CN220624632U - Industrial oven with cooling air duct - Google Patents
Industrial oven with cooling air duct Download PDFInfo
- Publication number
- CN220624632U CN220624632U CN202322304587.2U CN202322304587U CN220624632U CN 220624632 U CN220624632 U CN 220624632U CN 202322304587 U CN202322304587 U CN 202322304587U CN 220624632 U CN220624632 U CN 220624632U
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- plate
- cooling air
- oven
- air duct
- air
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- 238000001816 cooling Methods 0.000 title claims abstract description 59
- 239000000428 dust Substances 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 16
- 239000011148 porous material Substances 0.000 claims description 14
- 238000004891 communication Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 5
- 238000012423 maintenance Methods 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Electric Stoves And Ranges (AREA)
Abstract
The utility model discloses an industrial oven with a cooling air duct, which comprises a box body and a baking assembly, wherein the baking assembly is arranged in the box body, the baking assembly comprises an oven with a baking chamber and a return air structure with the cooling air duct, the cooling air duct is positioned outside the baking chamber and isolated from each other, a hot air circulation channel communicated with the baking chamber is further arranged in the oven, a circulating fan is arranged in the hot air circulation channel, one end of the cooling air duct is provided with a blower, and the other end of the cooling air duct is communicated with the outside atmosphere. According to the industrial oven, the cooling air duct is arranged at the outer side of the baking chamber, so that heat exchange is realized, heat can be timely carried out, the electronic components are prevented from being damaged due to high temperature, the maintenance cost is saved, and the economic benefit is improved.
Description
Technical Field
The utility model relates to the technical field of industrial ovens, in particular to an industrial oven with a cooling air duct.
Background
In the wafer production process, an industrial oven is required to be adopted to heat and bake the wafer so as to improve the comprehensive performance of the silicon wafer. In the working process of the industrial oven, heat in the baking chamber can be outwards emitted through the oven shell, and a circuit board arranged around the industrial oven and electronic components on the circuit board are easily damaged due to high temperature, so that the industrial oven needs to be stopped and checked by a user after being used for a period of time, the checking frequency of the user is increased, the workload is increased, the baking efficiency of the industrial oven is also reduced, and meanwhile, the circuit board and the electronic components on the circuit board are frequently damaged, the maintenance cost is also increased, so that the economic benefit is influenced.
Disclosure of Invention
The technical problems to be solved by the utility model are as follows: in the prior art, electronic components mounted on the side wall of an industrial oven are easily damaged by high temperature, and on the basis of the high temperature, it is necessary to provide an industrial oven with a cooling air duct so as to reduce the influence of heat on the electronic components.
The technical scheme adopted for solving the technical problems is as follows: the utility model provides an industry oven with cooling wind channel, includes the box and toasts the subassembly, it installs to toast the subassembly in the box, toast the subassembly including the oven that has the stoving room and have the return air structure in cooling wind channel, the cooling wind channel is located the outside in stoving room, and keep apart each other, still be provided with the hot air circulation passageway with the stoving room intercommunication in the oven, install circulating fan in the hot air circulation passageway, the air-blower is installed to the one end in cooling wind channel, the other end intercommunication outside atmosphere in cooling wind channel.
Further, the oven includes an outer case and an inner case, the inner case is disposed in the outer case, the baking chamber is formed in the inner case, and the hot air circulation passage is formed by a region space in the outer case other than the baking chamber.
Further, the shell body comprises a bottom plate, a top plate, a left side plate, a right side plate and a rear side plate, wherein the bottom plate and the top plate are oppositely arranged, the left side plate and the right side plate are oppositely arranged, the rear side plate is oppositely arranged, the inner shell body comprises two pore plates and a connecting plate connected between the two pore plates, the top of each pore plate is fixedly connected with the top plate, the bottom of each pore plate is fixedly connected with the bottom plate, and the baking chamber is formed by a cavity with an opening at the front side, which is formed by encircling the inner shell body, the top plate and the bottom plate.
Further, one of the pore plates is close to the left side plate and is parallel to the left side plate, the other pore plate is close to the right side plate and is parallel to the right side plate, the through holes on the pore plate form communication holes, and the hot air circulation channel is communicated with the baking chamber through the communication holes.
Further, the return air structure comprises an upper air plate fixedly connected with the top plate, a side air plate fixedly connected with the left side plate and a lower air plate fixedly connected with the bottom plate, a cavity formed between the upper air plate and the top plate, a cavity formed between the side air plate and the left side plate and a cavity formed between the lower air plate and the bottom plate are sequentially communicated, and the three cavities are communicated to form the cooling air channel together.
Further, the air blower is fixedly arranged at the top of the right side plate, an air outlet is connected to the lower air plate, and the tail end of the air outlet is fixedly connected with an air outlet pipe communicated with the outside atmosphere.
Further, the circulating fan comprises a motor and a fan volute, the motor is fixedly arranged on the rear side wall of the box body, the fan volute is fixedly arranged in the hot air circulating channel, a wind wheel is arranged in the fan volute, and the wind wheel is fixedly connected with an output shaft of the motor.
Further, the industrial oven with the cooling air duct further comprises a rear dust cover and a side dust cover, wherein the rear dust cover is installed on the rear side of the box body, the side dust cover is installed on the right side of the box body, the rear dust cover is arranged outside the motor, and the side dust cover is arranged outside the blower.
Further, the industrial oven with the cooling air duct comprises a sealing door, the sealing door is installed on an installation opening on the oven body in an openable manner, the baking assembly is installed in the oven body through the installation opening, the front end of the baking chamber is opened, and the opening of the baking chamber can be opened or closed by opening and closing the sealing door.
The beneficial effects of the utility model are as follows: according to the industrial oven with the cooling air duct, the cooling air duct is arranged on the outer side of the baking chamber, air with relatively low temperature outside the baking chamber is introduced into the cooling air duct, and the cooling air can exchange heat with heat transferred to the outer wall of the baking chamber, so that the heat is timely taken out, excessive heat transfer to the oven body is avoided, the electronic components on the oven body are prevented from being damaged due to high temperature, the maintenance cost is reduced, the economic benefit is improved, meanwhile, a user does not need to frequently stop and check, the labor intensity is greatly reduced, and the working efficiency of the industrial oven is improved.
Drawings
The utility model is further described below with reference to the drawings and examples.
FIG. 1 is a perspective view of an industrial oven with a cooling tunnel of the present utility model;
FIG. 2 is a partially exploded view of the industrial oven with cooling air duct of FIG. 1;
FIG. 3 is a partially exploded view of the industrial oven with cooling air duct of FIG. 1 from another perspective;
FIG. 4 is a top view of the industrial oven with cooling air duct of FIG. 1;
FIG. 5 is a cross-sectional view of the industrial oven with cooling air duct of FIG. 4 taken along line A-A;
FIG. 6 is a perspective view of a baking assembly of the industrial oven with cooling air duct of FIG. 1;
FIG. 7 is a partially exploded view of the baking assembly of FIG. 6;
fig. 8 is a perspective view (with the rear side panel omitted) of the baking assembly of fig. 6 from another perspective;
fig. 9 is a perspective view of the baking assembly of fig. 6 from another perspective (with the rear side panel, top panel and windup plate omitted).
In the figure: 10. the oven comprises a box body, 101, a mounting port, 20, a baking assembly, 21, an oven, 210, a baking chamber, 211, an outer shell, 2111, a bottom plate, 2112, a top plate, 2113, a left side plate, 2114, a right side plate, 2115, a rear side plate, 212, an inner shell, 2121, an orifice plate, 2122, a connecting plate, 2123, a communication hole, 2124, a circulating fan, 2125, a motor, 2126, a fan volute, 213, a bearing frame, 22, a return air structure, 220, a cooling air duct, 230, a hot air circulating air duct, 221, an upper air panel, 222, a side air panel, 223, a lower air panel, 224, a blower, 225, an air outlet, 226, an air outlet duct, 30, a sealing door, 40, a rear dust cover, 50 and a side dust cover.
Detailed Description
The present utility model will now be described in detail with reference to the accompanying drawings. The figure is a simplified schematic diagram illustrating the basic structure of the utility model only by way of illustration, and therefore it shows only the constitution related to the utility model.
Referring to fig. 1 to 3, the present utility model provides an industrial oven with a cooling duct, comprising a cabinet 10, a baking assembly 20, a sealing door 30, a rear dust cover 40 and a side dust cover 50, wherein the baking assembly 20 is installed in the cabinet 10, the sealing door 30 is installed at the front side of the cabinet 10 to seal the baking assembly 20 in the cabinet 10, the rear dust cover 40 is installed at the rear side of the cabinet 10, and the side dust cover 50 is installed at the right side of the cabinet 10.
The box 10 is a hollow cuboid box structure, the front side of the box 10 is provided with a mounting opening 101, the sealing door 30 is mounted on the box 10 in an openable and closable manner corresponding to the mounting opening 101, and the baking assembly 20 is mounted in the box 10 through the mounting opening 101. In this embodiment, two mounting openings 101 are provided, and two baking assemblies 20 and two sealing doors 30 are provided in sequence along the longitudinal direction, one baking assembly 20 is correspondingly mounted in the case 10 through one mounting opening 101, and one sealing door 30 is correspondingly sealed with one mounting opening 101. In addition, the sealing door 30 is rotatably installed on the case 10 by a hinge structure, and a user operates by turning over the sealing door 30, thereby opening or closing the installation opening 101.
Referring to fig. 4-9, the baking assembly 20 includes an oven 21 having a baking chamber 210 and a return air structure 22 having a cooling air duct 220, wherein the cooling air duct 220 is located outside the baking chamber 210, and the baking chamber 210 and the cooling air duct 220 are isolated from each other, wherein the front end of the baking chamber 210 is provided with an opening, and the interior is used for placing a wafer to be baked, and the cooling air duct 220 is used for introducing air outside the box 10, when the air flows in the cooling air duct 220, heat overflowed from the interior of the baking chamber 210 can be carried out, so that the outer side wall of the box 10 is ensured not to have higher temperature, and thus the circuit board mounted on the box 10 and electronic components thereon are protected. The user can open or close the opening of the toaster 210 by opening or closing the sealing door 30.
The oven 21 includes an outer housing 211 and an inner housing 212, the inner housing 212 is disposed in the outer housing 211, the baking chamber 210 is formed in the inner housing 212, specifically, the outer housing 211 is a hollow rectangular parallelepiped housing structure with an opening at the front end, the outer housing 211 includes a bottom plate 2111 and a top plate 2112 which are disposed opposite to each other, a left side plate 2113 and a right side plate 2114 which are disposed opposite to each other, and a rear side plate 2115, the inner housing 212 is in a "n" shape structure, the inner housing 212 includes two orifice plates 2121 disposed opposite to each other and a connecting plate 2122 connected between the two orifice plates 2121, one orifice plate 2121 is disposed close to the left side plate 2113 and parallel to the left side plate 2113, the other orifice plate 2121 is disposed close to the right side plate 2114 and parallel to the right side plate 2114, the top of the orifice plate 2121 is fixedly connected to the top plate 2112, the bottom of the orifice plate 2121 is fixedly connected to the bottom plate 2111, thus, a cavity with an opening is formed between the inner housing 212, the top plate 2112 and the bottom plate 2111, when the sealing door 30 is closed, the front side of the baking chamber 210 is sealed into a wafer to be baked, and the wafer 210 is sealed into the baking chamber. In order to facilitate carrying wafers to be baked, a carrier 213 is horizontally disposed within the bake chamber 210.
The space of the outer case 211 except the roasting chamber 210 forms a hot air circulation passage 230, and the through holes of the orifice plate 2121 form a communication hole 2123, and the hot air circulation passage 230 communicates with the roasting chamber 210 through the communication hole 2123. A heating member (not shown) and a circulation fan 2124 are installed in the hot air circulation path 230, and after the heating member is energized, it can generate resistance heat, thereby heating air in the hot air circulation path 230, and when the circulation fan 2124 works, hot air in the hot air circulation path 230 can circulate between the hot air circulation path 230 and the baking chamber 210, and when hot air passes through the baking chamber 210, wafers in the baking chamber 210 can be baked.
The circulation fan 2124 includes a motor 2125 and a fan volute 2126, the motor 2125 being fixedly installed on the rear side wall of the case 10, the fan volute 2126 being fixedly provided in the hot air circulation passage 230, specifically, the fan volute 2126 being installed on the rear side plate 2115. The fan volute 2126 is internally provided with a wind wheel, and the wind wheel is fixedly connected with an output shaft of the motor 2125, so that the motor 2125 is driven to rotate at a high speed, and when the wind wheel rotates, hot air is sucked into the fan volute 2126 from the center of the fan volute 2126 and then flows out of an air outlet of the fan volute 2126, so that the hot air circularly flows.
The rear dust cover 40 is provided outside the motor 2125 so as to protect the motor 2125 from dust.
The air return structure 22 is approximately in a C-shaped structure, the air return structure 22 comprises an upper air plate 221, a side air plate 222 and a lower air plate 223 which are connected with each other, wherein the upper air plate 221 is fixedly connected with a top plate 2112, the side air plate 222 is fixedly connected with a left side plate 2113, the lower air plate 223 is fixedly connected with a bottom plate 2111, a cavity formed between the upper air plate 221 and the top plate 2112, a cavity formed between the side air plate 222 and the left side plate 2113 and a cavity formed between the lower air plate 223 and the bottom plate 2111 are sequentially communicated, the three cavities are communicated to form a C-shaped cooling air duct 220 together, an air blower 224 is fixedly arranged at the top of a right side plate 2114, the air blower 224 is positioned outside the outer shell 211, an air outlet 225 is connected to the lower air plate 223, wherein the air blower 224 is communicated with the upper port of the cooling air duct 220, and the air outlet 225 is communicated with the lower port of the cooling air duct 220. In addition, a circuit board and electronic components are mounted on the side of the case 10 near the left side plate 2113 to provide good heat insulation.
In addition, referring to fig. 3, 6 and 7, an air outlet pipe 226 communicating with the outside air is fixedly connected to the end of the air outlet 225, and in use, the air flow in the cooling air duct 220 after heat exchange is finally discharged from the air outlet pipe 226.
The side dust cover 50 is covered outside the blower 224 to realize a dust-proof protection effect on the blower 224, and prevents excessive dust from being sucked into the cooling air duct 220.
According to the industrial oven with the cooling air duct, the cooling air duct 220 is arranged on the outer side of the baking chamber 210, air with relatively low temperature outside the baking oven 21 is introduced into the cooling air duct 220, and the cold air can exchange heat with heat transferred to the outer wall of the baking oven 21, so that the heat is timely taken out, excessive heat transfer to the oven body 10 is avoided, the electronic components on the oven body 10 are prevented from being damaged due to high temperature, the maintenance cost is reduced, the economic benefit is improved, meanwhile, a user does not need to frequently stop and check, the labor intensity is greatly reduced, and the working efficiency of the industrial oven is improved.
While the foregoing is directed to the preferred embodiment of the present utility model, other and further embodiments of the utility model may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow. The technical scope of the present utility model is not limited to the description, but must be determined according to the scope of claims.
Claims (9)
1. The utility model provides an industry oven with cooling wind channel, includes box and toasts the subassembly, toast the subassembly and install in the box, its characterized in that: the baking assembly comprises a baking oven with a baking chamber and a return air structure with a cooling air channel, wherein the cooling air channel is positioned outside the baking chamber and isolated from each other, a hot air circulation channel communicated with the baking chamber is further arranged in the baking oven, a circulating fan is arranged in the hot air circulation channel, a blower is arranged at one end of the cooling air channel, and the other end of the cooling air channel is communicated with the outside atmosphere.
2. The industrial oven with cooling air duct of claim 1, wherein: the oven comprises an outer shell and an inner shell, wherein the inner shell is arranged in the outer shell, the baking chamber is formed in the inner shell, and the hot air circulation channel is formed by the area space except the baking chamber in the outer shell.
3. The industrial oven with cooling air duct of claim 2, wherein: the outer shell comprises a bottom plate, a top plate, a left side plate, a right side plate and a rear side plate, wherein the bottom plate and the top plate are oppositely arranged, the left side plate and the right side plate are oppositely arranged, the rear side plate is oppositely arranged, the inner shell comprises two pore plates and a connecting plate connected between the two pore plates, the top of each pore plate is fixedly connected with the top plate, the bottom of each pore plate is fixedly connected with the bottom plate, and the baking chamber is formed by enclosing a cavity with an opening on the front side among the inner shell, the top plate and the bottom plate.
4. The industrial oven with cooling air duct of claim 3, wherein: one of the pore plates is close to the left side plate and is parallel to the left side plate, the other pore plate is close to the right side plate and is parallel to the right side plate, the through holes on the pore plate form communication holes, and the hot air circulation channel is communicated with the baking chamber through the communication holes.
5. The industrial oven with cooling air duct of claim 3, wherein: the air return structure comprises an upper air plate fixedly connected with the top plate, a side air plate fixedly connected with the left side plate and a lower air plate fixedly connected with the bottom plate, wherein a cavity formed between the upper air plate and the top plate, a cavity formed between the side air plate and the left side plate and a cavity formed between the lower air plate and the bottom plate are sequentially communicated, and the three cavities are communicated to form the cooling air channel together.
6. The industrial oven with cooling air duct of claim 5, wherein: the air blower is fixedly arranged at the top of the right side plate, an air outlet is connected to the lower air plate, and the tail end of the air outlet is fixedly connected with an air outlet pipe communicated with the outside atmosphere.
7. The industrial oven with cooling air duct of claim 1, wherein: the circulating fan comprises a motor and a fan volute, the motor is fixedly arranged on the rear side wall of the box body, the fan volute is fixedly arranged in the hot air circulating channel, a wind wheel is arranged in the fan volute, and the wind wheel is fixedly connected with an output shaft of the motor.
8. The industrial oven with cooling air duct of claim 7, wherein: the industrial oven with the cooling air duct further comprises a rear dust cover and a side dust cover, wherein the rear dust cover is arranged on the rear side of the oven body, the side dust cover is arranged on the right side of the oven body, the rear dust cover is arranged outside the motor, and the side dust cover is arranged outside the blower.
9. The industrial oven with cooling air duct of claim 1, wherein: the industrial oven with the cooling air duct comprises a sealing door, wherein the sealing door is installed on an installation opening on the oven body in an openable manner, the baking assembly is installed in the oven body through the installation opening, the front end of the baking chamber is opened, and the sealing door can be opened or closed to open or close the opening of the baking chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322304587.2U CN220624632U (en) | 2023-08-28 | 2023-08-28 | Industrial oven with cooling air duct |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322304587.2U CN220624632U (en) | 2023-08-28 | 2023-08-28 | Industrial oven with cooling air duct |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220624632U true CN220624632U (en) | 2024-03-19 |
Family
ID=90221706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322304587.2U Active CN220624632U (en) | 2023-08-28 | 2023-08-28 | Industrial oven with cooling air duct |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220624632U (en) |
-
2023
- 2023-08-28 CN CN202322304587.2U patent/CN220624632U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |