CN220520606U - Pipeline convenient to installation for magnetron sputtering machine - Google Patents
Pipeline convenient to installation for magnetron sputtering machine Download PDFInfo
- Publication number
- CN220520606U CN220520606U CN202321124682.8U CN202321124682U CN220520606U CN 220520606 U CN220520606 U CN 220520606U CN 202321124682 U CN202321124682 U CN 202321124682U CN 220520606 U CN220520606 U CN 220520606U
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- CN
- China
- Prior art keywords
- connecting pipe
- wall
- block
- magnetron sputtering
- pipeline
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Links
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 18
- 238000009434 installation Methods 0.000 title claims description 10
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 14
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 10
- 239000004800 polyvinyl chloride Substances 0.000 claims description 10
- 239000010410 layer Substances 0.000 claims description 9
- 239000012790 adhesive layer Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000004907 flux Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to the technical field of pipelines of magnetron sputtering machines, and discloses a pipeline for the magnetron sputtering machines, which is convenient to install, and comprises a first connecting pipe, wherein a fixing device is arranged on the outer surface of the first connecting pipe, a rotating block is arranged on the structure of the fixing device, a threaded rod is driven to rotate by rotating the rotating block, a connecting rod is connected with the threaded rod along the outer edge of the threaded rod, the threaded rod is driven to rotate and simultaneously move, one end of the connecting rod far away from the threaded rod is fixedly assembled with a connecting block, the connecting block can be pushed to move, a fixing ring is fixedly assembled with the outer wall of the connecting block, the fixing ring is stressed to move, a clamping block is driven to enter a clamping groove formed on the outer surface of the first connecting pipe and a round hole formed on the outer surface of a second connecting pipe, the purpose of fixing the first connecting pipe and the second connecting pipe is achieved, the device is convenient to install and detach, and the efficiency of installing and detaching of workers is improved.
Description
Technical Field
The utility model relates to the technical field of pipelines of magnetron sputtering machines, in particular to a pipeline for a magnetron sputtering machine, which is convenient to install.
Background
The magnetron sputtering coating machine is a universal coating machine and is used for various single-layer films, multi-layer films and doped film systems.
The traditional pipeline for the magnetron sputtering machine convenient to install can refer to Chinese patent of the utility model with the publication number of CN203999797U, which discloses a magnetic flux pipe of a direct current magnetron sputtering machine with variable magnetic flux distribution, wherein the magnetic flux pipe comprises a magnetic tube, a rotating shaft, a cathode target and an electromagnet; the magnetic flux tube is a cylindrical shell, the axis of the magnetic tube is horizontally arranged, the cathode target material is arranged on the front end face of the magnetic tube, and the rotating shaft is parallel to the axis of the magnetic tube and is arranged outside the rear end face of the magnetic tube; an electromagnet is arranged in the rear end face of the magnetic tube; according to the utility model, through improving the appearance design of the magnetic tube, the magnetic tube is designed into a plurality of electromagnets with adjustable magnetic field directions and magnetic flux, and the uniformity of the film can be adjusted to a required process by changing the magnetic field directions and the magnetic flux of each electromagnet. "
When the equipment is used, the pipeline is connected through the threads, the connection mode is simple, the installation and the disassembly are inconvenient, the installation and the disassembly efficiency of staff are reduced, the equipment is exposed to the outside in the use process, and is in direct contact with air, substances such as water vapor in the air can corrode the pipeline after long-time use, the pipeline is corroded and damaged, and the service life of the pipeline is reduced.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides a pipeline for a magnetron sputtering machine, which is convenient to install, has the advantages of being convenient to install and disassemble a pipeline, improving the efficiency of the installation and disassembly of workers, reducing the contact between the pipeline and air, reducing the anti-corrosion effect on the pipeline and improving the service life of the pipeline, and solves the problems in the prior art.
The utility model provides the following technical scheme: the utility model provides a magnetron sputtering machine pipeline convenient to installation, includes first connecting pipe, the surface of first connecting pipe is provided with fixing device, fixing device's structure has the turning block, the fixed threaded rod that is equipped with in top of the output shaft of turning block, the outer edge threaded connection of threaded rod has the connecting rod, the one end fixedly equipped with connecting block of threaded rod is kept away from to the connecting rod, the outer wall of connecting block is fixed to be equipped with solid fixed ring, gu fixed ring's inner wall fixedly equipped with fixture block.
As a preferable technical scheme of the utility model, the outer surface of the first connecting pipe is provided with a clamping groove, and the inner wall of the clamping groove is in sliding connection with the outer wall of the clamping block.
As a preferable technical scheme of the utility model, the outer wall of the first connecting pipe is provided with a round groove, the inner wall of the round groove is connected with the second connecting pipe in a sliding manner, and the inner wall of the first connecting pipe is provided with a rubber pad.
As a preferable technical scheme of the utility model, the outer surface of the second connecting pipe is provided with a round hole, and the inner wall of the round hole is in sliding connection with the outer wall of the clamping block.
As a preferred embodiment of the present utility model, the second connection pipe includes a polyvinyl chloride coating layer, the bottom of which is fixedly equipped with an adhesive layer, and the bottom of which is fixedly equipped with a drying layer.
As a preferable technical scheme of the utility model, the outer surfaces of the first connecting pipe and the second connecting pipe are both coated with an organic silicon coating, and the outer surface of the rotating block is provided with a rotating rod.
Compared with the prior art, the utility model has the following beneficial effects:
1. this magnetron is pipeline for sputtering machine convenient to installation drives the threaded rod and rotates through rotating the rotating block, the connecting rod of external edge threaded connection through the threaded rod, drive the connecting rod and remove when making threaded rod pivoted, keep away from the one end fixed mounting's of threaded rod connecting block through the connecting rod, make can promote the connecting block and remove, the outer wall fixed mounting's of connecting block solid fixed ring, make gu fixed ring atress remove, and then make the drive fixture block get into the draw-in groove that first connecting pipe surface was seted up and the round hole that the surface of second connecting pipe was seted up, reach the purpose of fixing first connecting pipe and second connecting pipe, be convenient for install and dismantle the device, improve staff's installation and the efficiency of dismantlement.
2. This magnetron is pipeline for sputtering machine convenient to installation, through the polyvinyl chloride coating that is equipped with for can play waterproof effect to the device, reduce water and pipeline and contact, through the adhesive linkage that is equipped with, make can be connected polyvinyl chloride coating and dry layer, through the dry layer that is equipped with, make can dry the device, absorb moisture, reduce the moisture and corrode the pipeline, improve the life of pipeline, and then reduce use cost.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
FIG. 2 is a schematic cross-sectional view of the present utility model;
FIG. 3 is a schematic view of a fastening structure according to the present utility model;
fig. 4 is a schematic diagram of an explosive structure according to the present utility model.
In the figure: 1. a first connection pipe; 2. a second connection pipe; 201. a polyvinyl chloride coating; 202. an adhesive layer; 203. drying the layer; 3. a fixing device; 301. a rotating block; 302. a threaded rod; 303. a connecting rod; 304. a connecting block; 305. a fixing ring; 306. a clamping block; 4. and a rubber pad.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, a pipeline for a magnetron sputtering machine convenient to install comprises a first connecting pipe 1, wherein a fixing device 3 is arranged on the outer surface of the first connecting pipe 1, a rotating block 301 is arranged on the structure of the fixing device 3, a threaded rod 302 is fixedly arranged at the top of an output shaft of the rotating block 301, a connecting rod 303 is connected to the outer edge of the threaded rod 302 in a threaded manner, a connecting block 304 is fixedly arranged at one end, away from the threaded rod 302, of the connecting rod 303, a fixing ring 305 is fixedly arranged on the outer wall of the connecting block 304, and a clamping block 306 is fixedly arranged on the inner wall of the fixing ring 305.
Referring to fig. 2, a clamping groove is formed on the outer surface of the first connecting pipe 1, and the inner wall of the clamping groove is slidably connected with the outer wall of the clamping block 306, so that the clamping block 306 can slide on the inner wall of the clamping groove conveniently through the structure, friction resistance and friction loss are reduced, and service life is prolonged.
Referring to fig. 1, a circular groove is formed in an outer wall of a first connecting pipe 1, and a second connecting pipe 2 is slidably connected to an inner wall of the circular groove, and a rubber pad 4 is disposed on an inner wall of the first connecting pipe 1.
Referring to fig. 2, the outer surface of the second connecting pipe 2 is provided with a circular hole, and the inner wall of the circular hole is slidably connected with the outer wall of the clamping block 306, so that the clamping block 306 can conveniently enter the circular hole provided on the outer surface of the second connecting pipe 2, and the first connecting pipe 1 and the second connecting pipe 2 can be installed and fixed.
Referring to fig. 4, the second connection pipe 2 includes a polyvinyl chloride coating 201, an adhesive layer 202 is fixedly installed at the bottom of the polyvinyl chloride coating 201, and a drying layer 203 is fixedly installed at the bottom of the adhesive layer 202, so that the device can be waterproof and dried, and corrosion of water vapor in air to a pipeline can be reduced.
Referring to fig. 1, the outer surfaces of the first connecting pipe 1 and the second connecting pipe 2 are coated with an organic silicon coating, and the outer surface of the rotating block 301 is provided with a rotating rod.
The theory of operation, through rotating the turning block 301, drive the threaded rod 302 and rotate, the connecting rod 303 of external edge threaded connection through the threaded rod 302, make the threaded rod 302 rotate and drive the connecting rod 303 and remove simultaneously, keep away from the connecting block 304 of the one end fixed mounting of threaded rod 302 through the connecting rod 303, make can promote the connecting block 304 and remove, the outer wall fixed mounting's of connecting block 304 solid fixed ring 305, make gu fixed ring 305 atress remove, and then make drive the draw-in groove that the clamping block 306 got into first connecting pipe 1 surface was seted up and the round hole that the surface of second connecting pipe 2 was seted up, reach the purpose of fixing first connecting pipe 1 and second connecting pipe 2, be convenient for install and dismantle the device, through the polyvinyl chloride coating 201 that is equipped with, make the device play waterproof effect, reduce water and pipeline and contact, through the adhesive layer 202 that is equipped with, make the polyvinyl chloride coating 201 and dry layer 203 are connected, through the dry layer 203 that is equipped with, make the device dry, absorb moisture.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a magnetron sputtering machine pipeline convenient to installation, includes first connecting pipe (1), its characterized in that: the outer surface of first connecting pipe (1) is provided with fixing device (3), the structure of fixing device (3) has rotating block (301), the top of the output shaft of rotating block (301) is fixed to be equipped with threaded rod (302), the external edge threaded connection of threaded rod (302) has connecting rod (303), the one end fixed mounting who keeps away from threaded rod (302) connecting rod (303) has connecting block (304), the outer wall of connecting block (304) is fixed to be equipped with solid fixed ring (305), the inner wall of solid fixed ring (305) is fixed to be equipped with fixture block (306).
2. The pipeline for the magnetron sputtering machine convenient to install according to claim 1, wherein: the clamping groove is formed in the outer surface of the first connecting pipe (1), and the inner wall of the clamping groove is in sliding connection with the outer wall of the clamping block (306).
3. The pipeline for the magnetron sputtering machine convenient to install according to claim 1, wherein: the outer wall of first connecting pipe (1) has seted up the circular slot, and the inner wall sliding connection of circular slot has second connecting pipe (2), the inner wall of first connecting pipe (1) is provided with rubber pad (4).
4. A magnetron sputtering machine pipeline convenient to install according to claim 3, wherein: the outer surface of the second connecting pipe (2) is provided with a round hole, and the inner wall of the round hole is in sliding connection with the outer wall of the clamping block (306).
5. A magnetron sputtering machine pipeline convenient to install according to claim 3, wherein: the second connecting pipe (2) comprises a polyvinyl chloride coating (201), an adhesive layer (202) is fixedly arranged at the bottom of the polyvinyl chloride coating (201), and a drying layer (203) is fixedly arranged at the bottom of the adhesive layer (202).
6. The pipeline for the magnetron sputtering machine convenient to install according to claim 1, wherein: the outer surfaces of the first connecting pipe (1) and the second connecting pipe (2) are coated with an organic silicon coating, and the outer surface of the rotating block (301) is provided with a rotating rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321124682.8U CN220520606U (en) | 2023-05-11 | 2023-05-11 | Pipeline convenient to installation for magnetron sputtering machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321124682.8U CN220520606U (en) | 2023-05-11 | 2023-05-11 | Pipeline convenient to installation for magnetron sputtering machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220520606U true CN220520606U (en) | 2024-02-23 |
Family
ID=89938394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321124682.8U Active CN220520606U (en) | 2023-05-11 | 2023-05-11 | Pipeline convenient to installation for magnetron sputtering machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220520606U (en) |
-
2023
- 2023-05-11 CN CN202321124682.8U patent/CN220520606U/en active Active
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