CN220523369U - Water inlet valve for wafer cleaning mechanism - Google Patents

Water inlet valve for wafer cleaning mechanism Download PDF

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Publication number
CN220523369U
CN220523369U CN202322156989.2U CN202322156989U CN220523369U CN 220523369 U CN220523369 U CN 220523369U CN 202322156989 U CN202322156989 U CN 202322156989U CN 220523369 U CN220523369 U CN 220523369U
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CN
China
Prior art keywords
valve body
water inlet
connector
cleaning mechanism
valve
Prior art date
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Active
Application number
CN202322156989.2U
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Chinese (zh)
Inventor
陶明生
任中辛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Yinglongze Semiconductor Equipment Co ltd
Original Assignee
Suzhou Yinglongze Semiconductor Equipment Co ltd
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Application filed by Suzhou Yinglongze Semiconductor Equipment Co ltd filed Critical Suzhou Yinglongze Semiconductor Equipment Co ltd
Priority to CN202322156989.2U priority Critical patent/CN220523369U/en
Application granted granted Critical
Publication of CN220523369U publication Critical patent/CN220523369U/en
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Abstract

The utility model discloses a water inlet valve for a wafer cleaning mechanism, which comprises a body, wherein the body comprises a valve body, a water inlet rod, a transmission assembly and a connector, the water inlet rod, the transmission assembly and the connector are arranged on the valve body, the connector is arranged at the top of the valve body, the transmission assembly and the water inlet rod are respectively arranged at two sides of the valve body, a cavity connected with the water inlet rod and the connector is arranged in the valve body, and the transmission assembly comprises a connecting sleeve connected with the valve body and a pressure limiting sealing piece arranged in the connecting sleeve and connected with the cavity. Compared with the prior art, the automatic closing device has the advantages that the structure is simple, the use is convenient, the automatic closing can be realized, in addition, the automatic closing device can be automatically opened when liquid reaches the preset pressure, and the low-flow liquid can be effectively blocked for cleaning the wafer for the wafer cleaning mechanism.

Description

Water inlet valve for wafer cleaning mechanism
Technical Field
The application belongs to the field of water inlet valves, and particularly relates to a water inlet valve for a wafer cleaning mechanism.
Background
The inlet valve is a control component in the fluid delivery system and has a shut-off function. In the prior art, the water inlet valve comprises a valve body, a valve rod and a closing member, wherein a flow passage is arranged in the valve body, and the valve rod drives the closing member to cut off or communicate with the flow passage. At present, most of water inlet valves in the prior market can drive a closing member to communicate with a flow passage by manually pressing a valve rod, and in this way, although the operation is simple, the liquid cannot be limited in pressure, and the practical effect is very poor for the prior wafer cleaning mechanism, so that improvement is necessary. In view of this, we provide a water inlet valve for a wafer cleaning mechanism.
Disclosure of Invention
The present utility model is directed to a water inlet valve for a wafer cleaning mechanism, which solves the above-mentioned problems.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a water intaking valve for wafer wiper mechanism, includes the body, the body includes the valve body and locates intake rod, drive assembly and the connector on the valve body, the connector is located the top of valve body, drive assembly with intake rod locates respectively the both sides of valve body, just be provided with in the valve body with intake rod with the cavity that the connector is connected, drive assembly including connect in the adapter sleeve of valve body and locate in the adapter sleeve, and with the pressure limiting sealing member that the cavity is connected.
According to the technical scheme, liquid enters the valve body through the water inlet rod, the pressure limiting sealing piece is opened by utilizing the pressure of the liquid, so that the liquid enters the connector, and then the liquid is connected into the wafer cleaning mechanism through the connector.
As a preferred scheme of this application, the connector includes spacing platform and locates the outlet pipe of spacing platform both sides, wherein the outlet pipe of one side pass through the sealing washer install in the top of valve body.
As a preferable scheme of the valve, one side of the valve body is provided with an assembly seat connected with the connecting sleeve, and an assembly hole connected with the cavity is formed in the assembly seat.
As a preferred scheme of the present application, the pressure limiting sealing member includes a piston disposed in the connecting sleeve, a spring and a spring pressing block disposed on one side of the piston, and a plug connected with the cavity is disposed on the other side of the piston.
According to the technical scheme, the spring is pressed by the spring pressing block, so that the spring elastically presses the piston, the plug on the piston enters the cavity to prevent liquid from flowing between the water inlet rod and the connector, when the pressure in the liquid reaches the preset pressure, the liquid presses the plug to enable the plug to shrink inwards, and the liquid flowing between the water inlet rod and the connector is opened.
Compared with the prior art, the beneficial effects of this application are:
compared with the prior art, the automatic closing device has the advantages that the structure is simple, the use is convenient, the automatic closing can be realized, in addition, the automatic closing device can be automatically opened when liquid reaches the preset pressure, and the low-flow liquid can be effectively blocked for cleaning the wafer for the wafer cleaning mechanism.
Drawings
Fig. 1 is a schematic diagram related to the present application.
In the figure: the device comprises a spring pressing block 1, a spring 2, a connecting sleeve 3, a piston 4, a plug 5, a valve body 6, a connector 7 and a water inlet rod 8.
Description of the embodiments
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Examples
A water intaking valve for wafer wiper mechanism, refer to fig. 1, including the body, the body includes valve body 6 and installs intake rod 8, drive assembly and connector 7 on valve body 6, and connector 7 installs in the top of valve body 6, and drive assembly and intake rod 8 install respectively in the both sides of valve body 6, and has seted up the cavity of being connected with intake rod 8 and connector 7 in the valve body 6. In this embodiment, an assembly seat is provided on one side of the valve body 6, an assembly hole connected with the cavity is provided in the assembly seat, the transmission assembly includes a connecting sleeve 3 connected with the assembly seat and a pressure limiting sealing member installed in the connecting sleeve 3 and connected with the cavity, the pressure limiting sealing member includes a piston 4 installed in the connecting sleeve 3, a spring 2 and a spring pressing block 1 installed on one side of the piston 4, and a plug 5 installed on the other side of the piston 4 and connected with the cavity, and the plug 5 is compressed and opened by liquid.
Referring to fig. 1, a water inlet valve is connected to the wafer cleaning mechanism for ease of connection. In this embodiment, the connector 7 includes a limiting table and water outlet pipes disposed at two sides of the limiting table, wherein the water outlet pipe at one side is mounted at the top of the valve body 6 through threads and a sealing ring, and the water outlet pipe at the other side is mounted at the wafer cleaning mechanism through threads and a sealing ring.
Specifically, during actual use, the spring 2 is pressed by the spring pressing block 1, so that the spring 2 elastically presses the piston 4, the plug 5 on the piston 4 is prevented from entering the cavity to prevent liquid from flowing between the water inlet rod 8 and the connector 7, when the liquid enters the valve body 6 through the water inlet rod 8, the liquid presses the plug 5 when the pressure in the liquid reaches the preset pressure, the plug 5 is contracted inwards, and the liquid flowing between the water inlet rod 8 and the connector 7 is opened.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. The utility model provides a water intaking valve for wafer wiper mechanism, includes the body, its characterized in that, the body includes valve body (6) and locates intake rod (8), drive assembly and connector (7) on valve body (6), connector (7) are located the top of valve body (6), drive assembly with intake rod (8) are located respectively the both sides of valve body (6), just be provided with in valve body (6) with intake rod (8) with cavity that connector (7) are connected, drive assembly including connect in adapter sleeve (3) of valve body (6) and locate in adapter sleeve (3) and with the pressure limiting sealing member that the cavity is connected.
2. The water inlet valve for the wafer cleaning mechanism according to claim 1, wherein the connector (7) comprises a limiting table and water outlet pipes arranged on two sides of the limiting table, and the water outlet pipe on one side is arranged on the top of the valve body (6) through a sealing ring.
3. The water inlet valve for the wafer cleaning mechanism according to claim 1, wherein one side of the valve body (6) is provided with an assembly seat connected with the connecting sleeve (3), and an assembly hole connected with the cavity is formed in the assembly seat.
4. A water inlet valve for a wafer cleaning mechanism according to claim 1, characterized in that the pressure limiting seal comprises a piston (4) arranged in the connecting sleeve (3), a spring (2) and a spring pressing block (1) arranged at one side of the piston (4), and a plug (5) connected with the cavity is arranged at the other side of the piston (4).
CN202322156989.2U 2023-08-11 2023-08-11 Water inlet valve for wafer cleaning mechanism Active CN220523369U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322156989.2U CN220523369U (en) 2023-08-11 2023-08-11 Water inlet valve for wafer cleaning mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322156989.2U CN220523369U (en) 2023-08-11 2023-08-11 Water inlet valve for wafer cleaning mechanism

Publications (1)

Publication Number Publication Date
CN220523369U true CN220523369U (en) 2024-02-23

Family

ID=89933069

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322156989.2U Active CN220523369U (en) 2023-08-11 2023-08-11 Water inlet valve for wafer cleaning mechanism

Country Status (1)

Country Link
CN (1) CN220523369U (en)

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