CN220485832U - Medium-high frequency heating type silicon oxygen cathode fluidization CVD device - Google Patents
Medium-high frequency heating type silicon oxygen cathode fluidization CVD device Download PDFInfo
- Publication number
- CN220485832U CN220485832U CN202321465536.1U CN202321465536U CN220485832U CN 220485832 U CN220485832 U CN 220485832U CN 202321465536 U CN202321465536 U CN 202321465536U CN 220485832 U CN220485832 U CN 220485832U
- Authority
- CN
- China
- Prior art keywords
- unit
- high frequency
- medium
- type silicon
- heating type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 39
- OBNDGIHQAIXEAO-UHFFFAOYSA-N [O].[Si] Chemical compound [O].[Si] OBNDGIHQAIXEAO-UHFFFAOYSA-N 0.000 title claims abstract description 22
- 238000005243 fluidization Methods 0.000 title claims abstract description 18
- 238000006243 chemical reaction Methods 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims abstract description 43
- 239000007789 gas Substances 0.000 claims abstract description 38
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 15
- 239000002245 particle Substances 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 239000011261 inert gas Substances 0.000 claims abstract description 7
- 230000006698 induction Effects 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 13
- 238000009825 accumulation Methods 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910000858 La alloy Inorganic materials 0.000 claims description 3
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- FAYUQEZUGGXARF-UHFFFAOYSA-N lanthanum tungsten Chemical compound [La].[W] FAYUQEZUGGXARF-UHFFFAOYSA-N 0.000 claims description 3
- 239000003921 oil Substances 0.000 claims description 3
- 238000012856 packing Methods 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 230000000630 rising effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 239000010405 anode material Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 2
- 230000001351 cycling effect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002687 intercalation Effects 0.000 description 1
- 238000009830 intercalation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007773 negative electrode material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model provides a medium-high frequency heating type silicon-oxygen negative electrode fluidization CVD device, which comprises: the device comprises a feeding unit, a reaction unit, a separator, a collecting unit, an electric control unit and a gas source unit, wherein the feeding unit is connected with an inlet of the reaction unit through a pipeline, and the feeding unit comprises a feeding bin and a grading component. The classifying component is arranged in the feeding bin and communicated with the pipeline, and is used for controlling the grain size range of the materials; the separator is connected with the collecting unit and the tail gas processor and is used for separating the coated materials and the tail gas; the electronic control unit is configured to control parameters of the fluidization system; the gas source unit is connected with the feeding unit and the reaction unit through gas pipes and provides inert gas source and carbon source gas. The CVD device provided by the utility model can improve the stability and the rising rate of temperature, solves the problem of different coating degrees of particles with different granularity, and ensures the uniformity and consistency of material reaction.
Description
Technical Field
The utility model relates to the technical field of silica material pretreatment devices, in particular to a medium-high frequency heating type silica cathode fluidization CVD device.
Background
Electric vehicles are requiring Lithium Ion Batteries (LIBs) to have a higher energy density in order to dominate the global automotive market. Conventional LIBs use graphite as the active material for the anode, but their theoretical limits have led to academia and industry interest in replacing candidate materials, such as silicon. Because the volume change rate of the silicon material is 300%, the expansion of the carbon material is only 12%, and the silicon anode material is easy to repeatedly expand and contract in the lithium intercalation process, so that the anode material is pulverized and falls off, and finally the anode material loses electrical contact, so that the battery is completely disabled. At the same time, it results in electrical isolation and an unstable and continuously thickened solid-electrolyte interface phase (SEI), which results in asymmetric cycling performance. While many studies have been made in an effort to alleviate this problem, its use in the industry is still uncertain.
Instead of pure silicon, silicon oxide is considered as a viable candidate. In return for a lower electrochemically active silicon content, the less active silica matrix acts as a buffer layer between the silicon nano-domains, reducing the volume expansion to 150%. Thus, the silicon oxide negative electrode exhibits better cycling stability than the silicon negative electrode while providing a larger theoretical capacity than the graphite negative electrode. However, in view of practicality, its cycle stability is still insufficient, and it cannot be used alone as a negative electrode material, and therefore it is only partially substituted for reliable graphite. The addition of silica to graphite anodes is currently an advantageous strategy for increasing the energy density of batteries, and the battery industry has long desired to adapt graphite/silica composite anodes to the market. In this case, carbon coating of the silica becomes a good choice. The fluidized CVD process carbon inclusion not only avoids carbon deposition caused by material accumulation, but also avoids the problem of re-agglomeration of powder caused by high-temperature sintering.
Disclosure of Invention
The present utility model is directed to solving one or more of the problems of the prior art, including the shortcomings of the prior art. For example, one of the purposes of the present utility model is to provide a medium-high frequency heating type silicon oxygen negative electrode fluidization CVD apparatus for fluidized bed process carbon coating of silicon oxygen materials, which solves the problems of slow heating rate, low electrothermal conversion efficiency, improvement of the severity of the particle size requirements in the fluidization process, and more stable and uniform silicon oxygen materials coated by the fluidization CVD process.
In order to achieve the above object, the present utility model provides a medium-high frequency heating type silicon oxygen anode fluidized CVD apparatus, comprising: the device comprises a feeding unit, a reaction unit, a separator, a collecting unit, an electric control unit and a gas source unit, wherein the feeding unit is connected with an inlet of the reaction unit through a pipeline, the feeding unit comprises a feeding bin and a grading component, the grading component is arranged in the feeding bin and is communicated with the pipeline, and the grading component is used for controlling a particle size interval of materials; the separator is connected with the collecting unit and the tail gas processor and is used for separating the coated materials and the tail gas; the electronic control unit is configured to control parameters of the fluidization system; the gas source unit is connected with the feeding unit and the reaction unit through a gas pipe and provides an inert gas source and a carbon source gas.
According to one or more exemplary embodiments of the present utility model, the classification component may include: the high-speed classifier controls the particle size interval of the materials through different centrifugal rotation speeds.
According to one or more exemplary embodiments of the present utility model, the reaction unit bottom may be provided with an anti-accumulation member, enabling the material not to accumulate at the reaction unit bottom.
According to one or more exemplary embodiments of the present utility model, the reaction unit may be surrounded by a heating unit, which may be heated by induction at a medium frequency or a high frequency.
According to one or more exemplary embodiments of the present utility model, the heating unit may be an induction coil, which may be hollow, and the inside of which is circulated with cooling water.
According to one or more exemplary embodiments of the present utility model, the induction coil may be a copper induction coil.
According to one or more exemplary embodiments of the utility model, the separator may be a cyclone separator.
According to one or more exemplary embodiments of the utility model, the cyclone separator may be ceramic.
According to one or more exemplary embodiments of the present utility model, the feeding unit, the reaction unit, the separator, the collecting unit, the tail gas treatment unit, and the gas source unit are connected by multistage dynamic seals, which are one or more of a packing dynamic seal, a labyrinth dynamic seal, and an oil seal dynamic seal.
According to one or more exemplary embodiments of the utility model, the substrate of the reaction unit is one or more of 310S stainless steel, 314S stainless steel, molybdenum alloy, tungsten lanthanum alloy, and conductive ceramic.
Compared with the prior art, the utility model has the beneficial effects that at least one of the following contents is included:
(1) The utility model adopts medium-high frequency induction heating, has extremely fast and controllable heating rate, and can make the material heated more uniformly and more stably. The traditional fluidized bed adopts electric heating wires for radiation heating, and the heating rate is extremely slow and the waste of electric energy can be caused.
(2) The utility model reduces the time of the material in the fluidization area, ensures that the material does not abrade the reaction furnace, improves the purity of the product, further improves the production efficiency and saves the cost.
(3) The feeding unit is provided with the classifying unit for controlling the grain size interval of the materials, so that the problem that the repose angle of the traditional fluidized CVD device cannot be determined due to uneven granularity of the raw materials is solved, and the problem that the coating degrees of the grains with different granularity are different is solved.
(4) The utility model adds a rotatable ceramic net structure at the bottom of the reaction unit, and solves the problem that the base materials among air holes are easy to accumulate materials in the fluidization process.
Drawings
The foregoing and other objects and/or features of the utility model will become more apparent from the following description taken in conjunction with the accompanying drawings in which:
fig. 1 shows a schematic configuration of a medium-high frequency heating type silicon oxygen anode fluidized CVD apparatus according to an exemplary embodiment of the present utility model.
Reference numerals:
1-feeding unit, 2-reaction unit, 3-separator, 4-collecting unit, 5-tail gas treatment unit, 6-anti-accumulation component, 7-electric control unit, 8-air source unit, 9-heating unit, 11-feeding bin and 12-classification unit.
Detailed Description
Hereinafter, the medium-high frequency heating type silicon oxygen anode fluidized CVD apparatus of the present utility model will be described in detail with reference to the drawings and exemplary embodiments.
It should be noted that the terms "upper," "lower," "inner," "outer," "left," "right," "forward," "reverse," and the like are merely used for convenience of description and to construct a relative orientation or positional relationship, and are not intended to indicate or imply that the components in question must have that particular orientation or position.
Fig. 1 shows a schematic configuration of a medium-high frequency heating type silicon oxygen anode fluidized CVD apparatus according to an exemplary embodiment of the present utility model.
In the first exemplary embodiment of the present utility model, as shown in fig. 1, the medium-high frequency heating type silicon oxygen anode fluidized CVD apparatus mainly includes a feeding unit 1, a reaction unit 2, a separator 3, a collecting unit 4, an exhaust gas treatment unit 5, an electric control unit 7, and a gas supply unit 8.
The feeding unit 1 includes a feeding bin 11 and a classifying unit 12, wherein the classifying unit 12 is provided inside the feeding bin 11. The feed unit 1 may be located on the left side of the reaction unit 2 and the material is blown into the reaction unit 2 in the feed bin 11 through the classifying unit 12. The separator 3 is positioned at the top of the device and connected with the outlet of the reaction unit 2, and the collecting unit 4 can be positioned below the separator 3 to collect the coated materials; the tail gas treatment unit 5 is connected with the other end of the separator and is responsible for treating and recycling tail gas. The anti-accumulation member 6 can be positioned at the bottom of the reaction unit 2, and is a rotatable ceramic net structure, and the material starts to fluidize in the reaction unit 2 by rotating and controlling the air source pressure. The electronic control unit 7 may be located at the lower right and is responsible for the parameter control of the fluidisation system. The gas source unit 8 may be located at the left side and is respectively connected to the bottom of the feeding unit 1 and the top of the reaction unit 2, and is responsible for providing an inert gas source and a carbon source gas. One or more materials are blown into the reaction unit 2 through the classifying unit 12 of the feeding unit 1, the rotation control of the bottom anti-accumulation member 6 is started, the air source pressure is controlled to enable the materials to start fluidization in the reaction unit 2, and meanwhile, the medium-high frequency induction heating is started to heat the reaction unit 2. And after the temperature reaches the cracking temperature of the carbon source gas, introducing the carbon source gas to coat the material. After the coating is completed, the carbon source gas is closed, the inert gas flow and pressure are increased, and the materials are blown into the separator 3 for separation and are collected in the collecting unit 4.
In the present exemplary embodiment, the classifying unit 12 may be a high-speed classifier, which can control the particle size range of the material, and by controlling the particle size range of the material, the problem that the repose angle cannot be determined due to uneven particle size of the material is solved, and meanwhile, the problem that the coating degrees of particles with different particle sizes are different is also solved.
The working principle of the high-speed classifier is as follows: the motor drives the classifying wheel to rotate in the classifying shell at high speed, the speed can be adjusted at will, and a strong centrifugal force is formed in the classifier. The gas-powder mixture entering the classifier is firstly in the classifier wheel, and under the action of centrifugal force, large or heavy particles are subjected to large centrifugal force, so that the particles are thrown to the periphery of the classifier wheel to the side wall of the classifier, are not influenced by centrifugal force any more, naturally fall into a crushing host machine to be crushed or fall into a discharge port to be collected. The small or light materials are little influenced by centrifugal force, hover in the classifying wheel, are brought to a high place under the influence of induced draft force of the induced draft fan, and move to the next component along the pipeline to be classified or collected. The centrifugal force in the classifier can be adjusted by adjusting the rotating speed of the classifying wheel through frequency conversion, and finally the purpose of separating out materials with specified granularity is achieved.
In the present exemplary embodiment, as shown in fig. 1, the outer wall of the reaction unit 2 may be surrounded by a heating unit 9, and the heating unit 9 is heated in an induction manner of medium frequency or high frequency. The heating unit 9 surrounds the outer side of the furnace tube and adopts medium-high frequency induction heating to heat the reaction unit 2. Here, the regulation of the frequency is generally achieved by means of a frequency multiplier, a thyristor or an oscillator. Medium and high frequency refers to frequencies of 150Hz and above. The intermediate frequency generally refers to frequencies between 150Hz and 5KHz, and the high frequency generally refers to frequencies above 100 KHz. The medium-high frequency induction heating mode is adopted, so that the heating rate and the electrothermal conversion efficiency of the device are higher, and meanwhile, the materials are heated more uniformly and more stably in the fluidization bin.
Further, the heating unit 9 may be an induction coil, which may be hollow, and the inside of which is circulated with cooling water. Further, the induction coil may be a copper induction coil.
In the present exemplary embodiment, the separator 3 may be a cyclone separator. Further, the cyclone separator may be ceramic.
In the present exemplary embodiment, multistage dynamic sealing connection may be adopted between the feeding unit 1, the reaction unit 2, the separator 3, the collecting unit 4, the tail gas treatment unit 5 and the gas source unit 8, and the multistage dynamic sealing may be one or more of packing dynamic sealing, labyrinth dynamic sealing and oil sealing dynamic sealing. More preferably, the dynamic sealing structure adopts water cooling to cool down.
In the present exemplary embodiment, the substrate of the reaction unit 2 may be one or more of 310S stainless steel, 314S stainless steel, molybdenum alloy, tungsten lanthanum alloy, and conductive ceramics.
The application method/working process of the utility model is as follows:
one or more mixed materials are placed in a feeding unit, and the materials are blown into a reaction unit by inert gas through a classification unit. The anti-accumulation component at the bottom of the reaction unit rotates, the air source pressure is controlled to enable the materials to start to fluidize in the reaction unit, and meanwhile, the medium-high frequency induction unit surrounding the outer wall of the reaction unit starts to heat. The medium-high frequency induction heating mode can enable the temperature rising rate and the electrothermal conversion efficiency of the device to be higher, and meanwhile, materials are heated more uniformly and more stably in the fluidization bin. And after the temperature of the reaction unit reaches the cracking temperature of the carbon source gas, introducing the carbon source gas to coat the material. And closing the carbon source gas after coating, increasing the inert gas flow and pressure, and blowing the materials into a separator to separate the materials from the tail gas. The existence of the anti-accumulation components at the bottoms of the feeding unit classifying units and the reaction units can prevent uneven coating and accumulation of materials at the bottoms of the reaction units.
Although a medium-high frequency heated silicon oxygen anode fluidized CVD apparatus of the present utility model has been described above by combining exemplary embodiments, it should be apparent to those skilled in the art that various modifications and changes can be made to the exemplary embodiments of the present utility model without departing from the spirit and scope of the utility model as defined in the appended claims.
Claims (10)
1. A medium-high frequency heated silicon oxygen negative electrode fluidized CVD apparatus for carbon coating of silicon oxide, the apparatus comprising: the device comprises a feeding unit, a reaction unit, a separator, a collecting unit, an electric control unit and a gas source unit, wherein,
the feeding unit is connected with an inlet of the reaction unit through a pipeline and comprises a feeding bin and a grading component, wherein the grading component is arranged in the feeding bin and is communicated with the pipeline, and the grading component is used for controlling the grain size range of materials;
the separator is connected with the collecting unit and the tail gas processor and is used for separating the coated materials and the tail gas;
the electronic control unit is configured to control parameters of the fluidization system;
the gas source unit is connected with the feeding unit and the reaction unit through a gas pipe and provides an inert gas source and a carbon source gas.
2. The medium-high frequency heating type silicon oxygen anode fluidized CVD apparatus according to claim 1, wherein the classifying means comprises: the high-speed classifier controls the particle size interval of the materials through different centrifugal rotation speeds.
3. The medium-high frequency heating type silicon-oxygen anode fluidized CVD apparatus according to claim 1, wherein the reaction unit bottom is provided with an anti-accumulation member capable of preventing accumulation of materials at the reaction unit bottom.
4. The medium-high frequency heating type silicon-oxygen negative electrode fluidization CVD device according to claim 1, wherein the outer wall of the reaction unit is surrounded by a heating unit, and the heating unit is heated by an intermediate frequency or high frequency induction mode.
5. The medium-high frequency heating type silicon-oxygen anode fluidized CVD apparatus according to claim 4, wherein the heating unit is an induction coil, the induction coil is hollow, and circulating cooling water is introduced into the induction coil.
6. The medium-high frequency heating type silicon oxygen negative electrode fluidized CVD apparatus according to claim 5, wherein the induction coil is a copper induction coil.
7. The medium-high frequency heating type silicon oxygen anode fluidized CVD apparatus according to claim 1, wherein the separator is a cyclone separator.
8. The medium-high frequency heating type silicon oxygen negative electrode fluidized CVD apparatus according to claim 7, wherein the cyclone separator is made of ceramic material.
9. The medium-high frequency heating type silicon-oxygen negative electrode fluidization CVD device according to claim 1, wherein the feeding unit, the reaction unit, the separator, the collecting unit, the tail gas treatment unit and the gas source unit are connected by adopting multistage dynamic sealing, and the multistage dynamic sealing is one or more of packing dynamic sealing, labyrinth dynamic sealing and oil sealing dynamic sealing.
10. The medium-high frequency heating type silicon oxygen negative electrode fluidized CVD apparatus according to claim 1, wherein the substrate of the reaction unit is one of 310S stainless steel, 314S stainless steel, molybdenum alloy, tungsten lanthanum alloy, and conductive ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321465536.1U CN220485832U (en) | 2023-06-09 | 2023-06-09 | Medium-high frequency heating type silicon oxygen cathode fluidization CVD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321465536.1U CN220485832U (en) | 2023-06-09 | 2023-06-09 | Medium-high frequency heating type silicon oxygen cathode fluidization CVD device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220485832U true CN220485832U (en) | 2024-02-13 |
Family
ID=89841399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321465536.1U Active CN220485832U (en) | 2023-06-09 | 2023-06-09 | Medium-high frequency heating type silicon oxygen cathode fluidization CVD device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220485832U (en) |
-
2023
- 2023-06-09 CN CN202321465536.1U patent/CN220485832U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100457339C (en) | Continuous production apparatus for nano metal powder | |
| WO2015015795A1 (en) | Siox powder manufacturing process and siox powder manufacturing apparatus | |
| CN106185947B (en) | A kind of preparation method of nano silica fume | |
| CN105810548A (en) | Apparatus for producing fine particles and method for producing fine particles | |
| KR102564420B1 (en) | Device and method for rounding graphite flakes of a graphite material | |
| US10363540B2 (en) | Production apparatus and production method for fine particles | |
| CN1203948C (en) | Equipment for preparing nano metal powder | |
| WO2022095270A1 (en) | Continuous low-temperature plasma powder treatment and ball milling production device and method therefor | |
| CN102836822A (en) | Water-cooled internal circulation type high-efficiency powder concentrator | |
| CN107470639A (en) | A kind of preparation method of narrow size distribution globular tungsten powder | |
| CN105734272A (en) | Mechanical dynamic suspension synchronous roasting beneficiation method and device | |
| CN220485832U (en) | Medium-high frequency heating type silicon oxygen cathode fluidization CVD device | |
| CN114130341A (en) | Device and method for continuously synthesizing aluminum nitride powder by using conveying bed under normal pressure | |
| CN111747416A (en) | Production of SiOxApparatus and method of | |
| CN212457832U (en) | Vertical roller grinding system with bilateral air supply | |
| CN104070175B (en) | Method for producing metal molybdenum spherical fine powder or superfine powder | |
| CN111829293A (en) | Method for drying silicon wafer cutting waste by fluidized bed | |
| CN107812954B (en) | Preparation method and preparation device of copper powder | |
| CN108823409B (en) | System and method for recovering waste heat of liquid magnesium chloride generated in titanium sponge preparation process | |
| CN209631144U (en) | A kind of high temperature transferred arc Granulation Equipments of Buddha's warrior attendant wire cutting silicon powder | |
| CN111023813A (en) | Fluidized bed reaction furnace for sintering lithium ion battery anode material | |
| CN220878756U (en) | Continuous granulating production equipment for graphite cathode material | |
| CN110655085A (en) | Single-side collecting method for solid purified object horizontal electric heating equipment | |
| CN209065438U (en) | The production equipment of rare-earth oxide nano particles | |
| CN110081717A (en) | A kind of calcium carbide fast cooling shaping and waste-heat recovery device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |