CN220482074U - Demoulding device for prefabricated wafer bearing platform blank - Google Patents

Abstract

The utility model discloses a demoulding device for a prefabricated wafer bearing platform blank, which comprises a bracket, wherein a supporting platform for placing a first moulding external mould, a second moulding external mould and a third moulding external mould is arranged on the bracket, a demoulding opening corresponding to a mould accommodating area is arranged on the supporting platform, a lifting ring at a lower mould in the mould accommodating area is positioned in the demoulding opening, a guide rail is arranged below the supporting platform, a longitudinal sliding table is longitudinally driven by a sliding power device to slide and is provided with a lifting hook, the lifting hook corresponds to the lifting ring, the lifting hook is driven by a lifting power device to lift, a supporting plate for supporting the lower mould is fixedly arranged on the longitudinal sliding table, and a lifting notch for facilitating the lifting hook to penetrate through the supporting plate is arranged on the supporting plate; the demolding device can accurately and effectively demold the corresponding molding die, and the overall quality of the molded wafer bearing platform blank after demolding is qualified.

Description

Demoulding device for prefabricated wafer bearing platform blank

Technical Field

The utility model relates to the field of manufacturing of silicon carbide wafer bearing tables, in particular to a demoulding device for a blank of a prefabricated wafer bearing table.

Background

The silicon carbide wafer bearing platform is used for bearing the silicon wafer, and is convenient for carrying out photoetching treatment on the silicon wafer, for example, the silicon wafer is placed on the silicon carbide wafer bearing platform for photoetching treatment, so that the silicon carbide wafer bearing platform needs very high surface precision to ensure that the silicon wafer is stably placed, and once the surface precision of the silicon carbide wafer bearing platform is insufficient, the silicon wafer is placed unevenly, and then the photoetching quality is problematic. At present, a silicon carbide wafer bearing table is generally prepared by mixing high-purity silicon powder and high-purity carbon powder according to a certain proportion, uniformly stirring, guiding the mixture into a prefabricated grinding tool to form a disc, solidifying, pouring out the grinding tool to carry out plane grinding, ensuring the parallelism of a silicon carbide blank, and processing the whole disc into the finished silicon carbide wafer bearing table requires a plurality of process steps, which is very complicated and affects the production efficiency; therefore, the forming die comprises a lower die, a middle die, an upper die and a forming outer die, wherein the middle die is sleeved on the lower die, the upper end face of the middle die is matched with the end face of one side of the wafer bearing platform, the lower end face of the upper die is matched with the end face of the other side of the wafer bearing platform, the wafer bearing platform is pressed down by the upper die, the forming outer die is installed around the lower die and the middle die to form a die accommodating area for accommodating the lower die, the middle die and the upper die, the forming outer die comprises a first forming outer die, a second forming outer die and a third forming outer die, a plurality of half die accommodating areas are arranged on the first forming outer die, the first forming outer die has the same structure as the third forming outer die, a half die accommodating area corresponding to the first forming outer die and the third forming outer die is also arranged on the second forming outer die, the first molding outer die, the second molding outer die, the third molding outer die and the second molding outer die are surrounded to form a plurality of die accommodating areas, a corresponding lower die, a middle die and an upper die are placed in the die areas, the first molding outer die, the third molding outer die and the middle die are detachably connected and fixed, a vertical rod penetrating through a wafer bearing table is circumferentially arranged at the center of the lower die, a strip-shaped bulge and a cylindrical bulge corresponding to the wafer bearing table are arranged on the outer edge surface of the lower die, a rectangular bulge and an arc-shaped bulge corresponding to the wafer bearing table are further arranged at the end part of the outer edge surface of the lower die, a middle die notch matched with the vertical rod, the strip-shaped bulge and the cylindrical bulge of the lower die is formed in the middle die, an upper die notch for accommodating the vertical rod, the rectangular bulge and the arc-shaped bulge is formed in the upper die, and a hanging ring is detachably arranged at the bottom of the lower die; when the forming die is used for demolding, a corresponding demolding device is needed, so that the forming die is convenient to use.

Disclosure of Invention

The technical problems to be solved by the utility model are as follows: a demoulding device for a prefabricated wafer carrying platform blank can accurately and effectively demould aiming at a corresponding forming die, and the overall quality of the formed wafer carrying platform blank after demoulding is qualified.

In order to solve the technical problems, the technical scheme of the utility model is as follows: the utility model provides a shedder of prefabricated piece platform blank, includes the support, be equipped with the supporting platform who places first shaping external mold, second shaping external mold and third shaping external mold on the support, be equipped with the drawing of patterns mouth corresponding with the mould accommodation area on the supporting platform, rings that lower mould department in the mould accommodation area was in the drawing of patterns mouth, the supporting platform below is equipped with the guide rail, have vertical slip table through sliding power device longitudinal drive slidable mounting on the guide rail, vertical slip table goes up and down to install the lifting hook, the lifting hook corresponds with rings, lifting hook goes up and down through the drive of lifting power device, fixed mounting has the layer board that supports the lower mould on the vertical slip table, be equipped with the lift breach that makes things convenient for the lifting hook to run through the layer board on the layer board.

As a preferred scheme, the supporting platform below is equipped with the base, the guide rail includes first guide rail and second guide rail, first guide rail and second guide rail are all fixed mounting on the base, install screw nut mechanism on the first guide rail, slidable mounting has first slider on the first guide rail, slidable mounting has the second slider on the second guide rail, vertical slip table sliding connection installs on first slider and second slider, be equipped with the drawing of patterns station and the outside station that resets of being in supporting platform under the drawing of patterns mouth on the first guide rail, first slider passes through sliding power device drive screw nut mechanism and at drawing of patterns station and station reciprocating motion that resets.

As a preferable scheme, grooves embedded into the first molding outer die, the second molding outer die and the third molding outer die to a certain depth are formed in the supporting platform, and the demolding opening is formed in the grooves.

As a preferable scheme, the lifting power device comprises a lifting cylinder vertically arranged on the longitudinal sliding table, a connecting block is fixedly connected to a guide rod of the lifting cylinder, the lifting hook is in threaded connection with the connecting block, and the supporting plate is fixedly arranged above the lifting hook.

As a preferable scheme, a rotating bearing is arranged in the connecting block, the connecting block is rotatably arranged on a guide rod of the lifting cylinder through the rotating bearing, and the connecting block rotates around the center of the rotating bearing at will.

As a preferable scheme, the lifting notch is in a long rectangular shape arranged on the end face of the supporting plate.

After the technical scheme is adopted, the utility model has the following effects: the demolding device for the prefabricated wafer bearing platform blank comprises a support, wherein a supporting platform for placing a first molding outer mold, a second molding outer mold and a third molding outer mold is arranged on the support, a demolding opening corresponding to a mold accommodating area is formed in the supporting platform, a lifting ring at a lower mold in the mold accommodating area is positioned in the demolding opening, a guide rail is arranged below the supporting platform, a longitudinal sliding table is longitudinally driven to slide by a sliding power device and provided with a lifting hook in a lifting manner, the lifting hook corresponds to the lifting ring, the lifting hook is driven to lift by a lifting power device, a supporting plate for supporting the lower mold is fixedly arranged on the longitudinal sliding table, and a lifting notch for facilitating the lifting hook to penetrate through the supporting plate is formed in the supporting plate; firstly, placing a first molding outer die, a second molding outer die and a third molding outer die on a supporting platform, aligning a die accommodating area with a demolding opening, driving a longitudinal sliding table to slide by a sliding power device, enabling a lifting hook to move to the demolding opening, driving the lifting hook to rise by the lifting power device, enabling the lifting hook to extend out of a lifting notch, continuously driving the longitudinal sliding table to slide by the sliding power device, enabling the lifting hook to be clamped into a hanging ring, driving the lifting hook to descend by the lifting power device, so as to downwards drag a lower die to fall off, enabling the lower die to fall on a supporting plate, and then manually taking the lower die off the supporting plate to finish the next demolding step; the demolding device can accurately and effectively demold the corresponding molding die, and the overall quality of the molded wafer bearing platform blank after demolding is qualified.

The base is arranged below the supporting platform, the guide rail comprises a first guide rail and a second guide rail, the first guide rail and the second guide rail are fixedly arranged on the base, a screw nut mechanism is arranged on the first guide rail, a first sliding block is slidably arranged on the first guide rail, a second sliding block is slidably arranged on the second guide rail, the longitudinal sliding table is slidably connected with the first sliding block and the second sliding block, a demolding station right below the demolding opening and a reset station outside the supporting platform are arranged on the first guide rail, and the first sliding block drives the screw nut mechanism to reciprocate at the demolding station and the reset station through a sliding power device; after the lower die is conveniently demolded, the lower die is conveniently taken away manually, and the efficiency is improved.

And because the supporting platform is provided with the grooves embedded into the first molding outer die, the second molding outer die and the third molding outer die to a certain depth, and the demolding opening is arranged in the grooves, the placement of the first molding outer die, the second molding outer die and the third molding outer die is facilitated, the mold accommodating area can be aligned with the demolding opening rapidly and accurately, and the efficiency is improved.

The lifting power device comprises a lifting cylinder vertically arranged on the longitudinal sliding table, a connecting block is fixedly connected to a guide rod of the lifting cylinder, the lifting hook is in threaded connection with the connecting block, and the supporting plate is fixedly arranged above the lifting hook; the lifting air cylinder drives the lifting hook to lift, so that the lifting hook can be controlled to be rapidly and conveniently demoulded. Simultaneously, the spiral connection can facilitate the installation of the lifting hook, ensure firm installation and ensure demoulding efficiency.

And because the rotating bearing is arranged in the connecting block, the connecting block is rotatably arranged on the guide rod of the lifting cylinder through the rotating bearing, and the connecting block rotates around the center of the rotating bearing at will, so that the lifting hook can also rotate, the direction of the lifting hook can be effectively regulated, and the lifting hook can be conveniently and accurately matched with the lifting ring to carry out demoulding.

And because the lifting notch is in a rectangular shape and is arranged on the end face of the supporting plate, and because the lower die is demoulded and falls on the supporting plate, the lifting hook is positioned in the lifting ring, the lifting ring can be taken away only by moving the lower die to separate from the lower die, and the lower die can be conveniently moved through the rectangular lifting notch, so that the lower die is taken away.

Drawings

The utility model will be further described with reference to the drawings and examples.

FIG. 1 is a perspective view of an embodiment of the present utility model;

FIG. 2 is a schematic view of a support platform according to an embodiment of the present utility model;

FIG. 3 is a schematic view of the structure of the support platform under the embodiment of the present utility model;

FIG. 4 is a cross-sectional view of a lifting hook in accordance with an embodiment of the utility model;

FIG. 5 is a cross-sectional view of a lower, middle and upper die of a die according to an embodiment of the present utility model;

FIG. 6 is a perspective view of a lower, middle and upper die of a die according to an embodiment of the present utility model;

FIG. 7 is a schematic view of the structure of a lower die of the die according to the embodiment of the utility model;

in the accompanying drawings: 1. a bracket; 2. a first molding outer mold; 3. a second molding outer mold; 4. a third molding outer mold; 5. a support platform; 6. a demoulding port; 7. a longitudinal sliding table; 8. a lifting hook; 9. a supporting plate; 91. a vertical plate; 92. a carrying plate; 10. a lifting notch; 11. a base; 12. a first guide rail; 13. a second guide rail; 14. a first slider; 15. a second slider; 16. a demolding station; 17. resetting a station; 18. a driving motor; 19; a nut; 20. a screw rod; 21. a groove; 22. a lifting cylinder; 23. a connecting block; 24. a rotating bearing; 25. a mold receiving area; 26. a lower die; 27. middle mold; 28. an upper die; 29. a wafer carrying table; 30. a vertical rod; 31. a bar-shaped protrusion; 32. a cylindrical protrusion; 33. rectangular protrusions; 34. arc-shaped bulges; 35. a middle die notch; 36. an upper die notch; 37. and (5) hanging rings.

Detailed Description

The present utility model will be described in further detail with reference to the following examples.

As shown in fig. 1 to 7, a demolding device for a prefabricated wafer carrier blank comprises a support 1, a support platform 5 for placing a first molding outer die 2, a second molding outer die 3 and a third molding outer die 4 is arranged on the support 1, a demolding opening 6 corresponding to a mold accommodating area 25 is arranged on the support platform 5, a lifting ring 37 at a lower mold 26 in the mold accommodating area 25 is positioned in the demolding opening 6, a guide rail is arranged below the support platform 5, a longitudinal sliding table 7 is longitudinally driven by a sliding power device to slide, a lifting hook 8 is installed on the longitudinal sliding table 7 in a lifting manner, the lifting hook 8 corresponds to the lifting ring 37, the lifting hook 8 is driven to lift by a lifting power device, a supporting plate 9 for supporting the lower mold 26 is fixedly installed on the longitudinal sliding table 7, and a lifting notch 10 for facilitating the lifting hook 8 to penetrate through the supporting plate 9 is arranged on the supporting plate 9.

In this embodiment, the first molding outer die 2, the second molding outer die 3 and the third molding outer die 4 are fixed together to form four die accommodating areas 25, so that four demolding openings 6 are correspondingly formed, meanwhile, the demolding openings 6 are ensured to be slightly larger than the die accommodating areas 25, the bottoms of the corresponding first molding outer die 2, second molding outer die 3 and third molding outer die 4 are effectively supported, so that the lower die 26 can be conveniently and rapidly demolded through the lifting hooks 8, and the lifting hooks 8 are correspondingly provided with four demolding openings 6, so that the four lower dies 26 can be simultaneously demolded, and the efficiency is improved; the die accommodating area 25 is internally provided with a lower die 26, a middle die 27 and an upper die 28 in sequence, the middle die 27 is sleeved on the lower die 26, the upper end face of the middle die 27 is matched with the end face of one side of the die supporting table 29, the lower end face of the upper die 28 is matched with the end face of the other side of the die supporting table 29, the upper die 28 is used for pressing the die supporting table 29 downwards, the center of the lower die 26 is circumferentially provided with a vertical rod 30 penetrating through the die supporting table 29, the outer edge face of the lower die 26 is provided with a strip-shaped bulge 31 and a cylindrical bulge 32 corresponding to the die supporting table 29, the end part of the outer edge face of the lower die 26 is also provided with a rectangular bulge 33 and an arc-shaped bulge 34 corresponding to the die supporting table 29, the middle die 27 is provided with a middle die notch 35 matched with the vertical rod 30, the strip-shaped bulge 31, the cylindrical bulge 32, the rectangular bulge 33 and the arc-shaped bulge 34, the upper die notch 36 for accommodating the vertical rod 30, the rectangular bulge 33 and the arc-shaped bulge 34 is arranged in the upper die 28, the upper die 28 is connected with a hydraulic press, so that the upper die 28 can be taken away after the die supporting table 29 is finished, and the die stripping of the die supporting table 29 can be effectively finished through die stripping the lower die 26 when the die is stripped, and the die is connected with a lifting screw 37.

As shown in fig. 3, a base 11 is arranged below the supporting platform 5, the guide rails comprise a first guide rail 12 and a second guide rail 13, the first guide rail 12 and the second guide rail 13 are fixedly installed on the base 11, a screw 20 and nut 19 mechanism is installed on the first guide rail 12, a first sliding block 14 is installed on the first guide rail 12 in a sliding manner, a second sliding block 15 is installed on the second guide rail 13 in a sliding manner, the longitudinal sliding table 7 is installed on the first sliding block 14 and the second sliding block 15 in a sliding manner, a demolding station 16 positioned right below the demolding opening 6 and a reset station 17 positioned outside the supporting platform 5 are arranged on the first guide rail 12, and the first sliding block 14 drives the screw 20 and nut 19 mechanism to reciprocate at the demolding station 16 and the reset station 17 through a sliding power device; the sliding power device comprises a driving motor 18, the driving motor 18 is fixedly arranged on the base 11, two first sliding blocks 14 are arranged on the first guide rail 12, two second sliding blocks 15 are arranged on the second guide rail 13, the driving motor 18 controls a screw rod 20 to rotate, the first sliding blocks 14 are driven to slide through nuts 19, then the longitudinal sliding table 7 can effectively slide, the longitudinal sliding table 7 is conveniently supported through the two guide rails, the longitudinal sliding table 7 is accurate and reliable in sliding, the longitudinal sliding table 7 can be effectively connected with the first sliding blocks 14 and the second sliding blocks 15, the accuracy of the longitudinal sliding of the first sliding blocks 14 can be effectively ensured through a screw rod 20 and nut 19 mechanism, and the moving precision is high.

As shown in fig. 2, the supporting platform 5 is provided with a groove 21 embedded into the first molding outer die 2, the second molding outer die 3 and the third molding outer die 4 to a certain depth, and the demolding opening 6 is arranged in the groove 21; the grooves 21 can accurately position and fix the first molding outer film, the second molding outer film 3 and the third molding outer film 4, and prevent the first molding outer film 2, the second molding outer film 3 and the third molding outer film 4 from shaking after being placed on the supporting platform 5, so that the installation is convenient and quick.

As shown in fig. 3 and 4, the lifting power device comprises a lifting cylinder 22 vertically installed on the longitudinal sliding table 7, a connecting block 23 is fixedly connected to a guide rod of the lifting cylinder 22, the lifting hook 8 is in threaded connection with the connecting block 23, and the supporting plate 9 is fixedly installed above the lifting hook 8; lifting hook 8 is simple and effective through threaded connection, and lifting cylinder 22 is the structure existing on the market, stretches out the control through the guide arm and goes up and down, and with supporting slip table cooperation enable lifting cylinder 22 slip take-off die 6 department, then make lifting hook 8 stretch into in the take-off die 6 through upper body lifting hook 8 aim at rings 37, continue to remove like this and support the slip table, lifting hook 8 just can hook rings 37, thereby lifting hook 8 descends and pulls rings 37, and lower mould 26 goes out of the mould, and simple structure is effective.

In this embodiment, be provided with rolling bearing 24 in the connecting block 23, the connecting block 23 passes through rolling bearing 24 rotation and installs on the guide arm of lift cylinder 22, the connecting block 23 revolutes the arbitrary rotation in rolling bearing 24 center, rolling bearing 24 adopts tapered roller bearing, and tapered roller bearing can bear higher axial load, can effectively bear axial force like this when dragging, can also rotate wantonly and adjust the orientation of lifting hook 8, conveniently carries out the hook and gets to carry out effective drawing of patterns to lower mould 26, guarantee that the drawing of patterns is accurate.

Further, the lifting notch 10 is in a rectangular shape and is arranged on the end face of the supporting plate 9; lifting notch 10 makes things convenient for rings 37 and lifting hook 8 to pass simultaneously, and layer board 9 corresponds with lifting hook 8, and layer board 9 is the spill form, including two vertical riser 91 of vertical installation and the loading board 92 that bears lower mould 26, lifting notch 10 sets up on loading board 92 like this, and lower mould 26 drawing of patterns falls on loading board 92 like this, and lifting hook 8 is in rings 37, and the needs remove lower mould 26 and make rings 37 break away from lower mould 26 just can take away, just can make things convenient for lower mould 26 to remove lower mould 26 through rectangular lifting notch 10.

The working principle of the embodiment is as follows: firstly, placing the formed first molding outer film, second molding outer film 3 and third molding outer film 4 in a groove 21 of a supporting platform 5, then driving a screw rod 20 to rotate by a driving motor 18 to enable a first sliding block 14 to longitudinally move to a demolding station 16, further enabling a longitudinal sliding table 7 to also slide to the demolding station 16, respectively driving a corresponding lifting hook 8 to ascend by a lifting cylinder 22 to be in one-to-one correspondence with annular holes of lifting hooks 8 and lifting rings 37, continuing to longitudinally slide by the lifting hooks 8, enabling the lifting hooks 8 to enter the annular holes of the lifting rings 37, driving the lifting hooks 8 to descend by the lifting cylinder 22, pulling the corresponding lifting rings 37, enabling a lower die 26 to descend and demolding, falling on a bearing plate 92, driving the longitudinal sliding table 7 to return to a reset station 17, manually moving the lower die 26, enabling the lifting rings 37 on the lower die 26 to be separated from the lifting hooks 8, and completing the removal.

The above examples are merely illustrative of the preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model, and various modifications and adaptations of the technical solution of the present utility model should and are intended to fall within the scope of the present utility model as defined in the claims.

Claims (6)

1. The utility model provides a shedder of prefabricated piece platform blank, includes support, its characterized in that: the support is provided with a supporting platform for placing the first molding outer die, the second molding outer die and the third molding outer die, the supporting platform is provided with a demolding opening corresponding to the mold accommodating area, a lifting ring at the lower die in the mold accommodating area is positioned in the demolding opening, a guide rail is arranged below the supporting platform, a longitudinal sliding table is longitudinally driven by a sliding power device to slide on the guide rail, a lifting hook is arranged on the longitudinal sliding table in a lifting manner, the lifting hook corresponds to the lifting ring, the lifting hook is driven by the lifting power device to lift, a supporting plate for supporting the lower die is fixedly arranged on the longitudinal sliding table, and a lifting notch for enabling the lifting hook to penetrate through the supporting plate is formed in the supporting plate.

2. A preform table blank stripping apparatus as claimed in claim 1, wherein: the supporting platform below is equipped with the base, the guide rail includes first guide rail and second guide rail, first guide rail and second guide rail are all fixed mounting on the base, install screw nut mechanism on the first guide rail, slidable mounting has first slider on the first guide rail, slidable mounting has the second slider on the second guide rail, vertical slip table sliding connection installs on first slider and second slider, be equipped with the drawing of patterns station and the outside station that resets of being in supporting platform under the drawing of patterns mouth on the first guide rail, first slider passes through sliding power device drive screw nut mechanism at drawing of patterns station and station reciprocating motion that resets.

3. A preform table blank stripping apparatus as claimed in claim 2, wherein: the support platform is provided with grooves embedded into the first molding outer die, the second molding outer die and the third molding outer die to a certain depth, and the demolding opening is arranged in the grooves.

4. A preform table blank stripping apparatus as claimed in claim 3, wherein: the lifting power device comprises a lifting cylinder vertically arranged on the longitudinal sliding table, a connecting block is fixedly connected to a guide rod of the lifting cylinder, the lifting hook is in threaded connection with the connecting block, and the supporting plate is fixedly arranged above the lifting hook.

5. A preform table blank stripping apparatus as claimed in claim 4, wherein: the connecting block is internally provided with a rotating bearing, the connecting block is rotatably arranged on a guide rod of the lifting cylinder through the rotating bearing, and the connecting block rotates around the center of the rotating bearing at will.

6. A preform table blank stripping apparatus as claimed in claim 5, wherein: the lifting notch is in a rectangular shape and is arranged on the end face of the supporting plate.