CN220555718U - Swing frame structure and vacuum coating equipment - Google Patents

Abstract

The utility model discloses a swing frame structure and vacuum coating equipment, the swing frame structure comprises a swing frame which is arranged in a vacuum chamber, the swing frame comprises two support plates and a plurality of rollers, two ends of the rollers are respectively and rotatably arranged on the inner sides of the two support plates, the swing frame structure also comprises a cross beam, a driving component and two support columns which are oppositely arranged left and right, the cross beam is positioned below the swing frame, two ends of the cross beam are respectively and rotatably arranged on the inner walls of two sides of the vacuum chamber, the driving component is connected with one end of the cross beam, two ends of the cross beam are respectively and rotatably connected with the two support plates, one ends of the two support columns are respectively and fixedly arranged on the outer sides of the two support plates or rotatably arranged on the inner walls of two sides of the vacuum chamber, and the other ends of the two support columns are respectively and rotatably arranged on the inner walls of two sides of the vacuum chamber. The utility model can ensure that the rotation of the two support plates is synchronous.

Description

Swing frame structure and vacuum coating equipment

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to a swing frame structure and vacuum coating equipment.

Background

The vacuum coating machine comprises an evaporation coating device, a magnetron sputtering coating device and the like. In some cases, the unreeling roller and the reeling roller are provided with swing frame structures. Taking the wind-up roll department is provided with the rocker structure as an example, this rocker structure is located the place ahead of wind-up roll, usually include two backup pads and a plurality of roller that are relative setting, the upper end and the wind-up roll of two backup pads correspond, this a plurality of rollers are usually including first roller, the second is crossed roller and roll bending (the flattening roller promptly), first roller that crosses, the second is crossed the roller, the both ends of roll bending set up in the inboard of two backup pads rotationally respectively, first roller that crosses, the second crosses the roller corresponds with the upper end of two backup pads respectively, the roll bending is located first roller and second cross between the roller, two backup pads can use the second to cross the roller and rotate as the centre of a circle, when the rolling diameter of the film of wind-up roll rolling is increasing, can drive first roller and keep away from the wind-up roll through the rotation of two backup pads, thereby can make first roller and the film face of film of rolling up all the time keep fixed distance with the film face outer layer of rolling, in order to guarantee that the process film face is smooth, the roll bending can carry out the rolling face of film of rolling up to flattening, ensure the overall appearance and flattening and the effect that the second crosses the effect that the roll of using the tension is used to conduct the film to the effect.

The rotation of the two supporting plates is usually driven by two air cylinders, specifically, the tail ends of the output shafts of the two air cylinders are respectively connected with the two supporting plates, and the two supporting plates are respectively driven to rotate by the two air cylinders, so that the first passing roller is close to or far from the winding roller. In this kind of driving mode, adopted two cylinders, the condition that two cylinders drive is asynchronous appears easily to lead to two backup pads unable synchronous rotation, thereby can make first roller, second roller, curved roller and the parallel degree of wind-up roll inconsistent, can not guarantee the roughness of the film face of wind-up roll in-process.

Disclosure of Invention

In order to overcome the defects in the prior art, the utility model provides the swing frame structure and the vacuum coating equipment, which can ensure that the rotation of two support plates is synchronous, so that the flatness of the film surface in the winding process of the winding roller can be ensured.

The technical scheme adopted for solving the technical problems is as follows:

the first aspect of the utility model provides a swing frame structure, which comprises a swing frame arranged in a vacuum chamber, wherein the swing frame comprises two support plates and a plurality of rollers, the two support plates are oppositely arranged left and right, two ends of the rollers are respectively and rotatably arranged on the inner sides of the two support plates, the swing frame structure further comprises a cross beam, a driving assembly and two support columns oppositely arranged left and right, the cross beam is positioned below the swing frame, two ends of the cross beam are respectively and rotatably arranged on two side inner walls of a vacuum chamber, the driving assembly is connected with one end of the cross beam, two ends of the cross beam are respectively and rotatably connected with the two support plates, one ends of the two support columns are respectively and fixedly arranged on the outer sides of the two support plates, the other ends of the two support columns are respectively and rotatably arranged on two side inner walls of the vacuum chamber, and the driving assembly is used for driving the cross beam to rotate, so that the two support plates can be respectively and rotatably driven to rotate around the axes of the two support columns, and the rollers can be driven to rotate around the axes of the two support columns.

As a preferable technical scheme, the upper ends of the supporting plates are inclined backwards, and the supporting columns are located below the centers of the corresponding supporting plates and in front of the cross beams.

As an preferable technical scheme, the swing frame structure further comprises two connecting rod assemblies, and the two supporting plates are respectively connected with the cross beam in a rotating mode through the two connecting rod assemblies.

As the preferable technical scheme, the connecting rod assembly comprises a first connecting rod and a second connecting rod, one end of the first connecting rod is rotationally connected with the inner side of the corresponding supporting plate, a rotational connecting point of the first connecting rod and the inner side of the corresponding supporting plate is positioned above the corresponding supporting column, the other end of the first connecting rod is hinged with one end of the second connecting rod, the other end of the second connecting rod is fixedly connected with the cross beam, and the rotation of the cross beam can drive the second connecting rod to rotate around the axis of the cross beam, so that the corresponding supporting plate can be pulled or pushed to rotate around the axis of the corresponding supporting column through the first connecting rod.

As the preferable technical scheme, the driving assembly comprises a driving cylinder and a third connecting rod, the driving cylinder is arranged on the outer wall of one side of the vacuum chamber, the tail end of an output shaft of the driving cylinder is rotationally connected with one end of the third connecting rod, the other end of the third connecting rod is fixedly connected with one end of the cross beam, the driving cylinder is used for driving the third connecting rod to swing back and forth, and the back and forth swing of the third connecting rod can drive the cross beam to rotate.

As the preferable technical scheme, the swing frame structure further comprises a counterweight assembly, the counterweight assembly comprises a counterweight block, a fourth connecting rod and a fifth connecting rod, the counterweight block is positioned below the cross beam and in front of the cross beam, one end of the fourth connecting rod is fixedly connected with the counterweight block, the other end of the fourth connecting rod is hinged with one end of the fifth connecting rod, the other end of the fifth connecting rod is fixedly connected with one end, far away from the driving assembly, of the cross beam, and the rotation of the cross beam can drive the fifth connecting rod to rotate around the axis of the cross beam, so that the counterweight block can be driven to move up and down through the fourth connecting rod.

As the preferable technical scheme, the outside of two backup pads is equipped with respectively with two first support column mounting holes that two support columns correspond, the one end of support column is fixed to be set up in the first support column mounting hole of the backup pad that corresponds.

As the preferable technical scheme, the outside of two backup pads is equipped with respectively with two first support column mounting holes that two support columns correspond, the one end of support column is rotatably set up in the first support column mounting hole of corresponding backup pad through the support column bearing.

As a preferred technical solution, the driving assembly is arranged on one side outer wall of the vacuum chamber.

The second aspect of the utility model provides vacuum coating equipment, which comprises a vacuum chamber, and an unreeling roller and a reeling roller which are arranged in the vacuum chamber, wherein the unreeling roller and/or the reeling roller are provided with the swing frame structure according to the technical scheme.

The beneficial effects of the utility model are as follows: according to the utility model, the beam, the driving assembly and the two support columns are arranged, the beam is driven to rotate through the driving assembly, and the two support plates are driven to rotate through the rotation of the beam, so that the rotation of the two support plates is synchronous, the parallelism of a plurality of rollers and the wind-up roller is ensured to be consistent, and the flatness of the film surface in the wind-up process of the wind-up roller is ensured.

Drawings

The utility model will be further described with reference to the drawings and examples.

FIG. 1 is a schematic cross-sectional view of a vacuum coating apparatus according to an embodiment of the present utility model;

FIG. 2 is a schematic front view of a swing frame structure of the vacuum plating apparatus shown in FIG. 1;

FIG. 3 is a right side schematic view of a swing frame structure of the vacuum coating apparatus shown in FIG. 1;

FIG. 4 is a schematic left-hand view of a swing frame structure of the vacuum coating apparatus shown in FIG. 1;

fig. 5 is a schematic front view of an alternative configuration of the swing frame of the vacuum plating apparatus shown in fig. 1.

Reference numerals:

10. a vacuum chamber;

20. a wind-up roll;

30. a swing frame structure; 31. a support plate; 32. a first pass roller; 33. a second pass roller; 34. a roller bending; 36. a cross beam; 362. a cross beam bearing; 37. a support column; 372. a support column bearing; 391. a first link; 392. a second link; 393. a first hinge shaft; 394. a rotating shaft; 382. a driving cylinder; 3822. an output shaft driving the cylinder; 383. a third link; 422. balancing weight; 423. a fourth link; 424. a fifth link; 425. and a second hinge shaft.

Detailed Description

The conception, specific structure, and technical effects produced by the present utility model will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, features, and effects of the present utility model. It is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments, and that other embodiments obtained by those skilled in the art without inventive effort are within the scope of the present utility model based on the embodiments of the present utility model. In addition, all the coupling/connection relationships referred to in the patent are not direct connection of the single-finger members, but rather, it means that a better coupling structure can be formed by adding or subtracting coupling aids depending on the specific implementation. The technical features in the utility model can be interactively combined on the premise of no contradiction and conflict.

Referring to fig. 1, a vacuum coating apparatus according to an embodiment of the present utility model is an evaporation coating apparatus or a magnetron sputtering coating apparatus. The vacuum coating equipment comprises a vacuum chamber 10, and an unreeling roller and a reeling roller 20 which are arranged in the vacuum chamber 10. The unwind and wind-up rolls 20 are arranged in sequence from front to back. The wind-up roll 20 is provided with a swing frame structure 30, in particular to a swing frame structure 30 arranged in front of the wind-up roll 20.

Two unreeling roller mounting holes and two reeling roller mounting holes which respectively correspond to two ends of the unreeling roller and two ends of the reeling roller 20 are respectively arranged on the inner walls of two sides of the vacuum chamber 10. Unreeling roller bearings are respectively sleeved on the peripheries of two ends of the unreeling roller, two ends of the unreeling roller are rotatably arranged in two unreeling roller mounting holes through the unreeling roller bearings respectively, and one end of the unreeling roller protrudes out of the outer wall of the corresponding side of the vacuum chamber 10 and is connected with an unreeling driving motor arranged on the outer wall. The unreeling roller bearing can provide rotary support for the unreeling roller. The unreeling roller is driven to rotate by the unreeling driving motor, so that the film mounted on the unreeling roller can be unreeled by the unreeling roller. The wind-up roller bearings are respectively sleeved on the peripheries of the two ends of the wind-up roller 20, the two ends of the wind-up roller 20 are respectively rotatably arranged in the two wind-up roller mounting holes through the wind-up roller bearings, and one end of the wind-up roller 20 protrudes out of the outer wall of the corresponding side of the vacuum chamber 10 and is connected with a wind-up driving motor arranged on the outer wall. The wind-up roller bearings are provided to provide rotational support for the wind-up roller 20. The winding roller 20 is driven to rotate by the winding driving motor, so that the film unreeled by the unreeling roller can be wound by the winding roller 20.

In other embodiments, the unreeling roller may be provided with a swing frame structure 30, specifically, the swing frame structure 30 is located at the rear of the unreeling roller, or the unreeling roller and the reeling roller 20 are respectively provided with a swing frame structure 30, the swing frame structure 30 at the unreeling roller is located at the rear of the unreeling roller, and the swing frame structure 30 at the reeling roller 20 is located at the front of the reeling roller 20.

As shown in connection with fig. 2-4, the swing frame structure 30 includes a swing frame, a cross beam 36, a drive assembly, two support posts 37, two link assemblies, and a counterweight assembly.

The swing frame is disposed within the vacuum chamber 10. The swing frame comprises two support plates 31 and several rollers. The rolls include a first pass 32, a second pass 33 and a roll nip 34 (i.e., nip roll). The two support plates 31 are disposed opposite to each other. The support plate 31 is located in front of the wind-up roll 20. The upper end of the support plate 31 is inclined rearward with respect to the vacuum chamber 10 and corresponds to the wind-up roll 20, and the lower end of the support plate 31 is located below the wind-up roll 20. The inner sides of the two support plates 31 are respectively provided with two first roller mounting holes, two second roller mounting holes and two roller mounting holes corresponding to the two ends of the first roller 32, the two ends of the second roller 33 and the two ends of the roller 34. The outer circumferences of the two ends of the first roller 32 are respectively sleeved with a first roller bearing, and the two ends of the first roller 32 are respectively rotatably arranged in the two first roller mounting holes through the first roller bearings. The outer circumferences of the two ends of the second roller 33 are respectively sleeved with a second roller bearing, and the two ends of the second roller 33 are respectively rotatably arranged in the two second roller mounting holes through the second roller bearings. The outer circumferences of the two ends of the bending roller 34 are respectively sleeved with a bending roller bearing, and the two ends of the bending roller 34 are respectively rotatably arranged in the two bending roller mounting holes through the bending roller bearings. The first passing roller 32 corresponds to the upper ends of the two support plates 31, the second passing roller 33 corresponds to the lower ends of the two support plates 31, and the bending roller 34 is located between the first passing roller 32 and the second passing roller 33 and near the front side of the support plates 31. The first passing roller 32, the second passing roller 33 and the bending roller 34 are all arranged in parallel with the winding roller 20. The first roller bearings may be provided to provide rotational support for the first roller 32. The second roller bearings may be provided to provide rotational support for the second roller 33. The roller bearings may be provided to provide rotational support for the roller 34.

Of the first passing roller 32, the second passing roller 33, and the bending roller 34, for example, the bending roller 34 may be a driving roller, and the first passing roller 32 and the second passing roller 33 may be driven rollers.

Specifically, one end of the bending roller 34 protrudes outside the corresponding support plate 31 and has an extended end that protrudes outside one side outer wall of the vacuum chamber 10 and is connected to a bending roller driving motor provided on one side outer wall of the vacuum chamber 10 through a belt transmission assembly. The roller drive motor is used to drive the roller 34 to rotate via a belt drive assembly.

In the present utility model, the inner side means a side close to the center of the vacuum chamber 10, and the outer side means a side far from the center of the vacuum chamber 10.

The cross member 36 is located below the swing frame. Both ends of the cross member 36 are rotatably provided on both side inner walls of the vacuum chamber 10, respectively, and both ends of the cross member 36 protrude from both side outer walls of the vacuum chamber 10, respectively. Specifically, two beam mounting holes corresponding to two ends of the beam 36 are respectively formed in two side inner walls of the vacuum chamber 10, beam bearings 362 are respectively sleeved on the peripheries of the two ends of the beam 36, the two ends of the beam 36 are respectively rotatably arranged in the two beam mounting holes through the beam bearings 362, and the two ends of the beam 36 respectively protrude out of two side outer walls of the vacuum chamber 10. Beam bearings 362 are provided to provide rotational support for beam 36.

The two support plates 31 are rotatably connected to both ends of the cross member 36 by two link assemblies, respectively. Specifically, the link assembly includes a first link 391 and a second link 392, one end of the first link 391 is rotatably connected to the inner side of the corresponding support plate 31, and a rotational connection point between the center of the corresponding support plate 31 and the rear side of the corresponding support plate 31, and the other end of the first link 391 is hinged to one end of the second link 392 through a first hinge shaft 393, and the hinge manner is conventional, which is not described herein again, and the other end of the second link 392 is fixedly connected to the corresponding one end of the cross beam 36. The second link 392 is inclined backward, the first link 391 is inclined forward, and an included angle is formed between the first link 391 and the second link 392, and the included angle is an obtuse angle. The hinge point between the first link 391 and the second link 392 is located rearward of the center of the cross beam 36, rearward of the rotational connection point between the first link 391 and the corresponding support plate 31.

One end of the first link 391 is rotatably coupled to the inner side of the corresponding support plate 31 through a rotation shaft 394. Specifically, the one end fixed cover of first connecting rod 391 is established in the one end periphery of pivot 394, and the other end periphery cover of pivot 394 is equipped with the pivot bearing, and the other end of pivot 394 passes through the pivot bearing and rotationally sets up in the inboard pivot mounting hole of corresponding backup pad 31, and the pivot mounting hole is the blind hole preferably, and the pivot bearing of setting can provide the rotation support to pivot 394. The rotary shafts 394 are located between the centers of the corresponding support plates 31 and the rear sides of the corresponding support plates 31.

Two support columns 37 are respectively provided between the two support plates 31 and the inner walls of the vacuum chamber 10. One end of the support column 37 is fixedly provided at the outer side of the corresponding support plate 31, and the other end of the support column 37 is rotatably provided on the inner wall of the corresponding side of the vacuum chamber 10.

Specifically, two first support column mounting holes corresponding to the two support columns 37 are respectively provided on the outer sides of the two support plates 31, and the two first support column mounting holes are preferably blind holes. Two second support column mounting holes corresponding to the two support columns 37 are respectively formed in the inner walls of the two sides of the vacuum chamber 10. One end of the support column 37 is fixedly arranged in a corresponding first support column mounting hole, a support column bearing 372 is sleeved on the periphery of the other end of the support column 37, and the other end of the support column 37 is rotatably arranged in a corresponding second support column mounting hole through the support column bearing 372. Support post bearings 372 are provided to provide rotational support for support post 37.

The support column 37 is located below the center of the corresponding support plate 31, specifically, between the center of the corresponding support plate 31 and the second passing roller 33, and the axis of the support column 37 and the axis of the second passing roller 33 are located on the same straight line. Support column 37 is located forward of cross beam 36.

The driving assembly is provided on one side outer wall of the vacuum chamber 10 and is connected to one end of the cross member 36. Specifically, the drive assembly includes a drive cylinder 382 and a third link 383. The driving cylinder 382 is disposed on one side outer wall of the vacuum chamber 10, which can reduce the volume of the vacuum chamber 10 and can prevent the driving cylinder 382 from being deposited with an evaporation plating material or a magnetron sputtering plating material. The drive cylinder 382 is located rearward of the cross member 36 and is disposed obliquely upward. The output shaft 3822 of the driving cylinder 382 is located above the beam 36, and the end of the output shaft 3822 is rotatably connected to one end of the third link 383, for example, in a hinged manner, and the other end of the third link 383 is fixedly connected to one end of the beam 36. The driving cylinder 382 is used for driving the third link 383 to swing back and forth, the back and forth swing of the third link 383 can drive the cross beam 36 to rotate, the rotation of the cross beam 36 can drive the second link 392 of the two link assemblies to rotate around the axis of the cross beam 36, and under the action of the two support columns 37, the two support plates 31 can be respectively pushed or pulled by the first link 391 of the two link assemblies to rotate around the axis of the two support columns 37, so that the first passing roller 32, the second passing roller 33 and the bending roller 34 can be driven to rotate around the axis of the two support columns 37, and the first passing roller 32 can be far away from or close to the winding roller 20. During rotation of the two support plates 31, the two support columns 37 may be rotated in synchronization with the two support plates 31.

The weight assembly includes a weight 422, a fourth link 423, and a fifth link 424. The weight 422 is located below the beam 36 and in front of the beam 36, i.e. the weight 422 is located on the same side as the two support columns 37. The fourth link 423 is in a vertical state, one end of the fourth link 423 is fixedly connected with the balancing weight 422, the other end of the fourth link 423 is hinged with one end of the fifth link 424 through the second hinge shaft 425, the hinge mode is existing, details are omitted here, the other end of the fifth link 424 is fixedly connected with one end, far away from the third link 383, of the cross beam 36, and projections of the fifth link 424 and the second link 392 on an inner wall of one side of the vacuum chamber 10 are symmetrical with respect to the cross beam 36. The fifth link 424 forms an angle with the fourth link 423, which is an obtuse angle. During the rotation of the cross beam 36, the rotation of the cross beam 36 may drive the fifth link 424 to rotate around the axis of the cross beam 36, so that the fourth link 423 may drive the weight 422 to move up and down.

Through the above structure, in practical application, before the wind-up roll 2 performs wind-up work, the driving cylinder 382 drives the third link 383 to swing backward, the backward swing of the third link 383 can drive the cross beam 36 to rotate in the counterclockwise direction, the rotation of the cross beam 36 can drive the second links 392 of the two link assemblies to rotate in the counterclockwise direction around the axis of the cross beam 36, and under the action of the two support columns 37, the two support plates 31 can be pulled to rotate in the counterclockwise direction around the axis of the two support columns 37 respectively by the first links 391 of the two link assemblies, so that the first pass roll 32, the second pass roll 33 and the bending roll 34 can be driven to rotate in the counterclockwise direction around the axis of the two support columns 37, and the first pass roll 32 is close to the wind-up roll 20. During the rotation of the cross beam 36 in the counterclockwise direction, the rotation of the cross beam 36 may drive the fifth link 424 to rotate in the counterclockwise direction around the axis of the cross beam 36, so that the weight 422 may be driven to move upward by the fourth link 423, since the support columns 37 are located between the centers of the corresponding support plates 31 and the second passing roller 33, during the rotation of the two support plates 31 in the counterclockwise direction, the downward force may be greater and greater behind the cross beam 36, and the weight 422 may be greater and greater by the upward movement of the weight 422, so that the downward force may be greater and greater in front of the cross beam 36, and so that the force behind the cross beam 36 and the force in front of the cross beam 36 may be balanced.

Then the unreeling roller is unreeled, the reeling roller 20 is reeled, along with the increase of the reeling diameter of the film reeled by the reeling roller 20, the driving cylinder 382 drives the third connecting rod 383 to swing forwards, the forward swing of the third connecting rod 383 can drive the cross beam 36 to rotate clockwise, the rotation of the cross beam 36 can drive the second connecting rod 392 of the two connecting rod assemblies to rotate clockwise around the axis of the cross beam 36, the first connecting rod 391 of the two connecting rod assemblies can drive the two supporting plates 31 to rotate clockwise around the axis of the two supporting columns 37 respectively, and accordingly the first passing roller 32, the second passing roller 33 and the bending roller 34 can be driven to rotate clockwise around the axis of the two supporting columns 37, and the first passing roller 32 is far away from the reeling roller 20. In the process of winding the winding roller 20, the first passing roller 32 is continuously far away from the winding roller 20, so that the first passing roller 32 always keeps a certain distance from the outermost layer of the film surface of the film on the winding roller 20, and the film surface is ensured to be flat in the winding process. During the clockwise rotation of the cross beam 36, the rotation of the cross beam 36 may drive the fifth link 424 to rotate clockwise about the axis of the cross beam 36, so that the weight 422 may be driven to move downward by the fourth link 423, and since the support column 37 is located between the center of the corresponding support plate 31 and the second roller 32, during the clockwise rotation of the two support plates 31, the downward force may be smaller and smaller behind the cross beam 36, and the downward force may be smaller and smaller in front of the cross beam 36 by the downward movement of the weight 422, so that the force behind the cross beam 36 and the force in front of the cross beam 36 may be balanced. The bending roller 34 is used for flattening the film surface of the film rolled by the rolling roller 20, and guaranteeing the flatness and the overall rolling appearance effect of the film surface. The second pass roller 33 functions as a conductive guide film and may also be used as a tension detecting roller.

According to the utility model, the beam 36, the driving assembly and the two supporting columns 37 are arranged, the beam 36 is driven to rotate through the driving assembly, and the two supporting plates 31 are driven to rotate through the rotation of the beam 36, so that the rotation of the two supporting plates 31 is synchronous, the parallelism of the first passing roller 32, the second passing roller 33, the bending roller 34, namely a plurality of rollers and the winding roller 20 can be ensured to be consistent, and the flatness of the film surface in the winding process of the winding roller 20 is ensured. By providing the weight 422, a balancing force is exerted during rotation of the two support plates 31, and the support pressure of the first and second links 391 and 392 can be reduced.

There is also an alternative to the arrangement of support columns 37. As shown in fig. 5, one end of the support column 37 is rotatably provided at the outer side of the corresponding support plate 31, and the other end of the support column 37 is fixedly provided on the inner wall of the corresponding side of the vacuum chamber 10.

Specifically, two first support column mounting holes corresponding to the two support columns 37 are respectively provided on the outer sides of the two support plates 31, and the two first support column mounting holes are preferably blind holes. Two second support column mounting holes corresponding to the two support columns 37 are respectively formed in the inner walls of the two sides of the vacuum chamber 10. One end periphery cover of support column 37 is equipped with support column bearing 372, and support column 37's one end passes through support column bearing 372 rotatably to be set up in corresponding first support column mounting hole, and support column 37's the other end is fixed to be set up in corresponding second support column mounting hole. The second connecting rod 392 of the two connecting rod assemblies is driven by the cross beam 36 to rotate around the axis of the cross beam 36, and under the action of the two support columns 37, the two support plates 31 can be pushed or pulled to rotate around the axes of the two support columns 37 through the first connecting rod 391 of the two connecting rod assemblies, so that the first passing roller 32, the second passing roller 33 and the bending roller 34 can be driven to rotate around the axes of the two support columns 37, and the first passing roller 32 can be far away from or near the winding roller 20. During the rotation of the two support plates 31, the two support columns 37 cannot rotate.

While the preferred embodiment of the present utility model has been described in detail, the present utility model is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model, and these equivalent modifications or substitutions are included in the scope of the present utility model as defined in the appended claims.

Claims (10)

1. The swing frame structure comprises a swing frame arranged in a vacuum chamber, the swing frame comprises two support plates and a plurality of rollers, the two support plates are oppositely arranged left and right, two ends of the rollers are respectively and rotatably arranged at the inner sides of the two support plates, the swing frame is characterized in that,

the swing frame structure further comprises a cross beam, a driving assembly and two supporting columns which are oppositely arranged left and right, the cross beam is located below the swing frame, two ends of the cross beam are respectively and rotatably arranged on two side inner walls of the vacuum chamber, the driving assembly is connected with one end of the cross beam, two ends of the cross beam are respectively and rotatably connected with the two supporting plates, one ends of the two supporting columns are respectively and fixedly arranged on the outer sides of the two supporting plates or rotatably arranged on the inner walls of the two sides of the vacuum chamber, the other ends of the two supporting columns are respectively and rotatably arranged on the two side inner walls of the vacuum chamber, and the driving assembly is used for driving the cross beam to rotate so as to drive the two supporting plates to rotate around the axes of the two supporting columns respectively and drive the rollers to rotate around the axes of the two supporting columns.

2. The swing frame structure according to claim 1, wherein the upper ends of the support plates are inclined rearward, and the support columns are located below the centers of the corresponding support plates and in front of the cross beams.

3. The swing frame structure according to claim 2, further comprising two link assemblies, said two support plates being rotatably connected to said cross beam by said two link assemblies, respectively.

4. The swing frame structure according to claim 3, wherein the link assembly comprises a first link and a second link, one end of the first link is rotatably connected to the inner side of the corresponding support plate, the rotational connection point of the first link and the second link is located above the corresponding support column, the other end of the first link is hinged to one end of the second link, the other end of the second link is fixedly connected to the cross beam, and rotation of the cross beam can drive the second link to rotate around the axis of the cross beam, so that the corresponding support plate can be pulled or pushed to rotate around the axis of the corresponding support column by the first link.

5. The swing frame structure according to claim 1, wherein the driving assembly comprises a driving cylinder and a third connecting rod, the driving cylinder is arranged on an outer wall of one side of the vacuum chamber, the tail end of an output shaft of the driving cylinder is rotationally connected with one end of the third connecting rod, the other end of the third connecting rod is fixedly connected with one end of the cross beam, the driving cylinder is used for driving the third connecting rod to swing back and forth, and the back and forth swing of the third connecting rod can drive the cross beam to rotate.

6. The swing frame structure according to claim 4, further comprising a counterweight assembly, wherein the counterweight assembly comprises a counterweight, a fourth link and a fifth link, the counterweight is located below the cross beam and in front of the cross beam, one end of the fourth link is connected with the counterweight, the other end of the fourth link is hinged with one end of the fifth link, the other end of the fifth link is fixedly connected with one end of the cross beam, which is far away from the driving assembly, and rotation of the cross beam can drive the fifth link to rotate around the axis of the cross beam, so that the counterweight can be driven to move up and down by the fourth link.

7. The swing frame structure according to claim 1, wherein two first support column mounting holes corresponding to the two support columns are respectively provided on the outer sides of the two support plates, and one end of each support column is fixedly arranged in the corresponding first support column mounting hole of the support plate.

8. The swing frame structure according to claim 1, wherein two first support column mounting holes corresponding to the two support columns are respectively provided on outer sides of the two support plates, and one end of the support column is rotatably provided in the first support column mounting hole of the corresponding support plate through a support column bearing.

9. The swing frame structure of claim 1, wherein said drive assembly is adapted to be disposed on a side outer wall of a vacuum chamber.

10. Vacuum coating equipment comprises a vacuum chamber, and an unreeling roller and a reeling roller which are arranged in the vacuum chamber, and is characterized in that the unreeling roller and/or the reeling roller are provided with the swing frame structure as claimed in any one of claims 1-9.