CN220651974U - Automatic clean inserted sheet machine of silicon chip inserted sheet - Google Patents
Automatic clean inserted sheet machine of silicon chip inserted sheet Download PDFInfo
- Publication number
- CN220651974U CN220651974U CN202322108767.3U CN202322108767U CN220651974U CN 220651974 U CN220651974 U CN 220651974U CN 202322108767 U CN202322108767 U CN 202322108767U CN 220651974 U CN220651974 U CN 220651974U
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- China
- Prior art keywords
- tank
- rinsing
- machine
- cleaning
- drainage
- Prior art date
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 18
- 239000010703 silicon Substances 0.000 title claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 76
- 239000002351 wastewater Substances 0.000 claims abstract description 53
- 239000007788 liquid Substances 0.000 claims abstract description 52
- 238000004140 cleaning Methods 0.000 claims abstract description 43
- 230000000903 blocking effect Effects 0.000 claims description 20
- 238000001035 drying Methods 0.000 claims description 11
- 239000003814 drug Substances 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 8
- 230000037431 insertion Effects 0.000 claims description 8
- 238000009825 accumulation Methods 0.000 claims description 7
- 238000005406 washing Methods 0.000 claims description 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 9
- 244000005700 microbiome Species 0.000 abstract description 7
- 238000005507 spraying Methods 0.000 abstract description 7
- 230000002159 abnormal effect Effects 0.000 abstract description 6
- 238000009395 breeding Methods 0.000 abstract description 5
- 230000001488 breeding effect Effects 0.000 abstract description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to the technical field of inserting machines, in particular to an inserting machine capable of automatically cleaning silicon wafer inserting sheets, which comprises an inserting machine body and a cleaning machine arranged on one side of the inserting machine body, wherein a drainage conveying assembly is arranged in a waste water collecting tank; the drainage conveying assembly arranged in the wastewater collection tank can conduct layering on rinsing liquid, layered liquid rinsing liquid in the shape of bubbles on the upper layer after layering can be conveyed to the first inserting sheet groove and the second inserting sheet groove through the water outlet pipe, and cleaning can be conducted on the inside of the first inserting sheet groove and the inside of the second inserting sheet groove in the conveying process by means of the layered liquid rinsing liquid in the shape of bubbles, so that the problem that the main side spraying blockage causes abnormal inserting sheets due to microorganism breeding in the first inserting sheet groove and the second inserting sheet groove is effectively avoided.
Description
Technical Field
The utility model relates to the technical field of wafer inserting machines, in particular to a wafer inserting machine capable of automatically cleaning silicon wafer inserting pieces.
Background
Before cleaning, each silicon wafer needs to be inserted into a corresponding carrier, the process is to insert the silicon wafer into water, and as the silicon wafer is not cleaned and a large amount of microorganism cutting fluid and other residual silicon wafer surfaces exist in the process of inserting the silicon wafer, the inserting wafer groove body is dirty, the inserting machine sprays water flow with certain pressure through the main side of the inserting machine in the process of inserting the silicon wafer, the water flow sprays the side edge of the silicon wafer, so that the silicon wafer is blown up, the blown silicon wafer is conveyed to a flower basket to complete the inserting action, but sundries in the inserting wafer groove can cause blockage to affect the inserting wafer when entering the main side spraying through the water flow, and therefore, the cleanliness of the inserting wafer groove needs to be kept. The problem that exists among the following patents can appear in the inserted sheet in-process of current inserted sheet machine generally, see the patent of publication number CN215997853U and disclose an inserted sheet washs all-in-one waste water and waste heat recycling system, including the inserted sheet groove, preceding washtrough group, with inserted sheet groove intercommunication, back washtrough group, with preceding washtrough group intercommunication, the sewage station, be used for receiving waste water on connecting preceding washtrough group and the inserted sheet groove, and recycle system, through each component intercommunication between back washtrough group and inserted sheet groove, although this patent can collect the waste water that produces behind the cleaning equipment and use once more, nevertheless still have the problem of wasing incompletely, thereby influence the inserted sheet and handled, consequently, in long-term research and development test process: after the prior art of the inserting machine is cleaned, the inside of the inserting groove is still easy to cause the problem of main side spraying blockage and abnormal inserting caused by microorganism breeding.
Disclosure of Invention
Therefore, the utility model aims to provide an automatic cleaning silicon wafer inserting machine for solving the problem that the main side spraying is blocked and the inserting is abnormal due to the fact that microorganisms are still easy to breed in an inserting groove.
Based on the above object, the present utility model provides an insert machine for automatically cleaning silicon wafer inserts, comprising: the inserting machine comprises an inserting machine body and a cleaning machine arranged on one side of the inserting machine body, wherein a first inserting groove and a second inserting groove are formed in one side of the inserting machine body, and a first rinsing groove is formed in one side of the cleaning machine; further comprises: the waste water collecting tank is arranged between the inserting machine body and the cleaning machine, a water inlet pipe is fixedly inserted into the bottom of one side of the waste water collecting tank, one end of the water inlet pipe is fixedly connected with the first rinsing tank, a water outlet pipe is fixedly inserted into the other side of the waste water collecting tank close to the top of the waste water collecting tank, one end of the water outlet pipe is fixedly connected with the first inserting tank and the second inserting tank, and a drainage conveying assembly is arranged in the waste water collecting tank; the rinse liquid in the first rinsing tank flows into the wastewater collection tank through the water inlet pipe, the rinse liquid is layered through the drainage conveying component in the wastewater collection tank, and the rinse liquid in the upper layer after layering is conveyed into the first inserting sheet tank and the second inserting sheet tank through the water outlet pipe so as to clean the inside of the first inserting sheet tank and the second inserting sheet tank.
Preferably, the drainage delivery assembly comprises: the water blocking plate is fixedly arranged at the bottom end of one side of the interior of the wastewater collection tank, one end of the water inlet pipe penetrates into the wastewater collection tank and is arranged above the bottom end of the water blocking plate, the drainage plate is fixedly arranged at the top end of the water blocking plate, the ponding component is fixedly arranged at one end of the drainage plate, and the guide plate is fixedly arranged at one end of the ponding component.
Preferably, the water blocking plate is obliquely arranged in the wastewater collection tank, the flow guiding plates are horizontally arranged, the positions of the flow guiding plates are lower than those of the flow guiding plates, the layered rinsing liquid flows into the water accumulating part through the flow guiding plates, and the rinsing liquid overflowed into the water accumulating part flows into the water outlet pipe through the flow guiding plates.
Preferably, the wastewater collection tank comprises: the cover plate is detachably arranged above the wastewater collection tank, a feeding pipe is fixedly inserted into the middle of the cover plate near one end of the cover plate, and the bottom end of the feeding pipe penetrates through the cover plate and stretches into the water accumulation component.
Preferably, the top of the feeding pipe is in threaded sleeve joint with a plug cover.
Preferably, the cleaning machine on one side of the first rinsing tank is provided with an overflow tank, a first medicine rinsing tank, a second medicine rinsing tank and a third medicine rinsing tank, and the cleaning machine on the other side of the first rinsing tank is provided with a hydrogen peroxide solution cleaning tank, a second rinsing tank, a third rinsing tank, a fourth rinsing tank, a fifth rinsing tank, a slow-pulling drying tank, a first drying tank, a second drying tank and a blanking tablet discharging tank.
The utility model has the beneficial effects that: rinse liquid inside a first rinsing tank in the cleaning machine flows into a waste water collecting tank through a water inlet pipe to be stored, the rinse liquid in the waste water collecting tank is slowly accumulated, the rinse liquid can be layered through a drainage conveying assembly arranged in the waste water collecting tank, bubble-shaped layered liquid rinse liquid on an upper layer after layering can be conveyed into a first inserting sheet groove and a second inserting sheet groove through a water outlet pipe, cleaning can be carried out inside the first inserting sheet groove and the second inserting sheet groove through bubble-shaped layered liquid rinse liquid in the conveying process, and therefore the problem that the inserting sheets are abnormal due to primary side spraying blockage in the first inserting sheet groove and the second inserting sheet groove caused by microorganism breeding is effectively avoided.
Drawings
In order to more clearly illustrate the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only of the utility model and that other drawings can be obtained from them without inventive effort for a person skilled in the art.
FIG. 1 is a schematic top view of the present utility model;
FIG. 2 is a schematic diagram of the front view structure of the wastewater collection tank of the utility model;
FIG. 3 is a schematic diagram of a front view and semi-section structure of the wastewater collection tank.
Marked in the figure as: 1. a cleaning machine; 101. an overflow trough; 102. a first medicine washing tank; 103. a second medicine washing tank; 104. a third medicine washing tank; 105. a first rinse tank; 106. a hydrogen peroxide cleaning tank; 107. a second rinse tank; 108. a third rinse tank; 109. a fourth rinse tank; 110. a fifth rinse tank; 111. slow-pulling a drying control groove; 112. a first drying tank; 113. a second drying tank; 114. discharging and discharging a slice groove; 2. a tab machine body; 21. a first tab slot; 22. a second tab slot; 3. a wastewater collection tank; 31. a water inlet pipe; 32. a water outlet pipe; 4. a water blocking plate; 41. a drainage plate; 42. a water accumulation component; 43. a deflector; 5. a cover plate; 51. a feeding pipe; 52. and (5) plugging a cover.
Detailed Description
The present utility model will be further described in detail with reference to specific embodiments in order to make the objects, technical solutions and advantages of the present utility model more apparent.
As shown in fig. 1, 2 and 3, an wafer insertion machine for automatically cleaning wafer insertion sheets includes: the wafer inserting machine comprises an inserting machine body 2 and a cleaning machine 1 arranged on one side of the inserting machine body 2, wherein a first inserting slot 21 and a second inserting slot 22 are arranged on one side of the inserting machine body 2, an inserting position can be provided for a silicon wafer through the first inserting slot 21 and the second inserting slot 22, a first rinsing slot 105 is arranged on one side of the cleaning machine 1, rinsing liquid is filled in the first rinsing slot 105, the rinsing liquid is formed by mixing water and a rinsing agent, a layer of bubble-shaped layered liquid is suspended on the surface of the rinsing liquid after the rinsing liquid is conveyed in an oscillating mode, the layered liquid contains a liquefied rinsing agent, a water body is deposited below the layered liquid, an overflow slot 101, a first rinsing slot 102, a second rinsing slot 103 and a third rinsing slot 104 are arranged on the cleaning machine 1 on one side of the first rinsing slot 105, and a cleaning tank 1 on the other side of the first rinsing slot 105 is provided with a hydrogen peroxide solution 106, a second rinsing slot 107, a third rinsing slot 108, a fourth rinsing slot 109, a fifth rinsing slot 110, a slow control slot 111, a first rinsing slot 112, a drying slot 114 and a drying slot 114; further comprises: the waste water collecting tank 3 is arranged between the inserting machine body 2 and the cleaning machine 1, a water inlet pipe 31 is fixedly inserted into the bottom of one side of the waste water collecting tank 3 through bolts, one end of the water inlet pipe 31 is fixedly connected with the first rinsing tank 105 through bolts, a water outlet pipe 32 is fixedly inserted into the other side of the waste water collecting tank 3 close to the top through bolts, one end of the water outlet pipe 32 is fixedly connected with the first inserting sheet groove 21 and the second inserting sheet groove 22 through bolts, and a drainage conveying assembly is arranged inside the waste water collecting tank 3.
Wherein, the rinsing liquid in the first rinsing tank 105 in the cleaning machine 1 flows into the waste water collecting tank 3 through the water inlet pipe 31 for storage, the rinsing liquid in the waste water collecting tank 3 is slowly accumulated, the rinsing liquid can be layered through the drainage conveying component arranged in the waste water collecting tank 3, the layered bubble-shaped layered liquid rinsing liquid which is positioned on the upper layer after layering can be conveyed into the first inserting sheet groove 21 and the second inserting sheet groove 22 through the water outlet pipe 32, and cleaning can be carried out in the first inserting sheet groove 21 and the second inserting sheet groove 22 by means of the bubble-shaped layered liquid rinsing liquid in the conveying process, so that the problem of abnormal inserting sheets caused by main side spraying blocking due to microorganism breeding in the first inserting sheet groove 21 and the second inserting sheet groove 22 is effectively avoided.
Further, the drainage delivery assembly includes: the water blocking plate 4 is fixedly arranged at the bottom end of one side of the interior of the wastewater collection tank 3 through bolts, the water blocking plate 4 is made of stainless steel, the periphery of the water blocking plate 4 is fixedly connected to the interior of the wastewater collection tank 3 through bolts, one end of the water inlet pipe 31 penetrates into the wastewater collection tank 3 and is arranged above the bottom end of the water blocking plate 4, so that rinsing liquid entering into the wastewater collection tank 3 can be accumulated above the water blocking plate 4, the accumulated rinsing liquid is layered with the lower liquid due to the fact that the upper liquid is lighter and contains more cleaning agent, the lighter upper liquid can flow into the water accumulating part 42 preferentially from the water guiding plate 41, the top end of the water blocking plate 4 is fixedly provided with the water guiding plate 41 through bolts, one end of the water accumulating part 41 is fixedly provided with the water accumulating part 42 through bolts, the water accumulating part 42 is of a water accumulating groove structure of a U-shaped structure, and one end of the water accumulating part 42 is fixedly provided with the water guiding plate 43 through bolts; the water blocking plate 4 is obliquely arranged in the wastewater collection tank 3, the drainage plates 41 are horizontally arranged, the guide plates 43 are horizontally arranged, the position of each guide plate 43 is lower than that of each drainage plate 41, layered rinsing liquid flows into the corresponding water accumulating part 42 through the corresponding drainage plates 41, and rinsing liquid overflowed into the corresponding water accumulating part 42 flows into the corresponding water outlet pipe 32 through the corresponding guide plates 43.
After the rinse solution flowing into the wastewater collection tank 3 through the water inlet pipe 31 is accumulated through the water blocking plate 4, bubble-shaped layered liquid layered above the water blocking plate can enter the water accumulation component 42 through the drainage plate 41, and the content of the rinse agent in the rinse solution can be further improved through accumulation of the water accumulation component 42, so that the rinse solution discharged from the water outlet pipe 32 can perform cleaning effects on the first insert slot 21 and the second insert slot 22.
Further, the wastewater collection tank 3 includes: the cover plate 5 is detachably arranged above the wastewater collection tank 3, a feeding pipe 51 is fixedly inserted into one end, close to the middle, of the cover plate 5 through a bolt, and the bottom end of the feeding pipe 51 penetrates through the cover plate 5 and stretches into the water accumulation part 42; the top of the feeding pipe 51 is in threaded sleeve joint with a plug cover 52.
Wherein, can play dustproof protection's effect through the apron 5 that is equipped with on waste water collecting tank 3, further play anti-pollution effect, the material pipe 51 of throwing that is equipped with on apron 5 simultaneously can conveniently add the cleaner to the rinsing liquid, realizes further cleaning performance.
Working principle: when the device is used, the rinsing liquid in the first rinsing tank 105 in the cleaning machine 1 flows into the waste water collecting tank 3 through the water inlet pipe 31 for storage, the rinsing liquid in the waste water collecting tank 3 is slowly accumulated, the rinsing liquid can be layered through the drainage conveying component arranged in the waste water collecting tank 3, the layered bubble-shaped layered liquid rinsing liquid in the upper layer after layering can be conveyed into the first inserting sheet tank 21 and the second inserting sheet tank 22 through the water outlet pipe 32, and the cleaning can be carried out in the first inserting sheet tank 21 and the second inserting sheet tank 22 through the bubble-shaped layered liquid rinsing liquid in the conveying process, so that the abnormal inserting sheet caused by main side spraying blocking due to microorganism breeding in the first inserting sheet tank 21 and the second inserting sheet tank 22 is effectively avoided.
Claims (6)
1. An wafer insertion machine for automatically cleaning wafer insertion sheets, comprising: the automatic cleaning machine comprises an inserting machine body (2) and a cleaning machine (1) arranged on one side of the inserting machine body (2), wherein a first inserting groove (21) and a second inserting groove (22) are formed in one side of the inserting machine body (2), and a first rinsing groove (105) is formed in one side of the cleaning machine (1); characterized by further comprising:
the waste water collecting tank (3) is arranged between the inserting machine body (2) and the cleaning machine (1), a water inlet pipe (31) is fixedly inserted into the bottom of one side of the waste water collecting tank (3), one end of the water inlet pipe (31) is fixedly connected with the first rinsing tank (105), a water outlet pipe (32) is fixedly inserted into the other side of the waste water collecting tank (3) close to the top, one end of the water outlet pipe (32) is fixedly connected with the first inserting sheet tank (21) and the second inserting sheet tank (22), and a drainage conveying assembly is arranged inside the waste water collecting tank (3);
wherein, the inside rinsing liquid of first potcher (105) flows into waste water collecting tank (3) through inlet tube (31), carries out the layering with the rinsing liquid through drainage conveying component in waste water collecting tank (3), in the rinsing liquid transmission to first inserted sheet groove (21) and second inserted sheet groove (22) that are in the upper strata after layering through outlet pipe (32) to carry out the washing to first inserted sheet groove (21) and second inserted sheet groove (22) inside.
2. The wafer insertion machine for automatically cleaning wafer insertion according to claim 1, wherein the drainage and transport assembly comprises:
the water blocking plate (4) is fixedly arranged at the bottom end of one side of the interior of the wastewater collection tank (3), one end of the water inlet pipe (31) penetrates into the wastewater collection tank (3) and is arranged above the bottom end of the water blocking plate (4), the drainage plate (41) is fixedly arranged at the top end of the water blocking plate (4), the ponding component (42) is fixedly arranged at one end of the drainage plate (41), and the guide plate (43) is fixedly arranged at one end of the ponding component (42).
3. The automatic cleaning silicon wafer inserting machine according to claim 2, wherein the water blocking plate (4) is obliquely arranged in the waste water collecting tank (3), the drainage plates (41) are horizontally arranged, the drainage plates (43) are horizontally arranged, the position of the drainage plates (43) is lower than that of the drainage plates (41), layered rinsing liquid flows into the water accumulating part (42) through the drainage plates (41), and rinsing liquid overflowed into the water accumulating part (42) flows into the water outlet pipe (32) through the drainage plates (43).
4. The wafer insertion machine for automatically cleaning wafer insertion according to claim 2, wherein the waste water collection tank (3) comprises:
the cover plate (5) is detachably arranged above the wastewater collection tank (3), a feeding pipe (51) is fixedly inserted into the middle of the cover plate (5) close to one end of the cover plate, and the bottom end of the feeding pipe (51) penetrates through the cover plate (5) and stretches into the water accumulation part (42).
5. The wafer inserting machine capable of automatically cleaning silicon wafer inserting pieces according to claim 4, wherein a plug cover (52) is sleeved on the top of the feeding pipe (51) in a threaded manner.
6. The wafer inserting machine for automatically cleaning the wafer inserting sheets according to claim 1, wherein an overflow tank (101), a first medicine washing tank (102), a second medicine washing tank (103) and a third medicine washing tank (104) are arranged on a cleaning machine (1) on one side of the first rinsing tank (105), and a hydrogen peroxide cleaning tank (106), a second rinsing tank (107), a third rinsing tank (108), a fourth rinsing tank (109), a fifth rinsing tank (110), a slow-pulling drying tank (111), a first drying tank (112), a second drying tank (113) and a blanking discharging tank (114) are arranged on the cleaning machine (1) on the other side of the first rinsing tank (105).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322108767.3U CN220651974U (en) | 2023-08-07 | 2023-08-07 | Automatic clean inserted sheet machine of silicon chip inserted sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322108767.3U CN220651974U (en) | 2023-08-07 | 2023-08-07 | Automatic clean inserted sheet machine of silicon chip inserted sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220651974U true CN220651974U (en) | 2024-03-22 |
Family
ID=90285365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322108767.3U Active CN220651974U (en) | 2023-08-07 | 2023-08-07 | Automatic clean inserted sheet machine of silicon chip inserted sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220651974U (en) |
-
2023
- 2023-08-07 CN CN202322108767.3U patent/CN220651974U/en active Active
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