CN220628480U - Frequency multiplication conversion device and ultraviolet femtosecond laser - Google Patents

Frequency multiplication conversion device and ultraviolet femtosecond laser Download PDF

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CN220628480U
CN220628480U CN202321976376.7U CN202321976376U CN220628480U CN 220628480 U CN220628480 U CN 220628480U CN 202321976376 U CN202321976376 U CN 202321976376U CN 220628480 U CN220628480 U CN 220628480U
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frequency
light
frequency doubling
crystal
fundamental
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罗近雅
周宇超
裴冠森
张亚男
梁达科
王海
陶孝收
孙玉芬
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Hymson Laser Technology Group Co Ltd
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Hymson Laser Technology Group Co Ltd
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Abstract

The utility model discloses a frequency multiplication conversion device and an ultraviolet femtosecond laser, wherein the frequency multiplication conversion device comprises an adjusting unit, a frequency multiplication unit and a beam splitting unit; the adjusting unit is used for adjusting the light spot size of the fundamental frequency light; the frequency doubling unit is coupled with the adjusting unit, the frequency doubling unit sequentially comprises a frequency doubling crystal, a compensating piece and a frequency tripling crystal along the light path propagation direction, the frequency doubling crystal is used for converting fundamental frequency light into frequency doubling light, the compensating piece is used for reducing group velocity difference generated in the frequency doubling crystal between the fundamental frequency light and the frequency doubling light, and the frequency tripling crystal is used for converting the frequency doubling light into frequency tripling light; the beam splitting unit is coupled with the frequency doubling unit and is used for splitting lasers with different wave bands after passing through the frequency doubling unit; the frequency doubling conversion device has high frequency doubling conversion efficiency and simple structure.

Description

Frequency multiplication conversion device and ultraviolet femtosecond laser
Technical Field
The utility model relates to the technical field of ultrafast lasers, in particular to a frequency doubling conversion device and an ultraviolet femtosecond laser.
Background
The femtosecond laser has the characteristics of high reliability, excellent beam quality, ultra-high peak power and the like, and can realize cold processing of materials; while a short uv wavelength allows for smaller focused spots and longer process depths and is suitable for use in a wider variety of material processes. The ultraviolet femtosecond laser combines the advantages of the ultraviolet femtosecond laser and the ultraviolet femtosecond laser, and is gradually favored by the industrial market, but the three-time frequency conversion efficiency of the ultraviolet femtosecond laser is lower and the converted light path is more complex at present.
Disclosure of Invention
The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides a frequency doubling conversion device which has higher frequency doubling conversion efficiency and simple structure.
The utility model also provides an ultraviolet femtosecond laser with the frequency doubling conversion device.
According to an embodiment of the first aspect of the present utility model, a frequency doubling conversion apparatus includes:
the adjusting unit is used for adjusting the light spot size of the fundamental frequency light;
the frequency doubling unit is coupled with the adjusting unit and sequentially comprises a frequency doubling crystal, a compensation sheet and a frequency tripling crystal along the light path propagation direction, the frequency doubling crystal is used for converting the fundamental frequency light into frequency doubling light, the compensation sheet is used for reducing the group velocity difference generated by the fundamental frequency light and the frequency doubling light in the frequency doubling crystal, and the frequency tripling crystal is used for converting the frequency doubling light into frequency tripling light;
and the beam splitting unit is coupled with the frequency doubling unit and is used for separating lasers with different wave bands.
The frequency doubling conversion device provided by the embodiment of the utility model has at least the following beneficial effects: the adjusting unit is used for controlling the frequency doubling conversion efficiency of frequency doubling by adjusting the light spot size of the fundamental frequency light; after the frequency doubling light is generated by the frequency doubling crystal, the fundamental frequency light and the frequency doubling light pass through the compensation sheet, the group velocity difference generated by the fundamental frequency light and the frequency doubling light in the frequency doubling crystal can be reduced by the compensation sheet, the time domain pulse coincidence ratio of the fundamental frequency light and the frequency doubling light is improved, and the frequency doubling light and the fundamental frequency light after compensation pass through the frequency doubling crystal, so that the frequency doubling conversion efficiency is improved; the frequency doubling conversion device provided by the embodiment of the utility model has a simple structure and high frequency doubling conversion efficiency.
According to some embodiments of the utility model, the frequency doubling crystal is provided with a first incidence plane, the compensation plate is provided with a second incidence plane, the frequency doubling crystal is provided with a third incidence plane, and the first incidence plane, the second incidence plane and the third incidence plane are parallel to each other.
According to some embodiments of the utility model, the beam splitting unit is provided with a fourth incident surface, and the third incident surface forms an angle of 45 degrees with the fourth incident surface.
According to some embodiments of the utility model, the adjusting unit comprises a convex lens and a concave lens, and the convex lens and the concave lens are matched to adjust the spot size of the fundamental frequency light.
According to some embodiments of the utility model, the frequency doubling crystal is a lithium triborate crystal (LBO) or a low-temperature phase barium metaborate crystal (β -BBO), the first incident surface is coated with a fundamental light antireflection film, and the frequency doubling crystal is provided with a first exit surface, and the first exit surface is coated with a fundamental light antireflection film and a frequency doubling light antireflection film.
According to some embodiments of the utility model, the frequency tripling crystal is LBO or β -BBO, the third incident surface is coated with a fundamental light antireflection film and a frequency doubling light antireflection film, and the frequency tripling crystal is provided with a third exit surface, and the third exit surface is coated with a fundamental light antireflection film, a frequency doubling light antireflection film and a frequency tripling light antireflection film.
According to some embodiments of the utility model, the compensator is high temperature phase barium metaborate crystals (α -BBO).
According to some embodiments of the utility model, the beam splitting unit is a harmonic separator, a triple prism or a petri brinella prism.
An ultraviolet femtosecond laser according to an embodiment of the second aspect of the utility model includes a frequency doubling conversion apparatus as an embodiment of the first aspect of the utility model.
The ultraviolet femtosecond laser provided by the embodiment of the utility model has at least the following beneficial effects: the ultraviolet femtosecond laser comprises a frequency doubling conversion device of the embodiment of the first aspect of the utility model; an adjusting unit in the frequency doubling conversion device adjusts the light spot size of the fundamental frequency light, so as to control the frequency doubling conversion efficiency of frequency doubling; after the frequency doubling light is generated by the frequency doubling crystal, the fundamental frequency light and the frequency doubling light pass through the compensation sheet, the group velocity difference generated by the fundamental frequency light and the frequency doubling light in the frequency doubling crystal can be reduced by the compensation sheet, the time domain pulse coincidence ratio of the fundamental frequency light and the frequency doubling light is improved, and the frequency doubling light and the fundamental frequency light after compensation pass through the frequency doubling crystal, so that the frequency doubling conversion efficiency is improved; the high efficiency frequency tripled conversion enables the ultraviolet femtosecond laser to output high power femtosecond ultraviolet light.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
fig. 1 is a schematic structural diagram of a frequency doubling conversion device according to an embodiment of the first aspect of the present utility model;
fig. 2 is a schematic diagram of another configuration of a frequency doubling conversion apparatus according to an embodiment of the first aspect of the present utility model;
FIG. 3 is a diagram of a frequency doubling crystal according to the present utility model;
fig. 4 is a schematic view of an ultraviolet femtosecond laser according to an embodiment of the second aspect of the present utility model.
Reference numerals:
a frequency doubling conversion device 100; an adjusting unit 110; a frequency multiplication unit 120; a frequency doubling crystal 121; a compensation plate 122; a frequency-tripled crystal 123; a wave plate 124; a beam splitting unit 130; a femtosecond pulsed seed source 200; a pulse stretcher 300; a pulse selector 400; a pulse amplifier 500; pulse compressor 600.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
In the description of the present utility model, a number means one or more, a number means two or more, and greater than, less than, exceeding, etc. are understood to not include the present number, and above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
Referring to fig. 1, a frequency doubling conversion apparatus 100 according to an embodiment of the first aspect of the present utility model is provided with an adjusting unit 110, a frequency doubling unit 120, and a beam splitting unit 130 in order along an optical path direction. The adjusting unit 110 is used for adjusting the spot size of the fundamental frequency light; the frequency doubling unit 120 is coupled to the adjusting unit 110, and the frequency doubling unit 120 includes a frequency doubling crystal 121, a compensating plate 122, and a frequency tripling crystal 123, where the frequency doubling crystal 121 is used for converting the fundamental frequency light into the frequency doubling light, the compensating plate 122 is used for reducing the group velocity difference generated by the fundamental frequency light and the frequency doubling light in the frequency doubling crystal 121, and the frequency tripling crystal 123 is used for converting the frequency doubling light into the frequency tripling light; the beam splitting unit 130 is coupled to the frequency doubling unit 120, and is configured to split the laser beams with different wavebands after frequency doubling by the frequency doubling unit 120.
For example, the fundamental frequency light enters the adjusting unit 110 for adjustment, the energy of the adjusted fundamental frequency light is more concentrated, the adjusted fundamental frequency light enters the frequency doubling unit 120 for frequency doubling treatment, most of the fundamental frequency light is converted into frequency doubling light and frequency tripling light, and the frequency doubling unit 120 comprises the compensating plate 122, so that the time domain pulse coincidence ratio of the fundamental frequency light and the frequency doubling light is improved, and the frequency tripling conversion efficiency is further improved; the fundamental frequency light, the frequency doubling light, and the frequency tripler light are separated in the beam splitting unit 130, and the frequency tripler light is output after the separation.
It should be noted that, in order to increase the frequency multiplication efficiency, that is, to increase the power density at the nonlinear crystal, a telescope system is generally used to reduce the incident beam to a reasonable size. The telescope system, i.e. the adjusting unit 110, comprises in this embodiment a convex lens and a concave lens. Reducing the size of the light spot by one time, wherein the focal length f1 of the convex lens and the focal length f2 of the concave lens can be selected from a lens combination with f1=2×f2 focal length, and the lens distance d=f1-f 2; for example: f1 A combination of a convex lens of 80mm and a concave lens of f2=40 mm, the lens distance being 80-40=40 mm.
It can be understood that the adjusting unit 110 adjusts the spot size of the fundamental frequency light, so as to control the frequency doubling conversion efficiency of the frequency doubling; after the frequency doubling crystal 121 generates frequency doubling light, the fundamental frequency light and the frequency doubling light pass through the compensation sheet 122, the compensation sheet 122 can reduce the group velocity difference generated by the fundamental frequency light and the frequency doubling light in the frequency doubling crystal 121, so that the time domain pulse coincidence ratio of the fundamental frequency light and the frequency doubling light is improved, and the frequency doubling light and the fundamental frequency light after compensation pass through the frequency doubling crystal 123 again, thereby being beneficial to improving the frequency doubling conversion efficiency; the frequency doubling conversion device 100 of the embodiment of the utility model has high frequency doubling conversion efficiency and simple structure.
In some embodiments of the present utility model, the frequency doubling crystal 121 is LBO or β -BBO, the frequency tripling crystal 123 is LBO or β -BBO, the frequency doubling crystal 121 is provided with a first entrance face and a first exit face, the compensation plate 122 is provided with a second entrance face, and the frequency tripling crystal 123 is provided with a third entrance face and a third exit face; the first incidence surface, the second incidence surface and the third incidence surface are parallel to each other; it can be understood that, since the first incident surface, the second incident surface and the third incident surface are parallel to each other, that is, the included angle between the polarization direction of the fundamental frequency light and the optical axis of the frequency doubling crystal 121 is 90 °, the included angle between the polarization direction of the frequency doubling light and the optical axis of the compensation plate 122 is 90 °, and the included angle between the polarization direction of the frequency doubling light and the optical axis of the frequency doubling crystal 123 is 90 °, the power loss of light in the frequency doubling conversion device 100 of the present utility model is smaller, which is beneficial to improving the frequency doubling efficiency. In order to further reduce the power loss in the light transmission process and improve the frequency doubling efficiency, a fundamental frequency light antireflection film is plated on the first incident surface, and a fundamental frequency light antireflection film and a frequency doubling light antireflection film are plated on the first emergent surface; the third incident surface is coated with a fundamental frequency light antireflection film and a frequency doubling light antireflection film, and the third emergent surface is coated with a fundamental frequency light antireflection film, a frequency doubling light antireflection film and a frequency tripling light antireflection film.
In some embodiments of the present utility model, referring to fig. 1 to 3, the compensation sheet 122 is an α -BBO crystal, which is an excellent birefringent crystal material, is a negative uniaxial crystal, has a very large birefringence coefficient, and has a good transmittance for both ultraviolet 189nm and mid-infrared 3500 nm; the alpha-BBO crystal has good internal quality, small absorption, good mechanical property and high damage threshold; the alpha-BBO crystal is of a centrosymmetric crystal structure, and the alpha-BBO crystal does not have nonlinear optical characteristics, so that the alpha-BBO crystal cannot be used as a nonlinear crystal, but the positions of fundamental frequency light and double frequency light can be interchanged; the propagation speed of the fundamental frequency light in the beta-BBO is higher than that of the double frequency light in the beta-BBO, and the propagation speed of the fundamental frequency light in the alpha-BBO crystal is lower than that of the double frequency light in the alpha-BBO crystal, so that the group velocity difference generated by the fundamental frequency light and the double frequency light in the beta-BBO can be reduced by the alpha-BBO crystal, the time domain pulse coincidence ratio of the fundamental frequency light and the double frequency light is improved, and the compensated double frequency light and the fundamental frequency light pass through the triple frequency crystal 123 again, thereby being beneficial to improving the triple frequency conversion efficiency.
In some embodiments of the present utility model, beam splitting unit 130 is a harmonic separator, a triple prism, or a petri-brin prism; in the frequency doubling device 100 of the present utility model, the separation is performed by using an ultraviolet laser, and the material is selected from materials with high damage threshold, such as ultraviolet fused silica.
Specifically, femtosecond laser with a central wavelength of 1030nm is used as a fundamental frequency light source, and in order to improve nonlinear frequency conversion efficiency, light spots are reduced through a convex lens and a concave lens, so that the power density of fundamental frequency light in nonlinear crystals is increased; when 1030nm fundamental frequency light enters into beta-BBO with the thickness of 1mm, 515nm frequency doubling light and 1030nm fundamental frequency light are generated by frequency doubling, and due to group velocity difference, time delay occurs after the femtosecond pulse with double wavelengths passes through the beta-BBO, so that 1mm thickness birefringent crystal alpha-BBO is added to compensate the group velocity difference; the 515nm frequency doubling light and 1030nm fundamental frequency light compensated by the alpha-BBO crystal enter the beta-BBO with the thickness of 1mm, 344nm frequency doubling light, 515nm frequency doubling light and 1030nm fundamental frequency light are generated by frequency doubling, and the 344nm frequency doubling light is separated after the femtosecond pulse with three wavelengths passes through the triple prism, so that the triple frequency conversion of laser is realized.
In some embodiments of the present utility model, referring to fig. 2, when the frequency tripled crystal 123 is an LBO or BBO crystal cut at a type of phase matching angle, since the nonlinear conversion coefficient is high, a wave plate 124 needs to be added before the frequency tripled crystal 123 to make the polarization directions of the fundamental frequency light and the frequency doubled light consistent, and it should be noted that the wave plate 124 must be a half wave plate for the frequency doubled light and a full wave plate crystal for the fundamental frequency light.
The embodiment of the present utility model also proposes an ultraviolet femtosecond laser, which sequentially includes a femtosecond pulse seed source 200, a pulse stretcher 300, a pulse selector 400, a pulse amplifier 500, a pulse compressor 600, and the frequency doubling conversion apparatus 100 of the above embodiment; the femtosecond pulse seed source 200 is used for generating a femtosecond pulse with certain power; the pulse stretcher 300 is coupled with the femtosecond pulse seed source 200 and is used for stretching the pulse width of the output pulse of the seed source; the pulse selector 400 is coupled to the pulse stretcher 300 for screening out the appropriate pulses; the pulse amplifier 500 is coupled to the pulse selector 400, and is used for amplifying the screened pulse; the pulse compressor 600 is coupled to the pulse amplifier 500, and is configured to compress the amplified pulse to obtain a femtosecond pulse; the frequency doubling device 100 is coupled to the pulse compressor 600 for frequency doubling converting the femtosecond pulses.
It will be appreciated that the ultraviolet femtosecond laser includes the frequency doubling conversion apparatus 100 of the embodiment of the first aspect of the present utility model; the adjusting unit 110 in the frequency doubling device 100 adjusts the light spot size of the fundamental frequency light, so as to control the frequency doubling conversion efficiency of frequency doubling; after the frequency doubling crystal 121 generates frequency doubling light, the fundamental frequency light and the frequency doubling light pass through the compensation sheet 122, the compensation sheet 122 can reduce the group velocity difference generated by the fundamental frequency light and the frequency doubling light in the frequency doubling crystal 121, so that the time domain pulse coincidence ratio of the fundamental frequency light and the frequency doubling light is improved, and the frequency doubling light and the fundamental frequency light after compensation pass through the frequency doubling crystal 123 again, thereby being beneficial to improving the frequency doubling conversion efficiency; the high efficiency frequency tripled conversion enables the ultraviolet femtosecond laser to output high power femtosecond ultraviolet light.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.

Claims (9)

1. A frequency doubling conversion apparatus, comprising:
the adjusting unit is used for adjusting the light spot size of the fundamental frequency light;
the frequency doubling unit is coupled with the adjusting unit and sequentially comprises a frequency doubling crystal, a compensation sheet and a frequency tripling crystal along the light path propagation direction, the frequency doubling crystal is used for converting the fundamental frequency light into frequency doubling light, the compensation sheet is used for reducing the group velocity difference generated by the fundamental frequency light and the frequency doubling light in the frequency doubling crystal, and the frequency tripling crystal is used for converting the frequency doubling light into frequency tripling light;
and the beam splitting unit is coupled with the frequency doubling unit and is used for separating lasers with different wave bands.
2. The frequency doubling conversion device according to claim 1, wherein the frequency doubling crystal is provided with a first incidence surface, the compensation plate is provided with a second incidence surface, the frequency doubling crystal is provided with a third incidence surface, and the first incidence surface, the second incidence surface and the third incidence surface are parallel to each other.
3. The frequency doubling conversion device according to claim 2, wherein the beam splitting unit is provided with a fourth entrance face, and the third entrance face forms an angle of 45 ° with the fourth entrance face.
4. The frequency doubling conversion apparatus according to claim 1, wherein the adjusting unit comprises a convex lens and a concave lens, and the convex lens and the concave lens are matched to adjust a spot size of the fundamental frequency light.
5. The frequency doubling conversion device according to claim 2, wherein the frequency doubling crystal comprises a lithium triborate crystal or a low-temperature phase barium metaborate crystal, the first incident surface is coated with a fundamental light antireflection film, the frequency doubling crystal is provided with a first emergent surface, and the first emergent surface is coated with a fundamental light antireflection film and a frequency doubling light antireflection film.
6. The frequency doubling conversion device according to claim 2, wherein the frequency tripling crystal comprises a lithium triborate crystal or a low-temperature phase barium metaborate crystal, the third incident surface is coated with a fundamental light antireflection film and a frequency doubling light antireflection film, the frequency tripling crystal is provided with a third exit surface, and the third exit surface is coated with a fundamental light antireflection film, a frequency doubling light antireflection film and a frequency tripling light antireflection film.
7. The frequency doubling conversion device according to claim 1, wherein the compensation sheet comprises high temperature phase barium metaborate crystals.
8. The frequency doubling conversion apparatus according to claim 1, wherein the beam splitting unit comprises a harmonic separator, a triple prism or a petri-brinella prism.
9. An ultraviolet femtosecond laser, comprising a frequency doubling conversion apparatus as claimed in any one of claims 1 to 8.
CN202321976376.7U 2023-07-24 2023-07-24 Frequency multiplication conversion device and ultraviolet femtosecond laser Active CN220628480U (en)

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CN220628480U true CN220628480U (en) 2024-03-19

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