CN220490776U - Movable vibration-proof platform for wafer detection - Google Patents
Movable vibration-proof platform for wafer detection Download PDFInfo
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- CN220490776U CN220490776U CN202321457781.8U CN202321457781U CN220490776U CN 220490776 U CN220490776 U CN 220490776U CN 202321457781 U CN202321457781 U CN 202321457781U CN 220490776 U CN220490776 U CN 220490776U
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- springs
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- screw rod
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- 238000001514 detection method Methods 0.000 title claims abstract description 11
- 238000013016 damping Methods 0.000 claims abstract description 26
- 238000007689 inspection Methods 0.000 claims description 9
- 230000035939 shock Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000002955 isolation Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a movable vibration-proof platform for wafer detection, which relates to the technical field of movable vibration-proof platforms and comprises a top assembly, a damping assembly and a base assembly; the top subassembly includes the operation panel, the last surface mounting of operation panel has the backup pad, the roof is installed at the top of backup pad, the lower surface mounting of roof has the light, and is a plurality of the telescopic link is established with a plurality of damping spring cover and is connected, two snubber blocks are installed to the bottom of blotter, two telescopic springs are installed to the bottom of snubber block, set up a plurality of damping springs and cushion the operation panel and shock attenuation, the material of blotter is softer has elasticity, can effectively cushion the shock.
Description
Technical Field
The utility model relates to the technical field of movable vibration-proof platforms, in particular to a movable vibration-proof platform for wafer detection.
Background
The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, the original material is silicon, high-purity polycrystalline silicon is dissolved and then is doped with silicon crystal seeds, then the silicon crystal seeds are slowly pulled out to form cylindrical monocrystalline silicon, and a silicon wafer, namely the wafer, is formed after a silicon crystal bar is ground, polished and sliced.
However, in the prior art, the wafer is detected, the wafer is required to be moved and conveyed, vibration is generated due to the fact that the conveying device moves in the conveying process, the vibration is transmitted to the platform of the wafer, and once the vibration is too large, the wafer is vibrated, and the wafer is easily damaged by collision.
Disclosure of Invention
The present utility model is directed to a movable vibration isolation platform for wafer inspection, which solves the above-mentioned problems of the prior art.
In order to achieve the above purpose, the present utility model adopts the following technical scheme: a movable vibration-proof platform for wafer detection comprises a top component, a damping component and a base component; the top assembly comprises an operation plate, a supporting plate is arranged on the upper surface of the operation plate, a top plate is arranged on the top of the supporting plate, a lighting lamp is arranged on the lower surface of the top plate, and an operation table is arranged on the upper surface of the operation plate; the shock-absorbing assembly comprises a cushion pad, a plurality of rubber pads are arranged at the top of the cushion pad, a plurality of shock-absorbing springs are arranged at the top of the rubber pads, a plurality of telescopic rods are arranged in the shock-absorbing springs, the telescopic rods are sleeved with the plurality of shock-absorbing springs to be connected, two shock-absorbing blocks are arranged at the bottom of the cushion pad, and two telescopic springs are arranged at the bottom of the shock-absorbing blocks.
Preferably, the base assembly comprises a bottom plate, a groove is formed in the upper surface of the bottom plate, a screw rod is mounted in the groove, a round block is mounted at one end of the screw rod, and the round block is movably connected with the bottom plate.
Preferably, two limiting blocks are arranged on the outer surface wall of the screw rod, and two threaded holes are formed in one side of each limiting block.
Preferably, the two threaded holes are in threaded connection with the screw rod, a handle is installed at one end of the screw rod, and two groups of supports are installed on the lower surface of the bottom plate.
Preferably, two electric telescopic rods are arranged in the two telescopic springs, and the two telescopic springs are sleeved and connected with the two electric telescopic rods.
Preferably, the lower surface of the operation plate is fixedly connected with a plurality of damping springs, and two telescopic springs are fixedly connected with two limiting blocks.
Compared with the prior art, the utility model has the advantages and positive effects that:
1. in the utility model, a plurality of damping springs and damping pads are arranged to damp the operation panel, and the damping pads are soft and elastic in material and can effectively damp.
2. In the utility model, the screw rod is arranged on the bottom plate, and two limiting blocks are arranged on the outer surface wall of the screw rod to move the screw rod left and right.
Drawings
Fig. 1 is a schematic diagram of the overall structure of a movable vibration isolation platform for wafer inspection according to the present utility model;
FIG. 2 is a schematic diagram of a top assembly of a movable anti-vibration table for wafer inspection according to the present utility model;
FIG. 3 is a schematic view showing a shock absorbing assembly structure of a movable anti-vibration platform for wafer inspection according to the present utility model;
fig. 4 is a schematic view showing a base assembly structure of a movable vibration isolation platform for wafer inspection according to the present utility model.
Legend description: 1. a top assembly; 101. an operation panel; 102. a support plate; 103. a top plate; 104. a lighting lamp; 105. an operation table; 2. a shock absorbing assembly; 201. a cushion pad; 202. a damping spring; 203. a damper block; 204. a telescopic spring; 205. an electric telescopic rod; 3. a base assembly; 301. a bottom plate; 302. a groove; 303. a screw rod; 304. a limiting block; 305. a handle; 306. and (5) a support.
Description of the embodiments
In order that the above objects, features and advantages of the utility model will be more clearly understood, a further description of the utility model will be provided with reference to the accompanying drawings and examples, it being understood that the embodiments and features of the embodiments of the utility model may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced otherwise than as described herein, and therefore the present utility model is not limited to the specific embodiments of the disclosure that follow.
Embodiment 1 as shown in fig. 1 to 4, the present utility model provides a movable vibration isolation platform for wafer inspection, comprising a top assembly 1, a shock absorbing assembly 2 and a base assembly 3; the top assembly 1 comprises an operation panel 101, wherein a supporting plate 102 is arranged on the upper surface of the operation panel 101, a top plate 103 is arranged on the top of the supporting plate 102, a lighting lamp 104 is arranged on the lower surface of the top plate 103, and an operation table 105 is arranged on the upper surface of the operation panel 101; the damping assembly 2 comprises a cushion 201, a plurality of rubber pads are arranged at the top of the cushion 201, a plurality of damping springs 202 are arranged at the top of the plurality of rubber pads, a plurality of telescopic rods are arranged inside the plurality of damping springs 202 and are sleeved with the plurality of damping springs 202 to be connected, two damping blocks 203 are arranged at the bottom of the cushion 201, and two telescopic springs 204 are arranged at the bottom of the two damping blocks 203.
The whole embodiment 1 achieves the effects that the buffer pads 201 are installed on the tops of the two buffer blocks 203, the buffer pads 201 are made of soft materials and have certain elasticity, the plurality of buffer springs 202 are installed on the tops of the buffer pads 201, the plurality of telescopic rods are sleeved in the plurality of buffer springs 202, the plurality of telescopic rods play a role in stabilizing the plurality of buffer springs 202, the plurality of buffer springs 202 are prevented from shaking to influence the detection work of a wafer, the operation plate 101 is installed on the outer surface wall of the plurality of buffer springs 202, the supporting plate 102 is installed on the upper surface of the operation plate 101, the top plate 103 is installed on the top of the supporting plate 102, the illuminating lamp 104 is installed on the lower surface of the top plate 103, the wafer is conveniently detected by the illuminating lamp 104, the operation table 105 is installed on the upper surface of the operation plate 101, and the plurality of buffer springs 202 and the buffer blocks 203 play a role in double buffer of the wafer operation table 105.
1-4, the base assembly 3 comprises a bottom plate 301, a groove 302 is formed in the upper surface of the bottom plate 301, a screw rod 303 is mounted in the groove 302, a round block is mounted at one end of the screw rod 303 and movably connected with the bottom plate 301, two limiting blocks 304 are mounted on the outer surface wall of the screw rod 303, two threaded holes are formed in one side of each limiting block 304 and are in threaded connection with the screw rod 303, a handle 305 is mounted at one end of the screw rod 303, two groups of supports 306 are mounted on the lower surface of the bottom plate 301, two electric telescopic rods 205 are mounted in the two telescopic springs 204, the two electric telescopic rods 205 are sleeved and connected with each other, and the lower surface of the operating plate 101 is fixedly connected with the plurality of damping springs 202 and the two telescopic springs 204 are fixedly connected with the two limiting blocks 304.
The effect that its whole embodiment 2 reached is, the wafer detects the mobile station and produces vibrations easily when removing, vibrations can transmit to the wafer platform, in case vibrations too big can lead to the wafer vibrations, the wafer is easy to damage, recess 302 has been seted up at the upper surface of bottom plate 301, install lead screw 303 in recess 302, install two stopper 304 on the exterior wall of lead screw 303, two screw holes have been seted up to one side of two stopper 304, two screw holes and lead screw 303 threaded connection, when handheld handle 305 rotates, lead screw 303 rotates and drives two stopper 304 and moves about, put into one end at the lead screw 303 and install button and bottom plate 301 movable mounting, two sets of support 306 have been installed at the lower surface of bottom plate 301, two sets of support 306 support fixed bottom plate 301, install two electric telescopic handle 205 at the top of two stopper 304, install two expansion springs 204 on the exterior wall cover of two electric telescopic handle 205, install two shock-absorbing blocks 203 on the wall of two expansion springs 204.
Working principle: the wafer detection moving table is easy to generate vibration when moving, the vibration can be transmitted to the wafer platform, once the vibration is overlarge and leads to the wafer vibration, the wafer is easy to damage, a groove 302 is formed on the upper surface of a bottom plate 301, a screw rod 303 is arranged in the groove 302, two limiting blocks 304 are arranged on the outer surface wall of the screw rod 303, two threaded holes are formed on one side of each limiting block 304, the two threaded holes are in threaded connection with the screw rod 303, when a handheld handle 305 rotates, the screw rod 303 rotates to drive the two limiting blocks 304 to move left and right, a round block is arranged at one end of the screw rod 303 and movably installed with the bottom plate 301, two groups of supports 306 are arranged on the lower surface of the bottom plate 301, the two groups of supports 306 support and fix the bottom plate 301, two electric telescopic rods 205 are arranged at the top of the two limiting blocks 304, two telescopic springs 204 are sleeved on the outer surface walls of the two electric telescopic rods 205, two damping blocks 203 are arranged on the outer surface walls of the two telescopic springs 204, a buffer pad 201 is arranged on the top of the two damping blocks 203, the buffer pad 201 is made of soft materials and has certain elasticity, a plurality of damping springs 202 are arranged on the top of the buffer pad 201, a plurality of telescopic rods are sleeved in the damping springs 202, the telescopic rods play a role in stabilizing the damping springs 202, the damping springs 202 are prevented from shaking to influence the detection work of a wafer, an operation plate 101 is arranged on the outer surface wall of the damping springs 202, a supporting plate 102 is arranged on the upper surface of the operation plate 101, a top plate 103 is arranged on the top of the supporting plate 102, an illuminating lamp 104 is arranged on the lower surface of the top plate 103, the illuminating lamp 104 is convenient for detecting the wafer, an operation table 105 is arranged on the upper surface of the operation plate 101, the plurality of damper springs 202 and damper blocks 203 have dual damping and buffering effects on the wafer handling table 105.
The present utility model is not limited to the above-mentioned embodiments, and any equivalent embodiments which can be changed or modified by the technical content disclosed above can be applied to other fields, but any simple modification, equivalent changes and modification made to the above-mentioned embodiments according to the technical substance of the present utility model without departing from the technical content of the present utility model still belong to the protection scope of the technical solution of the present utility model.
Claims (6)
1. A movable vibration-proof platform for wafer detection, which is characterized by comprising a top component (1), a damping component (2) and a base component (3);
the top assembly (1) comprises an operation plate (101), wherein a supporting plate (102) is arranged on the upper surface of the operation plate (101), a top plate (103) is arranged on the top of the supporting plate (102), an illuminating lamp (104) is arranged on the lower surface of the top plate (103), and an operation table (105) is arranged on the upper surface of the operation plate (101);
the shock-absorbing assembly (2) comprises a cushion pad (201), a plurality of rubber pads are arranged at the top of the cushion pad (201), a plurality of shock-absorbing springs (202) are arranged at the top of the rubber pads, a plurality of telescopic rods are arranged in the shock-absorbing springs (202), the telescopic rods are sleeved with the plurality of shock-absorbing springs (202) to be connected, two shock-absorbing blocks (203) are arranged at the bottom of the cushion pad (201), and two telescopic springs (204) are arranged at the bottom of the shock-absorbing blocks (203).
2. The movable vibration-proof platform for wafer detection according to claim 1, wherein the base assembly (3) comprises a bottom plate (301), a groove (302) is formed in the upper surface of the bottom plate (301), a screw rod (303) is mounted in the groove (302), a round block is mounted at one end of the screw rod (303), and the round block is movably connected with the bottom plate (301).
3. The movable vibration-proof platform for wafer detection according to claim 2, wherein two limiting blocks (304) are arranged on the outer surface wall of the screw rod (303), and two threaded holes are formed in one side of each limiting block (304).
4. A movable vibration-proof platform for wafer inspection according to claim 3, wherein two of the screw holes are screwed with a screw rod (303), a handle (305) is mounted at one end of the screw rod (303), and two sets of supports (306) are mounted on the lower surface of the base plate (301).
5. A movable vibration-proof platform for wafer inspection according to claim 1, wherein two electric telescopic rods (205) are installed inside two telescopic springs (204), and the two telescopic springs (204) are sleeved with the two electric telescopic rods (205).
6. A movable vibration-proof platform for wafer inspection according to claim 3, wherein the lower surface of the operation plate (101) is fixedly connected with a plurality of damping springs (202), and two telescopic springs (204) are fixedly connected with two limiting blocks (304).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321457781.8U CN220490776U (en) | 2023-06-09 | 2023-06-09 | Movable vibration-proof platform for wafer detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321457781.8U CN220490776U (en) | 2023-06-09 | 2023-06-09 | Movable vibration-proof platform for wafer detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220490776U true CN220490776U (en) | 2024-02-13 |
Family
ID=89827416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321457781.8U Active CN220490776U (en) | 2023-06-09 | 2023-06-09 | Movable vibration-proof platform for wafer detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220490776U (en) |
-
2023
- 2023-06-09 CN CN202321457781.8U patent/CN220490776U/en active Active
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