CN220507959U - Novel online measurement's laser ellipsometer - Google Patents
Novel online measurement's laser ellipsometer Download PDFInfo
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- CN220507959U CN220507959U CN202322052067.7U CN202322052067U CN220507959U CN 220507959 U CN220507959 U CN 220507959U CN 202322052067 U CN202322052067 U CN 202322052067U CN 220507959 U CN220507959 U CN 220507959U
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- 230000003287 optical effect Effects 0.000 claims description 20
- 238000003825 pressing Methods 0.000 claims description 12
- 238000009434 installation Methods 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
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- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 4
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Abstract
The utility model provides a novel online measurement laser ellipsometer which comprises a bracket, a main body arranged at the upper end of the bracket and a control box arranged at the upper end of the main body, wherein a Z-axis movement mechanism is fixedly arranged in the main body, a bottom plate is horizontally arranged at the lower end of the Z-axis movement mechanism so as to control the lifting movement of the bottom plate, and a debugging table for installing a test piece is arranged at the lower end of the bottom plate. The utility model provides an online laser ellipsometer structure which is convenient to use, stable and firm in structure and visible in test position. The design of the rotating bearing is eliminated, the production process of the equipment is simplified, the production efficiency is improved, and the performance of the equipment is also improved. The test bit is visible, so that the test state is easy to judge, and the practicability is improved.
Description
Technical Field
The utility model relates to the technical field of laser ellipsometers, in particular to a novel online measurement laser ellipsometer.
Background
The ellipsometer is a testing device for calculating the thickness, refractive index and extinction coefficient of a film by testing the change of the polarization state amplitude and phase of linearly polarized light after being reflected by a sample based on an ellipsometer testing technology and establishing a corresponding optical model of the sample.
The existing online laser ellipsometer has a complex structure and is inconvenient to install and use; the two optical module shafts of the online laser ellipsometer are provided with rotating mechanisms, which can be influenced by the installation precision and the precision of the rotating mechanisms, so that the consistency between the devices is poor; the wallboard is in an inclined mode, and the rotating shaft and the like are easy to deviate in position along with the extension of time, so that the testing accuracy is affected; the test piece is completely shielded by the machine, and the test position cannot be judged.
Disclosure of Invention
The technical problem solved by the utility model is to provide an online laser ellipsometer structure which is convenient to use, stable and firm in structure and visible in test position, so as to solve the problems in the background technology.
The technical problems solved by the utility model are realized by adopting the following technical scheme: the utility model provides a novel online measurement's laser ellipsometer, includes the support and installs the host computer body in the support upper end, sets up the control box in the host computer body upper end, the internal fixed mounting of host computer has Z axle motion, and the bottom plate is installed to Z axle motion's lower extreme level to control the bottom plate lift and remove, avoided the adverse effect that conventional online laser ellipsometer wallboard slope arouses, improved equipment stability, the lower extreme of bottom plate is equipped with the debugging platform that is used for installing the test piece, and one side of bottom plate corresponds the debugging platform and is equipped with optical signal and send out the module, and the opposite side is equipped with optical signal receiving module, optical signal sends module, optical signal receiving module and debugging platform pass through the synchronous reciprocates of bottom plate to realize focusing of Z axle direction, the debugging platform stretches out the host computer body bottom, so that personnel installs the test piece, and observe the position of test piece.
As a further scheme of the utility model: the main machine body comprises side plates, a front panel and a back panel, wherein the side plates are arranged on the brackets on two sides in parallel, the front panel is used for connecting one side of each side plate at two ends, the back panel is used for connecting the rear ends of the side plates at two ends, and the upper end of the main machine body is also provided with a top cover for sealing an inner cavity of the main machine body; the main body is internally provided with a plurality of supporting beams which are arranged between the side plates at the two ends.
As a further scheme of the utility model: the front panel is of a bending structure, and graduation marks are marked at the lower end of the front panel so as to accurately position the test piece placed on the test table and facilitate observation of whether the test piece is shifted.
As a further scheme of the utility model: the lateral plates at two sides of the main machine body are respectively provided with an observation window.
As a further scheme of the utility model: the Z-axis movement mechanism comprises a wallboard, a frame fixedly installed on the wallboard and a movement assembly arranged on the frame, wherein the movement assembly comprises a sliding block, a screw rod rotatably installed on the frame and a motor for driving the screw rod to rotate, the two sides of the frame, which are positioned on the screw rod, are respectively provided with sliding rods, the two sides of the sliding block are respectively and slidably installed on the sliding rods, a screw hole is formed in the middle of the sliding block, the sliding block is installed on the screw rod through a screw hole thread sleeve, lifting adjustment of the sliding block is controlled through the motor driving screw rod, and the lower end of the sliding block is fixedly connected with a bottom plate through a connecting piece so as to drive the bottom plate to move.
As a further scheme of the utility model: one side of the frame is provided with a positioning sensor for limiting, and one side of the sliding block is provided with a positioning plate corresponding to the positioning sensor so as to control the moving distance of the sliding block.
As a further scheme of the utility model: the upper end of the debugging table is provided with an elastic pressing sheet for clamping and fixing the test piece, and the elastic pressing sheet is provided with a plurality of elastic pressing sheets.
As a further scheme of the utility model: the control box comprises a laminate plate arranged at the upper end of the main body and a box plate encircling the periphery of the laminate plate, wherein an upright post is fixedly arranged at the joint of the box plate, the cover plate is arranged at the upper end of the box plate and is fixed on the upright post through screws, electric parts are arranged on the laminate plate, and a plurality of interfaces are distributed on one side of the box plate.
As a further scheme of the utility model: the laminate and the cover plate are respectively opened corresponding to the motor, the motor penetrates through the laminate and stretches into the control box, and the cover plate is provided with a cover corresponding to the motor so as to cover the upper end of the motor.
As a further scheme of the utility model: the lower extreme of support is equipped with the base, and the base sets up perpendicularly with the support to improve the stability of equipment installation.
Compared with the prior art, the utility model has the beneficial effects that: the Z-axis movement mechanism controls the screw rod to rotate through the motor, so that the bottom plate is driven to move up and down through the sliding block, the bottom plate is horizontally arranged at the lower end of the connecting piece, adverse effects caused by inclination of a conventional on-line laser ellipsometer wallboard are avoided, the stability of equipment is improved, and the behavior sensor is used for limiting a Z-axis movement interval and determining a zero position. The optical signal collecting module, the optical signal sending module and the debugging table are all installed on the bottom plate and move up and down together with the bottom plate, so that focusing in the Z-axis direction is realized. The elastic pressing piece is arranged on the debugging table and has a certain elastic force, the testing piece is pressed during debugging, the scale marks are arranged on the front panel corresponding to the testing piece, the testing piece placed on the debugging table is accurately positioned, and whether the testing piece is shifted or not is conveniently observed. The utility model provides an online laser ellipsometer structure which is convenient to use, stable and firm in structure and visible in test position. The design of the rotating bearing is eliminated, the production process of the equipment is simplified, the production efficiency is improved, and the performance of the equipment is also improved. The test bit is visible, so that the test state is easy to judge, and the practicability is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic diagram of a main body structure of the present utility model;
FIG. 3 is a schematic view of the internal structure of the main body of the present utility model;
FIG. 4 is a schematic view of the structure of the Z-axis motion mechanism of the present utility model;
FIG. 5 is a schematic diagram of the control box structure of the present utility model;
the marks in the figure are as follows: 1. a bracket; 2. a main body; 3. a control box; 4. a debugging table; 5. a wallboard; 11. a base; 20. an observation window; 21. a bottom plate; 22. an optical signal emitting module; 23. an optical signal receiving module; 24. a side plate; 25. a front panel; 26. a back plate; 27. a top cover; 28. a support beam; 29. scale marks; 31. a box plate; 32. a laminate; 33. a column; 34. a cover plate; 35. a cover cap; 41. a test piece; 42. elastic tabletting; 51. a frame; 52. a slide block; 53. a screw rod; 54. a motor; 55. a slide bar; 56. a connecting piece; 57. and positioning the sensor.
Detailed Description
The utility model is further described with reference to the following detailed drawings in order to make the implementation, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
As shown in figures 1 to 5 of the drawings,
the embodiment provides a novel online measurement's laser ellipsometer, including support 1 and install host computer body 2, the control box 3 of setting in host computer body 2 upper end at support 1 upper end, fixed mounting has Z axle motion in the host computer body 2, and bottom plate 21 is installed to Z axle motion's lower extreme level to control bottom plate 21 and go up and down to remove, avoided the adverse effect that conventional online laser ellipsometer wallboard 5 slope arouses, improved equipment stability, the lower extreme of bottom plate 21 is equipped with the debugging platform 4 that is used for installing test piece 41, and one side of bottom plate 21 corresponds debugging platform 4 and is equipped with optical signal and sends module 22, and the opposite side is equipped with optical signal receiving module 23, optical signal sends module 22, optical signal receiving module 23 and debugging platform 4 and reciprocates through the bottom plate 21 in step to realize focusing of Z axle direction, debugging platform 4 stretches out host computer body 2 bottom, so that the personnel installs test piece 41, and observes the position of test piece 41.
In this embodiment, the main body 2 includes side plates 24 mounted on the two side brackets 1 in parallel, a front panel 25 for connecting one sides of the side plates 24 at two ends, and a back plate 26 for connecting the rear ends of the side plates 24 at two ends, and a top cover 27 is further provided at the upper end of the main body 2 for sealing the inner cavity of the main body 2; a plurality of supporting beams 28 are arranged in the main body 2 and are arranged between the two end side plates 24. The front panel 25 is of a bending structure, and graduation marks 29 are marked on the lower end of the front panel 25 to accurately position the test piece 41 placed on the test table 4, and whether the test piece 41 is shifted or not is conveniently observed. The side plates 24 on the two sides of the main machine body 2 are respectively provided with an observation window 20, which is favorable for dismantling when equipment fails and observing and detecting the inside of the equipment.
In this embodiment, the Z-axis motion mechanism includes a wall board 5, a frame 51 fixedly installed on the wall board 5, and a motion assembly disposed on the frame 51, where the motion assembly includes a slider 52, a screw rod 53 rotatably installed on the frame 51, and a motor 54 for driving the screw rod 53 to rotate, the two sides of the frame 51 located on the screw rod 53 are respectively provided with a sliding rod 55, the two sides of the slider 52 are respectively slidably installed on the sliding rod 55, a screw hole is disposed in the middle of the slider 52, and the slider is sleeved and installed on the screw rod 53 through screw holes, so that the screw rod 53 is driven by the motor 54 to control lifting adjustment of the slider 52, and the lower end of the slider 52 is fixedly connected with the bottom plate 21 through a connecting piece 56, so as to drive movement of the bottom plate 21. A positioning sensor 57 for limiting is installed on one side of the frame 51, and a positioning plate is arranged on one side of the sliding block 52 corresponding to the positioning sensor 57 so as to control the moving distance of the sliding block 52. The upper end of the debugging table 4 is provided with an elastic pressing piece 42 for clamping and fixing the test piece 41, and the elastic pressing piece 42 is provided with a plurality of elastic pressing pieces.
In this embodiment, the control box 3 includes a laminate 32 mounted on the upper end of the main body 2 and a box plate 31 surrounding the laminate 32, where a stand column 33 is fixedly arranged at the joint of the box plate 31, a cover plate 34 is mounted on the upper end of the box plate 31 and fixed on the stand column by screws, electrical parts are mounted on the laminate 32, and a plurality of interfaces are distributed on one side of the box plate 31. The laminate 32 and the cover plate 34 are respectively opened corresponding to the motor 54, the motor 54 penetrates through the laminate 32 and extends into the control box 3, and the cover plate 34 is provided with a cover 35 corresponding to the motor 54 so as to cover the upper end of the motor 54. The lower extreme of support 1 is equipped with base 11, and base 11 sets up perpendicularly with support 1 to improve the stability of equipment installation.
The working principle of the utility model is as follows: the Z-axis movement mechanism controls the screw rod 53 to rotate through the motor 54, so that the bottom plate 21 is driven to move up and down through the sliding block 52, the bottom plate 21 is horizontally arranged at the lower end of the connecting piece 56, adverse effects caused by the inclination of the conventional on-line laser ellipsometer wallboard 5 are avoided, the equipment stability is improved, and the behavior sensor is used for limiting a Z-axis movement interval and determining a zero position. The optical signal collecting module, the optical signal emitting module 22 and the debugging table 4 are all arranged on the bottom plate 21 and move up and down together with the bottom plate to realize focusing in the Z-axis direction. The elastic pressing piece 42 is installed on the debugging table 4 and has a certain elastic force for pressing the test piece 41 during debugging, and the scale mark 29 is arranged on the front panel 25 corresponding to the test piece 41 so as to accurately position the test piece 41 placed on the debugging table 4 and facilitate observation of whether the test piece 41 is shifted.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof. It is noted that relational terms such as first and second, and the like, if any, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Claims (10)
1. The utility model provides a novel online measurement's laser ellipsometer, includes the support and installs the host computer body in the support upper end, sets up the control box in the host computer body upper end, the internal fixed mounting of host computer has Z axle motion, its characterized in that: the lower extreme level of Z axle motion installs the bottom plate to control the bottom plate lift and remove, the lower extreme of bottom plate is equipped with the debugging platform that is used for installing the test piece, and one side of bottom plate corresponds the debugging platform and is equipped with the optical signal and sends the module, and the opposite side is equipped with optical signal receiving module, optical signal sends module, optical signal receiving module and debugging platform and reciprocates through the bottom plate is synchronous, in order to realize focusing of Z axle direction, the debugging platform stretches out host computer body bottom, so that personnel installs the test piece, and observes the position of test piece.
2. The novel online measurement laser ellipsometer of claim 1, wherein: the main machine body comprises side plates, a front panel and a back panel, wherein the side plates are arranged on the brackets on two sides in parallel, the front panel is used for connecting one side of each side plate at two ends, the back panel is used for connecting the rear ends of the side plates at two ends, and the upper end of the main machine body is also provided with a top cover for sealing an inner cavity of the main machine body; the main body is internally provided with a plurality of supporting beams which are arranged between the side plates at the two ends.
3. The novel online measurement laser ellipsometer of claim 2, wherein: the front panel is of a bending structure, and graduation marks are marked at the lower end of the front panel so as to accurately position a test piece placed on the test bench.
4. The novel online measurement laser ellipsometer of claim 2, wherein: the lateral plates at two sides of the main machine body are respectively provided with an observation window.
5. The novel online measurement laser ellipsometer of claim 2, wherein: the Z-axis movement mechanism comprises a wallboard, a frame fixedly installed on the wallboard and a movement assembly arranged on the frame, wherein the movement assembly comprises a sliding block, a screw rod rotatably installed on the frame and a motor for driving the screw rod to rotate, the two sides of the frame, which are positioned on the screw rod, are respectively provided with sliding rods, the two sides of the sliding block are respectively and slidably installed on the sliding rods, a screw hole is formed in the middle of the sliding block, the sliding block is installed on the screw rod through a screw hole thread sleeve, lifting adjustment of the sliding block is controlled through the motor driving screw rod, and the lower end of the sliding block is fixedly connected with a bottom plate through a connecting piece so as to drive the bottom plate to move.
6. The novel online measurement laser ellipsometer of claim 5, wherein: one side of the frame is provided with a positioning sensor for limiting, and one side of the sliding block is provided with a positioning plate corresponding to the positioning sensor so as to control the moving distance of the sliding block.
7. The novel online measurement laser ellipsometer of claim 5, wherein: the upper end of the debugging table is provided with an elastic pressing sheet for clamping and fixing the test piece, and the elastic pressing sheet is provided with a plurality of elastic pressing sheets.
8. The novel online measurement laser ellipsometer of claim 5, wherein: the control box comprises a laminate plate arranged at the upper end of the main body and a box plate encircling the periphery of the laminate plate, wherein an upright post is fixedly arranged at the joint of the box plate, the cover plate is arranged at the upper end of the box plate and is fixed on the upright post through screws, electric parts are arranged on the laminate plate, and a plurality of interfaces are distributed on one side of the box plate.
9. The novel online measurement laser ellipsometer of claim 8, wherein: the laminate and the cover plate are respectively opened corresponding to the motor, the motor penetrates through the laminate and stretches into the control box, and the cover plate is provided with a cover corresponding to the motor so as to cover the upper end of the motor.
10. The novel online measurement laser ellipsometer of claim 1, wherein: the lower extreme of support is equipped with the base, and the base sets up perpendicularly with the support to improve the stability of equipment installation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322052067.7U CN220507959U (en) | 2023-08-01 | 2023-08-01 | Novel online measurement's laser ellipsometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322052067.7U CN220507959U (en) | 2023-08-01 | 2023-08-01 | Novel online measurement's laser ellipsometer |
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| Publication Number | Publication Date |
|---|---|
| CN220507959U true CN220507959U (en) | 2024-02-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322052067.7U Active CN220507959U (en) | 2023-08-01 | 2023-08-01 | Novel online measurement's laser ellipsometer |
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| Country | Link |
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| CN (1) | CN220507959U (en) |
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2023
- 2023-08-01 CN CN202322052067.7U patent/CN220507959U/en active Active
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