CN220633322U - Solid-liquid separation device for photoresist production - Google Patents
Solid-liquid separation device for photoresist production Download PDFInfo
- Publication number
- CN220633322U CN220633322U CN202322115927.7U CN202322115927U CN220633322U CN 220633322 U CN220633322 U CN 220633322U CN 202322115927 U CN202322115927 U CN 202322115927U CN 220633322 U CN220633322 U CN 220633322U
- Authority
- CN
- China
- Prior art keywords
- solid
- liquid separation
- separation tank
- centrifugal filter
- filter cartridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 83
- 238000000926 separation method Methods 0.000 title claims abstract description 76
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 238000004140 cleaning Methods 0.000 claims abstract description 20
- 230000001360 synchronised effect Effects 0.000 claims abstract description 12
- 238000001914 filtration Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 35
- 238000007790 scraping Methods 0.000 claims description 26
- 230000005540 biological transmission Effects 0.000 claims description 16
- 238000007599 discharging Methods 0.000 claims description 10
- 239000013078 crystal Substances 0.000 abstract description 15
- 230000000694 effects Effects 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229940114081 cinnamate Drugs 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 150000002894 organic compounds Chemical group 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical compound [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Centrifugal Separators (AREA)
Abstract
The utility model discloses a solid-liquid separation device for photoresist production, which comprises a solid-liquid separation tank and a centrifugal filter cartridge movably arranged in the solid-liquid separation tank, wherein the upper end of the solid-liquid separation tank is connected with a throwing mechanism, a filtering mechanism is arranged in the centrifugal filter cartridge, and the throwing mechanism comprises a blanking pipeline, a conical feeding hopper, a group of synchronous cylinders, a mounting plate, a driving motor, a driving shaft, a plurality of auger blades and a throwing disc. The utility model has the beneficial effects that the precipitated esterified crystals are put into the conical charging hopper, the group of synchronous cylinders drive the conical charging hopper and the throwing disc to lift up and down, so that the crystals can be uniformly thrown out by a plurality of auger blades in cooperation with the throwing disc, solid-liquid separation can be carried out on the crystals by cooperation with rotation of the centrifugal filter cartridge, the scraper can automatically scrape the crystals adhered to the inner wall of the centrifugal filter cartridge, the solid-liquid separation effect is improved, and the centrifugal filter cartridge can be automatically cleaned by cooperation with the cleaning brush of the cleaning pipeline, so that the centrifugal filter cartridge is convenient to use.
Description
Technical Field
The utility model relates to the field of photoresist, in particular to a solid-liquid separation device for photoresist production.
Background
Photoresist is one of key materials for micro pattern processing in microelectronic technology, and especially the development of large-scale and ultra-large-scale integrated circuits in recent years has greatly promoted the research, development and application of photoresist. The printing industry is another important area of photoresist application. 1954. The last years, the successful polyvinyl alcohol cinnamate studied by Minsk et al was used in the printing industry and later in the electronics industry. Photoresist is an organic compound whose solubility in a developing solution changes after exposure to ultraviolet light. The photoresist used in the manufacture of silicon wafers is coated on the surface of the silicon wafer in a liquid state and then dried into a glue film.
In the preparation process of the photoresist, after the esterified substance in the washing crystallization kettle is crystallized and separated out, the esterified substance is placed into a centrifuge for solid-liquid separation. When the centrifugal separation equipment used at present performs solid-liquid separation on the separated crystals, the crystals are easy to adhere to the inner wall of the centrifugal roller, the centrifugal separation effect is affected, and the crystals are not easy to clean and take out.
The foregoing is not necessarily a prior art, and falls within the technical scope of the inventors.
Disclosure of Invention
The utility model provides a solid-liquid separation device for photoresist production, aiming at the defects, so as to solve the problem of solid-liquid separation of esterified crystals produced by photoresist production.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the solid-liquid separation device for photoresist production comprises a solid-liquid separation tank and a centrifugal filter cartridge movably arranged in the solid-liquid separation tank, wherein the upper end of the solid-liquid separation tank is connected with a throwing mechanism, and a filtering mechanism is arranged in the centrifugal filter cartridge;
the material throwing mechanism comprises a blanking pipeline, a conical material throwing hopper, a group of synchronous cylinders, a mounting plate, a driving motor, a driving shaft, a plurality of auger blades and a material throwing disc, wherein the blanking pipeline is movably inserted into the center of the upper surface of the solid-liquid separation tank, the conical material throwing hopper is mounted at the upper end of the blanking pipeline, the group of synchronous cylinders are mounted on the solid-liquid separation tank, the telescopic ends are respectively connected with the conical material throwing hopper, the mounting plate is mounted at the upper end of the conical material throwing hopper, the driving motor is mounted on the mounting plate, the rotating end is movably inserted into the mounting plate, the driving shaft is mounted at the rotating end of the driving motor, the auger blades are uniformly mounted on the driving shaft, and the material throwing disc is mounted at the bottom of the driving shaft.
Further, the filter mechanism comprises a rotating motor, a rotating shaft, a servo cylinder, a group of fixed sleeves, a sliding rack, a scraping shaft and a transmission gear, wherein the rotating motor is arranged at the left bottom of the solid-liquid separation tank, the rotating end is vertically downward, the rotating shaft is movably inserted into the center of the bottom of the solid-liquid separation tank, the upper end of the rotating shaft is connected with the centrifugal filter cylinder, the servo cylinder is horizontally arranged at the upper rear end of the solid-liquid separation tank, the group of fixed sleeves is arranged at the upper left side of the solid-liquid separation tank, the sliding rack is slidably inserted into the group of fixed sleeves, the right end of the sliding rack is connected with the telescopic end of the servo cylinder, the scraping shaft is movably inserted into the upper left side of the solid-liquid separation tank, and the transmission gear is arranged at the upper end of the scraping shaft and meshed with the sliding rack.
Further, the rotating motor is in transmission connection with the rotating shaft through a transmission belt, a scraping knife is arranged on one side of the scraping shaft, and a cleaning brush is arranged on the other side of the scraping shaft.
Furthermore, a cleaning pipeline is inserted on the right side of the upper end of the solid-liquid separation tank, and a plurality of cleaning heads are uniformly arranged on the cleaning pipeline.
Furthermore, a plurality of baffle plates are uniformly arranged on the upper surface of the throwing tray.
Further, a liquid outlet pipeline is inserted into the bottom of the right side of the solid-liquid separation tank, a discharging pipeline communicated with the centrifugal filter cartridge is inserted into the rotating shaft, and a discharging control valve is installed at the bottom of the discharging pipeline.
The utility model provides a solid-liquid separation device for photoresist production, which has the advantages that precipitated esterified crystals are thrown into a conical throwing hopper through a throwing mechanism connected to the upper end of a solid-liquid separation tank, a group of synchronous cylinders drive the conical throwing hopper and a throwing tray to reciprocate, so that a plurality of auger blades are matched with the throwing tray to uniformly throw out crystals, and are matched with a centrifugal filter cylinder to rotate, so that the crystals are subjected to solid-liquid separation, a scraping knife can automatically scrape down the crystals adhered to the inner wall of the centrifugal filter cylinder, the solid-liquid separation effect is improved, and a cleaning pipeline is matched with a cleaning brush to automatically clean the centrifugal filter cylinder, thereby being convenient to use.
Drawings
FIG. 1 is a schematic diagram of a solid-liquid separation device for photoresist production according to the present utility model.
Fig. 2 is a top view of the conical hopper according to the utility model.
Fig. 3 is a top view of the throwing tray of the present utility model.
Fig. 4 is a schematic view of the scraper shaft according to the present utility model.
Fig. 5 is a cross-sectional view of a centrifugal filter cartridge according to the present utility model.
In the figure: 1. a solid-liquid separation tank; 2. centrifuging the filter cartridge; 3. a blanking pipeline; 4. a conical charging hopper; 5. a synchronous cylinder; 6. a mounting plate; 7. a driving motor; 8. a drive shaft; 9. auger blades; 10. a material throwing disc; 11. a rotating electric machine; 12. a rotation shaft; 13. a servo cylinder; 14. a fixed sleeve; 15. sliding racks; 16. a scraping shaft; 17. a transmission gear; 18. a drive belt; 19. a scraping knife; 20. cleaning brushes; 21. cleaning the pipeline; 22. a cleaning head; 23. a striker plate; 24. a liquid outlet pipe; 25. a discharge pipe; 26. and a discharging control valve.
Detailed Description
The utility model is described in detail below with reference to the accompanying drawings, as shown in fig. 1-5: the solid-liquid separation device for photoresist production comprises a solid-liquid separation tank 1 and a centrifugal filter cartridge 2 movably arranged in the solid-liquid separation tank 1, wherein the upper end of the solid-liquid separation tank 1 is connected with a material throwing mechanism, and a filtering mechanism is arranged in the centrifugal filter cartridge 2; the material throwing mechanism comprises a blanking pipeline 3, a conical material throwing hopper 4, a group of synchronous cylinders 5, a mounting plate 6, a driving motor 7, a driving shaft 8, a plurality of auger blades 9 and a material throwing disc 10, wherein the blanking pipeline 3 is movably inserted into the center of the upper surface of the solid-liquid separation tank 1, the conical material throwing hopper 4 is arranged at the upper end of the blanking pipeline 3, the group of synchronous cylinders 5 are arranged on the solid-liquid separation tank 1, the telescopic ends are respectively connected with the conical material throwing hopper 4, the mounting plate 6 is arranged at the upper end of the conical material throwing hopper 4, the driving motor 7 is arranged on the mounting plate 6, the rotating end of the driving motor 7 is movably inserted into the mounting plate 6, the driving shaft 8 is arranged on the rotating end of the driving motor 7, the auger blades 9 are uniformly arranged on the driving shaft 8, and the material throwing disc 10 is arranged at the bottom of the driving shaft 8; the filtering mechanism comprises a rotating motor 11, a rotating shaft 12, a servo cylinder 13, a group of fixed sleeves 14, a sliding rack 15, a scraping shaft 16 and a transmission gear 17, wherein the rotating motor 11 is arranged at the bottom of the left side of the solid-liquid separation tank 1, the rotating end is vertically downward, the rotating shaft 12 is movably inserted in the center of the bottom of the solid-liquid separation tank 1, the upper end of the rotating shaft is connected with the centrifugal filter cylinder 2, the servo cylinder 13 is horizontally arranged at the upper rear end of the solid-liquid separation tank 1, the group of fixed sleeves 14 are arranged at the upper left side of the solid-liquid separation tank 1, the sliding rack 15 is slidably inserted in the group of fixed sleeves 14, the right end of the sliding rack 15 is connected with the telescopic end of the servo cylinder 13, the scraping shaft 16 is movably inserted at the upper left side of the solid-liquid separation tank 1, and the transmission gear 17 is arranged at the upper end of the scraping shaft 16 and meshed with the sliding rack 15; the rotary motor 11 is in transmission connection with the rotary shaft 12 through a transmission belt 18, one side of the scraping shaft 16 is provided with a scraping knife 19, and the other side is provided with a cleaning brush 20; a cleaning pipeline 21 is inserted on the right side of the upper end of the solid-liquid separation tank 1, and a plurality of cleaning heads 22 are uniformly arranged on the cleaning pipeline 21; a plurality of baffle plates 23 are uniformly arranged on the upper surface of the throwing disc 10; the bottom of the right side of the solid-liquid separation tank 1 is inserted with a liquid outlet pipeline 24, the rotary shaft 12 is inserted with a discharge pipeline 25 communicated with the centrifugal filter cartridge 2, and the bottom of the discharge pipeline 25 is provided with a discharge control valve 26.
The working principle of the embodiment is as follows: the electric equipment used by the device is controlled by an external controller, and when the device is used, a user firstly puts precipitated esterified crystals into the conical charging hopper 4;
when the material is thrown: the blanking pipeline 3 is movably inserted in the center of the upper surface of the solid-liquid separation tank 1, the conical feeding hopper 4 is arranged at the upper end of the blanking pipeline 3, the group of synchronous cylinders 5 are arranged on the solid-liquid separation tank 1, the telescopic ends are respectively connected with the conical feeding hopper 4, the mounting plate 6 is arranged at the upper end of the conical feeding hopper 4, the driving motor 7 is arranged on the mounting plate 6, the rotating ends are movably inserted in the mounting plate 6 through fastening bearings, the driving shaft 8 is arranged at the rotating ends of the driving motor 7, a plurality of auger blades 9 are uniformly arranged on the driving shaft 8, the material throwing disc 10 is arranged at the bottom of the driving shaft 8, one side of the material scraping shaft 16 is provided with a material scraping knife 19, the other side of the material scraping shaft 16 is provided with a cleaning brush 20, the upper surface of the material throwing disc 10 is uniformly provided with a plurality of baffle plates 23, the bottom of the right side of the solid-liquid separation tank 1 is inserted with a liquid outlet pipeline 24, as shown in fig. 1 and 2, the rotating shaft 12 is internally provided with a material discharging pipeline 25 communicated with the centrifugal filter cartridge 2, the bottom of the material discharging pipeline 25 is provided with a material discharging control valve 26, the group of synchronous cylinders 5 drive the conical feeding hopper 4 and the driving motor 10 to reciprocate, and the driving shaft 10, and simultaneously, a plurality of auger blades 9 are uniformly drive the auger blades 9 are uniformly arranged on the driving shaft 9, and the solid-liquid is uniformly separated, and evenly collide with the solid-liquid crystal is thrown on the inner wall of the solid-liquid separation drum 2;
when filtering, the method comprises the following steps: the rotating electrical machine 11 is installed at the left bottom of the solid-liquid separation tank 1, the rotating end is vertical downwards, the rotating shaft 12 is movably inserted into the center of the bottom of the solid-liquid separation tank 1 through a fastening bearing, the upper end of the rotating shaft is connected with the centrifugal filter cartridge 2, the servo cylinder 13 is horizontally installed at the upper rear end of the solid-liquid separation tank 1, a group of fixed sleeves 14 are installed at the left side of the solid-liquid separation tank 1, the sliding rack 15 is slidably inserted into a group of fixed sleeves 14, the right end of the sliding rack is connected with the telescopic end of the servo cylinder 13, the scraping shaft 16 is movably inserted into the left side of the solid-liquid separation tank 1 through a fastening bearing, the transmission gear 17 is installed at the upper end of the scraping shaft 16 and meshed with the sliding rack 15, the rotating electrical machine 11 is in transmission connection with the rotating shaft 12 through a transmission belt 18, as shown in fig. 4 and 5, the rotating electrical machine 11 drives the centrifugal filter cartridge 2 to rotate, the solid-liquid separation is carried out on the crystal, the scraping blade 19 can automatically scrape the inner wall of the centrifugal filter cartridge 2, the solid-liquid separation effect is improved, the mother liquid separated through a liquid discharge pipe 24, the solid crystal can be discharged through a discharge pipe 25, and the filter cartridge 2 can be automatically cleaned by sliding the sliding rack 15 when the inner wall of the centrifugal filter cartridge 2 is required to be automatically stretched and the inner wall of the centrifugal filter cartridge 2 is cleaned by the centrifugal filter cartridge 2 by the telescopic brush 20, the centrifugal brush 20, the filter drum is automatically cleaned by the rotation of the centrifugal brush 2, and the filter drum is required to be automatically cleaned, and the inner wall is automatically cleaned by the inner wall is required to be automatically cleaned by the rotary brush 20.
The above technical solution only represents the preferred technical solution of the present utility model, and some changes that may be made by those skilled in the art to some parts of the technical solution represent the principles of the present utility model, and the technical solution falls within the scope of the present utility model.
Claims (6)
1. The solid-liquid separation device for photoresist production comprises a solid-liquid separation tank (1) and a centrifugal filter cartridge (2) movably arranged in the solid-liquid separation tank (1), and is characterized in that the upper end of the solid-liquid separation tank (1) is connected with a material throwing mechanism, and a filtering mechanism is arranged in the centrifugal filter cartridge (2);
the material throwing mechanism comprises a blanking pipeline (3), a conical material throwing hopper (4), a group of synchronous cylinders (5), a mounting plate (6), a driving motor (7), a driving shaft (8), a plurality of auger blades (9) and a material throwing disc (10), wherein the blanking pipeline (3) is movably inserted into the center of the upper surface of the solid-liquid separation tank (1), the conical material throwing hopper (4) is mounted at the upper end of the blanking pipeline (3), the group of synchronous cylinders (5) are mounted on the solid-liquid separation tank (1), the telescopic ends are respectively connected with the conical material throwing hopper (4), the mounting plate (6) is mounted at the upper end of the conical material throwing hopper (4), the driving motor (7) is mounted on the mounting plate (6), the rotating end of the driving motor (7) is movably inserted into the mounting plate (6), the plurality of auger blades (9) are uniformly mounted on the driving shaft (8), and the material throwing disc (10) is mounted at the bottom of the driving shaft (8).
2. The photoresist production solid-liquid separation device according to claim 1, wherein the filtering mechanism comprises a rotating motor (11), a rotating shaft (12), a servo cylinder (13), a group of fixed sleeves (14), a sliding rack (15), a scraping shaft (16) and a transmission gear (17), the rotating motor (11) is installed at the left bottom of the solid-liquid separation tank (1), the rotating end is vertically downward, the rotating shaft (12) is movably inserted at the center of the bottom of the solid-liquid separation tank (1), the upper end of the rotating shaft is connected with the centrifugal filter cylinder (2), the servo cylinder (13) is horizontally installed at the upper rear end of the solid-liquid separation tank (1), the group of fixed sleeves (14) is installed at the upper left side of the solid-liquid separation tank (1), the sliding rack (15) is slidably inserted in the group of fixed sleeves (14), the right end of the sliding rack is connected with the telescopic end of the servo cylinder (13), the scraping shaft (16) is movably inserted at the upper left side of the solid-liquid separation tank (1), and the transmission gear (17) is installed at the upper end of the scraping shaft (16) and is meshed with the sliding rack (15).
3. A photoresist production solid-liquid separation device according to claim 2, characterized in that the rotating motor (11) is in transmission connection with the rotating shaft (12) through a transmission belt (18), a scraping knife (19) is arranged on one side of the scraping shaft (16), and a cleaning brush (20) is arranged on the other side of the scraping shaft.
4. The solid-liquid separation device for photoresist production according to claim 1, wherein a cleaning pipeline (21) is inserted on the right side of the upper end of the solid-liquid separation tank (1), and a plurality of cleaning heads (22) are uniformly arranged on the cleaning pipeline (21).
5. The solid-liquid separation device for photoresist production according to claim 1, wherein a plurality of baffle plates (23) are uniformly arranged on the upper surface of the material throwing disc (10).
6. A photoresist production solid-liquid separation device according to claim 2, characterized in that the bottom of the right side of the solid-liquid separation tank (1) is inserted with a liquid outlet pipeline (24), the rotating shaft (12) is inserted with a discharging pipeline (25) communicated with the centrifugal filter cartridge (2), and the bottom of the discharging pipeline (25) is provided with a discharging control valve (26).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322115927.7U CN220633322U (en) | 2023-08-08 | 2023-08-08 | Solid-liquid separation device for photoresist production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322115927.7U CN220633322U (en) | 2023-08-08 | 2023-08-08 | Solid-liquid separation device for photoresist production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220633322U true CN220633322U (en) | 2024-03-22 |
Family
ID=90285326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322115927.7U Active CN220633322U (en) | 2023-08-08 | 2023-08-08 | Solid-liquid separation device for photoresist production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220633322U (en) |
-
2023
- 2023-08-08 CN CN202322115927.7U patent/CN220633322U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210001622U (en) | high-efficiency shallow air-floating treatment equipment | |
| CN212383888U (en) | Novel centrifugal equipment | |
| CN203852877U (en) | Industrial sewage purification and sludge separation treatment device | |
| CN220633322U (en) | Solid-liquid separation device for photoresist production | |
| TWI374490B (en) | Re-circulation method and device of chemical solution in semiconductor or display manufacturing process | |
| CN116510926B (en) | High-efficiency self-cleaning bipolar separation horizontal spiral centrifuge | |
| CN111981609B (en) | Detection cleaning device of electric heating humidifier with air feeder | |
| CN117000140A (en) | Boiling granulation desiccator is used in medicine production | |
| CN216023458U (en) | Discharging and filtering device for thickening agent | |
| CN214714843U (en) | Mechanical automation medicinal material processing filter media equipment of adjustable filter speed | |
| CN217594874U (en) | Centrifuge convenient to wash | |
| CN218959219U (en) | Electronic component cleaning equipment | |
| CN219307972U (en) | Stearic acid crystallization device | |
| CN116651629A (en) | Horizontal centrifuge and material removing and scraping mechanism and implementation method thereof | |
| CN220531921U (en) | Crude anthracene extraction equipment convenient to wash | |
| CN217594873U (en) | Device for quickly separating and cleaning crystals | |
| CN220903804U (en) | Mixing arrangement is used in resin production | |
| CN117206092B (en) | Astaxanthin monomer extraction equipment | |
| CN117398760B (en) | Impurity separating device | |
| CN219922297U (en) | Be used for oryzanol to draw filter equipment | |
| CN219964624U (en) | Combined sludge processor convenient to maintain | |
| CN219849150U (en) | Colloid stirring device for LED screen production | |
| CN218784897U (en) | Ink recovery device | |
| CN220140112U (en) | Seed medicine mixing device for detoxified potato planting | |
| CN215235012U (en) | Circulating deironing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |