CN220629607U - Protection architecture of heater strip department of crossing a bridge - Google Patents
Protection architecture of heater strip department of crossing a bridge Download PDFInfo
- Publication number
- CN220629607U CN220629607U CN202322296110.4U CN202322296110U CN220629607U CN 220629607 U CN220629607 U CN 220629607U CN 202322296110 U CN202322296110 U CN 202322296110U CN 220629607 U CN220629607 U CN 220629607U
- Authority
- CN
- China
- Prior art keywords
- bridge
- protection
- bridge structure
- protection structure
- crossing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 27
- 238000004804 winding Methods 0.000 claims abstract description 11
- 239000007769 metal material Substances 0.000 claims abstract description 4
- 230000001681 protective effect Effects 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 230000004323 axial length Effects 0.000 claims description 4
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 3
- -1 iron-chromium-aluminum Chemical compound 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 5
- 238000007664 blowing Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Abstract
The utility model discloses a protection structure of a heating wire bridge, which comprises a plurality of sections of heating wires for heating and a bridge structure connected between the ends of the adjacent heating wires, wherein the bridge structure is sleeved with a protection structure made of conductive metal materials, and the protection structure is tightly attached to the bridge structure in a winding manner so as to increase the cross-sectional area of the bridge structure. The protection structure capable of increasing the overcurrent cross-sectional area is connected to the bridge structure, so that the effect of reducing the resistance of the bridge structure, reducing the heating value and reducing the risk of overheat burning of the bridge structure is achieved.
Description
Technical Field
The utility model relates to the technical field of heating wires in photovoltaic semiconductor manufacturing equipment, in particular to a protection structure for a gap bridge of a heating wire.
Background
Diffusion furnaces are used in diffusion, oxidation, annealing, alloying, sintering, and other processes in the industries of large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices, optical fibers, and the like. The main purpose of the diffusion process is to dope the semiconductor wafer at high temperature, i.e. to diffuse elemental phosphorus and boron into the wafer, thereby changing and controlling the type, concentration and distribution of impurities in the semiconductor so as to establish different electrical characteristic regions.
Wherein arrange the multistage heater strip in the diffusion furnace and carry out furnace body heating, connect through the bridge structure between two adjacent sections heater strips, general bridge structure is a resistance wire of connecting between both ends heater strip, and in the furnace body heating process, the bridge structure resistance that forms by single resistance wire is great, makes its calorific capacity very big, makes bridge structure appear the risk of overtemperature blowing easily.
Disclosure of Invention
In view of this, the present utility model aims to provide a protection structure for the bridge of the heating wire.
In order to solve the technical problems, the technical scheme of the utility model is as follows: the utility model provides a protection architecture of heater strip gap bridge department, includes the multistage is used for the heater strip that generates heat and connects the gap bridge structure between adjacent the heater strip tip gap bridge structure is last to be equipped with protection architecture, protection architecture is made by electrically conductive metal material, protection architecture hugs closely through winding mode gap bridge structure is outside, in order to increase gap bridge structure's overflow cross-sectional area.
Preferably, the two ends of the protection structure are provided with tightly wound parts, and the tightly wound parts are tightly wound with the thread pitch of the bridge structure.
Further, the middle part shaping of protection architecture has elastic part, the pitch that elastic part and gap bridge structure twined is loose.
Preferably, the axial length of the protective structure is the same as the length of the bridge structure.
Preferably, the protective structure is made of pure nickel, or nickel-chromium, or iron-chromium-aluminum.
The technical effects of the utility model are mainly as follows: through be connected with the protection architecture of multiplicable cross-sectional area on the bridge structure, reach the resistance that reduces the bridge structure, reduce calorific capacity, reduce the bridge structure and appear the effect of the risk of overtemperature blowing.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a schematic end view of the whole body of the present utility model;
FIG. 3 is an enlarged schematic view of the portion of FIG. 1A according to the present utility model.
1-heating wires; 2-a bridge structure; 3-a protective structure; 31-tight wound part; 32-elastic part.
Detailed Description
The following detailed description of the utility model is provided in connection with the accompanying drawings to facilitate understanding and grasping of the technical scheme of the utility model.
Examples
According to the protection structure at the gap bridge of the heating wires shown in fig. 1-3, the protection structure comprises a plurality of sections of heating wires 1 for heating and a gap bridge structure 2 connected between the ends of the adjacent heating wires 1, wherein the sections of the heating wires 1 of the integrated heating device can be connected in series, and at least two sections of adjacent heating wires 1 of the sectional heating device can be connected in series; generally, two adjacent sections of the heating wires 1 are connected through a bridge structure 2, the bridge structure 2 is a strip-shaped wire segment with a section of wire diameter similar to that of the heating wires 1, and the material of the bridge structure 2 is the same as that of the heating wires 1, so that the bridge structure 2 is fragile, the resistance of the bridge structure 2 is large, and over-temperature is easy to occur, so that over-temperature burning of the bridge structure 2 is caused.
In order to reduce the risk of generating excessive temperature and blowing out at the bridge passing structure 2, the bridge passing structure 2 is sleeved with a protection structure 3, the protection structure 3 is made of a conductive metal material, and can be made of pure nickel, nickel chromium, iron chromium aluminum or other materials, the protection structure 3 is clung to the outside of the bridge passing structure 2 in a winding manner, the effect of being connected with the bridge passing structure 2 in parallel is achieved, the excessive current cross-sectional area of the bridge passing structure 2 is increased, the resistance of the bridge passing structure 2 is reduced, the heating value of the bridge passing structure 2 is reduced, and finally the excessive temperature and blowing out risk of the bridge passing structure 2 is reduced.
Generally, the wire diameter of the protection structure 3 is smaller than that of the bridge structure 2, so that the processing and the manufacturing are convenient.
When the protective structure 3 is connected with the bridge crossing result in a winding way, the thread pitch of the protective structure 3 winding the bridge crossing structure 2 can be tight; the tight winding parts 31 may be formed at two ends of the protection structure 3, the tight winding parts 31 are tightly wound with the thread pitch of the bridge passing structure 2, the elastic parts 32 are formed in the middle of the protection structure 3, the thread pitch of the elastic parts 32 wound with the bridge passing structure 2 is loose, the tight winding parts 31 can be tightly connected with the bridge passing structure 2, and the elastic parts 32 can increase the structural toughness of the bridge passing structure 2.
The axial length of the protection structure 3 may be the same as the length of the bridge structure 2, or may be shorter than the length of the bridge structure 2, and the longer the axial length of the protection structure 3, the better the effect of increasing the cross-sectional area of the flow is achieved.
Claims (5)
1. The utility model provides a protection architecture of heater strip department of crossing a bridge, includes the multistage is used for the heater strip that generates heat and connects at adjacent the bridge structure that crosses between the heater strip tip, its characterized in that: the bridge structure is sleeved with a protection structure, the protection structure is made of conductive metal materials, and the protection structure is clung to the outside of the bridge structure in a winding mode so as to increase the overcurrent cross-sectional area of the bridge structure.
2. A protection structure for a bridge crossing of heating wires as claimed in claim 1, wherein: the two ends of the protection structure are provided with dense winding parts, and the dense winding parts are tightly wound with the thread pitch of the bridge structure.
3. A protection structure for a bridge crossing of heating wires as claimed in claim 2, wherein: the middle part shaping of protection architecture has elastic part, the pitch of elastic part and the twining of gap bridge structure is loose.
4. A protection structure for a bridge crossing of heating wires as claimed in claim 1, wherein: the axial length of the protection structure is the same as the length of the gap bridge structure.
5. The protective structure at a bridge of heating wires according to any one of claims 1-4, characterized in that: the protective structure is made of pure nickel, nickel-chromium, or iron-chromium-aluminum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322296110.4U CN220629607U (en) | 2023-08-25 | 2023-08-25 | Protection architecture of heater strip department of crossing a bridge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322296110.4U CN220629607U (en) | 2023-08-25 | 2023-08-25 | Protection architecture of heater strip department of crossing a bridge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220629607U true CN220629607U (en) | 2024-03-19 |
Family
ID=90232910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322296110.4U Active CN220629607U (en) | 2023-08-25 | 2023-08-25 | Protection architecture of heater strip department of crossing a bridge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220629607U (en) |
-
2023
- 2023-08-25 CN CN202322296110.4U patent/CN220629607U/en active Active
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