CN220476213U - Multifunctional controller for PVD sputtering equipment - Google Patents
Multifunctional controller for PVD sputtering equipment Download PDFInfo
- Publication number
- CN220476213U CN220476213U CN202322107314.9U CN202322107314U CN220476213U CN 220476213 U CN220476213 U CN 220476213U CN 202322107314 U CN202322107314 U CN 202322107314U CN 220476213 U CN220476213 U CN 220476213U
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- fixed
- controller
- top end
- controller body
- mounting plate
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- 238000005240 physical vapour deposition Methods 0.000 title claims abstract description 20
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims abstract description 32
- 230000017525 heat dissipation Effects 0.000 claims abstract description 20
- 239000000428 dust Substances 0.000 claims abstract description 8
- 238000001816 cooling Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 3
- 238000009423 ventilation Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a multifunctional controller for PVD sputtering equipment, which comprises a mounting plate, wherein a base is arranged at the top end of the mounting plate, a controller body is fixed at the top end of the base, a dustproof heat dissipation mechanism is arranged at the front end of the controller body, and a mounting mechanism is arranged at the top end of the mounting plate; the mounting mechanism comprises a positioning groove formed in the middle of the top end of the mounting plate, and two sliding rails fixed on the left side and the right side of the top end of the mounting plate. This a multi-functional controller for PVD sputtering equipment is equipped with dustproof heat dissipation mechanism through the front end at the controller body for the controller can prevent the entering of dust when ventilation and radiating, is equipped with mounting mechanism through the top at the mounting panel, makes the controller body need not with the help of other instruments when installing and dismantling, improves the installation and the dismantlement efficiency of controller body, and holistic installation is better with the effect of dismantling, can satisfy multi-functional controller's user demand.
Description
Technical Field
The utility model relates to the technical field of PVD sputtering equipment controllers, in particular to a multifunctional controller for PVD sputtering equipment.
Background
PVD physical vapor deposition: the physical process is used to realize the transfer of substances and transfer atoms or molecules from a source to the surface of a substrate, and the effect of the physical process is that certain particles with special properties (high strength, wear resistance, heat dissipation, corrosion resistance and the like) can be sprayed on a parent body with lower properties, so that the parent body has better properties, and the PVD basic method comprises the following steps: vacuum evaporation, sputtering and ion plating, wherein sputtering refers to that under a vacuum environment, proper inert gas is introduced as a medium, and the inert gas is used for accelerating to strike the target material, so that atoms on the surface of the target material are struck out, and a coating film is formed on the surface.
The PVD sputtering equipment is generally provided with a controller, for the controller, bolts and nuts are generally adopted to fix and detach the controller in the prior art, so that other tools such as screwdrivers and the like can not be used in the mounting process of the controller, and the controller cannot be mounted and detached under the condition of no tools such as screwdrivers and the like, and is inconvenient to maintain and use.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides a multifunctional controller for PVD sputtering equipment, which has the advantages of being capable of being installed and disassembled without tools such as screwdrivers and the like, and solves the problem that the tools are needed to be utilized for the disassembly and the installation of the controller.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the multifunctional controller for the PVD sputtering equipment comprises a mounting plate, wherein a base is arranged at the top end of the mounting plate, a controller body is fixed at the top end of the base, a dustproof heat dissipation mechanism is arranged at the front end of the controller body, and a mounting mechanism is arranged at the top end of the mounting plate;
the mounting mechanism comprises a positioning groove formed in the middle of the top end of the mounting plate, the mounting mechanism further comprises two sliding rails fixed on the left side and the right side of the top end of the mounting plate, a spring is fixed at the right end of the inner wall of the sliding rail, a sliding block is fixed at the left end of the spring, a baffle is fixed at the top end of the sliding block, a vertical rod is fixed at the right end of the sliding rail, and a pull rod is hinged to the right side of the baffle.
Further, dustproof cooling mechanism is including seting up a plurality of louvres in controller body rear end, dustproof cooling mechanism is still including fixing the radiator fan with the inside of controller body, the front end of controller body is fixed with the intake pipe, the inner wall of intake pipe is fixed with a plurality of division boards, every two all be fixed with the dust screen between the opposite one side of division board.
Further, the base is placed in the positioning groove, the section of the baffle is L-shaped, and the bottom of the baffle is attached to the top of the base.
Further, a rectangular hole is formed in the pull rod, and the vertical rod is connected with the rectangular hole in a sliding mode.
Further, the right side of montant has seted up the recess, the left side in rectangular hole and the left side looks butt of recess.
Further, the position of the heat dissipation hole corresponds to the position of the air inlet pipe, and the position of the heat dissipation fan corresponds to the position of the air inlet pipe.
Compared with the prior art, the technical scheme of the application has the following beneficial effects:
this a multi-functional controller for PVD sputtering equipment is equipped with dustproof heat dissipation mechanism through the front end at the controller body for the controller can prevent the entering of dust when ventilation and radiating, is equipped with mounting mechanism through the top at the mounting panel, makes the controller body need not with the help of other instruments when installing and dismantling, improves the installation and the dismantlement efficiency of controller body, and holistic installation is better with the effect of dismantling, can satisfy multi-functional controller's user demand.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a side view of the controller body and dust-proof heat dissipation mechanism of the present utility model;
fig. 3 is an enlarged schematic view of the structure of fig. 1 a according to the present utility model.
In the figure: 1 mounting panel, 2 bases, 3 controller body, 4 dustproof cooling mechanism, 401 louvre, 402 radiator fan, 403 intake pipe, 404 division board, 405 dust screen, 5 installation mechanism, 501 constant head tank, 502 slide rail, 503 spring, 504 slider, 505 baffle, 506 montant, 507 pull rod.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1, a multifunctional controller for a PVD sputtering apparatus in the present embodiment includes a mounting board 1, a base 2 is disposed at the top end of the mounting board 1, a controller body 3 is fixed at the top end of the base 2, a dustproof heat dissipation mechanism 4 is disposed at the front end of the controller body 3, and a mounting mechanism 5 is disposed at the top end of the mounting board 1.
The base 2 in this embodiment is used for supporting the controller body 3, and dustproof heat dissipation mechanism 4 is used for dustproof and heat dissipation to the controller body 3, and installation mechanism 5 is convenient to install and dismantle the controller body 3.
Referring to fig. 1 and 3, for convenience in installing and dismantling the controller body 3, the installation mechanism 5 in this embodiment includes a positioning slot 501 formed in the middle of the top end of the installation board 1, the installation mechanism 5 further includes two slide rails 502 fixed on the left and right sides of the top end of the installation board 1, a spring 503 is fixed on the right end of the inner wall of the slide rail 502, a slider 504 is fixed on the left end of the spring 503, a baffle 505 is fixed on the top end of the slider 504, a vertical rod 506 is fixed on the right end of the slide rail 502, and a pull rod 507 is hinged on the right side of the baffle 505.
The mounting mechanism 5 in this embodiment is used to limit the controller body 3 through the cooperation of the positioning groove 501 and the baffle 505, and the baffle 505 can be driven to move through the sliding block 504, so that the baffle 505 can be limited when the pull rod 507 is fixed on the vertical rod 506.
The spring 503 returns the shutter 505 by the elastic force of the slider 504.
Referring to fig. 1 and 2, in order to prevent dust and dissipate heat from the controller body 3, the dustproof heat dissipation mechanism 4 in this embodiment includes a plurality of heat dissipation holes 401 formed at the rear end of the controller body 3, the dustproof heat dissipation mechanism 4 further includes a heat dissipation fan 402 fixed inside the controller body 3, an air inlet pipe 403 is fixed at the front end of the controller body 3, a plurality of partition plates 404 are fixed on the inner wall of the air inlet pipe 403, and a dustproof screen 405 is fixed between opposite sides of each of the partition plates 404.
The dustproof heat dissipation mechanism 4 in this embodiment promotes air flow and heat dissipation in the controller body 3 through the heat dissipation fan 402, and is used for blocking dust through the drainage of air by the cooperation of the air inlet pipe 403 and the heat dissipation hole 401, and the dustproof net 405.
The working principle of the embodiment is as follows:
when the device works, the cooling fan 402 absorbs outside air, the air enters the controller body 3 after being filtered by the dust screen 405, the original air in the controller body 3 is extruded and discharged through the cooling holes 401, redundant heat is taken away, when the controller body 3 needs to be disassembled or replaced, the pull rod 507 is pulled to one sides of the two baffles 505, which are opposite to each other, respectively, the pull rod 507 drives the baffles 505 and the sliding blocks 504 to do opposite movement, the sliding blocks 504 squeeze the springs 503, the springs 503 deform, when the pull rod 507 reaches a certain position, the pull rod 507 is fixed on a groove of the vertical rod 506, the pull rod 507 and the baffles 505 are limited, the controller body 3 is taken out from the positioning groove 501 to be replaced, the pull rod 507 is taken down from the vertical rod 506 after the replacement, and the springs 503 recover deformation to drive the baffles 505 to reset.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A multifunctional controller for PVD sputtering equipment, comprising a mounting plate (1), characterized in that: a base (2) is arranged at the top end of the mounting plate (1), a controller body (3) is fixed at the top end of the base (2), a dustproof heat dissipation mechanism (4) is arranged at the front end of the controller body (3), and a mounting mechanism (5) is arranged at the top end of the mounting plate (1);
the mounting mechanism (5) comprises a positioning groove (501) formed in the middle of the top end of the mounting plate (1), the mounting mechanism (5) further comprises two sliding rails (502) fixed on the left side and the right side of the top end of the mounting plate (1), a spring (503) is fixed at the right end of the inner wall of the sliding rail (502), a sliding block (504) is fixed at the left end of the spring (503), a baffle (505) is fixed at the top end of the sliding block (504), a vertical rod (506) is fixed at the right end of the sliding rail (502), and a pull rod (507) is hinged to the right side of the baffle (505).
2. A multi-function controller for a PVD sputtering apparatus according to claim 1, wherein: dustproof cooling mechanism (4) are including setting up a plurality of louvres (401) in controller body (3) rear end, dustproof cooling mechanism (4) still including fixed and inside radiator fan (402) of controller body (3), the front end of controller body (3) is fixed with intake pipe (403), the inner wall of intake pipe (403) is fixed with a plurality of division boards (404), every two all be fixed with dust screen (405) between the opposite one side of division board (404).
3. A multi-function controller for a PVD sputtering apparatus according to claim 1, wherein: the base (2) is placed in the positioning groove (501), the section of the baffle (505) is L-shaped, and the bottom end of the baffle (505) is attached to the top end of the base (2).
4. A multi-function controller for a PVD sputtering apparatus according to claim 1, wherein: rectangular holes are formed in the pull rods (507), and the vertical rods (506) are connected with the rectangular holes in a sliding mode.
5. A multi-function controller for a PVD sputtering apparatus according to claim 4, wherein: the right side of montant (506) has seted up the recess, the left side in rectangular hole and the left side looks butt of recess.
6. A multi-function controller for a PVD sputtering apparatus according to claim 2, wherein: the position of the radiating hole (401) corresponds to the position of the air inlet pipe (403), and the position of the radiating fan (402) corresponds to the position of the air inlet pipe (403).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322107314.9U CN220476213U (en) | 2023-08-07 | 2023-08-07 | Multifunctional controller for PVD sputtering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322107314.9U CN220476213U (en) | 2023-08-07 | 2023-08-07 | Multifunctional controller for PVD sputtering equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220476213U true CN220476213U (en) | 2024-02-09 |
Family
ID=89802853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322107314.9U Active CN220476213U (en) | 2023-08-07 | 2023-08-07 | Multifunctional controller for PVD sputtering equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220476213U (en) |
-
2023
- 2023-08-07 CN CN202322107314.9U patent/CN220476213U/en active Active
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