CN220575713U - Special fixture for semiconductor processing test - Google Patents

Abstract

The utility model discloses a special clamp for semiconductor processing and testing, which comprises a detection table, wherein a clamping mechanism is arranged outside the detection table, the clamping mechanism comprises a placing groove, the placing groove is formed in the outer surface of the detection table, a sliding groove is formed in a body of the detection table, the sliding groove is formed in the inner wall of the placing groove, a clamping plate is movably connected in the sliding groove, the outer surface of the clamping plate is movably connected with the inner part of the placing groove, a groove is formed in the outer surface of the clamping plate, the inner parts of the groove are respectively communicated with the sliding groove and the inner wall of the placing groove, and a reset component is arranged in the groove.

Description

Special fixture for semiconductor processing test

Technical Field

The utility model relates to the technical field of semiconductor detection, in particular to a special clamp for semiconductor processing and testing.

Background

The existing semiconductor chip is processed and tested, the semiconductor chip and the detection probe are poor in contact, meanwhile, the detection equipment is not provided with a stable fixing structure, the detection accuracy is reduced, the semiconductor chip processing and testing device with the application number of 2022204911210 comprises a mounting plate and a detector fixedly connected with the mounting plate, the upper end of the detector is fixedly connected with a placing plate, the chip in the groove is extruded by the extrusion block, the chip can be tightly attached to the upper end of the probe for detection, and the extrusion block is beneficial to the elastic extrusion of the second spring to extrude the chip, so that the damage of the probe or the chip caused by overlarge extrusion force can be avoided.

Although the device solves the defects in the prior art, the device still has the following defects:

1) The device fixes the chip by extruding the sliding block, and the sliding block horizontally slides under the oblique extrusion force, so that the sliding block can increase friction, and accelerated abrasion is caused to cause instability;

2) After the device is fixed to the chip through the sliding block, the sliding block cannot automatically reset after detection is completed, manual operation is needed, the chip taking and placing speed is reduced, and therefore detection efficiency is reduced.

Therefore, the above problems need to be solved.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model provides a special clamp for semiconductor processing and testing, which solves the problems that when the existing clamp for chip detection is used, the inclined pressurization is easy to aggravate abrasion, so that the motion balance is poor, the stability of clamping a chip is affected, the automatic resetting is not possible, and the taking and placing efficiency and the detection efficiency of the chip are reduced.

In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a semiconductor processing test special fixture, includes the detection platform, the outside of detection platform is provided with fixture, fixture includes the standing groove, the surface at the detection platform is seted up to the standing groove, the body of detection platform is provided with the spout, the inner wall at the standing groove is seted up to the spout, the inside swing joint of spout has splint, the surface and the inside swing joint of standing groove of splint, the recess has been seted up to the surface of splint, the inside of recess is linked together with the inner wall of spout and standing groove respectively, the inside of recess is provided with reset assembly, the inside run-through rotation of recess is connected with the bull stick, the surface of bull stick runs through fixedly connected with commentaries on classics roller, the surface and the inside swing joint of standing groove of commentaries on classics roller, the inside intercommunication of spout has the spread groove, the surface at the detection platform is seted up to the spread groove, the surface and the inside swing joint of spread groove of splint, the surface swing joint of splint has the butt plate, the surface and the inside swing joint of spread plate.

Preferably, the reset assembly comprises a partition plate, the outer surface of the partition plate is fixedly connected with the inside of the chute, and the outer surface of the partition plate is movably connected with the inside of the groove.

Preferably, the outer surface of the partition plate is fixedly connected with a telescopic rod, and one end of the telescopic rod is fixedly connected with the inner wall of the groove.

Preferably, the output end of the telescopic rod is fixedly connected with a fixed ring, the outer surface of the fixed ring is fixedly connected with a spring, and the spring is sleeved outside the telescopic rod.

Preferably, one end of the spring is movably connected with a spiral ring, and the inside of the spiral ring is in threaded connection with the outer surface of the telescopic rod.

Preferably, the outer surface of the spiral ring is meshed with a tooth column, one end of the tooth column is fixedly connected with a reciprocating motor through a coupler, and the outer surface of the reciprocating motor is fixedly connected with the outer surface of the partition plate.

Advantageous effects

The utility model provides a special fixture for semiconductor processing test. Compared with the prior art, the method has the following beneficial effects:

(1) Through setting up fixture, when the butt plate pushes down splint and through slant component, promote splint slip in order to fix the chip, splint atress can promote the roller and rotate, utilizes the roll of roller to move, reduces the motion friction of splint itself to after having avoided splint wearing and tearing, influence the stability to the chip centre gripping.

(2) Through setting up reset assembly, when splint move, can compress telescopic link and spring, after the detection is accomplished, keep out the board and the splint break away from the connection after for splint can automatic re-setting, has promoted the getting of chip and has put efficiency.

Drawings

FIG. 1 is a perspective view of an external structure of the present utility model;

FIG. 2 is a cross-sectional view showing the internal structure of the splint according to the present utility model;

fig. 3 is a perspective view showing the external structure of the tooth post of the present utility model.

In the figure: 1. a detection table; 2. a placement groove; 3. a chute; 4. a clamping plate; 5. a groove; 6. a reset assembly; 61. a partition plate; 62. a telescopic rod; 63. fixing rings; 64. a spring; 65. a spiro ring; 66. tooth columns; 67. a reciprocating motor; 7. a rotating rod; 8. a rotating roller; 9. a connecting groove; 10. and (5) a retaining plate.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-3, the present utility model provides a technical solution: special fixture for semiconductor processing test:

embodiment one:

comprises a detection table 1, wherein the detection table 1 is composed of an existing detector and a placement plate, a clamping mechanism is arranged outside the detection table 1, the clamping mechanism comprises a placement groove 2, a detection probe (not shown in the figure) is arranged inside the placement groove 2, the placement groove 2 is arranged on the outer surface of the detection table 1, a sliding groove 3 is arranged on the body of the detection table 1, the sliding groove 3 is arranged on the inner wall of the placement groove 2, a clamping plate 4 is movably connected inside the sliding groove 3, the outer surface of the clamping plate 4 is movably connected with the inner surface of the placement groove 2, a groove 5 is arranged on the outer surface of the clamping plate 4, the inner part of the groove 5 is respectively communicated with the sliding groove 3 and the inner wall of the placement groove 2, a reset component 6 is arranged inside the groove 5, a rotating rod 7 is connected inside the groove 5 in a penetrating and rotating way, a rotating roller 8 is fixedly connected on the outer surface of the rotating rod 7 in a penetrating way, the roller 8 adopts resistance to compression, stand wear and tear material to make, the surface of roller 8 and the inside swing joint of standing groove 2, the inside intercommunication of spout 3 has a continuous groove 9, the surface at detecting station 1 is seted up to continuous groove 9, the surface of splint 4 and the inside swing joint of continuous groove 9, the surface swing joint of splint 4 has a butt plate 10, butt plate 10 is connected with current clamp plate structure, butt plate 10's surface and the inside swing joint of continuous groove 9, through setting up fixture, when butt plate 10 pushes down splint 4 and through the slant component, promote splint 4 slip in order to fix the chip, splint 4 atress can promote roller 8 and rotate, utilize the roll of roller 8 to move, reduce the motion friction of splint 4 itself, thereby after having avoided splint 4 wearing and tearing, influence the stability to the chip centre gripping.

Embodiment two:

the reset component 6 comprises a partition plate 61, the partition plate 61 is made of compression-resistant and abrasion-resistant materials, the partition plate 61 can play a supporting and limiting role, the outer surface of the partition plate 61 is fixedly connected with the inside of the sliding groove 3, the outer surface of the partition plate 61 is movably connected with the inside of the groove 5, the outer surface of the partition plate 61 is fixedly connected with a telescopic rod 62, the telescopic rod 62 is made of compression-resistant and abrasion-resistant materials, one end of the telescopic rod 62 is fixedly connected with the inner wall of the groove 5, the output end of the telescopic rod 62 is fixedly connected with a fixed ring 63, the outer surface of the fixed ring 63 is fixedly connected with a spring 64, the spring 64 is made of compression-resistant and fatigue-resistant materials, the spring 64 is sleeved outside the telescopic rod 62, one end of the spring 64 is movably connected with a spiral ring 65, the inside of the spiral ring 65 is in threaded connection with the outer surface of the telescopic rod 62, the outer surface of the spiral ring 65 is meshed with a toothed column 66, one end of the toothed column 66 is fixedly connected with a reciprocating motor 67 through a coupler, the reciprocating motor 67 is made of a servo motor and is electrically connected with an external control circuit, the outer surface of the reciprocating motor 67 is fixedly connected with the partition plate 61, and the reset component 6 is arranged, when the telescopic rod 4 moves, the telescopic rod 62 and the clamp plate is detected, the spring 64 and the spring is compressed, the clamp plate 10 is compressed, the clamp plate 4 is automatically and the clamp plate is released after the clamp plate is automatically, and the clamp plate is released, and the clamp plate 4 is reset efficiency is replaced.

Embodiment III: the first embodiment and the second embodiment are combined to obtain the chip taking and placing efficiency is improved by reducing friction loss through rolling, so that the problem of poor clamping stability caused by abrasion is avoided, and automatic resetting is performed through elastic resilience.

And all that is not described in detail in this specification is well known to those skilled in the art.

When in work; firstly, chips are placed into the placing groove 2 and are contacted with a detection probe, then the pressing plate descends to drive the abutting plate 10 to descend along with the falling, the abutting plate 10 enters the connecting groove 9 to be contacted with the clamping plate 4, the clamping plate 4 is subjected to transverse thrust force through oblique extrusion component force, the clamping plate 4 is stressed to drive the rotating roller 8 to roll, the chips slide into the placing groove 2 from the inside, the chips are clamped and fixed by being contacted with one side of the chips, then the chips are extruded by the extrusion block, the chips are tightly contacted with the probe, so that the chips are conveniently detected, the clamping plate 4 moves, the output end of the telescopic rod 62 is compressed, meanwhile, the fixed ring 63 moves along with the moving and compresses the spring 64, after detection, the abutting plate 10 is separated from the clamping plate 4, the spring 64 rebounds to push the clamping plate 4, the chips are conveniently taken, after long-term use, the reciprocating motor 67 drives the toothed column 66 to rotate, the toothed column 66 is meshed with the 65, the threaded connection of the 65 and the telescopic rod 62 is convenient for the spiral ring 65 to be connected with the screw thread of the telescopic rod 62, the spiral ring 64 is conveniently translated, and the elastic force of the spiral ring 64 is conveniently compressed on the surfaces of the two ends of the spiral ring 64, and the spiral ring 64 is conveniently compressed by the elastic force of the spring 64.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a semiconductor processing test special fixture, includes detection platform (1), its characterized in that: the outside of detecting platform (1) is provided with fixture, fixture includes standing groove (2), the surface at detecting platform (1) is offered to standing groove (2), the body of detecting platform (1) is provided with spout (3), the inner wall at standing groove (2) is offered to spout (3), the inside swing joint of spout (3) has splint (4), the inside swing joint of the surface and standing groove (2) of splint (4), recess (5) have been offered to the surface of splint (4), the inside of recess (5) is linked together with the inner wall of spout (3) and standing groove (2) respectively, the inside of recess (5) is provided with reset subassembly (6), the inside run-through rotation of recess (5) is connected with bull stick (7), the surface of bull stick (7) runs through fixedly connected with roller (8), the inside swing joint of the surface and standing groove (2) of roller (8), the inside intercommunication of spout (3) has linking groove (9), the inside intercommunication of linking groove (5) is equipped with connecting the outside surface of splint (4) with the swing joint of locating groove (5), the outer surface of the retaining plate (10) is movably connected with the inside of the connecting groove (9).

2. The semiconductor processing test special fixture according to claim 1, wherein: the reset assembly (6) comprises a partition plate (61), the outer surface of the partition plate (61) is fixedly connected with the inside of the sliding groove (3), and the outer surface of the partition plate (61) is movably connected with the inside of the groove (5).

3. The semiconductor processing test special fixture according to claim 2, wherein: the outer surface of the partition plate (61) is fixedly connected with a telescopic rod (62), and one end of the telescopic rod (62) is fixedly connected with the inner wall of the groove (5).

4. A semiconductor processing test special fixture according to claim 3, wherein: the output end of the telescopic rod (62) is fixedly connected with a fixed ring (63), the outer surface of the fixed ring (63) is fixedly connected with a spring (64), and the spring (64) is sleeved outside the telescopic rod (62).

5. The semiconductor processing test special fixture according to claim 4, wherein: one end of the spring (64) is movably connected with a spiral ring (65), and the inside of the spiral ring (65) is in threaded connection with the outer surface of the telescopic rod (62).

6. The semiconductor processing test special fixture according to claim 5, wherein: the outer surface of the spiral ring (65) is meshed with a tooth column (66), one end of the tooth column (66) is fixedly connected with a reciprocating motor (67) through a coupler, and the outer surface of the reciprocating motor (67) is fixedly connected with the outer surface of the partition plate (61).