CN220493244U

CN220493244U - Suction nozzle and mounting machine table

Info

Publication number: CN220493244U
Application number: CN202322105821.9U
Authority: CN
Inventors: 何正鸿; 陈泽; 高源�; 宋祥祎; 李永帅
Original assignee: Forehope Electronic Ningbo Co Ltd
Current assignee: Forehope Electronic Ningbo Co Ltd
Priority date: 2023-08-07
Filing date: 2023-08-07
Publication date: 2024-02-13
Anticipated expiration: 2033-08-07

Abstract

The disclosure provides a suction nozzle and a mounting machine table, and relates to the technical field of mounting machines. The suction nozzle comprises a suction nozzle head, a suction nozzle base and a control valve, wherein a cavity body, a suction hole and a first side wall exhaust hole are formed in the suction nozzle head and are respectively communicated with the cavity body; the suction nozzle head is made of a material capable of elastically deforming; the suction nozzle base is provided with a mounting groove, a second side wall exhaust hole and a surface exhaust hole; the suction nozzle head is arranged in the mounting groove; the first side wall vent hole and the second side wall vent hole are oppositely arranged, and the second side wall vent hole is communicated with the surface vent hole; the control valve is arranged at the first side wall vent hole or the second side wall vent hole. The suction nozzle can realize that no extra external vacuum is needed for adsorbing gas during suction, the equipment is simpler, and the cost is saved.

Description

Suction nozzle and mounting machine table

Technical Field

The utility model relates to the technical field of mounting tables, in particular to a suction nozzle and a mounting table.

Background

With the rapid development of the semiconductor industry, in the process of manufacturing a semiconductor device, a chip mounting process needs to use a mounting head suction nozzle to suck and mount a chip on a substrate, the suction nozzle is mainly mounted on a suction nozzle rod, and vacuum air flow is introduced onto the suction nozzle rod through a vacuum pipeline on a machine table and then reaches a suction nozzle hole, so that the vacuum suction of the suction nozzle is realized. In the prior art, the adsorption is realized mainly by using external vacuum airflow, and once the vacuum airflow stops supplying, the suction nozzle cannot work.

Disclosure of Invention

The utility model aims to provide a suction nozzle and a mounting table, which can facilitate the formation of negative pressure in a cavity of the suction nozzle to form a closed structure, and realize the suction of the suction nozzle to an object under the condition of no external vacuum gas.

Embodiments of the present utility model are implemented as follows:

in a first aspect, the present utility model provides a suction nozzle comprising:

the suction nozzle head is provided with a cavity, an adsorption hole and a first side wall exhaust hole which are respectively communicated with the cavity; the suction nozzle head is made of a material capable of elastically deforming;

the suction nozzle base is provided with a mounting groove, a second side wall exhaust hole and a surface exhaust hole; the suction nozzle head is arranged in the mounting groove; the first side wall exhaust hole and the second side wall exhaust hole are oppositely arranged, and the second side wall exhaust hole is communicated with the surface exhaust hole;

the control valve is arranged at the first side wall vent hole, the second side wall vent hole or the surface vent hole.

In an alternative embodiment, the control valve is a one-way valve.

In an alternative embodiment, the nozzle base is made of a metallic material.

In an alternative embodiment, the suction nozzle head comprises a mounting part and an adsorption part which are connected with each other, the mounting part is arranged in the mounting groove, and the adsorption part exposes out of the mounting groove; the first side wall vent hole is formed in the mounting portion, and the adsorption hole is formed in the adsorption portion.

In an alternative embodiment, the shape and size of the mounting portion corresponds to the shape and size of the mounting groove.

In an alternative embodiment, the height of the mounting portion and the depth of the mounting groove are equal.

In an alternative embodiment, the adsorption portion is conical.

In an alternative embodiment, the adsorption hole is provided at a conical head of the adsorption part.

In an alternative embodiment, the control valve comprises a valve body and a rotating shaft which are connected with each other, the rotating shaft is arranged at two ends of the valve body, and the rotating shaft is used for being in rotating connection with the wall of the second side wall vent hole or the first side wall vent hole or the surface vent hole.

In an alternative embodiment, a mounting hole is formed in the side, away from the nozzle head, of the nozzle base.

In a second aspect, the present utility model provides a mounter including a nozzle bar and a nozzle according to any of the foregoing embodiments, said nozzle being mounted on said nozzle bar.

The beneficial effects of the embodiment of the utility model include:

in the structure of the suction nozzle, when the suction nozzle adsorbs an object, the suction nozzle deforms due to external force, and air in the cavity is extruded and discharged to form a closed negative pressure environment structure, so that when the object is sucked, extra external vacuum gas is not needed, the equipment can be simplified, and the cost is reduced.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of the overall structure of a suction nozzle according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of an overall structure of a suction nozzle structure in which a suction nozzle head is not completely mounted;

fig. 3 is a schematic structural diagram of a nozzle head of a nozzle according to an embodiment of the present utility model;

fig. 4 is a schematic structural view of a nozzle base of a nozzle according to an embodiment of the present utility model;

fig. 5 is a schematic structural diagram of a control valve of a suction nozzle according to an embodiment of the present utility model.

Icon: 100-suction nozzle; 110-a nozzle head; 111-cavity; 112-adsorption holes; 113-a first sidewall vent; 114-a mounting portion; 115-an adsorption section; 120-suction nozzle base; 121-mounting slots; 122-a second sidewall vent; 123-surface vent holes; 130-a control valve; 131-a valve body; 133-spindle.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In order to overcome at least one defect in the prior art, the embodiment provides a suction nozzle, which can facilitate the formation of negative pressure in a cavity of the suction nozzle to form a closed structure, and can realize the suction of the suction nozzle to an object under the condition of no need of external vacuum gas.

Referring to fig. 1 to 4, the present embodiment provides a suction nozzle 100, which includes a nozzle head 110, a nozzle base 120 and a control valve 130, wherein the nozzle head 110 is provided with a cavity 111, and an adsorption hole 112 and a first sidewall exhaust hole 113 respectively communicated with the cavity 111. The nozzle head 110 is made of an elastically deformable material. The nozzle base 120 is provided with a mounting groove 121, a second sidewall vent 122, and a surface vent 123; the suction nozzle head 110 is arranged in the mounting groove 121; the first sidewall vent hole 113 and the second sidewall vent hole 122 are disposed opposite to each other, and the second sidewall vent hole 122 and the surface vent hole 123 communicate. The control valve 130 is provided at the first sidewall vent 113 or the second sidewall vent 122 or the surface vent 123. When the suction nozzle 100 adsorbs an object, the suction nozzle 100 deforms due to external force, and the air in the cavity 111 is extruded and discharged to form a closed negative pressure environment structure, so that no extra external vacuum gas is needed when the object is sucked, the equipment can be simplified, and the cost can be reduced.

In this embodiment, the control valve 130 is disposed in the second sidewall vent 122 for opening or closing the second sidewall vent 122. Of course, in other embodiments, the control valve 130 may be disposed on the first sidewall vent 113 or the surface vent 123, which is not particularly limited herein. Optionally, the control valve 130 employs a one-way valve. The gas can only be discharged from the chamber 111 through the control valve 130 and cannot flow into the chamber 111 through the control valve 130.

Referring to fig. 5, the control valve 130 includes a valve body 131 and a rotation shaft 133 connected to the valve body 131, the rotation shaft 133 is disposed at two ends of the valve body 131, and the rotation shaft 133 is rotatably connected to a wall of the second sidewall exhaust hole 122 to deflect the valve body 131, thereby opening or closing the second sidewall exhaust hole 122 by the valve body 131. It will be appreciated that the cross-sectional dimensions of the valve body 131 and the second sidewall vent 122 are compatible. It can be understood that the side wall of the second side wall exhaust hole 122 is provided with a connection hole corresponding to the rotation shaft 133 for the rotation shaft 133 to be inserted, thereby realizing the installation of the control valve 130.

Similarly, if the control valve 130 is provided in the first sidewall vent 113, the rotation shaft 133 is rotatably coupled to the wall of the first sidewall vent 113. If the control valve 130 is disposed in the surface vent hole 123, the rotary shaft 133 is rotatably connected to the wall of the surface vent hole 123.

It is understood that the nozzle head 110 is made of an elastically deformable material, such as a polymer, e.g., rubber, silicone, etc. Thus, the elastic deformation can be conveniently generated when the external force is applied to the surface mount device, and the original shape can be recovered after the deformation. The shape of the suction nozzle 100 may be a cylinder, a cone, a truncated cone, a prism, a pyramid, a truncated pyramid, or the like, or any other irregular shape. The cross-sectional shape of the cavity 111 in the nozzle head 110 may be a circle, a square, an ellipse, a triangle, a polygon with five sides or more, or other special-shaped shapes, which are not particularly limited herein.

The suction nozzle base 120 is made of a metal material, such as tungsten steel, and has the advantages of high structural strength, wear resistance, high rigidity and long service life. Of course, other metal materials such as elemental metals or alloys or mixed metals are also possible, and are not particularly limited herein.

The nozzle base 120 and the nozzle head 110 are detachably mounted, and the nozzle base and the nozzle head 110 are detachably separated. In this way, replacement and maintenance of the nozzle head 110 is facilitated. The nozzle base 120 is made of metal or other durable materials, can be used for a long time, only the nozzle 100 needs to be replaced when the nozzle base 120 is replaced, the cost is saved, and the replacement and maintenance are more convenient.

Alternatively, the nozzle head 110 includes a mounting part 114 and an adsorption part 115 connected to each other, the mounting part 114 being provided in the mounting groove 121, the adsorption part 115 exposing the mounting groove 121; the first sidewall vent hole 113 is provided in the mounting portion 114, and the suction hole 112 is provided in the suction portion 115. The mounting portion 114 is disposed in the mounting groove 121, and the nozzle base 120 can provide good protection for the nozzle 100. Meanwhile, the mounting groove 121 is communicated with the cavity 111, the suction nozzle base 120 can seal the cavity 111, and the cavity 111 of the suction nozzle head 110 can be ensured to be in a sealed environment, so that a closed structure is formed.

It is easily understood that the shape and size of the mounting portion 114 correspond to the shape and size of the mounting groove 121. The height of the mounting portion 114 is equal to the depth of the mounting groove 121. By this arrangement, the nozzle base 120 and the nozzle head 110 can be closely mounted, and the air tightness can be improved. The nozzle head 110 and the nozzle base 120 are bonded, welded, riveted, clamped, bolted or screwed.

In this embodiment, the adsorbing portion 115 has a conical shape. The adsorption hole 112 is provided at the conical head of the adsorption portion 115, i.e., on the axis of the adsorption portion 115. In other embodiments, the adsorbing portion 115 may be a cylinder, a cone, a truncated cone, a prism, a pyramid, a truncated pyramid, or the like, or may be any other irregular shape, which is not particularly limited herein.

Optionally, a mounting hole is provided on a side of the nozzle base 120 away from the nozzle head 110. The mounting holes are used for fixing on the machine, such as the mounting holes are used for fixing connection with the suction nozzle 100.

The suction nozzle 100 provided in this embodiment works as follows:

the nozzle head 110 is mounted on the nozzle base 120. The control valve 130 is normally closed. The suction nozzle head 110 is provided with a cavity 111 therein, and when the suction nozzle 100 sucks an object, the object covers the suction hole 112, so that the whole cavity 111 is in a closed state. The nozzle head 110 receives the mounting pressure to generate elastic deformation, and the elastic deformation presses the cavity 111, so that the gas in the cavity 111 is compressed, and the pressure in the cavity 111 increases. Under the mounting pressure, the gas pressure in the cavity 111 increases, forcing the control valve 130 to open, so that the gas is discharged from the cavity 111 through the first sidewall vent 113, the control valve 130, the second sidewall vent 122, and the surface vent 123. After the gas is exhausted, the pressure in the chamber 111 decreases and the control valve 130 is closed. After the deformation of the nozzle head 110 is recovered, the nozzle 100 and the suction object are in a sealed environment, thereby forming vacuum suction and realizing the suction function of the nozzle 100. In this way, the suction nozzle 100 can absorb the air without additional external vacuum, and the principle is simpler and the cost is lower.

It should be noted that, when sucking the object, the suction nozzle 100 may be located above or below the object. If the suction nozzle 100 is positioned above the object, suction is performed. That is, the suction hole 112 of the nozzle head 110 is downward, the nozzle head 110 is elastically deformed, and when the gas is discharged from the surface exhaust hole 123, the discharge direction of the gas is downward and the air flow is downward. Similarly, during the mounting and separating after the suction nozzle head 110 is deformed, the surface exhaust holes 123 exhaust air to form downward air flow, so that the separation speed of the suction nozzle head 110 and the sucked object can be increased, and the recovery of the suction nozzle head 110 can be accelerated.

It is easy to understand that the suction nozzle 100 sucks the chip and mounts the chip to the substrate as an example. When the suction nozzle 100 sucks the chip, the suction nozzle head 110 deforms, the control valve 130 is opened, and the gas in the cavity 111 is discharged from the surface exhaust hole 123. The suction nozzle 100 moves the chip to the substrate and adheres to the substrate, and the substrate may be pre-coated with adhesive for bonding the chip. After the bonding adhesive bonds the chip, the suction nozzle 100 moves upward and separates from the chip. In the separation process, a gap exists between the adsorption hole 112 and the chip, external air enters the cavity 111 of the suction nozzle head 110 through the adsorption hole 112, the suction nozzle head 110 is restored, the control valve 130 is opened again by the air, and part of the air is discharged through the first side wall exhaust hole 113, the second side wall exhaust hole 122 and the surface exhaust hole 123 to form downward air flow, so that the separation of the chip and the suction nozzle head 110 is accelerated.

The embodiment of the utility model also provides a mounting table which can be used for mounting the chip on the substrate. The mounter includes a suction nozzle 100 lever and a suction nozzle 100 as in any of the foregoing embodiments, the suction nozzle 100 being mounted on the suction nozzle 100 lever. Alternatively, the mounting hole on the nozzle base 120 is connected to the stem of the nozzle 100 to fix the nozzle 100 to the stem of the nozzle 100, so as to facilitate the suction and mounting of the chip by the mounter.

Of course, the suction nozzle 100 is not limited thereto, and may be used in other occasions requiring suction, such as pole piece transfer, material delivery, etc., without being limited thereto.

In summary, the suction nozzle 100 and the mounting table provided by the embodiments of the present utility model have the following advantages, including:

in the structure of the suction nozzle 100 provided by the embodiment of the utility model, when the suction nozzle 100 adsorbs an object, the suction nozzle 100 deforms due to external force, and the air in the cavity 111 is extruded and discharged to form a closed negative pressure environment structure, so that no extra external vacuum gas is needed when the object is sucked, the equipment can be simplified, and the cost is reduced. The suction nozzle 100 has wide application range and flexible use field, can be applied to various material adsorption and transfer scenes, and is not limited to chip mounting.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A suction nozzle, comprising:

2. The mouthpiece of claim 1, wherein the control valve is a one-way valve.

3. The suction nozzle as set forth in claim 1 wherein said nozzle base is made of a metallic material.

4. The suction nozzle as claimed in claim 1, wherein the suction nozzle head comprises a mounting portion and a suction portion connected to each other, the mounting portion being provided in the mounting groove, the suction portion exposing the mounting groove; the first side wall vent hole is formed in the mounting portion, and the adsorption hole is formed in the adsorption portion.

5. The suction nozzle as claimed in claim 4, wherein the mounting portion has a shape and size corresponding to the shape and size of the mounting groove, and the mounting portion has a height equal to the depth of the mounting groove.

6. The suction nozzle as set forth in claim 4, wherein said suction portion is conical.

7. The suction nozzle as claimed in claim 6, wherein the suction hole is provided at a taper of the suction part.

8. The suction nozzle as claimed in claim 1, wherein the control valve comprises a valve body and a rotating shaft connected to each other, the rotating shaft being provided at both ends of the valve body, the rotating shaft being rotatably connected to the wall of the second side wall vent hole or the first side wall vent hole or the surface vent hole.

9. The suction nozzle as claimed in any one of claims 1 to 8, wherein a side of the suction nozzle base remote from the suction nozzle head is provided with a mounting hole.

10. A mounter table comprising a nozzle lever and the nozzle according to any one of claims 1 to 9, said nozzle being mounted on said nozzle lever.