CN220489727U - Furnace door device and diffusion furnace - Google Patents
Furnace door device and diffusion furnace Download PDFInfo
- Publication number
- CN220489727U CN220489727U CN202322238476.6U CN202322238476U CN220489727U CN 220489727 U CN220489727 U CN 220489727U CN 202322238476 U CN202322238476 U CN 202322238476U CN 220489727 U CN220489727 U CN 220489727U
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- door body
- furnace
- oven door
- furnace door
- hydraulic
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 18
- 239000000872 buffer Substances 0.000 claims abstract description 55
- 238000007789 sealing Methods 0.000 claims description 15
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 239000010720 hydraulic oil Substances 0.000 description 5
- 238000007906 compression Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The application relates to a furnace door device and diffusion furnace, furnace door device includes: a furnace door body; the adjusting piece is connected with the furnace door body and can controllably drive the furnace door body to move along a first direction, and the first direction is parallel to the direction in which the axis of the furnace door body is positioned; the hydraulic buffer is arranged on the adjusting piece and comprises a piston rod which is compressible along a first direction, and the piston rod is abutted with the furnace door body. The impact generated when the furnace door body contacts with the furnace tube can be absorbed by the hydraulic buffer, so that vibration and noise generated when the furnace tube is closed by the furnace door body are reduced, the probability of the furnace tube being broken by the furnace door body is reduced, the opening probability of the diffusion furnace is further improved, the mechanical service life is prolonged, the maintenance cost is reduced, the mechanical design is simplified, the production efficiency of a semiconductor is improved, and the like.
Description
Technical Field
The application relates to the technical field of photovoltaic manufacturing equipment, in particular to a furnace door device and a diffusion furnace.
Background
The diffusion furnace is one of important process equipment of the pre-process of a photovoltaic production line, and is used for diffusion, oxidation, annealing, alloy, sintering and other processes in the industries of large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like.
The diffusion furnace comprises a furnace tube and a furnace door, after the silicon wafer enters the furnace tube, the furnace door is closed, gas is introduced into the furnace, and the silicon wafer reacts with various gases in the furnace tube under the heating state. However, in the process of opening and closing the furnace tube, the furnace door of the existing diffusion furnace has larger vibration and noise and is easy to knock the tube orifice of the furnace tube.
Disclosure of Invention
Based on the above, it is necessary to provide a furnace door device and a diffusion furnace for solving the problems that the furnace door of the current diffusion furnace is large in vibration and noise and easy to knock the furnace mouth of the furnace tube in the process of opening and closing the furnace tube.
An oven door apparatus comprising:
a furnace door body;
the adjusting piece is connected with the furnace door body and can controllably drive the furnace door body to move along a first direction, and the first direction is parallel to the direction in which the axis of the furnace door body is positioned;
the hydraulic buffer is arranged on the adjusting piece and comprises a piston rod which is compressible along a first direction, and one end of the piston rod is abutted against the furnace door body.
In one embodiment, the adjusting member is connected to the geometric center of the oven door body, and the hydraulic damper includes a plurality of hydraulic dampers, and the plurality of hydraulic dampers are arranged at intervals around the axis of the oven door body.
In one embodiment, the adjusting member includes a connecting portion connected to the geometric center of the oven door body and a plurality of buffer portions radially disposed around the circumference of the connecting portion.
In one embodiment, the hydraulic buffer is arranged at one end of the buffer part, which is away from the connecting part.
In one embodiment, the adjusting member further includes a mounting ring, the mounting ring is disposed around the connection portion and connects one end of each buffer portion facing away from the connection portion, and all of the hydraulic buffers are disposed on the mounting ring.
In one embodiment, the oven door device comprises a first driving piece, and the first driving piece is in transmission connection with the adjusting piece so as to drive the adjusting piece to drive the oven door body to move along the first direction.
In one embodiment, the oven door device further comprises a bracket, wherein one end of the bracket is in transmission connection with the first driving piece;
the adjusting piece further comprises a fixing portion, the fixing portion is arranged on one side, deviating from the oven door body, of the adjusting piece in a protruding mode, and the bottom of the fixing portion is arranged at the other end of the support.
In one embodiment, the oven door device comprises a second driving piece, wherein the second driving piece is in transmission connection with the adjusting piece so as to drive the adjusting piece to drive the oven door body to move along a second direction, and the second direction is intersected with the first direction.
In one embodiment, the oven door body comprises a quartz door body and a sealing door body, wherein one side of the sealing door body is provided with the quartz door body, and the opposite side is provided with the adjusting piece.
A diffusion furnace comprising a furnace tube and a furnace door arrangement according to any one of the preceding claims for opening and closing the furnace tube.
According to the furnace door device, when the furnace door body is contacted with the pipe orifice of the furnace pipe at a certain initial speed, impact generated by the furnace pipe and the furnace door body can act on the piston rod of the hydraulic buffer and compress the piston rod, and the piston rod can provide a resistance with nearly fixed size for the piston rod through hydraulic oil in the hydraulic buffer in the compression process, so that the kinetic energy of the piston rod is converted into heat energy and finally emitted into air. That is, the impact generated when the furnace door body contacts the furnace tube can be absorbed by the hydraulic buffer, thereby reducing the vibration and noise generated when the furnace tube is closed by the furnace door body, reducing the probability of the furnace tube being broken by the furnace door body, further improving the opening probability of the diffusion furnace, prolonging the mechanical life, reducing the maintenance cost, simplifying the mechanical design, improving the production efficiency of the semiconductor and the like.
Drawings
Fig. 1 is a schematic structural view of an oven door device according to some embodiments of the present application.
Fig. 2 is a schematic structural view of the oven door body and the adjusting member of the oven door apparatus in the embodiment of fig. 1.
Fig. 3 is a schematic cross-sectional view of the oven door body and the adjusting member of the oven door arrangement of the embodiment of fig. 1.
Fig. 4 is a schematic structural view of an oven door device according to other embodiments of the present application.
Fig. 5 is a schematic structural view of the door body and the adjusting member of the door apparatus in the embodiment of fig. 4.
Fig. 6 is a schematic structural view of an oven door device according to still other embodiments of the present application.
Fig. 7 is a schematic view of the structure of the oven door body and the adjusting member of the oven door apparatus in the embodiment of fig. 6.
Reference numerals illustrate:
a furnace door body 10; a quartz door body 11; sealing the door body 12;
an adjusting member 20; a connection portion 21; a buffer section 22; a mounting ring 23; a fixing portion 24;
a hydraulic buffer 30; a piston rod 31;
a first driving member 40; a bracket 41; a second driving member 42;
a first direction X, a second direction Y;
Detailed Description
In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is, however, susceptible of embodiment in many other forms than those described herein and similar modifications can be made by those skilled in the art without departing from the spirit of the application, and therefore the application is not to be limited to the specific embodiments disclosed below.
In the description of the present application, it should be understood that, if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., these terms refer to the orientation or positional relationship based on the drawings, which are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.
In this application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In this application, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.
Referring to fig. 1, 2 and 3, an oven door device provided in an embodiment of the present application is used for opening and closing an oven tube of a diffusion furnace, and the oven door device includes an oven door body 10 and an adjusting member 20, where the oven door body 10 is used for abutting against an orifice of the oven tube, so as to close the orifice of the oven tube and seal the oven tube. The adjusting piece 20 is connected with the furnace tube body and can controllably drive the furnace door body 10 to move along a first direction X, and the first direction X is parallel to the direction of the axis of the furnace door body 10, so that the furnace door body 10 is driven to be abutted or separated from the tube orifice of the furnace tube by the movement of the adjusting piece 20 in the first direction X, and the effect of opening and closing the furnace tube is achieved.
If the furnace tube is opened and closed directly by the movement of the furnace door body 10 in the first direction X, when the furnace door body 10 closes the tube orifice of the furnace tube, the furnace door body 10 contacts with the tube orifice of the furnace tube at a certain speed and generates a larger impact force, so that the furnace door body 10 can generate larger noise and vibration due to the impact while closing the tube orifice, and the furnace door body 10 is very easy to knock the tube orifice of the furnace tube.
For this reason, the oven door device further comprises a hydraulic buffer 30, the hydraulic buffer 30 is mounted on the adjusting member 20, and the hydraulic buffer 30 comprises a piston rod 31 compressible along the first direction X, one end of the piston rod 31 is abutted against the oven door body 10, and the hydraulic buffer 30 can buffer and slow down to stop the object acting thereon by means of hydraulic damping, thereby playing a certain protection role.
Thus, when the furnace door body 10 contacts the mouth of the furnace tube at a certain initial speed, the impact force generated by the furnace door body 10 and the furnace tube acts on the piston rod 31 of the hydraulic buffer 30 and compresses the piston rod 31, and the hydraulic oil in the hydraulic buffer 30 provides a resistance force with nearly fixed magnitude to the piston rod 31 in the compression process of the piston rod 31, the resistance force is opposite to the direction of the impact force, so that the impact force on the furnace door body is reduced by the impact force absorbed by the hydraulic buffer, and after the impact force is absorbed by the hydraulic piston rod, the kinetic energy of the piston rod 31 is converted into heat energy, and finally the heat energy is emitted into the air. That is, the impact generated when the furnace door body 10 contacts the furnace tube is absorbed by the hydraulic buffer 30, thereby reducing the vibration and noise generated when the furnace tube is closed by the furnace door body 10, reducing the probability of the furnace tube being broken by the furnace door body 10, further improving the opening probability of the diffusion furnace, prolonging the mechanical life, reducing the maintenance cost, simplifying the mechanical design, improving the production efficiency of the semiconductor, and the like.
In the actual use process, after the furnace door body 10 closes the furnace tube, the connection point between the adjusting member 20 and the furnace door body 10 is usually at the geometric center of the furnace door body, so that the part of the furnace door body 10 away from the geometric center, i.e. the periphery of the furnace door body 10, will have a tilting phenomenon, resulting in the sealing of the furnace tube being not tight. Wherein, the furnace door body 10 is disc-shaped, and the geometric center of the furnace door body is the center of the disc.
To this end, in some embodiments of the present application, the adjusting member 20 is connected to the geometric center of the oven door body 10, and a plurality of hydraulic buffers 30 are disposed at intervals around the axis of the oven door body 10 on the adjusting member 20. From the above, the hydraulic oil in the hydraulic buffer 30 provides a resistance force for the piston rod 31, so that the piston rod 31 of the hydraulic buffer 30 can be pressed against the furnace door body 10 and the furnace tube by the resistance force provided by the hydraulic oil after the furnace door body 10 is closed to the furnace tube, thereby avoiding the tilting of the furnace door body 10. By arranging the plurality of hydraulic buffers 30, the periphery of the furnace door body 10 can be pressed on the furnace tube through the hydraulic buffers 30, and the sealing effect of the hydraulic buffers 30 is further ensured.
In some embodiments, the adjusting member 20 includes a connection portion 21 and a plurality of buffer portions 22, the connection portion 21 being connected to the geometric center of the oven door body 10, the plurality of buffer portions 22 being radially arranged around the circumference of the connection portion 21 to enable the adjusting member 20 to extend from the geometric center position of the oven door body 10 to the periphery of the oven door body 10 through the plurality of buffer portions 22 being radially arranged so as to position the plurality of hydraulic buffers 30 at positions close to the periphery of the oven door body 10.
In some embodiments, the hydraulic buffer 30 is disposed at one end of each buffer portion 22 facing away from the connecting portion 21, so that each hydraulic pipe device can be disposed at a position close to the periphery of the furnace door body 10, so as to compress the periphery of the furnace door body 10 with the furnace pipe, avoid tilting of the furnace door body 10, and ensure the hydraulic effect of the furnace pipe.
In the embodiment of fig. 2, the furnace door device has three hydraulic buffers 30, and the furnace door body 10 has three positions capable of being pressed against the furnace tube, while in the embodiments of fig. 4 and 5, the furnace door device has six hydraulic buffers 30, so that in the embodiment, the furnace door body 10 has six positions capable of being pressed against the furnace tube, and so on, if the number of the hydraulic buffers 30 is greater, the pressing effect of each position around the furnace door body 10 against the furnace tube is better, and therefore the number of the hydraulic buffers 30 determines the pressing effect of the furnace door body 10 against the furnace tube.
In order to further increase the number of hydraulic buffers 30, referring to fig. 6 and 7, in particular to some embodiments, the adjusting member 20 further includes a mounting ring 23, the mounting ring 23 is disposed around the connecting portion 21 and connects one end of each buffer portion 22 facing away from the connecting portion 21, all the hydraulic buffers 30 are disposed on the mounting ring 23, so that the adjusting member 20 can accommodate a greater number of hydraulic buffers 30 through the hydraulic ring, as in the embodiments of fig. 6 and 7, the adjusting member 20 can be provided with 12 hydraulic buffers 30 through the mounting ring 23, so that the compacting effect of the furnace door body 10 and the furnace tube is greatly improved, and the sealing performance of the furnace tube is better.
In some embodiments of the present application, in order to drive the furnace door body 10 to open and close the furnace tube, the furnace door device includes a first driving member 40, where the first driving member 40 is in transmission connection with the adjusting member 20, so as to drive the adjusting member 20 to drive the furnace door body 10 to move along the first direction X.
Wherein, furnace gate device still includes support 41, and support 41's one end and first driving piece 40 transmission are connected, and regulating part 20 still includes fixed part 24, and fixed part 24 protrusion sets up on the one side that regulating part 20 deviates from furnace gate body 10, and the bottom of fixed part 24 sets up in support 41's the other end, and support 41 not only plays the driven effect like this, can also support regulating part 20 and furnace gate body 10 together through support 41.
In some embodiments, the oven door device comprises a second driving member 42, wherein the second driving member 42 is in transmission connection with the adjusting member 20 to drive the adjusting member 20 to move the oven door body 10 along a second direction Y, and the second direction Y intersects the first direction X so as to drive the oven door body 10 away from the oven tube through the second driving member 42. In the actual use process, the furnace door body 10 can be driven to move along the first direction X so as to open the furnace tube, and then the furnace door body 10 is driven to move along the second direction Y so as to avoid the furnace door body 10 from the tube orifice of the furnace tube, so that the parts to be processed can be taken out and put in.
In particular, in some embodiments, the first driving member 40 and the second driving member 42 are each an air cylinder, and the output shaft of the first driving member 40 is connected to the second driving member 42, and the output shaft of the second driving member 42 is connected to the adjusting member 20 through the bracket 41. Thus, when the first driving member 40 is operated, the first driving member 40 drives the second driving member 42, the bracket 41, the adjusting member 20 and the furnace door body 10 to move together in the first direction X for opening and closing the furnace tube. When the second driving member 42 is operated, the second driving member 42 drives the furnace door body 10 to move along the second direction Y through the bracket 41 and the adjusting member 20, so as to approach or avoid the furnace tube. In other embodiments, the first driving motor and the second driving motor may be a linear motor or other components for outputting linear motion, which is not limited herein.
In some embodiments of the present application, the oven door body 10 includes a quartz door body 11 and a sealing door body 12, one side of the sealing door body 12 is provided with the quartz door body 11, the opposite side is provided with the adjusting piece 20, and the size of the quartz door body 11 is smaller than the size of the sealing door body 12, so that the quartz door body 11 can extend into the oven tube to insulate the oven door body 10 through the quartz door body 11. The sealing door 12 is used for being abutted against the furnace tube so as to seal the furnace tube, and the adjusting piece 20 is arranged on the sealing door 12, so that the sealing door 12 can improve the compacting effect of the sealing door 12 and the furnace tube through the hydraulic buffer piece on the adjusting piece 20.
The present application also provides a diffusion furnace, including the furnace tube and the furnace door device in any one of the above embodiments, the furnace door device is used for opening and closing the furnace tube, and when the furnace door body 10 contacts with the mouth of the furnace tube at a certain initial speed, the impact that the furnace tube produced with the furnace door body 10 can act on the piston rod 31 of the hydraulic buffer 30, and compress the piston rod 31, and the piston rod 31 can provide a nearly fixed size resistance force through the hydraulic oil in the hydraulic buffer 30 in the process of compression, thereby making the kinetic energy of the piston rod 31 convert into heat energy, finally give off into air. That is, the impact generated when the furnace door body 10 contacts the furnace tube is absorbed by the hydraulic buffer 30, thereby reducing the vibration and noise generated when the furnace tube is closed by the furnace door body 10, reducing the probability of the furnace tube being broken by the furnace door body 10, further improving the opening probability of the diffusion furnace, prolonging the mechanical life, reducing the maintenance cost, simplifying the mechanical design, improving the production efficiency of the semiconductor, and the like.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.
Claims (10)
1. An oven door arrangement, characterized in that the oven door arrangement comprises:
a furnace door body (10);
the adjusting piece (20) is connected with the furnace door body (10) and can controllably drive the furnace door body (10) to move along a first direction (X), and the first direction (X) is parallel to the direction in which the axis of the furnace door body (10) is positioned;
the hydraulic buffer (30) is installed on the adjusting piece (20), and the hydraulic buffer (30) comprises a piston rod (31) which is compressible along the first direction (X), and one end of the piston rod (31) is abutted with the furnace door body (10).
2. The oven door arrangement according to claim 1, characterized in, that the adjusting member (20) is connected to the geometrical centre of the oven door body (10), that the hydraulic damper (30) comprises a plurality of hydraulic dampers (30) being arranged at the adjusting member (20) around the axis of the oven door body (10).
3. The oven door arrangement according to claim 2, characterized in, that the adjusting member (20) comprises a connecting portion (21) and a plurality of buffer portions (22), the connecting portion (21) being connected to the geometric center of the oven door body (10), the plurality of buffer portions (22) being radially arranged around the circumference of the connecting portion (21).
4. Oven door arrangement according to claim 3, characterized in that the end of the buffer portion (22) facing away from the connecting portion (21) is provided with the hydraulic buffer (30).
5. The oven door arrangement according to claim 3, characterized in that the adjusting member (20) further comprises a mounting ring (23), the mounting ring (23) being arranged around the connecting portion (21) and connecting one end of each buffer portion (22) facing away from the connecting portion (21), all the hydraulic buffers (30) being arranged in the mounting ring (23).
6. The oven door arrangement according to claim 1, characterized in, that the oven door arrangement comprises a first driving member (40), which first driving member (40) is in transmission connection with the adjusting member (20) for driving the adjusting member (20) to move the oven door body (10) in the first direction (X).
7. The oven door arrangement according to claim 6, characterized in, that the oven door arrangement further comprises a bracket (41), one end of the bracket (41) being in driving connection with the first driving member (40);
the adjusting piece (20) further comprises a fixing portion (24), the fixing portion (24) is arranged on one side, deviating from the oven door body (10), of the adjusting piece (20) in a protruding mode, and the bottom of the fixing portion (24) is arranged at the other end of the support (41).
8. The oven door arrangement according to claim 6, characterized in, that the oven door arrangement comprises a second driving member (42), the second driving member (42) being in driving connection with the adjusting member (20) for driving the adjusting member (20) to move the oven door body (10) in a second direction (Y), which second direction (Y) intersects the first direction (X).
9. The oven door arrangement according to claim 1, characterized in, that the oven door body (10) comprises a quartz door body (11) and a sealing door body (12), that one side of the sealing door body (12) is provided with the quartz door body (11) and that the opposite side is provided with the adjusting member (20).
10. A diffusion furnace comprising a furnace tube and a furnace door arrangement according to any one of claims 1-9 for opening and closing the furnace tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322238476.6U CN220489727U (en) | 2023-08-18 | 2023-08-18 | Furnace door device and diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322238476.6U CN220489727U (en) | 2023-08-18 | 2023-08-18 | Furnace door device and diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220489727U true CN220489727U (en) | 2024-02-13 |
Family
ID=89828391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322238476.6U Active CN220489727U (en) | 2023-08-18 | 2023-08-18 | Furnace door device and diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220489727U (en) |
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2023
- 2023-08-18 CN CN202322238476.6U patent/CN220489727U/en active Active
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