CN220658542U

CN220658542U - Cleaning device for semiconductor processing

Info

Publication number: CN220658542U
Application number: CN202322039017.5U
Authority: CN
Inventors: 胡建军
Original assignee: Suzhou Yingerjie Semiconductor Co ltd
Current assignee: Suzhou Yingerjie Semiconductor Co ltd
Priority date: 2023-08-01
Filing date: 2023-08-01
Publication date: 2024-03-26
Anticipated expiration: 2033-08-01

Abstract

The utility model discloses a cleaning device for semiconductor processing, which comprises a box body, wherein the lower end of the box body is connected with a water tank, the lower end of the box body is connected with a valve, the valve stretches into the water tank, the outer wall of the front side of the box body is provided with a water pump, both ends of the water pump are connected with water guide pipes, one ends of the water guide pipes, which are far away from the water pump, respectively extend into the box body and the water tank, the box body is internally connected with a filter cylinder, the left side and the right side of the box body are respectively connected with a first motor and a driving mechanism, and the output end of the first motor penetrates through the outer wall of the box body and is connected with the filter cylinder. The utility model is convenient to drive the semiconductor to rotate in the filter cylinder by the operation of the driving mechanism, and the filter cylinder is driven to rotate by the first motor, so that the cleaning efficiency of the semiconductor is effectively improved, the valve is opened, water is led into the water tank to be filtered and deposited, the water in the water tank is conveniently led into the tank body by the water pump, the water resource is conveniently recycled, and the purposes of energy conservation and environmental protection are realized.

Description

Cleaning device for semiconductor processing

Technical Field

The utility model belongs to the technical field of semiconductor processing, and particularly relates to a cleaning device for semiconductor processing.

Background

The semiconductor is a material with conductivity between a conductor and an insulator, and is widely applied to a plurality of fields such as integrated circuits, electronic elements, power generation, illumination and the like, and the semiconductor needs to be cleaned and then subjected to subsequent processing steps in the processing process, but the conventional cleaning device for processing the semiconductor still has some defects in use, the cleaning liquid cannot quickly remove impurities on the semiconductor during cleaning, the semiconductor cannot be conveniently introduced or taken out, and the semiconductor cannot be quickly separated from the cleaning liquid, so that a novel cleaning device for processing the semiconductor is needed to solve the defects.

For example, the patent with the application number of 202222050583.1 discloses a cleaning device for semiconductor processing, which comprises a supporting frame and a cleaning groove, wherein the top end of the supporting frame is fixedly connected with the cleaning groove, a cleaning tank is arranged in the cleaning groove, and the bottom end of one side of the cleaning groove is fixedly connected with a liquid guide valve pipe. This cleaning device for semiconductor processing is through being provided with driving motor, lifter plate, wash jar, arc grid and connecting rod, when cleaning, put into the inside of wasing the jar with the semiconductor, the driving motor of restarting one side drives the connecting rod and rotates, the connecting rod pivoted drives the washing jar and rotates, it is in the inside cleaning solution of continuous entering cleaning tank to drive inside semiconductor motion when wasing jar pivoted, the cleaning solution is washd the inside of inside semiconductor to wasing the jar from the entering of arc grid to quick washing is clean, the semiconductor that has realized can be quick is clean, the problem that the cleaning efficiency is low is solved.

However, the prior art has some problems: after cleaning the semiconductor, the cleaned water is discharged and water resources are wasted, so we propose a cleaning device for semiconductor processing.

Disclosure of Invention

According to the cleaning device for the semiconductor processing, the driving mechanism is used for conveniently driving the semiconductor to rotate in the filter cylinder, the filter cylinder is driven by the first motor to rotate, the cleaning efficiency of the semiconductor is effectively improved, when the cleaning is completed, the valve is opened, water is guided into the water tank to filter and deposit, the water deposited in the water tank is conveniently guided into the tank body by the water pump, the water resource is conveniently recycled, the energy-saving and environment-friendly purposes are achieved, and the problems that the cleaned water is discharged after the semiconductor is cleaned and the water resource is wasted are solved.

The utility model discloses a cleaning device for semiconductor processing, which comprises a box body, wherein the lower end of the box body is connected with a water tank, the lower end of the box body is connected with a valve, the valve stretches into the water tank, the outer wall of the front side of the box body is provided with a water pump, both ends of the water pump are connected with water guide pipes, one ends of the water guide pipes, which are far away from the water pump, respectively extend into the box body and the water tank, a filter cylinder is connected in the box body, the outer wall of the filter cylinder is provided with a plurality of cylinder doors, the left side and the right side of the box body are respectively connected with a first motor and a driving mechanism, the driving mechanism penetrates through the outer wall of the box body and extends into the filter cylinder, and the output end of the first motor penetrates through the outer wall of the box body and is connected with the filter cylinder.

As the preferable mode of the utility model, the inner wall of the lower end of the box body is provided with an arc-shaped groove which is convenient for water guiding.

As preferable in the utility model, the left side of the water tank is connected with a drain pipe, and the inner wall of the water tank is connected with a filter screen.

Preferably, the driving mechanism comprises a second motor connected to the outer wall of the box body, the output end of the second motor is connected with a rotating shaft, the rotating shaft penetrates through the outer wall of the box body and extends to the inside of the filter cylinder, the outer wall of the rotating shaft, located inside the filter cylinder, is connected with a plurality of couplings, and the outer wall of each coupling is connected with a plurality of stirring shafts.

As the preferable mode of the utility model, the outer wall of the stirring shaft is sleeved with the protective sleeve, and the protective sleeve is made of a rubber material.

As preferable in the utility model, the upper end surface of the box body is provided with a mounting groove, and the right side of the mounting groove is provided with a plurality of communicated limiting holes.

As preferable in the utility model, the right inner wall of the mounting groove is connected with a limiting plate, and the limiting plate and the inner wall of the box body are integrally formed and positioned at the lower end of the limiting hole.

In the utility model, preferably, the mounting groove is internally connected with a matched box door, and the right side of the box door is connected with a fixing plate matched with the limiting plate.

As the preferable mode of the utility model, the right outer wall of the fixed plate is provided with an inward concave step hole, the inner wall of the step hole is connected with a telescopic block, one end of the telescopic block positioned in the step hole is connected with a spring, and one end of the telescopic block extending to the outside of the step hole and a limit Kong Qige are connected with the telescopic block.

Compared with the prior art, the utility model has the following beneficial effects:

1. according to the utility model, the valve is opened through the arranged arc-shaped groove, so that water is conveniently led into the water tank, the residue is filtered by the filter screen, water resources are conveniently precipitated into the water tank, and when the water tank is used next time, the water is conveniently led into the tank body by the water pump, so that the water resources are recycled, and the purposes of energy conservation and environmental protection are achieved;

2. according to the utility model, the second motor is started to drive the rotating shaft, the rotating shaft drives the coupler, the coupler drives the stirring shaft, so that the semiconductor is conveniently driven to rotate in the filter cylinder, the filter cylinder is driven to rotate by being matched with the first motor, the cleaning efficiency and the cleaning effect of the semiconductor are effectively improved, and the protection effect of the semiconductor is started by utilizing the protection sleeve sleeved on the stirring shaft, so that the semiconductor is prevented from being damaged while being driven to rotate;

3. according to the utility model, the box door and the barrel door are opened, so that a semiconductor is conveniently placed into the filter cylinder, the barrel door and the box door are closed, the fixed plate on the box door is contacted with the limiting plate, the spring is driven to shrink towards the inside of the step hole under the influence of stress of the telescopic block, when the step hole corresponds to the limiting hole, the spring rebounds, the telescopic block is driven to extend into the inside of the limiting hole to be limited and fixed, the box door is conveniently opened or closed, and the semiconductor is conveniently taken and placed.

Drawings

FIG. 1 is a schematic diagram of a structure provided by an embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view provided by an embodiment of the present utility model;

FIG. 3 is an enlarged schematic view of region a of FIG. 2 according to an embodiment of the present utility model;

fig. 4 is a schematic front view of a driving mechanism according to an embodiment of the present utility model.

In the figure: 1. a case; 2. a driving mechanism; 3. a water tank; 4. a water pump; 5. a filter cartridge; 11. a door; 12. a first motor; 13. an arc-shaped groove; 14. a valve; 15. a limiting hole; 16. a mounting groove; 17. a limiting plate; 111. a step hole; 112. a spring; 113. a telescopic block; 114. a fixing plate; 21. a second motor; 22. a rotating shaft; 23. a coupling; 24. a stirring shaft; 25. a protective sleeve; 31. a filter screen; 32. a drain pipe; 41. a water conduit; 51. a barrel door.

Detailed Description

For a further understanding of the utility model, its features and advantages, reference is now made to the following examples, which are illustrated in the accompanying drawings.

The structure of the present utility model will be described in detail with reference to the accompanying drawings.

As shown in fig. 1, the cleaning device for semiconductor processing provided by the embodiment of the utility model comprises a box body 1, wherein the lower end of the box body 1 is connected with a water tank 3, the lower end of the box body 1 is connected with a valve 14, the valve 14 stretches into the water tank 3, a water pump 4 is installed on the outer wall of the front side of the box body 1, two ends of the water pump 4 are connected with water guide pipes 41, one end of the water guide pipe 41 far away from the water pump 4 extends into the box body 1 and the water tank 3 respectively, the interior of the box body 1 is connected with a filter cartridge 5, the outer wall of the filter cartridge 5 is provided with a plurality of cartridge doors 51, the left side and the right side of the box body 1 are respectively connected with a first motor 12 and a driving mechanism 2, the driving mechanism 2 penetrates through the outer wall of the box body 1 to the interior of the filter cartridge 5, and the output end of the first motor 12 penetrates through the outer wall of the box body 1 to be connected with the filter cartridge 5. The utility model is convenient to drive the semiconductor to rotate in the filter cylinder 5 through the operation of the driving mechanism 2, and the filter cylinder 5 is driven to rotate by the first motor 12, so that the cleaning efficiency of the semiconductor is effectively improved, when the cleaning is finished, the valve 14 is opened, water is led into the water tank 3 to filter and deposit, the water pump 4 is used for conveniently leading the water deposited in the water tank 3 into the tank body 1, the water resource is conveniently recycled, and the purposes of energy conservation and environmental protection are realized.

As shown in fig. 2, an arc-shaped groove 13 for facilitating water guiding is formed in the inner wall of the lower end of the box body 1, a drain pipe 32 is connected to the left side of the water tank 3, and a filter screen 31 is connected to the inner wall of the water tank 3; through the arc groove 13 that sets up, open valve 14, be convenient for with water leading-in to inside the water tank 3, utilize filter screen 31 to filter the residue, be convenient for deposit to inside the water tank 3 to the water resource, when making things convenient for the next use, utilize water pump 4 to lead-in to inside the box 1 with water, realize water resource cyclic utilization, reach energy-concerving and environment-protective purpose.

As shown in fig. 4, the driving mechanism 2 includes a second motor 21 connected to the outer wall of the casing 1, an output end of the second motor 21 is connected with a rotating shaft 22, the rotating shaft 22 extends into the filter cartridge 5 through the outer wall of the casing 1, an outer wall of the rotating shaft 22 located in the filter cartridge 5 is connected with a plurality of couplings 23, an outer wall of each coupling 23 is connected with a plurality of stirring shafts 24, a protective sleeve 25 is sleeved on an outer wall of each stirring shaft 24, and the protective sleeve 25 is made of a rubber material; through starting second motor 21, drive pivot 22, pivot 22 drives shaft coupling 23, and shaft coupling 23 drives (mixing) shaft 24, is convenient for drive semiconductor and is in the inside rotation of straining a section of thick bamboo 5, and cooperation first motor 12 drives and strain a section of thick bamboo 5 itself and rotate, effectively improves the cleaning efficiency and the effect of semiconductor, and utilizes the protective sleeve 25 that the cover was established on the (mixing) shaft 24, starts the guard action of semiconductor, when avoiding driving semiconductor rotation, causes the damage.

As shown in fig. 3, the upper end surface of the box 1 is provided with a mounting groove 16, the right side of the mounting groove 16 is provided with a plurality of communicated limiting holes 15, the right side inner wall of the mounting groove 16 is connected with a limiting plate 17, the limiting plate 17 and the inner wall of the box 1 are integrally formed and positioned at the lower end of the limiting hole 15, the mounting groove 16 is internally connected with a box door 11 which is matched with the limiting plate 17, the right side of the box door 11 is connected with a fixing plate 114 which is matched with the limiting plate 17, the right side outer wall of the fixing plate 114 is provided with a step hole 111 which is recessed inwards, the inner wall of the step hole 111 is connected with a telescopic block 113, one end of the telescopic block 113 positioned in the step hole 111 is connected with a spring 112, and one end of the telescopic block 113 extending to the outer part of the step hole 111 is matched with the limiting hole 15; through opening chamber door 11 and section of thick bamboo door 51, be convenient for put into the semiconductor and strain a section of thick bamboo 5 inside, close section of thick bamboo door 51 and chamber door 11, fixed plate 114 and limiting plate 17 contact on the chamber door 11 for drive spring 112 to step hole 111 inside shrink under the influence of telescopic block 113 atress, when step hole 111 corresponds with spacing hole 15, spring 112 kick-backs, drives telescopic block 113 and stretches into spacing hole 15 inside, carries out spacing fixedly, and the chamber door 11 of being convenient for is opened or is closed, conveniently gets and puts the semiconductor.

The working principle of the utility model is as follows:

when the semiconductor filter cartridge is used, the box door 11 and the barrel door 51 are opened at first, semiconductors are conveniently placed into the filter cartridge 5, the barrel door 51 and the box door 11 are closed, the second motor 21 is driven to drive the rotating shaft 22, the rotating shaft 22 drives the coupler 23, the coupler 23 drives the stirring shaft 24, the semiconductors are conveniently driven to rotate in the filter cartridge 5, the first motor 12 is matched to drive the filter cartridge 5 to rotate, the cleaning efficiency and the cleaning effect of the semiconductors are effectively improved, the valve 14 is opened through the arc-shaped groove 13, water is conveniently led into the water tank 3, residues are filtered by the filter screen 31, water resources are conveniently precipitated into the water tank 3, and when the semiconductor filter cartridge is conveniently used next time, the water is conveniently led into the box 1 by the water pump 4, so that the purpose of energy conservation and environmental protection is achieved.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a cleaning device for semiconductor processing, includes box (1), its characterized in that: the utility model discloses a water tank, including box (1), valve (14), box (1) lower extreme is connected with valve (14), valve (14) stretch into inside water tank (3), water pump (4) are installed to box (1) front side outer wall, water pump (4) both ends all are connected with aqueduct (41), the one end that water pump (4) were kept away from to aqueduct (41) extends to box (1) and inside water tank (3) respectively, box (1) internal connection strain section of thick bamboo (5), it is equipped with a plurality of section of thick bamboo doors (51) to strain a section of thick bamboo (5) outer wall, box (1) left and right sides is connected with first motor (12) and actuating mechanism (2) respectively, actuating mechanism (2) run through box (1) outer wall and extend to strain a section of thick bamboo (5) inside, first motor (12) output runs through box (1) outer wall and is connected with strain a section of thick bamboo (5).

2. A cleaning device for semiconductor processing according to claim 1, wherein: the inner wall of the lower end of the box body (1) is provided with an arc-shaped groove (13) which is convenient for water guide.

3. A cleaning device for semiconductor processing according to claim 1, wherein: the left side of the water tank (3) is connected with a drain pipe (32), and the inner wall of the water tank (3) is connected with a filter screen (31).

4. A cleaning device for semiconductor processing according to claim 1, wherein: the driving mechanism (2) comprises a second motor (21) connected to the outer wall of the box body (1), a rotating shaft (22) is connected to the output end of the second motor (21), the rotating shaft (22) penetrates through the outer wall of the box body (1) and extends to the inside of the filter cylinder (5), a plurality of couplings (23) are connected to the outer wall of the rotating shaft (22) located inside the filter cylinder (5), and a plurality of stirring shafts (24) are connected to the outer wall of the couplings (23).

5. A cleaning device for semiconductor processing as defined in claim 4, wherein: the outer wall of the stirring shaft (24) is sleeved with a protective sleeve (25), and the protective sleeve (25) is made of a rubber material.

6. A cleaning device for semiconductor processing according to claim 1, wherein: the upper end face of the box body (1) is provided with a mounting groove (16), and the right side of the mounting groove (16) is provided with a plurality of communicated limiting holes (15).

7. A cleaning device for semiconductor processing as defined in claim 6, wherein: the right side inner wall of mounting groove (16) is connected with limiting plate (17), limiting plate (17) and box (1) inner wall integrated into one piece just are located the lower extreme of spacing hole (15).

8. A cleaning device for semiconductor processing according to claim 7, wherein: the mounting groove (16) is internally connected with a box door (11) which is matched with the mounting groove, and the right side of the box door (11) is connected with a fixing plate (114) which is matched with the limiting plate (17).

9. A cleaning device for semiconductor processing according to claim 8, wherein: the fixed plate (114) right side outer wall is equipped with inwards concave step hole (111), step hole (111) inner wall is connected with flexible piece (113), the inside one end of flexible piece (113) in step hole (111) is connected with spring (112), the outside one end of flexible piece (113) extension to step hole (111) is fit with spacing hole (15).