CN220566556U - Metal sealing ring with positioning ring - Google Patents

Abstract

A metal seal ring with a locating ring, comprising: the sealing ring comprises a sealing ring body, wherein two free ends are formed on the same side of the cross section of a ring body of the sealing ring body, and an inwards concave curve is formed between the two free ends. Further comprises: the positioning ring is arranged in the sealing ring body, and the peripheral end of the circumference of the positioning ring is in interference fit between two free ends of the sealing ring body. The side line of the free end on sealing washer body upper portion inclines to set up, wherein, the side line forms certain acute angle with the horizontal plane, from this, can keep higher leakproofness and stability in various vacuum (super vacuum) operational environment through accurate and the flexible sealing washer body of easily compressing.

Description

Metal sealing ring with positioning ring

Technical Field

The utility model relates to the technical field of sealing gaskets, in particular to a metal sealing ring with a positioning ring.

Background

The sealing ring plays an important sealing role in the connection relation of the two parts, so that the gap between the two parts is reduced, and the structure of the sealing ring and the selection of materials are significant for the sealing performance and the service life of the sealing ring. The sealing rings at the joints of the flange, the pipe fitting and the instrument and meter on the semiconductor vacuum equipment have certain requirements on the sealing performance in the vacuum environment.

In the related art, a plane gasket or a rubber gasket is generally adopted for sealing at the joint of the semiconductor vacuum equipment, but the plane gasket and the rubber gasket cannot continuously maintain good sealing performance in a vacuum working condition (super-vacuum working condition), so that the risk of sealing leakage exists, and the normal use of the semiconductor vacuum equipment is affected.

Disclosure of Invention

The present utility model aims to solve at least to some extent one of the technical problems in the above-described technology.

Therefore, a first object of the present utility model is to provide a metal seal ring with a positioning ring, which can maintain high tightness and stability in various vacuum (super vacuum) working environments.

To achieve the above object, an embodiment of the first aspect of the present utility model provides a metal seal ring with a positioning ring, including: the sealing ring comprises a sealing ring body, wherein two free ends are formed on the same side of the cross section of a ring body of the sealing ring body, and an inwards concave curve is formed between the two free ends.

According to the metal sealing ring with the positioning ring, the high tightness and stability can be kept in various vacuum (super vacuum) working environments through the flexible sealing ring body which is precise and easy to compress.

In addition, the metal sealing ring with the positioning ring according to the embodiment of the utility model can also have the following additional technical characteristics:

specifically, the method further comprises the following steps: the positioning ring is arranged in the sealing ring body, and the peripheral end of the circumference of the positioning ring is in interference fit between two free ends of the sealing ring body.

Specifically, the side line of the free end on sealing washer body upper portion inclines to set up, wherein, the side line forms certain acute angle with the horizontal plane.

Specifically, the end face of the free end of the lower part of the sealing ring body is inclined, and the end face is identical to the inclined face of the free end of the upper part in structure and is symmetrically arranged.

Specifically, the connection position between the end point of the side line and the inner side of the cross section of the ring body is a target connection position.

Specifically, the cross section of the positioning ring is square, and the positioning ring and the sealing ring body are coaxially arranged.

Specifically, the positioning ring is respectively connected with the two target connection positions.

Specifically, two sealing bulges are symmetrically arranged on two end faces of the sealing ring body, wherein the sealing bulges are annular, and the cross sections of the sealing bulges are isosceles trapezoids.

Specifically, the sealing bulge is coaxial with the sealing ring body, one end of the sealing bulge is connected with the end part of the sealing ring, and the other end of the sealing bulge is parallel to the end surface of the sealing ring body.

Specifically, chamfering is carried out at two ends of the sealing ring body.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a schematic view of a metal seal ring with a locating ring according to an embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view of a metal seal ring with a retaining ring according to one embodiment of the utility model;

fig. 3 is a partial enlarged view of a portion a according to an embodiment of the present utility model.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

A metal seal ring with a positioning ring according to an embodiment of the present utility model is described below with reference to the accompanying drawings.

The metal sealing ring with the positioning ring is suitable for flanges, pipe fittings and instrument joints on semiconductor vacuum equipment, and provides good sealing for the operation of the semiconductor vacuum equipment in a vacuum (super vacuum) environment.

As shown in fig. 1 to 3, the metal seal ring with a positioning ring according to the embodiment of the present utility model may include: the sealing ring body 1, the ring body cross section of the sealing ring body 1 forms two free ends towards the same side, and an inwards concave curve is formed between the two free ends, and it should be noted that the two ends of the sealing ring body 1 are subjected to chamfering treatment.

As a possible scenario, the inwardly concave curve shape described in this embodiment may be circular arc-shaped, semi-elliptical, and the compressible member formed between the two free ends provides an effective sealing effect for the target product (e.g., pipe fitting joint) by the flexible member being easily compressible after the seal ring body 1 is subjected to the pressure of the target product.

As another possibility, the inwardly concave curve described in this embodiment may also be an irregular curve, which also provides an effective sealing effect for the target product (e.g. a pipe joint) after the sealing ring body 1 is pressed by the target product.

It should be noted that, the curved shape of the inward recess described in this embodiment needs to be selected to be suitable for the seal ring body 1 according to the requirement of the target product (for example, the sealing persistence, the vacuum environment level, etc.), and the curved shape of the inward recess may be used to satisfy the seal ring body 1 of the target product.

Specifically, when the related staff performs sealing connection on the target product, the proper sealing ring body 1 is selected according to the type of the target product and the sealing environment, and after the sealing ring body 1 receives the pressure of the target product, the sealing ring body can provide effective sealing for the target product under various vacuum working conditions, particularly over vacuum working conditions due to the flexible knife edge which is easy to compress.

In one embodiment of the present utility model, as shown in fig. 2 and 3, it may further include: the locating ring 2, locating ring 2 sets up in sealing washer body 1, and locating ring 2 circumference peripheral end interference fit is between the two free ends of sealing washer body 1.

Further, the cross section of the positioning ring 2 is square, and the positioning ring 2 and the sealing ring body 1 are coaxially arranged.

It can be understood that the positioning ring 2 in this embodiment limits the compression height of the sealing ring body 1 after the sealing ring body 1 is compressed, so as to ensure that the compression degree of the sealing ring body 1 achieves the optimal sealing effect.

In one embodiment of the present utility model, as shown in fig. 3, the side line of the free end of the upper portion of the sealing ring body 1 is disposed obliquely, wherein the side line forms an acute angle with the horizontal plane, and the end face of the free end of the lower portion of the sealing ring body 1 forms an inclined plane, and is disposed in the same and symmetrical manner as the inclined plane structure of the free end of the upper portion. The connection part between the end points of the side lines and the inner side of the cross section of the ring body is a target connection position 3, and the positioning ring 2 is respectively connected with the two target connection positions 3.

It will be appreciated that, after the positioning ring 2 is disposed between the two free ends of the seal ring body 1 in the interference fit manner, the two end surfaces (upper end surface and lower end surface) of the positioning ring 2 may be fixedly connected (e.g., welded, etc.) to the two target connection sites 3, respectively.

In one embodiment of the present utility model, as shown in fig. 1 and 3, two sealing protrusions 4 are symmetrically disposed on two end surfaces of the sealing ring body 1, wherein the sealing protrusions 4 are ring-shaped, and the cross section of the sealing protrusions 4 is isosceles trapezoid.

The sealing bulge 4 is coaxially arranged with the sealing ring body 1, one end of the sealing bulge 4 is connected with the end part of the sealing ring, and the other end of the sealing bulge 4 is parallel to the end surface of the sealing ring body 1.

It will be appreciated that the two sealing protrusions 4 described in this embodiment will inhibit deformation against the sealing location of the target product, creating a certain stress through contact, thereby increasing the sealing effect.

In summary, the utility model provides a metal sealing ring with a positioning ring, which can keep higher tightness and stability in various vacuum (super vacuum) working environments through a flexible sealing ring body which is precise and easy to compress.

In the description of this specification, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

While embodiments of the present utility model have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the utility model.

Claims (9)

1. A metal seal ring with a locating ring, comprising: the sealing ring comprises a sealing ring body, wherein the cross section of a ring body of the sealing ring body forms two free ends towards the same side, and an inwards concave curve shape is formed between the two free ends;

the side line of the free end on the upper part of the sealing ring body is obliquely arranged, wherein the side line forms an acute angle with the horizontal plane.

2. The self-retaining ring metal seal ring of claim 1, further comprising: the positioning ring is arranged in the sealing ring body, and the peripheral end of the circumference of the positioning ring is in interference fit between two free ends of the sealing ring body.

3. The metal seal ring with the positioning ring according to claim 2, wherein the end face of the free end of the lower portion of the seal ring body is inclined and is arranged symmetrically with the same inclined structure as the upper portion of the free end.

4. A metal seal ring with a positioning ring according to claim 3, wherein the connection between the end point of the side line and the inner side of the ring body cross section is a target connection position.

5. The metal seal ring with the positioning ring according to claim 2, wherein the cross section of the positioning ring is square, and the positioning ring and the seal ring body are coaxially arranged.

6. The self-contained retaining ring metal seal ring of claim 4, wherein said retaining ring is connected to each of said two target connection locations.

7. The metal seal ring with the positioning ring according to claim 1, wherein two sealing bulges are symmetrically arranged on two end faces of the seal ring body, the sealing bulges are annular, and the cross section of the sealing bulges is isosceles trapezoid.

8. The metal seal ring with the positioning ring according to claim 7, wherein the sealing protrusion is coaxially arranged with the seal ring body, one end of the sealing protrusion is connected with the end portion of the seal ring, and the other end of the sealing protrusion is parallel to the end face of the seal ring body.

9. The self-retaining ring-carrying metal seal ring of any one of claims 1-8, wherein the seal ring body is chamfered at both ends.