CN220653863U

CN220653863U - UPS power supply for semiconductor machine equipment

Info

Publication number: CN220653863U
Application number: CN202322189497.3U
Authority: CN
Inventors: 董彬; 张金星; 储艳; 慈会霞
Original assignee: Shanghai Hera Industrial Co ltd
Current assignee: Shanghai Hera Industrial Co ltd
Priority date: 2023-08-15
Filing date: 2023-08-15
Publication date: 2024-03-22
Anticipated expiration: 2033-08-15

Abstract

The utility model discloses a UPS power supply for semiconductor machine equipment, which comprises a machine body, a shockproof structure, a cooling structure, a heat dissipation structure, a dustproof structure, a lifting structure and a rotating structure, wherein the machine body is provided with a plurality of power supply units; according to the utility model, the upper circular plate is driven to move through the movement of the shockproof plate, the shockproof spring is compressed through the movement of the upper circular plate, and the shockproof spring reversely gives an elastic force to the upper circular plate, so that the shockproof plate is provided with an elastic force; opening a second electromagnetic valve, pouring cold water from a water inlet pipe, enabling the cold water to enter a water tank, then opening a refrigerator, conveying the cooled water to a circulating condensing pipe through a water conveying pump, cooling the part above the inside by the dispersed cold air through a ventilation plate, and opening the first electromagnetic valve, wherein the water in the water tank flows out from a water outlet pipe; the fan is opened, external wind enters the inside of the machine body through the upper protective cover, then the inside of the machine body is subjected to heat dissipation treatment, and finally hot air is discharged from the ventilating plate, so that the inside dryness and the inside temperature of the machine body are ensured under the double-layer effect of the cooling structure and the heat dissipation structure.

Description

UPS power supply for semiconductor machine equipment

Technical Field

The utility model relates to the technical field of UPS power supplies, in particular to a UPS power supply for semiconductor machine equipment.

Background

A semiconductor is an electronic circuit device composed of semiconductor elements, and is an electronic device composed of two basic elements, namely, transistors and electronic devices. The system has a certain semiconductor attribute and stronger logic processing and control capability, and can greatly improve the performance of the system, thereby playing an important role worldwide. The semiconductor can be used for a microprocessor in electronic design, can realize control and processing of electronic products, such as a computer memory, a control circuit and an inductor, can also be used for an automobile electronic control system, a digital communication system, a new wind energy system and the like, and helps to improve modern technological progress and improve the technical life of people. The UPS is one of the functions of continuously supplying power to the user after power failure, and the other function is to protect the user from having a clean power supply and protecting the equipment of the user; the UPS power supply system comprises a main circuit, a bypass, a power input circuit such as a battery, a rectifier for performing AC/DC conversion, an inverter for performing DC/AC conversion, an inversion and bypass output switching circuit and an energy storage battery; however, the conventional UPS power supply for the semiconductor machine equipment can only perform a conventional heat dissipation function, cannot further reduce the temperature in the equipment on the basis of heat dissipation, and cannot easily carry the device; and on the one hand, the position of the heat radiation port can not be subjected to dustproof work, on the other hand, the heat radiation port can not be cleaned randomly, so that accumulated dust is gradually increased, and the ventilation and heat radiation effects are reduced.

Disclosure of Invention

The technical problems to be solved by the utility model are as follows:

in order to solve the technical problems, the utility model provides the following technical scheme: a UPS power supply for semiconductor machine equipment comprises

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the device comprises a machine body, a shockproof structure, a cooling structure, a heat dissipation structure, a dustproof structure, a lifting structure and a rotating structure; the inside of organism is transversely fixed and is provided with the connecting plate, and the centre of connecting plate is provided with ventilative board, and ventilative board's upper end is provided with shockproof structure, and shockproof structure's upper end is provided with shockproof board, is provided with revolution mechanic in the middle of the upper end of shockproof board, ventilative board's lower extreme, the inside bottom of organism is provided with cooling structure, and the top of organism is provided with heat radiation structure, and the left end upside and the right-hand member upside of organism are provided with and carry and draw the structure, and the left end upside and the right-hand member upside of organism, the lower extreme of carrying and drawing the structure all are provided with dustproof construction.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the anti-vibration structure comprises an upper circular plate, an anti-vibration telescopic rod, an anti-vibration spring and a lower circular plate, wherein the anti-vibration telescopic rod is arranged on the anti-vibration structure, the anti-vibration spring is arranged on an outer lever arm of the anti-vibration telescopic rod, the upper circular plate is arranged at the upper end of the anti-vibration telescopic rod, and the lower circular plate is arranged at the lower end of the anti-vibration telescopic rod.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the cooling structure comprises a water tank, a refrigerator, a water outlet pipe, a first electromagnetic valve, a water inlet pipe, a second electromagnetic valve, a water conveying pump and a circulating condensing pipe, wherein the water tank is arranged on the cooling structure, the refrigerator is arranged at the front end of the water tank, the water inlet pipe is arranged at the right front end of the water tank, the second electromagnetic valve is arranged on a pipe arm of the water inlet pipe, the water outlet pipe is arranged at the lower end of the water tank, the first electromagnetic valve is arranged on the pipe arm of the water outlet pipe, the upper end of the water outlet pipe and the inner side end of the water inlet pipe all penetrate and extend to the inside of the water tank, the water conveying pump is arranged at the right end of the water tank, the water conveying pump is connected with the water tank through the circulating condensing pipe, the pipe orifice at the left lower end of the circulating condensing pipe penetrates and extends to the inside of the water conveying pump, and the pipe orifice at the right lower end of the circulating condensing pipe penetrates and extends to the inside of the water conveying pump.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the heat radiation structure includes protective cover, protection backup pad, fan, support cross pole and lower protective cover, be provided with the protection backup pad on the heat radiation structure, the upper end of protection backup pad is provided with the protective cover, and the upper end of going up the protective cover runs through in the upper end of organism, and the inside cavity position department of protection backup pad is provided with the support cross pole, and the lower extreme of support cross pole is provided with the fan, and the lower extreme of protection backup pad is provided with the protective cover down.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: dustproof construction includes dustproof sliding closure, spout, buckle groove, ventilating board, buckle, goes up dust guard and vent, dustproof structural being provided with the ventilating board, ventilating board's upper and lower both ends all are provided with the buckle, and the vent has all been seted up to the left end upside and the right-hand member upside of organism, and the inboard one end of vent runs through in the inboard one end of organism, and the buckle groove corresponding setting with the buckle has all been seted up to the last port and the lower port of vent, and the spout has all been seted up at the left and right both ends of vent, and sliding connection has dustproof sliding closure on the spout, and the upper end of the spout at both ends is provided with the dust guard.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the lifting structure comprises an L-shaped left expansion plate, bolts, a fixed shaft, a handle, threaded holes and an L-shaped right expansion plate, wherein the L-shaped left expansion plate and the L-shaped right expansion plate are arranged on the lifting structure, the bolts are arranged at the lower end of the connecting short plate position of the L-shaped left expansion plate and the lower end of the connecting short plate position of the L-shaped right expansion plate, the threaded holes corresponding to the bolts are formed in the left side of the lower end of the connecting short plate position of the L-shaped left expansion plate and the right side of the lower end of the connecting short plate position of the L-shaped right expansion plate, and the fixed shafts are arranged at the upper right end of the L-shaped left expansion plate and the upper left end of the L-shaped right expansion plate, and are connected through the handle.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the rotary structure comprises a motor, a rotating shaft and a rotary protective shell, wherein the rotary protective shell is arranged on the rotary structure, the motor is arranged in the rotary protective shell, the rotating shaft is fixedly connected with the output end of the motor, and the rotating shaft is arranged at the upper end of the rotating shaft.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the upper end of shock-proof plate, revolution mechanic's left and right both ends all are provided with the connecting block, and the upper end of two connecting blocks is provided with the backup pad, and the sunken position department of backup pad is provided with the rotor plate, and the upper end of rotor plate is provided with the handle, and the sunken position department of rotor plate is provided with power body, and the connecting plate recess corresponding with the ventilation board sets up is seted up on the upper end surface of connecting plate, and ventilation board's lower extreme is provided with the heat-conducting plate, and circulating condensing tube on the cooling structure encircles around the heat-conducting plate.

As a preferable scheme of the UPS power supply for the semiconductor machine equipment, the utility model comprises the following steps: the front end surface of organism is provided with the cabinet door, and the right front end of cabinet door is provided with the cabinet door handle, and the left end of cabinet door is connected through hinge with the left end of organism, and the inboard one end of cabinet door is provided with cabinet door buckle, has seted up the cabinet door buckle groove corresponding with cabinet door buckle setting in the middle of the right front end of organism, and the lower extreme both sides of organism all are provided with pad foot, and the lower extreme of pad foot all is provided with the slipmat.

The utility model has the beneficial effects that:

according to the utility model, the upper circular plate is driven to move through the movement of the shockproof plate, the shockproof spring is compressed through the movement of the upper circular plate, and the shockproof spring reversely gives an elastic force to the upper circular plate, so that the shockproof plate is provided with an elastic force, and the shockproof work is carried out on the external movement; the circulation condensing pipe is surrounded on the outer part of the heat conducting plate, the second electromagnetic valve is opened, cold water is poured into the water tank from the water inlet pipe, the cold water enters the water tank, then the refrigerator is opened, the refrigerated water is conveyed into the circulation condensing pipe through the water conveying pump, the dispersed cold water cools the part above the inner part through the air permeable plate, the first electromagnetic valve is opened, the water in the water tank flows out from the water outlet pipe, the water source is convenient to replace, and the next cooling cycle is performed; the fan is opened, external wind enters the inside of the machine body through the upper protective cover, then the inside of the machine body is subjected to heat dissipation treatment, and finally hot air is discharged from the ventilation plates at two sides, so that the inside dryness and the temperature of the machine body are ensured under the double-layer effect of the cooling structure and the heat dissipation structure.

When ventilation is needed, the dustproof sliding cover is only required to slide downwards, the ventilation plate is exposed to perform conventional ventilation work, the dustproof sliding cover is slid upwards, the ventilation plate can be shielded, external dust is prevented from entering the inside of the machine body to cause damage to parts, when the dust left on the ventilation plate is too much, the ventilation plate is only required to be pulled outwards, the buckle on the ventilation plate is retracted inwards under the condition of being subjected to extrusion force until the buckle is separated from the buckle groove, and at the moment, the ventilation plate can be stored and taken independently to facilitate cleaning and replacement of the ventilation plate; the motor is turned on, the motor drives the rotation of the rotation shaft, the rotation of the rotation shaft drives the rotation of the rotation plate, and then the rotation of the power supply body is driven, so that the operation is beneficial to the observation and detection of the power supply body, and various operations are convenient to be carried out on the power supply body; pulling the cabinet door handle, the pulling of cabinet door handle has driven the pulling of cabinet door, and the pulling of cabinet door can observe the inside various circumstances of organism, closes the cabinet door, makes cabinet door buckle and cabinet door buckle groove agree with mutually, firmly closes the cabinet door, pulls the handle, can drive the removal of whole device, has made things convenient for the carrying of device.

Drawings

Fig. 1 is a schematic structural diagram in an embodiment of the present disclosure.

Fig. 2 is a schematic diagram of an internal structure in an embodiment of the present disclosure.

Fig. 3 is a left-side view of an embodiment of the present disclosure.

Fig. 4 is a schematic view of a vibration damping structure in an embodiment of the disclosure.

Fig. 5 is a schematic diagram of a cooling structure in an embodiment of the present disclosure.

Fig. 6 is a schematic diagram of a heat dissipation structure in an embodiment of the disclosure.

Fig. 7 is a schematic view of a dust-proof structure in an embodiment of the disclosure.

Fig. 8 is a schematic drawing of a lifting structure in an embodiment of the disclosure.

Fig. 9 is a schematic diagram of a rotating structure in an embodiment of the disclosure.

Reference numerals: 1-machine body, 2-cabinet door, 3-cabinet door buckle, 4-shockproof structure, 41-upper circular plate, 42-shockproof telescopic rod, 43-shockproof spring, 44-lower circular plate, 5-cooling structure, 51-water tank, 52-refrigerator, 53-water outlet pipe, 54-first electromagnetic valve, 55-water inlet pipe, 56-second electromagnetic valve, 57-water delivery pump, 58-circulating condensing pipe, 6-heat dissipation structure, 61-upper protective cover, 62-protective support plate, 63-fan, 64-support cross rod, 65-lower protective cover, 7-dustproof structure, 71-dustproof sliding cover, 72-sliding groove, 73-buckle groove, 74-ventilation plate, 75-buckle the novel door hinge comprises a 76-upper dustproof plate, a 77-ventilation opening, an 8-lifting structure, an 81-L-shaped left telescopic plate, 82-bolts, an 83-fixed shaft, an 84-handle, an 85-threaded hole, an 86-L-shaped right telescopic plate, a 9-rotating structure, a 91-motor, a 92-rotating shaft, a 93-rotating shaft, a 94-rotating protective shell, a 10-cabinet door buckling groove, a 11-foot pad, a 12-anti-skid pad, a 13-ventilation plate, a 14-shockproof plate, a 15-connecting plate, a 16-connecting plate groove, a 17-connecting block, a 18-supporting plate, a 19-rotating plate, a 20-handle, a 21-power supply body, a 22-heat conducting plate, a 23-cabinet door handle and a 24-hinge.

Detailed Description

In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.

Examples

Referring to fig. 1 to 4, the embodiment provides a UPS power source for a semiconductor machine, which includes a machine body 1, a shockproof structure 4, a cooling structure 5, a heat dissipation structure 6, a dust-proof structure 7, a lifting structure 8 and a rotating structure 9; the inside of the machine body 1 is transversely and fixedly provided with a connecting plate 15, the middle of the connecting plate 15 is provided with a ventilation plate 13, the upper end of the ventilation plate 13 is provided with a shockproof structure 4, the upper end of the shockproof structure 4 is provided with a shockproof plate 14, the middle of the upper end of the shockproof plate 14 is provided with a rotary structure 9, the lower end of the ventilation plate 13 and the inner bottom end of the machine body 1 are provided with a cooling structure 5, the top of the machine body 1 is provided with a heat dissipation structure 6, the upper side of the left end and the upper side of the right end of the machine body 1 are provided with lifting structures 8, and the upper side of the left end and the upper side of the right end of the machine body 1 and the lower end of the lifting structures 8 are provided with dustproof structures 7; the upper end of the shock-proof plate 14, the left and right two ends of the rotary structure 9 are respectively provided with a connecting block 17, the upper ends of the two connecting blocks 17 are provided with a supporting plate 18, a rotary plate 19 is arranged at the concave position of the supporting plate 18, the upper end of the rotary plate 19 is provided with a handle 20, the concave position of the rotary plate 19 is provided with a power supply body 21, the upper end surface of the connecting plate 15 is provided with a connecting plate groove 16 which is arranged corresponding to the ventilation plate 13, the lower end of the ventilation plate 13 is provided with a heat-conducting plate 22, a circulating condensation pipe 58 on the cooling structure 5 surrounds the periphery of the heat-conducting plate 22, the front end surface of the machine body 1 is provided with a cabinet door 2, the right front end of the cabinet door 2 is provided with a cabinet door handle 23, the left end of the cabinet door 2 is connected with the left end of the machine body 1 through a hinge 24, the inner side end of the cabinet door 2 is provided with a cabinet door buckle 3, the middle of the right front end of the machine body 1 is provided with a cabinet door buckle groove 10 which is arranged corresponding to the cabinet door buckle 3, the lower ends of the machine body 1 are provided with cushion feet 11, and the lower ends of the cushion feet 11 are provided with anti-slip pads 12; the shockproof structure 4 comprises an upper circular plate 41, a shockproof telescopic rod 42, a shockproof spring 43 and a lower circular plate 44, the shockproof telescopic rod 42 is arranged on the shockproof structure 4, the shockproof spring 43 is arranged on an outer lever arm of the shockproof telescopic rod 42, the upper circular plate 41 is arranged at the upper end of the shockproof telescopic rod 42, the lower circular plate 44 is arranged at the lower end of the shockproof telescopic rod 42, the movement of the shockproof plate 14 drives the movement of the upper circular plate 41, the movement of the upper circular plate 41 compresses the shockproof spring 43, the shockproof spring 43 reversely gives an elastic force to the upper circular plate 41, and then the shockproof plate 14 is given an elastic force, so that shockproof work is performed on the external movement.

Examples

Referring to fig. 5 to 6, this embodiment is based on the previous embodiment, and differs from the previous embodiment in that; the cooling structure 5 comprises a water tank 51, a refrigerator 52, a water outlet pipe 53, a first electromagnetic valve 54, a water inlet pipe 55, a second electromagnetic valve 56, a water delivery pump 57 and a circulating condensation pipe 58, wherein the water tank 51 is arranged on the cooling structure 5, the refrigerator 52 is arranged at the front end of the water tank 51, the water inlet pipe 55 is arranged at the right front end of the water tank 51, the second electromagnetic valve 56 is arranged on the pipe wall of the water inlet pipe 55, the water outlet pipe 53 is arranged at the lower end of the water tank 51, the first electromagnetic valve 54 is arranged on the pipe wall of the water outlet pipe 53, the upper end of the water outlet pipe 53 and the inner side end of the water inlet pipe 55 penetrate and extend into the water tank 51, the water delivery pump 57 is arranged at the right end of the water tank 51, the water delivery pump 57 is connected with the water tank 51 through the circulating condensation pipe 58, the pipe orifice at the left lower end of the circulating condensation pipe 58 penetrates and extends into the water tank 51, the pipe orifice at the right lower end of the circulating condensation pipe 58 penetrates and extends into the water delivery pump 57, the outer part of the heat conducting plate 22 is surrounded by the circulating condensation pipe 58, cold water is poured into the water tank 51 from the water inlet pipe 55, the water 52 is then opened, the water is delivered into the water tank 52 through the water delivery pump 57, the circulating condensation pipe is circulated through the water pump 13 through the water delivery pipe and the water outlet pipe 13, and the cooling part is cooled down the cooling part is circulated and cooled down by the water, and the cooling part is cooled down by the circulating part and cooled down water; the heat radiation structure 6 includes protective cover 61, protective support plate 62, fan 63, support cross bar 64 and lower protective cover 65, be provided with protective support plate 62 on the heat radiation structure 6, the upper end of protective support plate 62 is provided with protective cover 61, and the upper end of upper protective cover 61 runs through in the upper end of organism 1, and the inside cavity position department of protective support plate 62 is provided with support cross bar 64, and the lower extreme of support cross bar 64 is provided with fan 63, and the lower extreme of protective support plate 62 is provided with lower protective cover 65.

Examples

Referring to fig. 7 to 9, this embodiment is based on the previous embodiment, and differs from the previous embodiment in that;

the dustproof structure 7 comprises a dustproof sliding cover 71, a sliding groove 72, a buckling groove 73, a ventilating plate 74, buckling grooves 75, an upper dustproof plate 76 and a ventilating opening 77, wherein the ventilating plate 74 is arranged on the dustproof structure 7, buckling grooves 75 are arranged at the upper and lower ends of the ventilating plate 74, the ventilating opening 77 is arranged at the upper side of the left end and the upper side of the right end of the machine body 1, one end of the inner side of the ventilating opening 77 penetrates through one end of the inner side of the machine body 1, buckling grooves 73 which are arranged corresponding to the buckling grooves 75 are arranged at the upper end and the lower end of the ventilating opening 77, the sliding grooves 72 are arranged at the left and right ends of the ventilating opening 77, the dustproof sliding cover 71 is connected to the sliding groove 72 in a sliding mode, the upper ends of the sliding grooves 72 at the two ends are provided with the upper dustproof plate 76, conventional ventilating operation can be carried out only by sliding the dustproof sliding cover 71 downwards when ventilation is needed, the ventilating plate 74 is exposed, the outside dust is prevented from entering the inside of the machine body 1, damage of parts is caused, when the ventilating plate 74 is excessively increased, the ventilating plate 74 is only required to be moved outwards, the buckling grooves 74 are required to be separated from the buckling grooves 75, and the ventilating plate 74 can be conveniently taken up and separated from the ventilating grooves 75, and the ventilating plate can be conveniently cleaned; the lifting structure 8 comprises an L-shaped left expansion plate 81, a bolt 82, a fixed shaft 83, a handle 84, a threaded hole 85 and an L-shaped right expansion plate 86, wherein the L-shaped left expansion plate 81 and the L-shaped right expansion plate 86 are arranged on the lifting structure 8, the lower end of the L-shaped left expansion plate 81 at the position of a connecting short plate and the lower end of the L-shaped right expansion plate 86 at the position of the connecting short plate are both provided with bolts 82, the left side of the lower end of the L-shaped left expansion plate 81 at the position of the connecting short plate and the right side of the lower end of the L-shaped right expansion plate 86 at the position of the connecting short plate are both provided with threaded holes 85 which are arranged corresponding to the bolts 82, the right upper end of the L-shaped left expansion plate 81 and the left upper end of the L-shaped right expansion plate 86 are both provided with fixed shafts 83, and the two fixed shafts 83 are connected through the handle 84; the rotating structure 9 comprises a motor 91, a rotating shaft 92, a rotating shaft 93 and a rotating protective shell 94, wherein the rotating protective shell 94 is arranged on the rotating structure 9, the motor 91 is arranged in the rotating protective shell 94, the output end of the motor 91 is fixedly connected with the rotating shaft 92, and the rotating shaft 93 is arranged at the upper end of the rotating shaft 92.

Claims

1. The UPS power supply for the semiconductor machine equipment is characterized in that: comprises a machine body (1), a shockproof structure (4), a cooling structure (5), a heat dissipation structure (6), a dustproof structure (7), a lifting structure (8) and a rotating structure (9); the inside of organism (1) is transversely fixed and is provided with connecting plate (15), the centre of connecting plate (15) is provided with ventilative board (13), the upper end of ventilative board (13) is provided with shock-proof structure (4), the upper end of shock-proof structure (4) is provided with shock-proof plate (14), be provided with revolution mechanic (9) in the middle of the upper end of shock-proof plate (14), the lower extreme of ventilative board (13), the inside bottom of organism (1) is provided with cooling structure (5), the top of organism (1) is provided with heat radiation structure (6), the left end upside and the right-hand member upside of organism (1) are provided with and carry and draw structure (8), the left end upside and the right-hand member upside of organism (1), the lower extreme of carrying and drawing structure (8) all are provided with dustproof construction (7).

2. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: the anti-vibration structure (4) comprises an upper circular plate (41), an anti-vibration telescopic rod (42), an anti-vibration spring (43) and a lower circular plate (44), wherein the anti-vibration telescopic rod (42) is arranged on the anti-vibration structure (4), the anti-vibration spring (43) is arranged on an outer lever arm of the anti-vibration telescopic rod (42), the upper end of the anti-vibration telescopic rod (42) is provided with the upper circular plate (41), and the lower end of the anti-vibration telescopic rod (42) is provided with the lower circular plate (44).

3. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: the cooling structure (5) comprises a water tank (51), a refrigerator (52), a water outlet pipe (53), a first electromagnetic valve (54), a water inlet pipe (55), a second electromagnetic valve (56), a water delivery pump (57) and a circulating condensing pipe (58), wherein the water tank (51) is arranged on the cooling structure (5), the refrigerator (52) is arranged at the front end of the water tank (51), the water inlet pipe (55) is arranged at the right front end of the water tank (51), and the second electromagnetic valve (56) is arranged on a pipe arm of the water inlet pipe (55).

4. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: the heat radiation structure (6) comprises an upper protective cover (61), a protective support plate (62), a fan (63), a support cross rod (64) and a lower protective cover (65), wherein the protective support plate (62) is arranged on the heat radiation structure (6), the upper end of the protective support plate (62) is provided with the upper protective cover (61), the upper end of the upper protective cover (61) penetrates through the upper end of the machine body (1), the support cross rod (64) is arranged at the position of an inner cavity of the protective support plate (62), the fan (63) is arranged at the lower end of the support cross rod (64), and the lower protective cover (65) is arranged at the lower end of the protective support plate (62).

5. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: dustproof construction (7) are including dustproof sliding closure (71), spout (72), buckle groove (73), ventilation board (74), buckle (75), go up dust guard (76) and vent (77), be provided with on dustproof construction (7) ventilation board (74), the upper and lower both ends of ventilation board (74) all are provided with buckle (75), vent (77) have all been seted up to left end upside and right-hand member upside of organism (1), the inboard one end of vent (77) runs through in the inboard one end of organism (1), buckle groove (73) corresponding to buckle (75) have all been seted up to the last port and the lower port of vent (77), spout (72) have all been seted up at the left and right both ends of vent (77), sliding connection has dustproof sliding closure (71) on spout (72), the upper end of spout (72) at both ends is provided with dust guard (76).

6. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: the lifting structure (8) comprises an L-shaped left expansion plate (81), bolts (82), fixed shafts (83), a handle (84), threaded holes (85) and an L-shaped right expansion plate (86), the L-shaped left expansion plate (81) and the L-shaped right expansion plate (86) are arranged on the lifting structure (8), the lower ends of the L-shaped left expansion plate (81) and the L-shaped right expansion plate (86) are respectively provided with the bolts (82), the left side of the lower end of the L-shaped left expansion plate (81) and the right side of the lower end of the L-shaped right expansion plate (86), which are respectively provided with the threaded holes (85) corresponding to the bolts (82), the right upper ends of the L-shaped left expansion plate (81) and the L-shaped right expansion plate (86) are respectively provided with the fixed shafts (83), and the two fixed shafts (83) are connected through the handle (84).

7. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: the rotary structure (9) comprises a motor (91), a rotary shaft (92), a rotary shaft (93) and a rotary protective shell (94), the rotary protective shell (94) is arranged on the rotary structure (9), the motor (91) is arranged in the rotary protective shell (94), the rotary shaft (92) is fixedly connected to the output end of the motor (91), and the rotary shaft (93) is arranged at the upper end of the rotary shaft (92).

8. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: the utility model discloses a solar energy collection device, including shock-proof plate (14), rotary structure (9), connecting plate (17) are all provided with at the upper end of shock-proof plate (14), left and right both ends of rotary structure (9), the upper end of two connecting plates (17) is provided with backup pad (18), the sunken position department of backup pad (18) is provided with rotor plate (19), the upper end of rotor plate (19) is provided with handle (20), the sunken position department of rotor plate (19) is provided with power source body (21), connecting plate recess (16) corresponding setting with ventilation board (13) are seted up on the upper end surface of connecting plate (15), the lower extreme of ventilation board (13) is provided with heat-conducting plate (22), circulating condenser pipe (58) on cooling structure (5) encircle around heat-conducting plate (22).

9. A UPS power source for semiconductor equipment as claimed in claim 1, wherein: the novel cabinet is characterized in that a cabinet door (2) is arranged on the front end surface of the machine body (1), a cabinet door handle (23) is arranged at the right front end of the cabinet door (2), the left end of the cabinet door (2) is connected with the left end of the machine body (1) through a hinge (24), a cabinet door buckle (3) is arranged at the inner side end of the cabinet door (2), a cabinet door buckle groove (10) corresponding to the cabinet door buckle (3) is formed in the middle of the right front end of the machine body (1), foot pads (11) are arranged on two sides of the lower end of the machine body (1), and anti-slip pads (12) are arranged at the lower ends of the foot pads (11).

10. A UPS power source for semiconductor equipment as claimed in claim 3, wherein: the lower extreme of water tank (51) is provided with outlet pipe (53), be provided with first solenoid valve (54) on the pipe arm of outlet pipe (53), the inside one end of the upper end of outlet pipe (53) and inlet tube (55) all runs through and extends to the inside of water tank (51), the right-hand member of water tank (51) is provided with water delivery pump (57), be connected through circulating condenser pipe (58) between water delivery pump (57) and water tank (51), the mouth of pipe of the left lower extreme of circulating condenser pipe (58) runs through and extends to the inside of water tank (51), the mouth of pipe of the right lower extreme of circulating condenser pipe (58) runs through and extends to the inside of water delivery pump (57).