CN220609762U - Recovery device for chlorosilane-containing waste gas - Google Patents
Recovery device for chlorosilane-containing waste gas Download PDFInfo
- Publication number
- CN220609762U CN220609762U CN202321981028.9U CN202321981028U CN220609762U CN 220609762 U CN220609762 U CN 220609762U CN 202321981028 U CN202321981028 U CN 202321981028U CN 220609762 U CN220609762 U CN 220609762U
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- Prior art keywords
- pipe
- waste gas
- air
- adsorption
- chlorosilane
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- 239000002912 waste gas Substances 0.000 title claims abstract description 50
- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 23
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 238000011084 recovery Methods 0.000 title claims abstract description 15
- 238000001179 sorption measurement Methods 0.000 claims abstract description 64
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 58
- 239000007789 gas Substances 0.000 claims description 22
- 239000007921 spray Substances 0.000 claims description 19
- 239000000126 substance Substances 0.000 description 10
- 238000010992 reflux Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000003595 mist Substances 0.000 description 5
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 238000002386 leaching Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model discloses a recovery device of chlorosilane-containing waste gas, which comprises an adsorption box and is characterized in that: the adsorption box is internally provided with an adsorption assembly, two chambers are arranged in the adsorption box, one of the chambers is fixedly connected with an air inlet, the other chamber is fixedly inserted into a conveying pipe communicated with the air inlet, an air outlet pipe is rotatably connected to the outer part of the bottom of the conveying pipe and is communicated with the conveying pipe, a plurality of air nozzles I distributed at equal intervals are arranged on the outer wall of the top of the air outlet pipe, a plurality of air nozzles II are arranged at two ends of the air outlet pipe, and two openings of the air nozzles are oppositely arranged.
Description
Technical Field
The utility model relates to the technical field of waste gas recovery, in particular to a recovery device for waste gas containing chlorosilane.
Background
During the photovoltaic production process, chlorosilane-containing waste gas is often generated, and if the waste gas is discharged randomly, on one hand, a large amount of chlorosilane resources in the tail gas are wasted; on the other hand, the chlorosilane has pollution, such as serious pollution to the environment caused by leakage, the existing treatment method usually adopts a spraying mode, after the tail gas is collected and sent into a tail gas leaching tower, the leaching liquid sprayed by a spraying pump leaches hydrogen chloride, chlorosilane and the like which are easy to dissolve in water in the tail gas, and hydrogen and nitrogen which are insoluble in water and have no pollution are directly discharged through a tail gas discharge port after leaching.
Through retrieval, the utility model of Chinese patent publication No. CN216171361U discloses an exhaust gas spray tower, which comprises a spray tower, wherein the top of the spray tower is communicated with an exhaust pipe, an air pressure valve is arranged on the exhaust pipe, one side of the spray tower is communicated with an air supply assembly, the bottom of the spray tower is fixedly provided with an alkali liquor tank, the top of the alkali liquor tank is connected with a first water pump, the output end of the first water pump is communicated with a water outlet pipe positioned at the top of the spray tower, the free end of the water outlet pipe is rotationally connected with a first spray plate, and the bottom of the horizontal end of the water outlet pipe is fixedly provided with a rotating mechanism for driving the first spray plate to rotate.
The device sprays water mist downwards through the spray pipe, so that harmful substances in waste gas flowing from bottom to top can be absorbed, however, the water mist generated by the spray pipe cannot be prevented from being in full contact with the waste gas, the part of waste gas cannot be effectively treated, and the waste gas flows into the external environment to pollute the environment.
Disclosure of Invention
The utility model aims to provide a recovery device for waste gas containing chlorosilane, which is used for solving the problems in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a recovery unit who contains chlorosilane waste gas, includes adsorption tank, its characterized in that: the adsorption box is internally provided with an adsorption assembly, the inside of the adsorption box is provided with two chambers, one of the chambers is fixedly connected with an air inlet, the other chamber is fixedly inserted with a conveying pipe communicated with the air inlet, the outside of the bottom of the conveying pipe is rotationally connected with an air outlet pipe, the air outlet pipe is communicated with the conveying pipe, and the outer wall of the top of the air outlet pipe is provided with a plurality of air nozzles distributed at equal intervals.
As a further preferable mode of the technical scheme, a plurality of air nozzles II are arranged at two ends of the air outlet pipe, and openings of the air nozzles II are arranged in opposite directions at two ends.
The adsorption efficiency of harmful substance in the waste gas has been rejected to effectual improvement, avoid harmful gas to escape to external polluted environment, waste gas will enter into the conveyer pipe through the air inlet in the middle of, get into the outlet duct and spout the aquatic of another cavity from a plurality of air nozzles one and air nozzle two at last, install the air nozzle two in the outlet duct both sides because the orientation is opposite, the air nozzle can produce opposite direction's tangential force when outwards spraying of air current, the outlet duct can be driven and rotate, thereby make the bubble distribute more even, effectively improve the adsorption efficiency, and the outlet duct rotates and also can play stirring effect, make the local concentration of aquatic harmful substance too high, thereby improved the adsorption efficiency of water.
As a further preferable mode of the technical scheme, the outer wall of one side of the adsorption box is fixedly connected with an exhaust pipe in an inserting mode, a backflow assembly is arranged on the outer wall of one side of the adsorption box and comprises an exhaust gas sensor fixedly arranged at the bottom of the exhaust pipe, a backflow pipe I is fixedly connected to the top of the exhaust pipe in an inserting mode, a backflow pipe II is fixedly connected to the outer wall of the top of the adsorption box in an inserting mode, and a fan is fixedly arranged at one end of the backflow pipe I and one end of the backflow pipe II.
If the water adsorption effect is saturated, when the waste gas that can not fall is through the blast pipe, exhaust gas sensor will detect and send out the alarm to control the fan through the inside controller of adsorption case and start, the fan is taken back waste gas through back flow one, then gets into back flow two by the fan, gets into in the middle of the adsorption case at last, thereby has avoided waste gas to reveal external polluted environment.
As the further preferable of this technical scheme, one of them cavity one end inner wall bottom fixed mounting has the water pump, adsorption case one end outer wall bottom fixed grafting has the water pipe, water pipe one end runs through the adsorption case and downwardly extending, water pipe bottom one end fixed grafting has the shower nozzle.
As a further preferable mode of the technical scheme, the outer wall of one side of the adsorption box is fixedly inserted with an air inlet pipe, and the air inlet pipe is positioned below the spray head.
The waste gas containing chlorosilane enters a cavity of the adsorption box from the air inlet pipe, the water pump is started to pump water into the water pipe, then the water pipe is used for spraying water downwards through the spray head, and after the downwards sprayed water mist is mixed with the waste gas, harmful substances in the waste gas can be adsorbed once by the water.
As a further preferable mode of the technical scheme, one-way valves are arranged at the connecting positions of the first air nozzle and the second air nozzle and the air outlet pipe.
The utility model provides a recycling device for chlorosilane-containing waste gas, which has the following beneficial effects:
(1) According to the utility model, through arranging the adsorption component, the waste gas containing chlorosilane is subjected to secondary treatment after primary adsorption, so that the adsorption efficiency of removing harmful substances in the waste gas is effectively improved, the harmful gases are prevented from being dissipated to the outside polluted environment, the waste gas enters the conveying pipe through the air inlet and finally enters the air outlet pipe and is sprayed into water in another cavity from the first air nozzles and the second air nozzles, the second air nozzles arranged on two sides of the air outlet pipe are opposite in orientation, and opposite tangential force is generated when the air flow is sprayed outwards, so that the air outlet pipe can be driven to rotate, the air bubbles are distributed more uniformly, the adsorption effect is effectively improved, the air outlet pipe rotates to play a stirring role, the local concentration of harmful substances in the water is too high, and the adsorption efficiency of the water is improved.
(2) According to the utility model, by arranging the reflux component, if the water adsorption effect is saturated, the exhaust gas which cannot be treated passes through the exhaust pipe, the exhaust gas sensor can detect and give an alarm, the fan is controlled to start by the controller in the adsorption box, the fan pumps the exhaust gas back through the reflux pipe I, then the exhaust gas enters the reflux pipe II through the fan, and finally the exhaust gas enters the adsorption box, so that the exhaust gas is prevented from leaking to the external polluted environment.
Drawings
FIG. 1 is a schematic view of a first view angle structure of the present utility model;
FIG. 2 is a schematic diagram of an overall second view structure according to the present utility model;
FIG. 3 is a schematic view of the overall third view structure of the present utility model;
FIG. 4 is an enlarged schematic view of the structure of FIG. 1A according to the present utility model;
in the figure: 1. an adsorption box; 2. an air inlet pipe; 3. an exhaust pipe; 4. a water pump; 5. a water pipe; 6. a spray head; 7. an adsorption assembly; 8. a reflow assembly; 701. an air inlet; 702. a delivery tube; 703. an air outlet pipe; 704. an air nozzle I; 705. a second air nozzle; 801. an exhaust gas sensor; 802. a return pipe I; 803. a blower; 804. and a return pipe II.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.
The utility model provides the technical scheme that: as shown in fig. 1 and 4, in this embodiment, a recovery device for exhaust gas containing chlorosilane includes an adsorption tank 1, and is characterized in that: adsorption component 7 is installed to adsorption tank 1 internally mounted, adsorption tank 1 is inside to be provided with two cavities, one of them cavity one side inner wall fixedly connected with air inlet 701, another cavity one side inner wall fixedly pegging graft have with air inlet 701 be linked together the conveyer pipe 702, conveyer pipe 702 bottom outside rotates and is connected with outlet duct 703, outlet duct 703 is linked together with conveyer pipe 702, outlet duct 703 top outer wall is provided with the air nozzle one 704 that a plurality of equidistance distribute, the outlet duct 703 both ends all are provided with a plurality of air nozzles two 705, a plurality of air nozzles two 705 opening opposite direction in both ends set up.
Waste gas enters the conveying pipe 702 through the air inlet 701, finally enters the air outlet pipe 703 and is sprayed into water in another chamber from the first air nozzles 704 and the second air nozzles 705, tangential force with opposite directions is generated when the air flows are sprayed outwards due to opposite directions of the second air nozzles 705 arranged on two sides of the air outlet pipe 703, the air outlet pipe 703 can be driven to rotate, so that bubbles are distributed more uniformly, the adsorption effect is effectively improved, the air outlet pipe 703 rotates to play a stirring role, the local concentration of harmful substances in water is too high, and the adsorption efficiency of water is improved.
As shown in fig. 1 and 2, an exhaust pipe 3 is fixedly inserted into the outer wall of one side of the adsorption box 1, a reflux component 8 is installed outside the adsorption box 1, the reflux component 8 comprises an exhaust gas sensor 801 (the model of the sensor is preferably TD500S-SiH 4) fixedly installed at the bottom of the exhaust pipe 3, a reflux pipe I802 is fixedly inserted into the top of the exhaust pipe 3, a reflux pipe II 804 is fixedly inserted into the outer wall of the top of the adsorption box 1, a fan 803 is fixedly installed at one end of the reflux pipe I802 and one end of the reflux pipe II 804, a controller is installed inside the adsorption box 1, and the controller is respectively electrically connected with the exhaust gas sensor 801 and the fan 803 through wires.
If the water adsorption effect is saturated, when the waste gas which is not treated passes through the exhaust pipe 3, the waste gas sensor 801 detects that an alarm is sent out, the fan 803 is controlled to be started by the controller in the adsorption box 1, the fan 803 pumps the waste gas back through the first return pipe 802, then the waste gas enters the second return pipe 804 through the fan 803, and finally the waste gas enters the adsorption box 1, so that the waste gas is prevented from leaking to the external polluted environment.
As shown in fig. 1, 2 and 3, a water pump 4 is fixedly installed at the bottom of the inner wall of one end of one chamber, a water pipe 5 is fixedly inserted at the bottom of the outer wall of one end of the adsorption box 1, one end of the water pipe 5 penetrates through the adsorption box 1 and extends downwards, a spray head 6 is fixedly inserted at one end of the bottom of the water pipe 5, an air inlet pipe 2 is fixedly inserted at the outer wall of one side of the adsorption box 1, and the air inlet pipe 2 is positioned below the spray head 6.
The waste gas containing chlorosilane enters a chamber of the adsorption box 1 from the air inlet pipe 2, the water pump 4 is started to pump water into the water pipe 5, then the water pipe 5 is sprayed downwards through the spray head 6, and after the downwards sprayed water mist is mixed with the waste gas, harmful substances in the waste gas are adsorbed once by the water.
As shown in fig. 1 and fig. 4, the connection parts of the first air nozzle 704 and the second air nozzle 705 and the air outlet pipe 703 are provided with one-way valves, so that external water can be prevented from flowing back to the air outlet pipe 703 through the first air nozzle 704 and the second air nozzle 705 to corrode the external water.
The utility model provides a recovery device for chlorosilane-containing waste gas, which has the following specific working principle:
when the device works, chlorosilane-containing waste gas enters a chamber of the adsorption box 1 from the air inlet pipe 2, the water pump 4 is started to pump water into the water pipe 5, then the water pump 5 is sprayed downwards through the spray head 6, after the downwards sprayed water mist and the waste gas are mixed together, harmful substances in the waste gas are adsorbed once by the water, then the waste gas continuously moves upwards, then the waste gas enters the conveying pipe 702 through the air inlet 701, finally the waste gas enters the air outlet pipe 703 and is sprayed into water of another chamber from the first air nozzles 704 and the second air nozzles 705, the second air nozzles 705 arranged on the two sides of the air outlet pipe 703 are oppositely oriented, tangential force with opposite directions can be generated when the air flow is sprayed outwards, the air outlet pipe 703 can be driven to rotate, so that the air bubble distribution is more uniform, the adsorption effect is effectively improved, the rotation of the air outlet pipe 703 can also play a stirring role, the local concentration of harmful substances in the water is too high, the water adsorption efficiency is improved, if the water adsorption effect is saturated, when the waste gas which is not treated passes through the air outlet pipe 3, the waste gas sensor 801 can detect to send out an alarm, the alarm through the controller inside the adsorption box 1, the air outlet pipe 803 is controlled to be controlled by the controller to generate tangential force in opposite directions, the exhaust gas leakage from the air outlet pipe 803 is prevented from entering the air outlet pipe 803 to the outside 803, and the environment 803 is prevented from leaking out of the air outlet 803, and finally, the air outlet 803 is polluted by the air outlet 803.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a recovery unit who contains chlorosilane waste gas, includes adsorption case (1), its characterized in that: adsorption box (1) internally mounted has adsorption component (7), adsorption box (1) inside is provided with two cavities, one of them cavity one side inner wall fixedly connected with air inlet (701), another cavity one side inner wall fixedly pegging graft have delivery pipe (702) that are linked together with air inlet (701), delivery pipe (702) bottom outside rotation is connected with outlet duct (703), outlet duct (703) are linked together with delivery pipe (702), outlet duct (703) top outer wall is provided with a plurality of equidistance air nozzles (704) that distribute.
2. The recovery device for chlorosilane-containing waste gas as in claim 1, wherein: two ends of the air outlet pipe (703) are provided with a plurality of air nozzles II (705), and two ends of the air outlet pipe are provided with a plurality of air nozzles II (705) in opposite opening directions.
3. The recovery device for chlorosilane-containing waste gas as in claim 1, wherein: the utility model discloses a vacuum adsorption tank, including adsorption tank (1), back flow subassembly (8) are installed to adsorption tank (1) one side outer wall fixed grafting has blast pipe (3), back flow subassembly (8) include blast pipe (3) bottom fixed mounting's exhaust gas sensor (801), back flow one (802) are fixedly pegged graft at blast pipe (3) top, back flow two (804) are fixedly pegged graft to adsorption tank (1) top outer wall, back flow one (802) and back flow two (804) one end fixed mounting have fan (803).
4. The recovery device for chlorosilane-containing waste gas as in claim 1, wherein: one of them cavity one end inner wall bottom fixed mounting has water pump (4), fixed grafting in adsorption case (1) one end outer wall bottom has water pipe (5), water pipe (5) one end runs through adsorption case (1) and downwardly extending, fixed grafting in water pipe (5) bottom one end has shower nozzle (6).
5. The recovery device for chlorosilane-containing waste gas as in claim 4, wherein: the outer wall of one side of the adsorption box (1) is fixedly inserted with an air inlet pipe (2), and the air inlet pipe (2) is positioned below the spray head (6).
6. The recovery device for chlorosilane-containing waste gas as in claim 2, wherein: and the joints of the first air nozzle (704) and the second air nozzle (705) and the air outlet pipe (703) are respectively provided with a one-way valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321981028.9U CN220609762U (en) | 2023-07-26 | 2023-07-26 | Recovery device for chlorosilane-containing waste gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321981028.9U CN220609762U (en) | 2023-07-26 | 2023-07-26 | Recovery device for chlorosilane-containing waste gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220609762U true CN220609762U (en) | 2024-03-19 |
Family
ID=90220990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321981028.9U Active CN220609762U (en) | 2023-07-26 | 2023-07-26 | Recovery device for chlorosilane-containing waste gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220609762U (en) |
-
2023
- 2023-07-26 CN CN202321981028.9U patent/CN220609762U/en active Active
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