accomplish the centre gripping fixed to the sample, and then carry out the ion attenuate processing by equipment to the sample, adopt sample platform 204 to cooperate locating component 3 to fix the sample, has reduced the blocking to the ion, the sample is convenient for carrying out even attenuate, has shortened the sample time has improved the practicality and has thinned the sample.

As shown in fig. 1, fig. 2, and fig. 3, the positioning assembly 3 includes a base 301, the base 301 is configured on one side of the inner wall of the sample table 204, a movable key 302 is slidably disposed in the base 301, a plurality of compound springs 303 are fixedly mounted on one side of the movable key 302 in a rectangular array, one side of the compound springs 303 away from the movable key 302 is fixedly connected to the base 301, one end of the movable key 302 extending out of the base 301 is configured with an arc plate 304, one end top of the arc plate 304 away from the base 301 is configured with a positioning key 305, one end of the positioning key 305 away from the movable key 302 is provided with a positioning groove 306, the sample is pressed into the positioning grooves 306 on the four positioning keys 305, and the four movable keys 302 configured with the arc plates 304 are extruded into the four bases 301 respectively, so that extrusion shrinkage of the plurality of compound springs 303 is completed, so that clamping fixation of the sample is completed, and the positioning assembly is applicable to samples with different diameters, and has high practicability.

As shown in fig. 1, fig. 2, and fig. 3, the support assembly 1 includes a bottom plate 101, an installation groove for fixing the micro-speed reducer 102 is centrally provided at the top end of the bottom plate 101, and an output shaft of the micro-speed reducer 102 is fixedly connected to an installation seat 201, a servo motor 103 connected to an input shaft of the micro-speed reducer 102 is fixedly installed at one side of the bottom plate 101, extending lugs 104 are respectively configured at the bottoms of two sides of the bottom plate 101, a plurality of through holes for movably arranging fastening bolts 105 are provided at the top end of the extending lugs 104 at equal intervals, the servo motor 103 is started to drive the micro-speed reducer 102 to rotate, so that the installation seat 201 is driven to rotate, and ion thinning processing of a sample is completed, and the practicality is strong.

Working principle: this novel ion attenuate device, during the use, in pressing into the constant head tank 306 on four location keys 305 with the sample, and extrude four movable keys 302 that are constructed with arc 304 respectively get into four base 301, and then accomplish the extrusion shrink to a plurality of compound springs 303, thereby accomplish the centre gripping fixed to the sample, twist again interior hexagonal adjusting knob 203 and rotate with the sample platform 204 that drives and be connected with two axostylus axostyles 202, thereby realize the inclination to sample platform 204 and adjust, thereby the centre gripping fixed to the sample is accomplished to four locating component 3 of cooperation, and then carry out ion attenuate processing to the sample by equipment, during the processing, start servo motor 103 drives miniature reduction gear 102 and rotates, thereby drive mount pad 201 rotates, thereby accomplish the ion attenuate processing to the sample, the practicality is stronger.

The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. The novel ion thinning device comprises a supporting component (1) and a bearing component (2) rotatably arranged at the top of the supporting component (1);

the method is characterized in that: the bearing assembly (2) comprises a mounting seat (201), a bearing groove is formed in the middle of the top end of the mounting seat (201), through holes for rotating and mounting the shaft rods (202) are formed in two sides in the bearing groove, one end of one shaft rod (202) in the shaft rods (202) penetrating through the through holes is fixedly provided with an inner hexagonal adjusting button (203), a sample table (204) is fixedly arranged between opposite ends of the two shaft rods (202), and a plurality of positioning assemblies (3) for clamping and positioning samples are constructed in the sample table (204) in an annular array mode.

2. The novel ion thinning apparatus according to claim 1, wherein: the positioning assembly (3) comprises a base (301), wherein the base (301) is constructed on one side of the inner wall of the sample table (204), and a movable key (302) is arranged in the base (301) in a sliding mode.

3. A novel ion thinning apparatus according to claim 2 and wherein: a plurality of compound springs (303) are fixedly arranged on one side of the movable key (302) in a rectangular array, and one side, far away from the movable key (302), of the compound springs (303) is fixedly connected to the base (301).

4. A novel ion thinning apparatus according to claim 3 and wherein: one end of the movable key (302) extending out of the base (301) is provided with an arc-shaped plate (304), one end top of the arc-shaped plate (304) far away from the base (301) is provided with a positioning key (305), and one end of the positioning key (305) far away from the movable key (302) is provided with a positioning groove (306).

5. The novel ion thinning apparatus according to claim 1, wherein: the support assembly (1) comprises a bottom plate (101), a mounting groove for fixing the miniature speed reducer (102) is formed in the middle of the top end of the bottom plate (101), and an output shaft of the miniature speed reducer (102) is fixedly connected to the mounting seat (201).

6. The novel ion thinning apparatus according to claim 5, wherein: one side of the bottom plate (101) is fixedly provided with a servo motor (103) connected to an input shaft of the miniature speed reducer (102), the bottoms of the two sides of the bottom plate (101) are respectively provided with an extension lug (104), and the top ends of the extension lugs (104) are equidistantly provided with a plurality of through holes for the movable arrangement of fastening bolts (105).