CN220604648U - Rotary vacuum adsorption device - Google Patents

Abstract

The utility model relates to the technical field of semiconductors and discloses a rotary vacuum adsorption device. The vacuum adsorption device comprises a driving piece, a rotating assembly, a product jig, a fixing assembly and a bearing, wherein the driving piece is provided with a first hollow part, the rotating assembly is arranged on the driving piece and is provided with a second hollow part, the first hollow part is communicated with the second hollow part, the product jig is arranged on the rotating assembly and is provided with a first groove and a plurality of adsorption holes, the first groove is communicated with the plurality of adsorption holes, a vacuum cavity is formed in the second hollow part, the fixing assembly comprises a fixing piece and a plurality of air pipes, the fixing piece is embedded in the second hollow part, the air outlet ends of the plurality of air pipes are arranged at one end of the fixing piece facing the first hollow part, the air inlet ends of the plurality of air pipes penetrate through the first hollow part and are connected with external vacuum equipment, and the air outlet of the air pipes is communicated with the vacuum cavity; the bearing sleeve is arranged on the fixing piece and is connected with the rotating assembly, so that the condition that the air pipe is wound or falls off is avoided.

Description

Rotary vacuum adsorption device

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a rotary vacuum adsorption device.

Background

The chip industry chain can be divided into three major areas: circuit design, wafer manufacturing and chip package testing, which belongs to the back-end flow in the industry chain. After different package forms of QFN (quad Flat No-lead package), BGA (ball grid array package), SIP (System in a package) and the like are processed, the semiconductor chip is quickly absorbed before dicing, and the warpage of the product is corrected through vacuum absorption, so that a vision system can quickly align the position of the product during dicing, and a dicing processing system can accurately, stably and reliably perform dicing operation.

In the prior art, the condition that the adsorption flow is insufficient, so that the warping of a product cannot be effectively corrected is often caused, meanwhile, in the adsorption process, the driving piece rotates to cause the winded or fallen air pipe, and the maintenance is inconvenient.

Disclosure of Invention

The utility model mainly aims to provide a rotary vacuum adsorption device, which aims to solve the technical problem that an air pipe is wound or falls off in the rotation process of the rotary vacuum adsorption device.

In order to achieve the above object, the present utility model provides a rotary vacuum adsorption apparatus comprising:

a driving member provided with a first hollow portion;

the rotating assembly is arranged on the driving piece and is provided with a second hollow part, the first hollow part is communicated with the second hollow part, and the driving piece is used for driving the rotating assembly to rotate;

the product jig is detachably arranged on the rotating assembly, and is provided with a first groove and a plurality of adsorption holes, wherein the first groove is communicated with the adsorption holes and forms a vacuum cavity with the second hollow part;

the fixing assembly comprises a fixing piece and a plurality of air pipes, wherein the fixing piece is embedded in the second hollow part, the air outlet ends of the air pipes are arranged at one end of the fixing piece facing the first hollow part, the air inlet ends of the air pipes penetrate through the first hollow part and are connected with external vacuum equipment, and the air outlet of the air pipes is communicated with the vacuum cavity;

the bearing is sleeved on the fixing piece and is connected with the rotating assembly;

and the inner check ring is sleeved at one end of the fixing piece, which is opposite to the vacuum cavity, and the bearing is tightly pressed on the inner check ring.

Further, in an embodiment, the vacuum adsorption device further includes an inner retainer ring, the inner retainer ring is sleeved at one end of the fixing piece opposite to the vacuum cavity, and forms a second groove with the fixing piece, and the inner ring of the bearing is sleeved on the fixing piece and is located in the second groove.

Further, in an embodiment, the vacuum adsorption device further includes an outer retainer ring sleeved on one end of the rotating assembly and forming a third groove with the rotating assembly, and the outer ring of the bearing is disposed in the third groove.

Further, in an embodiment, the inner retainer ring includes a first annular plate and a first annular flange, the first annular flange is disposed on the first annular plate, an outer diameter of the first annular flange is equal to an outer diameter of the first annular plate, an inner diameter of the first annular flange is greater than an inner diameter of the first annular plate, the first annular flange is pressed against an inner ring of the bearing, an inner side wall of the first annular flange is sleeved on the fixing piece, and the first annular plate is pressed against the fixing piece.

Further, in an embodiment, the rotating assembly includes a jig base and a base, the jig base is disposed on the driving member, and the base is detachably embedded in the jig base.

Further, in an embodiment, the fixture base is provided with a third hollow portion, the base is detachably embedded in the third hollow portion, the second hollow portion is disposed on the base, and the fixing piece is embedded in the second hollow portion.

Further, in an embodiment, the rotating assembly further includes an insulating ring, the insulating ring is disposed between the jig base and the driving member, and the second hollow portion sequentially penetrates through the base and the insulating ring.

Further, in an embodiment, a fourth groove is formed in a side wall of the fixing piece, facing the rotating assembly, and the vacuum adsorption device further comprises a movable sealing ring, wherein the movable sealing ring is arranged in the fourth groove and abuts against the rotating assembly.

Further, in an embodiment, the fixing piece includes a second annular protruding edge and a fixing seat, the second annular protruding edge is disposed on the fixing seat, the base is provided with a fifth groove, and the second annular protruding edge is disposed in the fifth groove.

Further, in an embodiment, the vacuum adsorption device further includes a plurality of air connectors, the fixing member is correspondingly provided with a plurality of through holes, each air connector is correspondingly embedded in each through hole, and each air outlet of the air pipe is correspondingly arranged on each air connector.

Further, in an embodiment, the vacuum adsorption device further includes a driving member base and a working platform, the driving member base is disposed on a side of the driving member facing away from the rotating assembly, and the working platform is disposed on a side of the driving member facing away from the driving member.

According to the technical scheme, the first hollow part is arranged on the driving piece, the rotating assembly is arranged on the driving piece, the second hollow part communicated with the first hollow part is arranged on the driving piece, the product jig is detachably arranged on the rotating assembly, the first groove and the plurality of adsorption holes are arranged on the product jig, the first groove and the plurality of adsorption holes are communicated, the second hollow part is provided with the vacuum cavity, the fixing piece is embedded in the second hollow part, the air outlet ends of the plurality of air pipes are arranged in one end of the fixing piece facing the first hollow part, the air outlet ends of the plurality of air pipes penetrate through the first hollow part and are connected with external vacuum equipment, the air outlet of the air pipes are communicated with the vacuum cavity, the inner ring of the bearing is sleeved on the fixing piece, and the outer ring of the bearing is connected with the rotating assembly of the outer ring of the bearing, so that the outer ring of the bearing rotates when the driving piece drives the bearing through the rotating assembly, and the fixing piece connected with the inner ring is not moved, and the condition that the plurality of air pipes are wound or fall off is avoided.

Drawings

One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which the figures of the drawings are not to scale, unless expressly stated otherwise.

FIG. 1 is a schematic exploded view of a rotary vacuum adsorption apparatus according to one embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view of a rotary vacuum suction device according to an embodiment of the present utility model;

FIG. 3 is a partial schematic view of FIG. 2 at A;

fig. 4 is a schematic view showing a partial cross-sectional structure of a rotary vacuum suction apparatus according to an embodiment of the present utility model.

Wherein, 10, a vacuum adsorption device; 11. a driving member; 111. a first hollow portion; 12. a rotating assembly; 121. a second hollow portion; 1211. a top; 1212. a bottom; 123. a jig base; 1231. a third hollow portion; 124. a base; 1241. a fifth groove; 125. an insulating ring; 13. a product jig; 131. a first groove; 132. adsorption holes; 133. a vacuum chamber; 14. a fixing assembly; 141. an air pipe; 1411. an air inlet pipe; 142. a fixing member; 1422. a fourth groove; 1423. a second annular ledge; 1424. a fixing seat; 15. a bearing; 16. an inner retainer ring; 161. a first annular plate; 162. a first annular ledge; 17. an outer retainer ring; 171. a second annular plate; 172. a fourth annular ledge; 18. a dynamic seal ring; 19. an air joint; 20. a driving base; 21. and a working platform.

Detailed Description

In order that the utility model may be readily understood, a more particular description thereof will be rendered by reference to specific embodiments that are illustrated in the appended drawings. It will be understood that when an element is referred to as being "fixed" to another element, it can be directly on the other element or one or more intervening elements may be present therebetween. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or one or more intervening elements may be present therebetween. The terms "vertical," "horizontal," "left," "right," "inner," "outer," and the like are used in this specification for purposes of illustration only. In the description of the present utility model, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating relative importance or implicitly indicating the number of technical features indicated. Thus, unless otherwise indicated, features defining "first", "second" may include one or more such features either explicitly or implicitly; the meaning of "plurality" is two or more. The terms "comprises," "comprising," and any variations thereof, are intended to cover a non-exclusive inclusion, such that one or more other features, integers, steps, operations, elements, components, and/or groups thereof may be present or added.

Furthermore, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in communication with each other. All technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used in this specification includes any and all combinations of one or more of the associated listed items.

In addition, the technical features mentioned in the different embodiments of the utility model described below can be combined with one another as long as they do not conflict with one another.

Referring to fig. 1-4, a rotary vacuum suction apparatus 10 is disclosed in accordance with an embodiment of the present utility model.

In one embodiment, as shown in fig. 1-4, the vacuum suction device 10 includes a driving member 11, a rotating assembly 12, a product jig 13, a fixing assembly 14, and a bearing 15. Wherein,

the driving member 11 may be a motor (electric motor) including a stator for fixing and a rotor for rotating, and the driving member 11 is provided with a first hollow portion 111, and the first hollow portion 111 may be a through hole.

The rotating assembly 12 is fixed on the rotor of the driving piece 11 through bolts or screws, so that the driving piece 11 rotates and drives the rotating assembly 12 to rotate, the rotating assembly 12 is provided with a second hollow part 121, the second hollow part 121 can be a through hole, and the first hollow part 111 and the second hollow part 121 are communicated.

The product jig 13 is fixed on the rotating assembly 12 through bolts or screws, so that the product jig 13 can be detachably fixed on the rotating assembly 12, the rotating assembly 12 can drive the product jig 13 to rotate while rotating, the product jig 13 is provided with a first groove 131 and a plurality of adsorption holes 132, the first groove 131 is communicated with the plurality of adsorption holes 132, the first groove 131 and the second hollow 121 form a vacuum cavity 133, specifically, the second hollow 121 is provided with a top 1211 and a bottom 1212, the top 1211 is close to the first groove 131, the top 1211 of the second hollow 121 and the first groove form the vacuum cavity 133, and the fixing assembly 14 is embedded in the bottom 1212 of the second hollow 121.

The fixing assembly 14 comprises a fixing piece 142 and a plurality of air pipes 141, the fixing piece 142 can be a central shaft, the fixing piece 142 is embedded in the bottom 1212 of the second hollow part 121, the air outlet ends of the plurality of air pipes 141 are arranged at one end of the fixing piece 142 facing the first hollow part 111, the inlet ends of the plurality of air pipes 141 penetrate through the first hollow part 111 and are connected with external vacuum equipment, and the air outlet of the air pipe 141 is communicated with the vacuum cavity 133, so that when the external vacuum equipment is communicated, air sequentially enters the air pipes 141 from the inlet of the air pipe 141, flows to the vacuum cavity 133 through the air outlet of the air pipe 141, flows to each adsorption hole 132 through the vacuum cavity 133 to complete the adsorption of products, and the air pipes 141 are arranged into a plurality of air pipes, so that the adsorption force to the products is increased, and the products are ensured to be correctly positioned.

The inner retainer ring 16 is sleeved at one end of the fixing piece 142, which is opposite to the vacuum cavity 133, and forms a second groove with the fixing piece 142, the inner ring of the bearing 15 is sleeved on the fixing piece 142, the bearing 15 is positioned in the second groove, that is, the bottom of the inner ring of the bearing 15 is pressed on the inner retainer ring 16. The bearing 15 is sleeved on the fixing piece 142 and is connected with the rotating assembly 12. In particular, the bearing 15 is an important component of contemporary mechanical equipment. Its main function is to support the mechanical rotator, reduce the friction coefficient in the course of its movement and ensure its rotation accuracy. The bearing 15 includes an outer race, an inner race, rolling elements and a cage, and typically the inner race of the bearing 15 rotates and the outer race is stationary, in this embodiment the inner race of the bearing 15 is not rotated but rather is supported and secured to the stationary member 142 and the outer race rotates and is in interference fit engagement with the rotating assembly 12. When the driving piece 11 drives the rotating assembly 12 to rotate, the rotating piece drives the outer ring of the bearing 15 to rotate, and the inner ring of the bearing 15 is not moved, so that the fixing piece 142 and the air pipe 141 do not rotate along with the rotation of the motor, namely, the fixing piece 142 and the air pipe 141 are not moved, and therefore the winding condition of the air pipes 141 caused by the rotation is avoided, or the falling condition of the air pipes 141 is avoided.

In an embodiment, as shown in fig. 1 and 2, the rotating assembly 12 includes a jig base 123, a base 124 and an insulating ring 125, the insulating ring 125 is disposed between the jig base 123 and the driving member 11, the insulating ring 125 plays an insulating role, and the insulating ring 125 may be made of ceramic, so that the jig base 123 and the driving member 11 are insulated from each other, and leakage is avoided.

The jig base 123 is arranged on the insulating ring 125 and is used for fixing the product jig 13, the product jig 13 is fixed on the jig base 123, the product jig 13 can be detachably fixed on the jig base 123 through bolts or screws, the jig base 123 is provided with a third hollow part 1231, the third hollow part 1231 is a through hole, the base 124 is embedded into the third hollow part 1231, the jig base 123 and the base 124 can be fixed through bolts or screws and the like, the base 124 can be detachably arranged on the jig base 123, the second hollow part 121 sequentially penetrates through the base 124 and the insulating ring 125, the fixing piece 142 is embedded into the second hollow part 121, the fixing piece 142 is in interference fit connection with the base 124, when the vacuum adsorption device 10 needs to be maintained, only the product jig 13 needs to be detached, the base 124 needs to be detached, the fixing component 14 can be maintained or maintained, or the whole fixing component 14 needs to be taken out for maintenance or maintenance, the maintenance is more convenient and quick, the jig base 123 does not need to be reassembled, and the jig base 123 is required to be assembled again, and the production precision of the jig base 123 is required to be high, and the production precision of the base 123 is prevented from being affected.

In an embodiment, as shown in fig. 2 and 3, the vacuum adsorption apparatus 10 further includes an inner retainer ring 16, the inner retainer ring 16 is sleeved at one end of the fixing member 142 opposite to the vacuum chamber 133 and forms a second groove with the fixing member 142, the inner ring of the bearing 15 is sleeved on the fixing member 142, and the bearing 15 is located in the second groove

Specifically, the inner retainer 16 includes a first annular plate 161 and a first annular flange 162, the first annular flange 162 is disposed on the first annular plate 161, the outer diameter of the first annular flange 162 is equal to the outer diameter of the first annular plate 161, i.e. the outer side wall of the first annular flange 162 is flush with the outer side wall of the first annular plate 161, the inner diameter of the first annular flange 162 is larger than the inner diameter of the first annular plate 161, so that a second groove is formed between the inner side wall of the first annular flange 162 and one surface of the first annular plate 161, the end portion of the fixing member 142 is embedded in the second groove, so that the first annular flange 162 is pressed against the inner ring of the bearing 15, the inner side wall sleeve of the first annular flange 162 is disposed on the fixing member 142, the first annular plate 161 is pressed against the bottom surface of the fixing member 142, and the fixing member 142 is provided with a third annular flange, when the inner retainer 16 is sleeved on the fixing piece 142, the third annular protruding edge and the first annular protruding edge 162 form a second groove with an outer side wall of the fixing piece 142, the inner ring of the bearing 15 is fixed in the second groove, when the bearing is assembled, the bearing 15 is sleeved on the fixing piece 142, then the inner retainer 16 is fixed on the fixing piece 142 through bolts or screws, the inner ring of the bearing 15 is motionless, so that when the rotating assembly 12 rotates, the inner ring does not rotate along with the rotation of the rotating assembly 12, the fixing piece 142 and the air pipe 141 are motionless, the air pipe 141 is prevented from winding or falling off, and meanwhile, the inner ring of the bearing 15 is tightly pressed in the second groove through the first annular protruding edge 162 and the third annular protruding edge of the inner retainer 16, and the structure is simple, the assembly and disassembly are convenient, and the maintenance or the replacement of parts are convenient.

Further, the vacuum adsorption device 10 further includes an outer retainer ring 17, the outer retainer ring 17 is sleeved on one end of the rotating assembly 12, and forms a third groove with the rotating assembly 12, and an outer ring of the bearing 15 is disposed in the third groove.

Specifically, the outer baffle ring 17 includes a second annular plate 171 and a fourth flange, the fourth flange is disposed on the second annular plate 171, the inner diameter of the fourth flange is equal to the inner diameter of the second annular plate 171, that is, the inner side wall of the fourth flange is flush with the inner side wall of the second annular plate 171, the outer diameter of the fourth flange is smaller than the outer diameter of the second annular plate 171, so that a third groove is formed between the outer side wall of the fourth annular flange 172 and a surface of the second annular plate 171, one end of the base 124 of the rotating assembly 12 is embedded in the third groove, so that the fourth annular flange 172 is pressed against the outer ring of the bearing 15, the outer side wall of the fourth annular flange 172 is pressed against the base 124 of the rotating assembly 12, the second annular plate 171 is pressed against a bottom surface of the rotating assembly 12, and the base 124 of the rotating assembly 12 is provided with a fifth annular flange, the fifth annular convex edge and the fourth annular convex edge 172 form a sixth groove with an outer side wall of the base 124 of the rotating assembly 12, the outer ring of the bearing 15 is fixed in the sixth groove, when in assembly, the bearing 15 is sleeved on the fixing piece 142 and clamped into the sixth groove, then the inner retainer ring 16 is sleeved on the fixing piece 142, then the inner retainer ring 16 is fixed on the fixing piece 142 through bolts or screws, then the outer retainer ring 17 is sleeved on the end part of the base 124 of the rotating assembly 12, and meanwhile, the outer ring of the bearing 15 is pressed in the sixth groove through the fourth annular convex edge 172 and the fifth annular convex edge of the outer retainer ring 17, so that the outer ring of the bearing 15 is driven to rotate when the base 124 of the rotating assembly 12 rotates, the inner ring of the bearing 15 is not influenced, and the structure is simple, the assembly and the disassembly are convenient, and the maintenance or the replacement of parts are convenient.

In an embodiment, as shown in fig. 2 and 3, the fixing element 142 includes a second annular flange 1423 and a fixing seat 1424, the second annular flange 1423 is disposed on the fixing seat 1424, the base 124 is provided with a fifth groove 1241, the second annular flange 1423 is disposed in the second groove, and the second groove plays a limiting role on the fixing element 142 on one hand, and on the other hand, prevents liquid from entering other structural parts through a gap between the base 124 and the fixing element 142, thereby corroding or damaging the other structural parts.

In an embodiment, as shown in fig. 2 and 3, a fourth groove 1422 is formed in a side wall of the fixing member 142 facing the rotating assembly 12, the vacuum adsorption device 10 further includes a movable sealing ring 18, the movable sealing ring 18 is disposed in the fourth groove 1422, and the other side surface of the movable sealing ring 18 abuts against the base 124 of the rotating assembly 12, so as to increase the tightness of the vacuum adsorption device 10, and meanwhile, when a product is cut, a large amount of liquid is used for cooling and flushing, so that the liquid is prevented from entering other structural parts through a gap between the base 124 and the fixing member 142, and thus corrosion or damage to other structural parts is avoided.

In an embodiment, as shown in fig. 2 and 3, the vacuum adsorption apparatus 10 further includes a plurality of air connectors 19, the fixing member 142 is correspondingly provided with a plurality of through holes, each air connector 19 is correspondingly embedded in each through hole, and the air outlet of each air pipe 141 is correspondingly arranged on each air connector 19, so that the air pipe 141 is convenient to install or replace.

In an embodiment, the vacuum adsorption device 10 further includes a driving member 11 base and a working platform 21, the driving member 11 base is disposed on a side of the driving member 11 opposite to the rotating member, the working platform 21 is disposed on a side of the driving base 20 opposite to the driving member 11, and the vacuum adsorption device 10 is fixed on other devices through the working platform 21 for use, so that the installation and the disassembly are convenient.

The above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; the technical features of the above embodiments or in the different embodiments may also be combined within the idea of the utility model, the steps may be implemented in any order, and there are many other variations of the different aspects of the utility model as described above, which are not provided in detail for the sake of brevity; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims (10)

1. A rotary vacuum adsorption apparatus, the vacuum adsorption apparatus comprising:

a driving member provided with a first hollow portion;

the rotating assembly is arranged on the driving piece and is provided with a second hollow part, the first hollow part is communicated with the second hollow part, and the driving piece is used for driving the rotating assembly to rotate;

the product jig is detachably arranged on the rotating assembly, and is provided with a first groove and a plurality of adsorption holes, wherein the first groove is communicated with the adsorption holes and forms a vacuum cavity with the second hollow part;

the fixing assembly comprises a fixing piece and a plurality of air pipes, wherein the fixing piece is embedded in the second hollow part, the air outlet ends of the air pipes are arranged at one end of the fixing piece facing the first hollow part, the air inlet ends of the air pipes penetrate through the first hollow part and are connected with external vacuum equipment, and the air outlet of the air pipes is communicated with the vacuum cavity;

the bearing is sleeved on the fixing piece and is connected with the rotating assembly;

and the inner check ring is sleeved at one end of the fixing piece, which is opposite to the vacuum cavity, and the bearing is tightly pressed on the inner check ring.

2. The vacuum adsorption device of claim 1, further comprising an outer retainer ring sleeved on one end of the rotating assembly and forming a third groove with the rotating assembly, wherein an outer ring of the bearing is disposed in the third groove.

3. The vacuum adsorption device of claim 1, wherein the inner retainer ring comprises a first annular plate and a first annular flange, the first annular flange is arranged on the first annular plate, the outer diameter of the first annular flange is equal to the outer diameter of the first annular plate, the inner diameter of the first annular flange is larger than the inner diameter of the first annular plate, the first annular flange is tightly pressed on the inner ring of the bearing, the inner side wall of the first annular flange is sleeved on the fixing piece, and the first annular plate is tightly pressed on the fixing piece.

4. The vacuum adsorption device of claim 1, wherein the rotating assembly comprises a jig base and a base, the jig base is disposed on the driving member, and the base is detachably embedded on the jig base.

5. The vacuum adsorption device of claim 4, wherein the jig base is provided with a third hollow portion, the base is detachably inserted into the third hollow portion, the second hollow portion is disposed on the base, and the fixing member is inserted into the second hollow portion.

6. The vacuum adsorption device of claim 4, wherein the rotating assembly further comprises an insulating ring disposed between the jig base and the driving member, the second hollow portion penetrating through the base and the insulating ring in sequence.

7. The vacuum adsorption device of claim 1, wherein a fourth groove is formed in a side wall of the fixing member facing the rotating assembly, and the vacuum adsorption device further comprises a movable sealing ring, wherein the movable sealing ring is arranged in the fourth groove and abuts against the rotating assembly.

8. The vacuum adsorption device of claim 4, wherein the securing member comprises a second annular flange and a securing seat, the second annular flange is disposed on the securing seat, the base is provided with a fifth groove, and the second annular flange is disposed in the fifth groove.

9. The vacuum adsorption device of claim 1, further comprising a plurality of air connectors, wherein the fixing member is correspondingly provided with a plurality of through holes, each air connector is correspondingly embedded in each through hole, and the air outlet of each air pipe is correspondingly arranged on each air connector.

10. The vacuum adsorption device of claim 1, further comprising a drive base and a work platform, wherein the drive base is disposed on a side of the drive facing away from the rotating assembly, and the work platform is disposed on a side of the drive base facing away from the drive.