CN220503175U - Novel magnetron sputtering vacuum coating machine - Google Patents
Novel magnetron sputtering vacuum coating machine Download PDFInfo
- Publication number
- CN220503175U CN220503175U CN202321415522.9U CN202321415522U CN220503175U CN 220503175 U CN220503175 U CN 220503175U CN 202321415522 U CN202321415522 U CN 202321415522U CN 220503175 U CN220503175 U CN 220503175U
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- Prior art keywords
- guide rail
- electric guide
- equipment shell
- bolts
- bolt
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- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 13
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 12
- 238000007789 sealing Methods 0.000 claims abstract description 9
- 239000007921 spray Substances 0.000 claims abstract description 7
- 238000007747 plating Methods 0.000 abstract description 7
- 239000011248 coating agent Substances 0.000 description 14
- 238000000576 coating method Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a novel magnetron sputtering vacuum coating machine, which comprises an equipment shell, wherein a top electric guide rail is arranged on a top bolt on the inner side of the equipment shell; the magnetic control spray head is mounted on the lower sliding block of the top electric guide rail through bolts, and is characterized in that a side edge multi-position adjustable bracket structure is mounted on the left lower side of the inside of the equipment shell; the right side of the side multi-position adjustable bracket structure is provided with a convenient disassembly and assembly bracket structure; the right lower side of the inside of the equipment shell is provided with a side auxiliary supporting frame structure; the right side shaft of the front part of the equipment shell is provided with a sealing door; the inner side of the sealing door is embedded with an observation window. The three-clamping chuck can clamp and fix the film plating pipe fitting, and the jacking bolts are used for rotating from the upper side of the U-shaped fixing plate, so that the plate-shaped film plating object can be conveniently installed and fixed; the vertical position and the front and back position of the rotating motor can be adjusted through the first longitudinal electric guide rail and the transverse electric guide rail.
Description
Technical Field
The utility model belongs to the technical field of coating machines, and particularly relates to a novel magnetron sputtering vacuum coating machine.
Background
The utility model provides a vacuum magnetron sputtering coating machine is a scientific instrument that is used for material science, electron and communication technical field, current magnetron sputtering vacuum coating machine, includes the base, the top fixed mounting of base has the equipment shell, the right side fixed mounting at base top has first motor, inconvenient fixed to it when installing the coating piece of different shapes, can not adjust the angular position model of coating piece in a flexible way simultaneously.
Disclosure of Invention
Aiming at the technical problems, the utility model provides a novel magnetron sputtering vacuum coating machine which is simple in structure, can be used for mounting and storing coating pieces of different types, and can be used for flexibly adjusting the angle positions of the coating pieces.
The technical proposal is as follows: the novel magnetron sputtering vacuum coating machine comprises an equipment shell, wherein a top electric guide rail is arranged on an inner side top bolt of the equipment shell; the magnetic control spray head is mounted on the lower sliding block of the top electric guide rail through bolts, and is characterized in that a side edge multi-position adjustable bracket structure is mounted on the left lower side of the inside of the equipment shell; the right side of the side multi-position adjustable bracket structure is provided with a convenient disassembly and assembly bracket structure; the right lower side of the inside of the equipment shell is provided with a side auxiliary supporting frame structure; the right side shaft of the front part of the equipment shell is provided with a sealing door; the inner side of the sealing door is embedded with an observation window.
Preferably, the easy-to-detach clamping frame structure comprises a rotating motor, and a three-grabbing chuck is arranged on an output shaft of the rotating motor through bolts; a fixed seat is arranged on the right side of the three-grab chuck; the right bolt of the fixed seat is provided with a U-shaped fixed plate; the upper part of the U-shaped fixing plate is connected with a jacking bolt through threads; the lower part of the jacking bolt is provided with a jacking plate.
Preferably, the side edge multi-position adjustable bracket structure comprises a first longitudinal electric guide rail, wherein a transverse electric guide rail is arranged on a right side sliding block of the first longitudinal electric guide rail through bolts; the sliding block of the transverse electric guide rail is provided with a mounting tube by bolts; the front side of the installation tube is connected with an installation bolt in a threaded manner.
Preferably, the side auxiliary supporting frame structure comprises a second longitudinal electric guide rail, and an L-shaped supporting plate is mounted on a left sliding block of the second longitudinal electric guide rail through bolts; the left side of the upper part of the L-shaped supporting plate is respectively provided with a supporting rod by screws; the upper part of the supporting rod is respectively sleeved with a rubber cap.
Compared with the prior art, the utility model has the beneficial effects that:
according to the utility model, the three-grabbing chuck can be used for clamping and fixing the film plating pipe fitting, and the jacking bolts are used for rotating from the upper side of the U-shaped fixing plate, so that the plate-shaped film plating object can be conveniently installed and fixed.
In the utility model, the vertical position and the front-back position of the rotating motor can be adjusted through the first longitudinal electric guide rail and the transverse electric guide rail.
In the utility model, the rotary motor is placed on the inner side of the mounting pipe, and then the mounting bolt is screwed down, so that the rotary motor is conveniently fixed, and conversely, the rotary motor is conveniently disassembled and maintained after the mounting bolt is unscrewed.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
FIG. 2 is a schematic illustration of a side multi-position adjustable bracket structure of the present utility model.
Fig. 3 is a schematic structural view of the easy-to-detach clip frame structure of the present utility model.
Fig. 4 is a schematic structural view of the side auxiliary supporting frame structure of the present utility model.
In the figure:
1. an equipment housing; 2. a top motorized track; 3. a magnetic control spray head; 4. a side edge multi-position adjustable bracket structure; 41. a first longitudinal motorized rail; 42. a transverse electric guide rail; 43. installing a pipe; 44. installing a bolt; 5. the structure of the clamping frame is convenient to disassemble and assemble; 51. a rotating electric machine; 52. a three-grip chuck; 53. a fixing seat; 54. a U-shaped fixing plate; 55. a jack bolt; 56. a pressing plate; 6. a side auxiliary supporting frame structure; 61. a second longitudinal motorized rail; 62. an L-shaped supporting plate; 63. a support rod; 64. a rubber cap; 7. sealing the door; 8. and an observation window.
Detailed Description
The utility model is further described below with reference to the accompanying drawings:
examples:
as shown in fig. 1 and 2, the utility model provides a novel magnetron sputtering vacuum coating machine, which comprises an equipment shell 1, wherein a top electric guide rail 2 is arranged on the top bolt on the inner side of the equipment shell 1; the lower sliding block of the top electric guide rail 2 is provided with a magnetic control spray head 3 by a bolt, and is characterized in that the left lower side of the inside of the equipment shell 1 is provided with a side multi-position adjustable bracket structure 4; the right side of the side multi-position adjustable bracket structure 4 is provided with a convenient disassembly and assembly bracket structure 5; the right lower side of the inside of the equipment shell 1 is provided with a side auxiliary supporting frame structure 6; the right side shaft of the front part of the equipment shell 1 is provided with a sealing door 7; an observation window 8 is embedded in the inner side of the sealing door 7; the convenient-to-detach and clamp mounting frame structure 5 comprises a rotating motor 51, and a three-grab chuck 52 is mounted on an output shaft of the rotating motor 51 through bolts; a fixed seat 53 is arranged on the right side of the three-grab chuck 52; the right bolt of the fixed seat 53 is provided with a U-shaped fixed plate 54; the upper part of the U-shaped fixing plate 54 is connected with a jacking bolt 55 through threads; the lower part of the jacking bolt 55 is provided with a jacking plate 56, the three-grabbing chuck 52 can be used for clamping and fixing the film plating pipe fitting, and the jacking bolt 55 is used for rotating from the upper side of the U-shaped fixing plate 54, so that the plate-shaped film plating object can be conveniently installed and fixed.
As shown in fig. 2, in the above embodiment, specifically, the side multi-position adjustable bracket structure 4 includes a first longitudinal electric rail 41, a transverse electric rail 42 is mounted on a right slider of the first longitudinal electric rail 41 by a bolt, and the vertical position and the front-rear position of the rotating motor 51 can be adjusted by the first longitudinal electric rail 41 and the transverse electric rail 42; a mounting tube 43 is mounted on the slide block of the transverse electric guide rail 42 by bolts; the front side of the mounting tube 43 is connected with the mounting bolt 44 in a threaded manner, the mounting bolt 44 is screwed down after the rotating motor 51 is placed on the inner side of the mounting tube 43, the rotating motor 51 is further conveniently fixed, and the rotating motor 51 is convenient to detach and maintain after the mounting bolt 44 is unscrewed.
As shown in fig. 4, in the above embodiment, specifically, the side auxiliary supporting frame structure 6 includes a second longitudinal electric rail 61, and an L-shaped supporting plate 62 is mounted on a left slider of the second longitudinal electric rail 61 by a bolt; the left side of the upper part of the L-shaped supporting plate 62 is respectively provided with a supporting rod 63 by screws; the upper part of the supporting rod 63 is respectively sleeved with a rubber cap 64, and the rubber caps 64 can be used for storing larger film plating parts, and meanwhile, the right side of the plate can be supported when the U-shaped fixing plate 54 is clamped with a longer plate.
In the above embodiment, specifically, the first longitudinal electric rail 41 is bolt-mounted on the lower left side of the inner wall of the apparatus housing 1.
In the above embodiment, specifically, the bolts of the second longitudinal electric rail 61 are mounted on the lower right side of the inner wall of the apparatus housing 1.
In the above embodiment, specifically, the top electric rail 2, the transverse electric rail 42, the first longitudinal electric rail 41 and the second longitudinal electric rail 61 are electric rails of the model DS45M75F, respectively.
Principle of operation
In the working process, the mounting mode can be selected according to the shape of a coating piece required in use, the three-clamping chuck 52 can be directly used for fixing when the pipe coating piece is processed, the pipe coating piece can be placed on the inner side of the U-shaped fixing plate 54 when the pipe coating piece is fixed, then the pipe coating piece is rotated from the U-shaped fixing plate 54 by using the jacking bolts 55, the pipe coating piece is tightly jacked and fixed by using the jacking plates 56, meanwhile, the support rod 63 can be used for supporting the right side of the pipe, the coating piece can be directly placed on the upper part of the rubber cap 64 when the larger piece is coated, the height of the piece on the upper part of the L-shaped support plate 62 can be adjusted by using the second longitudinal electric guide rail 61, the upper and lower positions and the front and rear positions of the rotary motor 51 can be adjusted by using the first longitudinal electric guide rail 41 and the transverse electric guide rail 42, the rotary motor 51 can be driven to rotate by using the rotary motor 51 as required, and the left and right positions and left positions and right positions of the magnetic control spray head 3 can be flexibly adjusted by using the top electric guide rail 2, so that the magnetic control spray head 3 can be better arranged on the coating piece.
By using the technical scheme of the utility model or under the inspired by the technical scheme of the utility model, a similar technical scheme is designed by a person skilled in the art, so that the technical effects are achieved, and the technical effects fall into the protection scope of the utility model.
Claims (4)
1. The novel magnetron sputtering vacuum coating machine comprises an equipment shell (1), wherein a top electric guide rail (2) is arranged on the top bolt on the inner side of the equipment shell (1); the magnetic control spray head (3) is mounted on a lower sliding block of the top electric guide rail (2) through bolts, and is characterized in that a side edge multi-position adjustable bracket structure (4) is mounted on the left lower side of the inside of the equipment shell (1); the right side of the side multi-position adjustable bracket structure (4) is provided with a convenient-to-detach and clamp bracket structure (5); a side auxiliary supporting frame structure (6) is arranged at the right lower side of the inside of the equipment shell (1); the right side shaft of the front part of the equipment shell (1) is provided with a sealing door (7); an observation window (8) is embedded in the inner side of the sealing door (7); the convenient-to-detach clamping frame structure (5) comprises a rotating motor (51), and a three-grabbing chuck (52) is mounted on an output shaft of the rotating motor (51) through bolts; a fixed seat (53) is arranged on the right side of the three-grab chuck (52); a U-shaped fixing plate (54) is arranged on the right side bolt of the fixing seat (53); the upper part of the U-shaped fixing plate (54) is connected with a jacking bolt (55) through threads; a jacking plate (56) is arranged at the lower part of the jacking bolt (55); the side edge multi-position adjustable support structure (4) comprises a first longitudinal electric guide rail (41), and a transverse electric guide rail (42) is mounted on a right side sliding block of the first longitudinal electric guide rail (41) through bolts; a mounting tube (43) is mounted on the sliding block of the transverse electric guide rail (42) through bolts; the front side of the mounting pipe (43) is connected with a mounting bolt (44) in a threaded manner.
2. The novel magnetron sputtering vacuum coating machine according to claim 1, wherein the side auxiliary supporting frame structure (6) comprises a second longitudinal electric guide rail (61), and an L-shaped supporting plate (62) is mounted on a left sliding block of the second longitudinal electric guide rail (61) through bolts; the left side of the upper part of the L-shaped supporting plate (62) is respectively provided with a supporting rod (63) by screws; the upper parts of the supporting rods (63) are respectively sleeved with a rubber cap (64).
3. The novel magnetron sputtering vacuum coating machine according to claim 1, wherein the first longitudinal electric guide rail (41) is mounted on the left lower side of the inner wall of the equipment shell (1) through bolts.
4. The novel magnetron sputtering vacuum coating machine according to claim 2, wherein the bolts of the second longitudinal electric guide rail (61) are arranged on the right lower side of the inner wall of the equipment shell (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321415522.9U CN220503175U (en) | 2023-06-06 | 2023-06-06 | Novel magnetron sputtering vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321415522.9U CN220503175U (en) | 2023-06-06 | 2023-06-06 | Novel magnetron sputtering vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220503175U true CN220503175U (en) | 2024-02-20 |
Family
ID=89870031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321415522.9U Active CN220503175U (en) | 2023-06-06 | 2023-06-06 | Novel magnetron sputtering vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220503175U (en) |
-
2023
- 2023-06-06 CN CN202321415522.9U patent/CN220503175U/en active Active
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