CN220650940U - Optical fiber mounting device and optical fiber spectrum measurement system - Google Patents
Optical fiber mounting device and optical fiber spectrum measurement system Download PDFInfo
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- CN220650940U CN220650940U CN202321464289.3U CN202321464289U CN220650940U CN 220650940 U CN220650940 U CN 220650940U CN 202321464289 U CN202321464289 U CN 202321464289U CN 220650940 U CN220650940 U CN 220650940U
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- optical fiber
- mounting
- fiber optic
- connector
- adapter plate
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 76
- 238000001228 spectrum Methods 0.000 title claims abstract description 13
- 238000005259 measurement Methods 0.000 title abstract description 10
- 239000000835 fiber Substances 0.000 claims description 53
- 238000004611 spectroscopical analysis Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000014759 maintenance of location Effects 0.000 claims 3
- 238000012544 monitoring process Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Abstract
The present disclosure provides an optical fiber mounting device and an optical fiber spectrum measurement system, the optical fiber mounting device comprising: the connecting cover is used for being connected with the window of the vacuum cavity and comprises a cover body and a connector mounting hole arranged on the main surface of the cover body; the optical fiber connector is arranged in the connector mounting hole and comprises an optical fiber mounting hole for accommodating an optical fiber.
Description
Technical Field
The disclosure relates to the technical field of spectrum measurement, in particular to an optical fiber installation device and an optical fiber spectrum measurement system.
Background
Spectral measurements are widely used in various fields, such as the vacuum field, in particular the ultra-high vacuum field. The plasma is often regarded as a fourth state of matter except solid, liquid and gas, and is an ionized gaseous matter composed of atoms with partial electrons being deprived and positive and negative particles generated after the atoms are ionized, and different emission characteristic spectral lines are generated by different gas ionization. During the production and experimental process, the purpose of monitoring the production or experimental process can be achieved by monitoring the emission line generated by the plasma.
In the conventional technology, the optical fiber for collecting the emission line is often temporarily fixed on the vacuum cavity according to the actual monitoring requirement, and the optical fiber fixed in the mode is unstable and is easy to shift, so that monitoring failure is caused. Meanwhile, because the fixed positions of the optical fibers cannot be kept completely consistent each time, the collected emission line data may have errors, and monitoring results cannot be accurately obtained, so that production or experiments are affected.
Disclosure of Invention
The present disclosure provides an optical fiber mounting apparatus, comprising: the connecting cover is used for being connected with the window of the vacuum cavity and comprises a cover body and a connector mounting hole arranged on the main surface of the cover body; the optical fiber connector is arranged in the connector mounting hole and comprises an optical fiber mounting hole for accommodating an optical fiber.
In some embodiments, the fiber mounting apparatus further comprises: the adapter plate is sleeved on the optical fiber connector and is used for being arranged in the connector mounting hole.
In some embodiments, the adapter plate includes internal threads disposed on an inner side and the fiber optic connector includes external threads disposed on an outer side, the internal threads of the adapter plate for engaging the external threads of the fiber optic connector to connect the adapter plate to the fiber optic connector.
In some embodiments, the adapter plate includes external threads disposed on the outside and the connector mounting bore includes internal threads disposed on the inside, the external threads of the adapter plate for engaging the internal threads of the connector mounting bore to connect the adapter plate with the connector mounting bore.
In some embodiments, the adapter mounting hole includes an inwardly extending step disposed on the inner side, and the adapter plate can be disposed on the step.
In some embodiments, the connection cover further comprises at least one limiting screw hole formed in the cover body, and the optical fiber mounting device further comprises at least one limiting bolt matched with the at least one limiting screw hole, wherein the limiting bolt is used for being matched with the at least one limiting screw hole so that the bolt cap is at least partially positioned at the joint of the cover body and the adapter plate and used for pressing and fixing the adapter plate.
In some embodiments, the cover body of the connection cover is cylindrical with one side open, the connection cover further comprises at least one mounting screw hole formed on the side surface of the cover body, and the optical fiber mounting device further comprises at least one mounting bolt matched with the at least one mounting screw hole for fixedly connecting the connection cover to the flange of the window of the vacuum cavity.
In some embodiments, the connection cap further includes at least one flange screw hole formed in a major surface of the cap body for receiving a flange bolt of a window of the vacuum chamber to enable the fiber optic connector to be fixedly mounted to the window of the vacuum chamber.
The present disclosure provides a fiber optic spectrometry system comprising: a vacuum chamber including a window; the optical fiber mounting device according to any one of the embodiments of the present disclosure, disposed on the window; and an optical fiber provided in an optical fiber joint of the optical fiber mounting device for collecting light in the vacuum chamber.
In some embodiments, the fiber optic spectrometry system further comprises: the plasma light source is arranged in the vacuum cavity; and the spectrum detection device is connected with the optical fiber and is used for processing the optical signals collected by the optical fiber.
Optical fiber mounting devices according to some embodiments of the present disclosure can provide beneficial technical effects. For example, the fiber mounting device of some embodiments of the present disclosure can address one or more of the following problems in the conventional art: the optical fiber is unstable in fixation and easy to shift, and the monitoring result is affected; the optical fiber is fixed at different positions each time, so that the accuracy of monitoring data is affected, and the technical effects of stable optical fiber, fixed optical fiber position, convenient replacement, simple structure and easy operation can be realized.
Fiber optic spectrometry systems according to some embodiments of the present disclosure can provide beneficial technical effects. For example, fiber optic spectrometry systems of some embodiments of the present disclosure can address one or more of the following problems in the conventional art: the error of the measured data is large, the measurement is inaccurate, and the technical effects of accurate measurement result and small error can be realized.
Drawings
In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is apparent that the drawings in the following description are only one embodiment of the present disclosure, and other drawings may be obtained according to these drawings without inventive effort to those of ordinary skill in the art.
FIG. 1 illustrates a schematic perspective view of a fiber optic mounting apparatus according to some embodiments of the present disclosure;
FIG. 2 illustrates a structural cross-sectional view of a fiber optic mounting apparatus according to some embodiments of the present disclosure;
fig. 3 illustrates a schematic perspective view of a connection cover according to some embodiments of the present disclosure;
fig. 4 illustrates a schematic diagram of a fiber optic spectrometry system according to some embodiments of the present disclosure.
In the above drawings, each reference numeral represents:
100. optical fiber mounting device
10. Connecting cover
11. Cover body
111a, 111b, 111c and 111d limit screw holes
112a, 112b mounting screw holes
113. Major surface
12. Joint mounting hole
13a, 13b, 13c, 13d, 13e, 13f flange screw holes
20. Optical fiber connector
21. Optical fiber mounting hole
30. Switching disc
40a, 40b, 40c, 40d limit bolt
50a, 50b, 50c, 50d mounting bolts
200. Vacuum chamber
201. Window
Detailed Description
Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. It will be apparent that the described embodiments are merely exemplary embodiments of the present disclosure and not all embodiments.
In the description of the present disclosure, it should be noted that the positional or positional relationship indicated by the terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present disclosure. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "coupled," and "coupled" are to be construed broadly, and may be either a fixed connection or a removable connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium; may be a communication between the interiors of the two elements. In the description of this disclosure, distal or distal refers to an end or side that is deep into a vacuum environment (e.g., a vacuum lumen), and proximal or proximal is an end or side opposite the distal or distal (e.g., an end or side distal from the vacuum lumen, or an end or side within the vacuum lumen proximal to a wall of the vacuum lumen, etc.). The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art as the case may be.
Fig. 1 illustrates a schematic perspective view of a fiber optic mounting apparatus 100 according to some embodiments of the present disclosure. Fig. 2 illustrates a structural cross-sectional view of a fiber optic mounting apparatus 100 according to some embodiments of the present disclosure.
As shown in fig. 1 and 2, the optical fiber mounting apparatus 100 may include a connection cover 10 and an optical fiber connector 20. The connection cap 10 can be used to connect with the window 201 of the vacuum chamber 200, and the connection cap 10 may include a cap body 11 and a joint mounting hole 12 provided on a main surface 113 of the cap body 11.
Fig. 3 illustrates a schematic perspective view of the connection cover 10 according to some embodiments of the present disclosure.
As shown in fig. 3, the lid 11 of the connection lid 10 has a cylindrical shape with one side opened, for example, in fig. 3, the lower portion of the lid 11 is opened, the upper portion of the lid 11 is semi-closed, and the main surface 113 of the lid 11 may be an upper surface.
As shown in fig. 1-3, the fiber optic connector 20 is configured to be disposed within the connector mounting bore 12, and the fiber optic connector 20 may include a fiber mounting bore 21, the fiber mounting bore 21 being configured to receive an optical fiber. The cover 11 can be fitted over the window 201 of the vacuum chamber 200 to fix the optical fiber (not shown) to the window 201 such that the position of the optical fiber on the window 201 is the same every time it is installed. For example, in the semiconductor industry, wafers are typically processed by plasma technology, wherein the process of processing the wafer can be tracked by monitoring the plasma spectrum. In some embodiments of the present disclosure, the accuracy of the monitoring data can be effectively ensured by fixing the optical fibers at the same emission line acquisition position by the connection cover 10.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the fiber mounting device 100 may further include a splice tray 30. The splice tray 30 is sleeved over the fiber optic splice 20 and can be adapted to be disposed within the splice mounting hole 12.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the adapter plate 30 may include internal threads (not shown) disposed on the inside, and the fiber optic connector 20 may include external threads (not shown) disposed on the outside, the internal threads of the adapter plate 30 being configured to engage with the external threads of the fiber optic connector 20 to couple the adapter plate 30 to the fiber optic connector 20. As shown in fig. 1 and 2, external threads of the fiber optic connector 20 may be provided at the distal end (lower end as shown in fig. 1 and 2) of the fiber optic connector 20. In some embodiments, the proximal end of the fiber optic connector 20 may have a dimension (e.g., diameter) that is greater than the dimension of the distal end (e.g., upper end as shown in fig. 1 and 2). The optical fiber connector 20 is fixed on the connecting cover 10 through the rotating disc 30 in a threaded manner, so that the optical fiber connector is convenient to install and detach and is simple to operate.
Those skilled in the art will appreciate that while the hub 30 and fiber optic connector 20 of the present disclosure are threaded, this is merely exemplary and that the hub 30 and fiber optic connector 20 may be other types of removable connections, such as a snap fit. Likewise, although the splice tray 30 and the fiber optic splice 20 are removably connected in the present disclosure, the splice tray 30 and the fiber optic splice 20 may be integrally formed.
As shown in fig. 1, 2 and 3, in some embodiments of the present disclosure, adapter plate 30 includes external threads (not shown) disposed on the outside and joint mounting bore 12 includes internal threads (not shown) disposed on the inside, the external threads of adapter plate 30 being configured to engage the internal threads of joint mounting bore 12 to couple adapter plate 30 to joint mounting bore 12.
Those skilled in the art will appreciate that while the adapter plate 30 is threadably coupled to the connector mounting hole 12 of the connector cover 10 in this disclosure, this is merely exemplary and that the adapter plate 30 and the connector mounting hole 12 may be other types of removable connections, such as a snap fit.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the joint mounting bore 12 may include an inwardly extending step 122 disposed inboard, and the adapter plate 10 can be disposed on the step 122.
As shown in fig. 1-3, in some embodiments of the present disclosure, the connection cover 10 may further include at least one limiting screw hole (e.g., a limiting screw hole 111a, a limiting screw hole 111b, a limiting screw hole 111c, a limiting screw hole 111 d) opened on the cover body 11. The fiber mounting device 100 may further include at least one spacing bolt (e.g., spacing bolt 40a, spacing bolt 40b, spacing bolt 40c, spacing bolt 40 d) mated with at least one spacing screw hole (e.g., spacing screw hole 111a, spacing screw hole 111b, spacing screw hole 111c, spacing screw hole 111 d). The limit bolts (e.g., limit bolts 40a, limit bolts 40b, limit bolts 40c, limit bolts 40 d) can be used to cooperate with at least one limit screw hole (e.g., limit screw hole 111a, limit screw hole 111b, limit screw hole 111c, limit screw hole 111 d) so that the bolt cap is at least partially located at the connection position of the cover 11 and the adapter plate 30, and can be used to compress and fix the adapter plate 30, thereby avoiding the reverse rotation of the adapter plate 30 when the optical fiber connector 20 is screwed, loosening between the adapter plate 30 and the connection cover 10, and causing optical fiber displacement.
As shown in fig. 1-3, in some embodiments of the present disclosure, the connection cover 10 may further include at least one mounting screw hole (e.g., mounting screw hole 112a, mounting screw hole 112b, others not shown) opened on a side surface of the cover body 11, and the optical fiber mounting device 100 may further include at least one mounting bolt (e.g., mounting bolt 50a, mounting bolt 50b, mounting bolt 50c, mounting bolt 50 d) mated with the at least one mounting screw hole (e.g., mounting screw hole 112a, mounting screw hole 112b, others not shown) capable of being used to fixedly connect the connection cover 10 to the flange of the window 201 of the vacuum chamber 200.
As shown in fig. 3, in some embodiments of the present disclosure, the connection cover 10 may further include at least one flange screw hole (e.g., flange screw hole 13a, flange screw hole 13b, flange screw hole 13c, flange screw hole 13d, flange screw hole 13e, flange screw hole 13 f) opened on the main surface of the cover body 11. Flange screw holes (e.g., flange screw hole 13a, flange screw hole 13b, flange screw hole 13c, flange screw hole 13d, flange screw hole 13e, flange screw hole 13 f) can be used to receive flange bolts of window 201 of vacuum chamber 200 so that optical fiber connector 20 can be fixedly mounted on window 201 of vacuum chamber 200.
Fig. 4 illustrates a schematic diagram of a fiber optic spectrometry system 1000 according to some embodiments of the present disclosure. The angle of the optical fiber spectrum measuring system 1000 is adjusted for clarity of illustration of the optical fiber mounting apparatus 100, and fig. 4 does not show the actual use of the optical fiber spectrum measuring system 1000.
As shown in fig. 4, the fiber optic spectrometry system 1000 can include a vacuum chamber 200, a fiber optic mounting device 100, and an optical fiber (not shown). The vacuum chamber 200 may include a viewing window 201. The optical fiber mounting apparatus 100 is disposed on the window 201, and an optical fiber (not shown) is disposed in the optical fiber connector 20 of the optical fiber mounting apparatus 100, which can be used to collect light within the vacuum chamber 200.
As shown in fig. 4, in some embodiments of the present disclosure, the fiber optic spectrometry system 1000 can further comprise a plasma light source (not shown) and a spectroscopic detection device (not shown). The plasma light source is arranged in the vacuum cavity 200, and the spectrum detection device is connected with the optical fiber and can be used for processing the optical signal collected by the optical fiber.
In some embodiments of the present disclosure, the plasma emission characteristic lines can be used to identify the elements present, and the intensities can be used to quantify the particle and electron density in real time. Quantitative reference data can be provided for process parameters by monitoring the plasma spectrum and determining key plasma parameters required in controlling the plasma-based process. The optical fiber spectrum measuring system 1000 can be suitable for process monitoring of processes such as film growth, surface treatment, etching, photoresist removal and the like under different scenes, and monitoring data are accurate.
Optical fiber mounting devices according to some embodiments of the present disclosure can provide beneficial technical effects. For example, the fiber mounting device of some embodiments of the present disclosure can address one or more of the following problems in the conventional art: the optical fiber is unstable in fixation and easy to shift, and the monitoring result is affected; the optical fiber is fixed at different positions each time, so that the accuracy of monitoring data is affected, and the technical effects of stable optical fiber, fixed optical fiber position, convenient replacement, simple structure and easy operation can be realized.
Fiber optic spectrometry systems according to some embodiments of the present disclosure can provide beneficial technical effects. For example, fiber optic spectrometry systems of some embodiments of the present disclosure can address one or more of the following problems in the conventional art: the error of the measured data is large, the measurement is inaccurate, and the technical effects of accurate measurement result and small error can be realized.
It should be noted that the foregoing is merely exemplary embodiments of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the present disclosure are intended to be included within the scope of the present disclosure.
Claims (10)
1. An optical fiber mounting apparatus, comprising:
the connecting cover is used for being connected with the window of the vacuum cavity and comprises a cover body and a joint mounting hole arranged on the main surface of the cover body;
the optical fiber connector is arranged in the connector mounting hole and comprises an optical fiber mounting hole for accommodating an optical fiber.
2. The fiber optic mounting device of claim 1, further comprising:
the adapter plate is sleeved on the optical fiber connector and is used for being arranged in the connector mounting hole.
3. The fiber optic mounting device of claim 2, wherein the adapter plate includes internal threads disposed on an inner side and the fiber optic connector includes external threads disposed on an outer side, the internal threads of the adapter plate for engaging the external threads of the fiber optic connector to connect the adapter plate with the fiber optic connector.
4. A fiber optic mounting device according to claim 3, wherein the adapter plate includes external threads disposed on an outer side and the splice mounting hole includes internal threads disposed on an inner side, the external threads of the adapter plate for engaging the internal threads of the splice mounting hole to connect the adapter plate to the splice mounting hole.
5. The fiber optic mounting device of claim 2, wherein the splice mounting hole includes an inwardly extending step disposed on an inner side, the adapter disk being disposable on the step.
6. The fiber optic mounting apparatus of claim 2, wherein the connection cap further comprises at least one retention screw opening in the cap body, the fiber optic mounting apparatus further comprising at least one retention bolt mated with the at least one retention screw,
the limit bolt is used for being matched with the at least one limit screw hole so that the bolt cap is at least partially positioned at the joint of the cover body and the switching disc and used for compressing and fixing the switching disc.
7. The optical fiber mounting apparatus according to claim 1, wherein the cover body of the connection cover has a cylindrical shape with one side opened, the connection cover further comprises at least one mounting screw hole opened on the side surface of the cover body, and the optical fiber mounting apparatus further comprises at least one mounting bolt fitted with the at least one mounting screw hole for fixedly connecting the connection cover to the flange of the window of the vacuum chamber.
8. The fiber optic mounting apparatus of claim 1, wherein the connection cap further comprises at least one flange screw opening in a major surface of the cap body for receiving a flange bolt of a window of the vacuum chamber to enable the fiber optic connector to be fixedly mounted to the window of the vacuum chamber.
9. A fiber optic spectrometry system, comprising:
a vacuum chamber including a window;
the fiber optic mounting apparatus of any of claims 1-8, disposed on the viewing window; and
and the optical fiber is arranged in an optical fiber connector of the optical fiber mounting device and is used for collecting light in the vacuum cavity.
10. The fiber optic spectrometry system of claim 9, further comprising:
the plasma light source is arranged in the vacuum cavity; and
and the spectrum detection device is connected with the optical fiber and is used for processing the optical signals collected by the optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321464289.3U CN220650940U (en) | 2023-06-09 | 2023-06-09 | Optical fiber mounting device and optical fiber spectrum measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321464289.3U CN220650940U (en) | 2023-06-09 | 2023-06-09 | Optical fiber mounting device and optical fiber spectrum measurement system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220650940U true CN220650940U (en) | 2024-03-22 |
Family
ID=90269951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321464289.3U Active CN220650940U (en) | 2023-06-09 | 2023-06-09 | Optical fiber mounting device and optical fiber spectrum measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220650940U (en) |
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2023
- 2023-06-09 CN CN202321464289.3U patent/CN220650940U/en active Active
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