CN220533296U - Dual-optical-path switching device capable of automatically distributing power - Google Patents
Dual-optical-path switching device capable of automatically distributing power Download PDFInfo
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- CN220533296U CN220533296U CN202322172004.5U CN202322172004U CN220533296U CN 220533296 U CN220533296 U CN 220533296U CN 202322172004 U CN202322172004 U CN 202322172004U CN 220533296 U CN220533296 U CN 220533296U
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- 230000010287 polarization Effects 0.000 claims abstract description 41
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000009977 dual effect Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 5
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- 101100448366 Arabidopsis thaliana GH3.12 gene Proteins 0.000 description 8
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- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 101100298998 Caenorhabditis elegans pbs-3 gene Proteins 0.000 description 1
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Abstract
The utility model discloses a double-light-path switching device capable of automatically distributing power. Comprises a variable light splitting ratio light splitting prism and a shielding device; the variable light splitting ratio light splitting prism comprises a variable light splitting ratio device and a polarization light splitting prism PBS, wherein the variable light splitting ratio device and the polarization light splitting prism PBS are sequentially arranged on a laser path, and the power of two paths of emergent light of the polarization light splitting prism PBS is adjusted through the cooperation of the variable light splitting ratio device and the polarization light splitting prism PBS; the shielding device is rotatably arranged on the light paths of two paths of emergent light of the polarization beam splitter prism PBS, and one path of emergent light is shielded by the shielding device. According to the utility model, the rotatable baffle plates shield the emergent light which is not used, so that the error processing can not occur during the cutting of the semiconductor wafer, and the normal operation of the cutting of the semiconductor wafer is ensured. The power of emergent light is regulated through the variable light splitting ratio light splitting prism, so that the requirements of cutting and processing of different products are met, the application range is enlarged, and the production cost is reduced.
Description
Technical field:
the utility model belongs to the technical field of semiconductor wafer processing, and particularly relates to a double-optical-path switching device capable of automatically distributing power.
The background technology is as follows:
in the semiconductor wafer production process, a laser is required to cut a semiconductor wafer, a polarization beam splitter PBS is arranged according to the power required by cutting, and laser emitted by the laser passes through the polarization beam splitter PBS to obtain a light beam conforming to the power, and the light beam conforming to the power cuts the semiconductor wafer.
Because the laser can obtain two light beams through the polarization beam splitter prism PBS, only one light beam is used in cutting, and in the actual use process, another light beam can often cause error processing, and how to avoid interference of the other light beam with cutting is a problem to be solved. In addition, the cutting of different products often requires light beams with different powers, and the existing processing technology can only be solved by using light sources with different powers, so that the production cost is increased.
The information disclosed in this background section is only for enhancement of understanding of the general background of the utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art.
The utility model comprises the following steps:
the utility model aims to provide a double-light-path switching device capable of automatically distributing power, which overcomes the defects in the prior art by shielding one light beam split by a Polarization Beam Splitter (PBS).
In order to achieve the above purpose, the present utility model provides a dual-optical-path switching device capable of automatically distributing power, comprising a variable splitting ratio splitting prism and a shielding device; the variable light splitting ratio light splitting prism comprises a variable light splitting ratio device and a polarization light splitting prism PBS, wherein the variable light splitting ratio device and the polarization light splitting prism PBS are sequentially arranged on a laser path, and the power of two paths of emergent light of the polarization light splitting prism PBS is adjusted through the cooperation of the variable light splitting ratio device and the polarization light splitting prism PBS; the shielding device is rotatably arranged on the light paths of two paths of emergent light of the polarization beam splitter prism PBS, and one path of emergent light is shielded by the shielding device.
Preferably, in the technical scheme, the shielding device comprises a first motor seat, a first motor, a rotating block and a baffle plate, wherein the first motor and the polarization beam splitter PBS are arranged on the first motor seat, the rotating block is arranged at the output end of the first motor, the rotating block is positioned at the periphery of the polarization beam splitter PBS, the baffle plate is arranged on the rotating block, the baffle plate is in a circular arc structure, and the rotating track of the baffle plate is positioned on the light path of two paths of emergent light of the polarization beam splitter PBS.
Preferably, in the technical scheme, the variable light splitting ratio device comprises a second motor base, a second motor and a half wave plate, the second motor is arranged on the second motor base and connected with the half wave plate, the half wave plate and the polarization beam splitting prism PBS are sequentially arranged on a laser path, the second motor drives the half wave plate to rotate to adjust the angle of the half wave plate, the half wave plates with different angles are combined with the polarization beam splitting prism PBS to form the variable light splitting ratio beam splitting prism, and the power of two paths of emergent light of the polarization beam splitting prism PBS is adjusted.
Preferably, in the technical scheme, an encoder is arranged at the output end of the second motor, the rotation angle of the half wave plate is recorded through the encoder, and the rotation angle of the half wave plate and the actual power are calibrated.
Compared with the prior art, the utility model has the following beneficial effects:
the rotatable baffle shields the emergent light which cannot be used, only the emergent light which can be used in cutting is reserved, the error processing can not occur in the process of cutting the semiconductor wafer, and the normal operation of cutting the semiconductor wafer is ensured. The power of emergent light is regulated through the variable light splitting ratio light splitting prism, so that the requirements of cutting and processing of different products are met, the application range is enlarged, and the production cost is reduced.
Description of the drawings:
FIG. 1 is a schematic diagram of a dual optical path switching device capable of automatically distributing power according to the present utility model;
FIG. 2 is a schematic view of a shielding device according to the present utility model;
FIG. 3 is a schematic diagram of a variable spectral ratio device according to the present utility model.
The specific embodiment is as follows:
the following detailed description of specific embodiments of the utility model is, but it should be understood that the utility model is not limited to specific embodiments.
Throughout the specification and claims, unless explicitly stated otherwise, the term "comprise" or variations thereof such as "comprises" or "comprising", etc. will be understood to include the stated element or component without excluding other elements or components.
As shown in fig. 1-3, a dual-optical-path switching device capable of automatically distributing power comprises a variable splitting ratio splitting prism and a shielding device 2; the variable light splitting ratio prism comprises a variable light splitting ratio device 1 and a polarization light splitting prism PBS3, wherein the variable light splitting ratio device 1 comprises a second motor base 10, a second motor 11, a half wave plate 12 and an encoder 13, the second motor 11 is arranged on the second motor base 10, the second motor 11 is connected with the half wave plate 12, the half wave plate 12 and the polarization light splitting prism PBS3 are sequentially arranged on a laser path, the half wave plate 12 is driven by the second motor 11 to rotate to adjust the angle of the half wave plate 12, the half wave plates 12 with different angles are combined with the polarization light splitting prism PBS3 to form the variable light splitting prism, and the power of two paths of emergent light of the polarization light splitting prism 3 is adjusted. The output end of the second motor 11 is provided with an encoder 13, the rotation angle of the half wave plate 12 is recorded through the encoder 13, and the rotation angle of the half wave plate 12 and the actual power are calibrated; the shielding device 2 comprises a first motor base 20, a first motor 21, a rotating block 22 and a baffle plate 23, wherein the first motor 21 and the polarization splitting prism PBS3 are arranged on the first motor base 20, the rotating block 22 is arranged at the output end of the first motor 21, the rotating block 22 is positioned on the periphery of the polarization splitting prism PBS3, the baffle plate 23 is arranged on the rotating block 22, the baffle plate 23 is of a circular arc structure, and the rotating track of the baffle plate 23 is positioned on the light path of two paths of emergent light of the polarization splitting prism PBS 3.
According to the power of the first outgoing beam and the second outgoing beam of the polarization beam splitter PBS3 during product setting and cutting, the second motor 11 is started to drive the half wave plate 12 to rotate to a proper angle, the first motor 21 is started to drive the baffle plate 23 to rotate to the optical path of the second outgoing beam, and the laser 4 emits laser. The laser enters the polarization beam splitter prism PBS3 through the entrance port 30 after passing through the half wave plate 12, and the laser respectively emits an emergent beam I and an emergent beam II through the first exit port 31 and the second exit port 32 through the polarization beam splitter prism PBS3, wherein the emergent beam II is shielded by the baffle plate 23, and the emergent beam I is used for cutting products. The actual power of the first outgoing beam and the second outgoing beam is recorded and is calibrated with the rotation angle of the half wave plate 12, and when the outgoing beam with certain power is needed in the subsequent use process, the half wave plate 12 is only required to rotate to the corresponding angle. The rotatable baffle plate 23 shields the emergent light which cannot be used, only the emergent light which can be used in cutting is reserved, the error processing can not occur in the process of cutting the semiconductor wafer, and the normal operation of cutting the semiconductor wafer is ensured. The power of emergent light is regulated through the variable light splitting ratio light splitting prism, so that the requirements of cutting and processing of different products are met, the application range is enlarged, and the production cost is reduced.
The foregoing descriptions of specific exemplary embodiments of the present utility model are presented for purposes of illustration and description. It is not intended to limit the utility model to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain the specific principles of the utility model and its practical application to thereby enable one skilled in the art to make and utilize the utility model in various exemplary embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the utility model be defined by the claims and their equivalents.
Claims (4)
1. The utility model provides a but automatic distribution power double optical path auto-change over device which characterized in that: comprises a variable light splitting ratio light splitting prism and a shielding device; the variable light splitting ratio light splitting prism comprises a variable light splitting ratio device and a polarization light splitting prism PBS, wherein the variable light splitting ratio device and the polarization light splitting prism PBS are sequentially arranged on a laser path, and the power of two paths of emergent light of the polarization light splitting prism PBS is adjusted through the cooperation of the variable light splitting ratio device and the polarization light splitting prism PBS; the shielding device is rotatably arranged on the light paths of two paths of emergent light of the polarization beam splitter prism PBS, and one path of emergent light is shielded by the shielding device.
2. The automatically power-distributable dual optical path switching apparatus of claim 1 wherein: the shielding device comprises a first motor seat, a first motor, a rotating block and a baffle plate, wherein the first motor and the polarization beam splitter PBS are arranged on the first motor seat, the rotating block is arranged at the output end of the first motor, the rotating block is positioned at the periphery of the polarization beam splitter PBS, the baffle plate is arranged on the rotating block and is in a circular arc structure, and the rotating track of the baffle plate is positioned on the light path of two paths of emergent light of the polarization beam splitter PBS.
3. The automatically power-distributable dual optical path switching apparatus of claim 2 wherein: the variable light splitting ratio device comprises a second motor seat, a second motor and a half wave plate, wherein the second motor is arranged on the second motor seat and connected with the half wave plate, the half wave plate and the polarization light splitting prism PBS are sequentially arranged on a laser path, the second motor drives the half wave plate to rotate to adjust the angle of the half wave plate, the half wave plates with different angles are combined with the polarization light splitting prism PBS to form the variable light splitting ratio light splitting prism, and the power of two paths of emergent light of the polarization light splitting prism PBS is adjusted.
4. The automatically power-distributable dual optical path switching apparatus of claim 3 wherein: the second motor output end is provided with the encoder, through the rotatory angle of encoder record half wave plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322172004.5U CN220533296U (en) | 2023-08-14 | 2023-08-14 | Dual-optical-path switching device capable of automatically distributing power |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322172004.5U CN220533296U (en) | 2023-08-14 | 2023-08-14 | Dual-optical-path switching device capable of automatically distributing power |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220533296U true CN220533296U (en) | 2024-02-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322172004.5U Active CN220533296U (en) | 2023-08-14 | 2023-08-14 | Dual-optical-path switching device capable of automatically distributing power |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220533296U (en) |
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2023
- 2023-08-14 CN CN202322172004.5U patent/CN220533296U/en active Active
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