CN220467582U - High-purity high-concentration multilayer plate-type ozone generator and system thereof - Google Patents
High-purity high-concentration multilayer plate-type ozone generator and system thereof Download PDFInfo
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- CN220467582U CN220467582U CN202320775930.9U CN202320775930U CN220467582U CN 220467582 U CN220467582 U CN 220467582U CN 202320775930 U CN202320775930 U CN 202320775930U CN 220467582 U CN220467582 U CN 220467582U
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 193
- 238000001816 cooling Methods 0.000 claims abstract description 122
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 101
- 239000001301 oxygen Substances 0.000 claims abstract description 101
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 101
- OGIIWTRTOXDWEH-UHFFFAOYSA-N [O].[O-][O+]=O Chemical compound [O].[O-][O+]=O OGIIWTRTOXDWEH-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000000853 adhesive Substances 0.000 claims description 111
- 230000001070 adhesive effect Effects 0.000 claims description 111
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 91
- 238000007789 sealing Methods 0.000 claims description 67
- 239000000110 cooling liquid Substances 0.000 claims description 46
- 239000010410 layer Substances 0.000 claims description 26
- 239000012212 insulator Substances 0.000 claims description 23
- 238000002955 isolation Methods 0.000 claims description 22
- 230000000903 blocking effect Effects 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 9
- 239000012790 adhesive layer Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 6
- 230000010354 integration Effects 0.000 abstract description 4
- 239000012809 cooling fluid Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
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- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
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- 150000004706 metal oxides Chemical class 0.000 description 1
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- 239000007800 oxidant agent Substances 0.000 description 1
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- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
The utility model relates to a high-purity high-concentration multi-layer plate type ozone generator. The high-purity high-concentration multilayer plate-type ozone generator comprises a high-voltage component, a low-voltage component, an oxygen ozone pipeline and a cooling pipeline, wherein the high-voltage component comprises a first high-voltage component and a second high-voltage component, the low-voltage component comprises a first low-voltage component and a second low-voltage component, and the first high-voltage component, the first low-voltage component, the second high-voltage component and the second low-voltage component are respectively combined to generate a sealed first discharge gap area and a second discharge gap area so as to respectively generate ozone through electrodes with oxygen. The third structural component of the low-voltage assembly is a cooling carrier shared by the first low-voltage assembly and the second low-voltage assembly, and an ozone pipeline is integrated in the cooling carrier, so that ozone can be uniformly output through the same pipeline, the space is saved, and the integration level of the ozone generator is improved.
Description
Technical Field
The utility model relates to the field of ozone preparation, in particular to a high-purity high-concentration multilayer plate-type ozone generator and a system thereof.
Background
Ozone is a green and environment-friendly strong oxidant, and is used for water quality disinfection, chemical oxidation and sewage waterTreatment, waste gas treatment, air sterilization, advanced oxidation and other technological applications. Meanwhile, ozone has great application in photovoltaic ALD film plating, silicon wafer cleaning, panel cleaning and semiconductor manufacturing. In a clean semiconductor environment, ozone reacts with various gases to produce Al 2 O 3 ，ZrO 2 ，HfO 2 And La (La) 2 O 3 Metal oxide to realize thin film deposition process. Ozone is also useful in semiconductor manufacturing processes to remove hydrocarbons and clean, and after ozone treatment, it becomes oxygen without producing other byproducts. Ozone has high requirements on an ozone generator in the semiconductor industry, and the ozone must be very pure; however, some ozone generators at present use elastic sealing and electrode materials, which pollute ozone and cannot obtain ozone gas with high purity.
The ozone generator in the prior art is a single-layer split plate type ozone generator, each unit of the ozone generator is required to be provided with an independent oxygen inlet pipeline and an ozone outlet pipeline, and when the ozone generators are combined and operated, a large amount of space is occupied by the redundant pipelines, so that the ozone preparation cost is increased.
Accordingly, there is a need for one or more approaches to address the above-described problems.
It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the utility model and thus may include information that does not form the prior art that is already known to those of ordinary skill in the art.
Disclosure of Invention
The present utility model is directed to a high purity, high concentration, multi-layered plate-type ozone generator that, at least in part, obviates one or more problems due to limitations and disadvantages of the related art.
According to one aspect of the present utility model, there is provided a high purity high concentration multi-layer plate ozone generator comprising a high voltage component, a low voltage component, an oxygen ozone line, a cooling line, wherein:
the high-voltage assembly comprises a first high-voltage assembly and a second high-voltage assembly, the first high-voltage assembly and the second high-voltage assembly are of circular plate type structures, the first high-voltage assembly comprises a first structural component and a first sealing plate, the first structural component is fixedly connected with the first sealing plate, the second high-voltage assembly comprises a second structural component and a second sealing plate, and the second structural component is fixedly connected with the second sealing plate;
The low-voltage assembly comprises a first low-voltage assembly, a second low-voltage assembly and a third structural component, the first low-voltage assembly and the second low-voltage assembly are of a circular plate type structure, the first low-voltage assembly comprises a third sealing plate, the second low-voltage assembly comprises a fourth sealing plate, the third sealing plate, the fourth sealing plate and the third structural component are fixedly connected, the third sealing plate is fixedly connected with the edge of the first sealing plate so that the first high-voltage assembly and the first low-voltage assembly are combined to form a first airtight discharge chamber, a preset interval is reserved between the first high-voltage assembly and the first low-voltage assembly so as to form a first discharge gap area, the fourth sealing plate is fixedly connected with the edge of the second sealing plate so that the second high-voltage assembly and the second low-voltage assembly are combined to form a second airtight discharge chamber, and a preset interval is reserved between the second high-voltage assembly and the second low-voltage assembly so as to form a second discharge gap area;
the oxygen-ozone pipeline comprises a first oxygen pipeline, a second oxygen pipeline and an ozone pipeline, the first oxygen pipeline is connected with a first structural component of the first high-voltage assembly, the first oxygen pipeline is used for inputting oxygen into the first airtight discharge chamber, the second oxygen pipeline is connected with a second structural component of the second high-voltage assembly, the second oxygen pipeline is used for inputting oxygen into the second airtight discharge chamber, the ozone pipeline is connected with a third structural component of the low-voltage assembly, and the ozone pipeline is used for outputting ozone generated in the first discharge gap area and the second discharge gap area;
The cooling circuit comprises a first high-pressure side cooling unit, a second high-pressure side cooling unit, a first low-pressure side cooling unit and a second low-pressure side cooling unit, wherein the first high-pressure side cooling unit is connected with a first structural component of the first high-pressure assembly, the first high-pressure side cooling unit is used for cooling the first high-pressure assembly based on cooling liquid flowing in the first high-pressure side cooling unit, the second high-pressure side cooling unit is connected with a second structural component of the second high-pressure assembly, the second high-pressure side cooling unit is used for cooling the second high-pressure assembly based on cooling liquid flowing in the second high-pressure side cooling unit, the first low-pressure side cooling unit is connected with a third structural component of the low-pressure assembly, the first low-pressure side cooling unit is used for cooling the first low-pressure assembly based on cooling liquid flowing in the first low-pressure side cooling unit, and the second low-pressure side cooling unit is used for cooling the second low-pressure assembly based on cooling liquid flowing in the second low-pressure side cooling unit.
In an exemplary embodiment of the utility model, the first high voltage assembly at the high voltage assembly further comprises a first blocking dielectric ceramic plate, a first thermally conductive adhesive, a second thermally conductive adhesive, a first high voltage isolation insulator, a first high voltage electrically conductive element, a first electrically and thermally conductive adhesive, a second high voltage electrically conductive element, wherein:
The first high-voltage isolation insulator is connected with the first sealing plate through the second heat-conducting adhesive, and is used for conducting heat conducted by the second heat-conducting adhesive to cooling liquid circulated in a first high-voltage side cooling unit in the first structural component through the first sealing plate;
the first high-voltage conductive element is a metal silver layer with a preset thickness, the first high-voltage conductive element is sintered to the surface of the first high-voltage isolation insulator through high temperature, the first high-voltage conductive element is bonded with the second high-voltage conductive element through a first electric conduction and heat conduction adhesive, and the first high-voltage conductive element is used for supplying power to the second high-voltage conductive element;
the second high-voltage conductive element is a metal silver layer with a preset thickness, and is sintered to the surface of the first blocking dielectric ceramic plate at high temperature, so that the second high-voltage conductive element is uniformly distributed on the first blocking dielectric ceramic plate;
the first heat conduction adhesive is adhered to the outer ring of the first electric conduction heat conduction adhesive, and surrounds the outer rings of the first electric conduction heat conduction adhesive, the first high-voltage electric conduction element and the second high-voltage electric conduction element to prevent the first electric conduction heat conduction adhesive, the first high-voltage electric conduction element and the second high-voltage electric conduction element from being corroded by ozone generated in the first discharge gap area.
In an exemplary embodiment of the utility model, the second high voltage assembly at the high voltage assembly further comprises a second blocking dielectric ceramic plate, a third thermally conductive adhesive, a fourth thermally conductive adhesive, a second high voltage isolation insulator, a third high voltage electrically conductive element, a second electrically and thermally conductive adhesive, a fourth high voltage electrically conductive element, wherein:
the second high-voltage isolation insulator is connected with the second sealing plate through the fourth heat conduction adhesive, and is used for conducting heat conducted by the fourth heat conduction adhesive to cooling liquid circulated in a second high-voltage side cooling unit in the second structural component through the second sealing plate;
the third high-voltage conductive element is a metal silver layer with preset thickness, the third high-voltage conductive element is sintered to the surface of the second high-voltage isolation insulator through high temperature, the third high-voltage conductive element is bonded with the fourth high-voltage conductive element through a second electric conduction and heat conduction adhesive, and the third high-voltage conductive element is used for supplying power to the fourth high-voltage conductive element;
the fourth high-voltage conductive element is a metal silver layer with preset thickness, and is sintered to the surface of the second blocking dielectric ceramic plate at high temperature, so that the fourth high-voltage conductive element is uniformly distributed on the second blocking dielectric ceramic plate;
The third heat conduction adhesive is adhered to the outer ring of the second electric conduction heat conduction adhesive, and surrounds the outer rings of the second electric conduction heat conduction adhesive, the third high-voltage electric conduction element and the fourth high-voltage electric conduction element to prevent the second electric conduction heat conduction adhesive, the third high-voltage electric conduction element and the fourth high-voltage electric conduction element from being corroded by ozone generated in the second discharge gap area.
In an exemplary embodiment of the utility model, the ozone generator further comprises a first high voltage cable hole, a second high voltage cable hole, a third high voltage cable hole, a fourth high voltage cable hole, a fifth high voltage cable hole, a sixth high voltage cable hole, a seventh high voltage cable hole, an eighth high voltage cable hole, wherein:
the first high-voltage cable hole and the second high-voltage cable hole are holes in the first structural component, the third high-voltage cable hole is a hole in the second heat conduction adhesive layer, the fourth high-voltage cable hole is a hole in the first high-voltage isolation insulator, the second high-voltage cable hole, the third high-voltage cable hole and the fourth high-voltage cable hole are concentric holes, and a preset high-voltage cable is connected with the first high-voltage conductive element through the first high-voltage cable hole, the second high-voltage cable hole, the third high-voltage cable hole and the fourth high-voltage cable hole;
The fifth high-voltage cable hole and the sixth high-voltage cable hole are holes in the second structural component, the seventh high-voltage cable hole is a hole in the fourth heat conduction adhesive layer, the eighth high-voltage cable hole is a hole in the second high-voltage isolation insulator, the sixth high-voltage cable hole, the seventh high-voltage cable hole and the eighth high-voltage cable hole are concentric holes, and the preset high-voltage cable is connected with the third high-voltage conductive element through the fifth high-voltage cable hole, the sixth high-voltage cable hole, the seventh high-voltage cable hole and the eighth high-voltage cable hole.
In an exemplary embodiment of the utility model, the first low voltage component of the ozone generator further comprises a fifth thermally conductive adhesive, a third electrically and thermally conductive adhesive, a first low voltage electrically conductive element, wherein:
the first low-voltage conductive element is bonded with a third sealing plate through the third conductive and heat-conductive adhesive;
the fifth heat conduction adhesive is adhered to the outer ring of the third electric conduction heat conduction adhesive, and surrounds the outer ring of the third electric conduction heat conduction adhesive and the outer ring of the first low-voltage electric conduction element, so that the third electric conduction heat conduction adhesive and the first low-voltage electric conduction element are prevented from being corroded by ozone generated in the first discharge gap area.
In an exemplary embodiment of the utility model, the second low voltage component of the ozone generator further comprises a sixth thermally conductive adhesive, a fourth electrically and thermally conductive adhesive, a second low voltage electrically conductive element, wherein:
the second low-voltage conductive element is bonded with a fourth sealing plate through the fourth conductive and heat-conductive adhesive;
the sixth heat conduction adhesive is adhered to the outer ring of the fourth heat conduction adhesive, and surrounds the outer ring of the fourth heat conduction adhesive and the outer ring of the second low-voltage electric conduction element to prevent the fourth heat conduction adhesive and the second low-voltage electric conduction element from being corroded by ozone generated in the second discharge gap area.
In an exemplary embodiment of the utility model, the oxygen ozone line of the ozone generator further comprises an oxygen inlet manifold:
the first oxygen pipeline further comprises a first oxygen input channel, a first oxygen branch pipe and a first restrictor, wherein after oxygen is input into the first oxygen branch pipe through the oxygen inlet main pipe, the oxygen is input into the first closed discharge chamber through the first oxygen input channel and after being restricted by the first restrictor;
The second oxygen pipeline further comprises a second oxygen input channel, a second oxygen branch pipe and a second restrictor, wherein after oxygen is input into the second oxygen branch pipe through the oxygen inlet main pipe, the oxygen is input into the first closed discharge chamber through the second oxygen input channel and after being restricted by the second restrictor;
the ozone pipeline also comprises an ozone outlet channel, an ozone branch pipe and an ozone air outlet main pipe, and ozone generated in the first discharge gap area and the second discharge gap area is output to the ozone air outlet main pipe through the ozone outlet channel and the ozone branch pipe.
In an exemplary embodiment of the utility model, the ozone generator further comprises a first low pressure side hole, a second low pressure side hole, a third low pressure side hole, a fourth low pressure side hole, wherein:
a first low voltage side hole in the first low voltage conductive element and a second low voltage side hole in the third electrically and thermally conductive adhesive are in communication with an ozone outlet channel of the third structural component such that ozone generated in the first discharge gap region flows out of the ozone outlet channel;
a third low voltage side hole in the second low voltage conductive element and a fourth low voltage side hole in the fourth electrically and thermally conductive adhesive are in communication with the ozone outlet channel of the third structural component such that ozone generated in the second discharge gap region flows out of the ozone outlet channel.
In an exemplary embodiment of the utility model, the cooling circuit of the ozone generator comprises:
the first high-pressure side cooling unit further comprises a first high-pressure side water inlet branch pipe and a first high-pressure side water outlet branch pipe, and is used for cooling the first high-pressure component based on cooling liquid flowing in the first high-pressure side water inlet branch pipe and flowing out of the first high-pressure side water outlet branch pipe;
the second high-pressure side cooling unit further comprises a second high-pressure side water inlet branch pipe and a second high-pressure side water outlet branch pipe, and is used for cooling the second high-pressure component based on cooling liquid flowing in the second high-pressure side water inlet branch pipe and flowing out of the second high-pressure side water outlet branch pipe;
the first low-pressure side cooling unit further comprises a first low-pressure side water inlet branch pipe and a first low-pressure side water outlet branch pipe, and is used for cooling the first low-pressure component based on cooling liquid flowing in the first low-pressure side water inlet branch pipe and flowing out of the first low-pressure side water outlet branch pipe;
the second low-pressure side cooling unit further comprises a second low-pressure side water inlet branch pipe and a second low-pressure side water outlet branch pipe, and the second low-pressure side cooling unit is used for cooling the second low-pressure component based on cooling liquid flowing in the second low-pressure side water inlet branch pipe and flowing out of the second low-pressure side water outlet branch pipe.
In one aspect of the present utility model, there is provided a high purity high concentration multi-layer plate type ozone generating system composed of a plurality of high purity high concentration multi-layer plate type ozone generators stacked, the ozone generating system comprising:
the oxygen inlet unit comprises an oxygen inlet main pipe and an oxygen branch pipe, and the oxygen branch pipe is respectively connected with a first oxygen input channel and a second oxygen input channel of the ozone generator;
the ozone gas outlet unit comprises an ozone gas outlet main pipe and ozone branch pipes, and the ozone branch pipes are respectively connected with an ozone outlet channel of an ozone generator;
the cooling liquid water inlet main pipe and the cooling liquid water outlet main pipe are respectively connected with a first high-pressure side water inlet branch pipe, a second high-pressure side water inlet branch pipe, a first low-pressure side water inlet branch pipe and a second low-pressure side water inlet branch pipe of the ozone generator, the cooling liquid water inlet main pipe is used for providing cooling liquid water inlet for the ozone generating system, and the cooling liquid water outlet main pipe is respectively connected with a first high-pressure side water outlet branch pipe, a second high-pressure side water outlet branch pipe, a first low-pressure side water outlet branch pipe and a second low-pressure side water outlet branch pipe of the ozone generator, and the cooling liquid water outlet main pipe is used for collecting cooling liquid backwater of the ozone generating system.
The high-purity high-concentration multi-layer plate-type ozone generator comprises a high-voltage component, a low-voltage component, an oxygen ozone pipeline and a cooling pipeline, wherein the high-voltage component comprises a first high-voltage component and a second high-voltage component, the low-voltage component comprises a first low-voltage component and a second low-voltage component, and the first high-voltage component, the first low-voltage component, the second high-voltage component and the second low-voltage component are respectively combined to generate a sealed first discharge gap area and a sealed second discharge gap area so as to respectively generate ozone through electrodes. The third structural component of the low-voltage assembly is a cooling carrier shared by the first low-voltage assembly and the second low-voltage assembly, and an ozone pipeline is integrated in the cooling carrier, so that ozone can be uniformly output through the same pipeline, the space is saved, and the integration level of the ozone generator is improved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed.
Drawings
The above and other features and advantages of the present utility model will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.
FIG. 1 illustrates an overall block diagram of a high purity, high concentration, multi-layered plate ozone generator, according to an exemplary embodiment of the utility model;
FIG. 2 illustrates an exploded view of a high purity, high concentration multi-layered plate ozone generator, according to an exemplary embodiment of the present utility model;
fig. 3 shows a schematic structural view of a high purity high concentration multi-layered plate type ozone generating system according to an exemplary embodiment of the present utility model.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar parts, and thus a repetitive description thereof will be omitted.
Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the utility model. One skilled in the relevant art will recognize, however, that the utility model may be practiced without one or more of the specific details, or with other methods, components, materials, devices, steps, etc. In other instances, well-known structures, methods, devices, implementations, materials, or operations are not shown or described in detail to avoid obscuring aspects of the utility model.
The block diagrams depicted in the figures are merely functional entities and do not necessarily correspond to physically separate entities. That is, these functional entities may be implemented in software, or in one or more software-hardened modules, or in different networks and/or processor devices and/or microcontroller devices.
In the present exemplary embodiment, a high purity high concentration multi-layer plate type ozone generator is provided first; referring to fig. 1, the high purity high concentration multi-layer plate type ozone generator high voltage assembly 100, low voltage assembly 200, oxygen ozone line 300, cooling line 400, wherein:
the high-pressure assembly 100 comprises a first high-pressure assembly 110 and a second high-pressure assembly 120, the first high-pressure assembly 110 and the second high-pressure assembly 120 are of a circular plate type structure, the first high-pressure assembly 110 comprises a first structural component 112 and a first sealing plate 113, the first structural component 112 is fixedly connected with the first sealing plate 113, the second high-pressure assembly 120 comprises a second structural component 122 and a second sealing plate 123, and the second structural component 122 is fixedly connected with the second sealing plate 123;
The low pressure assembly 200 includes a first low pressure assembly 210, a second low pressure assembly 220, and a third structural member 212, where the first low pressure assembly 210 and the second low pressure assembly 220 are in a circular plate structure, the first low pressure assembly 210 includes a third sealing plate 213, the second low pressure assembly 220 includes a fourth sealing plate 223, the third sealing plate 213, the fourth sealing plate 223 are fixedly connected with the third structural member 212, the third sealing plate 213 is fixedly connected with an edge of the first sealing plate 113 so that the first high pressure assembly 110 and the first low pressure assembly 210 are combined to form a first sealed discharge chamber, a preset interval is included between the first high pressure assembly 110 and the first low pressure assembly 210 to form a first discharge gap region, the fourth sealing plate 223 is fixedly connected with an edge of the second sealing plate 123 so that the second high pressure assembly 120 and the second low pressure assembly 220 are combined to form a second sealed discharge chamber, and the second high pressure assembly 120 and the second low pressure assembly 220 are combined to form a second sealed discharge gap region;
the oxygen-ozone line 300 includes a first oxygen line 310, a second oxygen line 320, and an ozone line 330, the first oxygen line 310 is connected to the first structural component 112 of the first high-voltage assembly 110, the first oxygen line 310 is used for inputting oxygen into the first sealed discharge chamber, the second oxygen line 320 is connected to the second structural component 122 of the second high-voltage assembly 120, the second oxygen line 320 is used for inputting oxygen into the second sealed discharge chamber, the ozone line 330 is connected to the third structural component 212 of the low-voltage assembly 200, and the ozone line 330 is used for outputting ozone generated in the first and second discharge gap regions;
The cooling circuit 400 includes a first high-pressure side cooling unit 410, a second high-pressure side cooling unit 420, a first low-pressure side cooling unit 430, and a second low-pressure side cooling unit 440, the first high-pressure side cooling unit 410 is connected to the first structural member 112 of the first high-pressure assembly 110, the first high-pressure side cooling unit 410 is used for cooling the first high-pressure assembly 110 based on the cooling fluid flowing in the first high-pressure side cooling unit 410, the second high-pressure side cooling unit 420 is connected to the second structural member 122 of the second high-pressure assembly 120, the second high-pressure side cooling unit 420 is used for cooling the second high-pressure assembly 120 based on the cooling fluid flowing in the second high-pressure side cooling unit 420, the first low-pressure side cooling unit 430 and the second low-pressure side cooling unit 440 are connected to the third structural member 212 of the low-pressure assembly 200, and the first low-pressure side cooling unit 430 is used for cooling the second low-pressure assembly 220 based on the cooling fluid flowing in the first low-pressure side cooling unit 430.
The high-purity high-concentration multi-layer plate-type ozone generator comprises a high-voltage component, a low-voltage component, an oxygen ozone pipeline and a cooling pipeline, wherein the high-voltage component comprises a first high-voltage component and a second high-voltage component, the low-voltage component comprises a first low-voltage component and a second low-voltage component, and the first high-voltage component, the first low-voltage component, the second high-voltage component and the second low-voltage component are respectively combined to generate a sealed first discharge gap area and a sealed second discharge gap area so as to respectively generate ozone through electrodes. The third structural component of the low-voltage assembly is a cooling carrier shared by the first low-voltage assembly and the second low-voltage assembly, and an ozone pipeline is integrated in the cooling carrier, so that ozone can be uniformly output through the same pipeline, the space is saved, and the integration level of the ozone generator is improved.
Next, as shown in fig. 2, a high purity high concentration multi-layered plate type ozone generator in the present exemplary embodiment will be further described based on an exploded structural view of the ozone generator.
The ozone generator comprises a high voltage assembly 100, a low voltage assembly 200, an oxygen ozone line 300, a cooling line 400, wherein:
The high-pressure assembly 100 comprises a first high-pressure assembly 110 and a second high-pressure assembly 120, the first high-pressure assembly 110 and the second high-pressure assembly 120 are of a circular plate type structure, the first high-pressure assembly 110 comprises a first structural component 112 and a first sealing plate 113, the first structural component 112 is fixedly connected with the first sealing plate 113, the second high-pressure assembly 120 comprises a second structural component 122 and a second sealing plate 123, and the second structural component 122 is fixedly connected with the second sealing plate 123;
the low pressure assembly 200 includes a first low pressure assembly 210, a second low pressure assembly 220, and a third structural member 212, where the first low pressure assembly 210 and the second low pressure assembly 220 are in a circular plate structure, the first low pressure assembly 210 includes a third sealing plate 213, the second low pressure assembly 220 includes a fourth sealing plate 223, the third sealing plate 213, the fourth sealing plate 223 are fixedly connected with the third structural member 212, the third sealing plate 213 is fixedly connected with an edge of the first sealing plate 113 so that the first high pressure assembly 110 and the first low pressure assembly 210 are combined to form a first sealed discharge chamber, a preset interval is included between the first high pressure assembly 110 and the first low pressure assembly 210 to form a first discharge gap region, the fourth sealing plate 223 is fixedly connected with an edge of the second sealing plate 123 so that the second high pressure assembly 120 and the second low pressure assembly 220 are combined to form a second sealed discharge chamber, and the second high pressure assembly 120 and the second low pressure assembly 220 are combined to form a second sealed discharge gap region;
The oxygen-ozone line 300 includes a first oxygen line 310, a second oxygen line 320, and an ozone line 330, the first oxygen line 310 is connected to the first structural component 112 of the first high-voltage assembly 110, the first oxygen line 310 is used for inputting oxygen into the first sealed discharge chamber, the second oxygen line 320 is connected to the second structural component 122 of the second high-voltage assembly 120, the second oxygen line 320 is used for inputting oxygen into the second sealed discharge chamber, the ozone line 330 is connected to the third structural component 212 of the low-voltage assembly 200, and the ozone line 330 is used for outputting ozone generated in the first and second discharge gap regions;
the cooling circuit 400 includes a first high-pressure side cooling unit 410, a second high-pressure side cooling unit 420, a first low-pressure side cooling unit 430, and a second low-pressure side cooling unit 440, the first high-pressure side cooling unit 410 is connected to the first structural member 112 of the first high-pressure assembly 110, the first high-pressure side cooling unit 410 is used for cooling the first high-pressure assembly 110 based on the cooling fluid flowing in the first high-pressure side cooling unit 410, the second high-pressure side cooling unit 420 is connected to the second structural member 122 of the second high-pressure assembly 120, the second high-pressure side cooling unit 420 is used for cooling the second high-pressure assembly 120 based on the cooling fluid flowing in the second high-pressure side cooling unit 420, the first low-pressure side cooling unit 430 and the second low-pressure side cooling unit 440 are connected to the third structural member 212 of the low-pressure assembly 200, and the first low-pressure side cooling unit 430 is used for cooling the second low-pressure assembly 220 based on the cooling fluid flowing in the first low-pressure side cooling unit 430.
In the embodiment of the present example, the first high voltage assembly 110 of the high voltage assembly 100 further comprises a first blocking dielectric ceramic plate 111, a first heat conductive adhesive 114, a second heat conductive adhesive 115, a first high voltage isolation insulator 116, a first high voltage electrically conductive element 117, a first electrically and thermally conductive adhesive 118, a second high voltage electrically conductive element 119, wherein:
the first high-voltage isolating insulator 116 is connected to the first sealing plate 113 by the second heat-conductive adhesive 115, and the first high-voltage isolating insulator 116 is used for conducting the heat conducted by the second heat-conductive adhesive 115 to the cooling liquid circulated in the first high-voltage side cooling unit 410 in the first structural component 112 through the first sealing plate 113;
the first high-voltage conductive element 117 is a metal silver layer with a preset thickness, the first high-voltage conductive element 117 is sintered to the surface of the first high-voltage isolation insulator 116 at a high temperature, the first high-voltage conductive element 117 is bonded with the second high-voltage conductive element 119 through a first conductive and heat-conductive adhesive 118, and the first high-voltage conductive element 117 is used for supplying power to the second high-voltage conductive element 119;
the second high-voltage conductive element 119 is a metal silver layer with a preset thickness, and the second high-voltage conductive element 119 is sintered to the surface of the first blocking dielectric ceramic plate 111 at a high temperature, so that the second high-voltage conductive element 119 is uniformly distributed on the first blocking dielectric ceramic plate 111;
The first heat conductive adhesive 114 is adhered to the outer ring of the first heat conductive adhesive 118, and the first heat conductive adhesive 114 surrounds the outer rings of the first heat conductive adhesive 118, the first high voltage conductive element 117, and the second high voltage conductive element 119 to prevent the first heat conductive adhesive 118, the first high voltage conductive element 117, and the second high voltage conductive element 119 from being corroded by ozone generated in the first discharge gap region.
In the embodiment of the present example, the second high voltage assembly 120 of the high voltage assembly 100 further comprises a second blocking dielectric ceramic plate 121, a third heat conductive adhesive 124, a fourth heat conductive adhesive 125, a second high voltage isolation insulator 126, a third high voltage electrically conductive element 127, a second electrically and thermally conductive adhesive 128, a fourth high voltage electrically conductive element 129, wherein:
the second high voltage isolation insulator 126 is connected to the second sealing plate 123 by the fourth heat conductive adhesive 125, and the second high voltage isolation insulator 126 is used for conducting the heat conducted by the fourth heat conductive adhesive 125 to the cooling liquid circulated in the second high voltage side cooling unit 420 in the second structural component 122 through the second sealing plate 123;
The third high voltage conductive element 127 is a metal silver layer with a preset thickness, the third high voltage conductive element 127 is sintered to the surface of the second high voltage isolation insulator 126 at a high temperature, the third high voltage conductive element 127 is bonded with the fourth high voltage conductive element 129 through a second conductive adhesive 128, and the third high voltage conductive element 127 is used for supplying power to the fourth high voltage conductive element 129;
the fourth high voltage conductive element 129 is a metal silver layer with a preset thickness, and the fourth high voltage conductive element 129 is sintered to the surface of the second blocking dielectric ceramic plate 121 at a high temperature, so that the fourth high voltage conductive element 129 is uniformly distributed on the second blocking dielectric ceramic plate 121;
the third heat conductive adhesive 124 is adhered to the outer ring of the second heat conductive adhesive 128, and the third heat conductive adhesive 124 surrounds the outer rings of the second heat conductive adhesive 128, the third high voltage conductive element 127, and the fourth high voltage conductive element 129 to prevent the second heat conductive adhesive 128, the third high voltage conductive element 127, and the fourth high voltage conductive element 129 from being corroded by ozone generated in the second discharge gap region.
In the embodiment of the present example, the ozone generator further comprises a first high voltage cable hole 511, a second high voltage cable hole 512, a third high voltage cable hole 513, a fourth high voltage cable hole 514, a fifth high voltage cable hole 515, a sixth high voltage cable hole 516, a seventh high voltage cable hole 517, an eighth high voltage cable hole 518, wherein:
the first high voltage cable hole 511, the second high voltage cable hole 512 are holes in the first structural component 112, the third high voltage cable hole 513 is a hole in the second heat conductive adhesive layer 115, the fourth high voltage cable hole 514 is a hole in the first high voltage isolation insulator 116, the second high voltage cable hole 512, the third high voltage cable hole 513, the fourth high voltage cable hole 514 are concentric holes, and a preset high voltage cable is connected to the first high voltage conductive element 117 through the first high voltage cable hole 511, the second high voltage cable hole 512, the third high voltage cable hole 513, the fourth high voltage cable hole 514;
the fifth high voltage cable hole 515 and the sixth high voltage cable hole 516 are holes in the second structural component 122, the seventh high voltage cable hole 517 is a hole in the fourth heat conductive adhesive layer 125, the eighth high voltage cable hole 518 is a hole in the second high voltage isolation insulating member 126, the sixth high voltage cable hole 516, the seventh high voltage cable hole 517 and the eighth high voltage cable hole 518 are concentric holes, and the preset high voltage cable is connected to the third high voltage conductive element 127 through the fifth high voltage cable hole 515, the sixth high voltage cable hole 516, the seventh high voltage cable hole 517 and the eighth high voltage cable hole 518.
In the present exemplary embodiment, the first low voltage component 210 of the ozone generator low voltage component 200 further comprises a fifth thermally conductive adhesive 214, a third electrically and thermally conductive adhesive 215, a first low voltage electrically conductive element 216, wherein:
the first low-voltage conductive element 216 is bonded to the third sealing plate 213 by the third electrically and thermally conductive adhesive 215;
the fifth heat conductive adhesive 214 is adhered to the outer ring of the third heat conductive adhesive 215, and the fifth heat conductive adhesive 214 surrounds the outer ring of the third heat conductive adhesive 215 and the first low voltage conductive element 216 to prevent the third heat conductive adhesive 215 and the first low voltage conductive element 216 from being corroded by ozone generated in the first discharge gap region.
In the present exemplary embodiment, the second low voltage component 220 of the ozone generator low voltage component 200 further comprises a sixth thermally conductive adhesive 224, a fourth electrically and thermally conductive adhesive 225, a second low voltage electrically conductive element 226, wherein:
the second low voltage conductive element 226 is bonded to the fourth sealing plate 223 by the fourth electrically and thermally conductive adhesive 225;
the sixth heat conductive adhesive 224 is adhered to the outer ring of the fourth heat conductive adhesive 225, and the sixth heat conductive adhesive 224 surrounds the outer ring of the fourth heat conductive adhesive 225 and the second low voltage conductive element 226 to prevent the fourth heat conductive adhesive 225 and the second low voltage conductive element 226 from being corroded by ozone generated in the second discharge gap region.
In the present exemplary embodiment, the oxygen ozone circuit 300 of the ozone generator further includes an oxygen inlet manifold 316:
the first oxygen pipeline 310 further comprises a first oxygen input channel 314, a first oxygen branch pipe 315, and a first restrictor 317, wherein oxygen is input into the first oxygen branch pipe 315 through the oxygen inlet manifold 316, and then is input into the first closed discharge chamber through the first oxygen input channel 314 and the restrictor 317;
the second oxygen pipeline 320 further comprises a second oxygen input channel 324, a second oxygen branch pipe 325 and a second restrictor 327, wherein oxygen is input into the first closed discharge chamber through the second oxygen input channel 324 after being input into the second oxygen branch pipe 325 through the oxygen inlet manifold 316 and is input into the first closed discharge chamber after being restricted by the second restrictor 317;
the ozone pipeline 330 further includes an ozone outlet channel 332, an ozone branch 333, and an ozone outlet manifold 334, and ozone generated in the first discharge gap region and the second discharge gap region is output to the ozone outlet manifold 334 through the ozone outlet channel 332 and the ozone branch 333.
In the embodiment of the present example, the ozone generator further comprises a first low pressure side hole 521, a second low pressure side hole 522, a third low pressure side hole 523, a fourth low pressure side hole 524, wherein:
A first low voltage side hole 521 in the first low voltage conductive element 216 and a second low voltage side hole 522 in the third electrically and thermally conductive adhesive 215 are in communication with the ozone outlet channel 332 of the third structural component 212 such that ozone generated in the first discharge gap region flows out of the ozone outlet channel 332;
the third low voltage side holes 523 in the second low voltage conductive element 226 and the fourth low voltage side holes 524 in the fourth electrically and thermally conductive adhesive 225 are in communication with the ozone outlet channel 332 of the third structural component 212 such that ozone generated in the second discharge gap region flows out of the ozone outlet channel 332.
In the embodiment of the present example, compared with the plate-type ozone generator in the prior art, since the combination of the two plate-type ozone generators to generate a high-purity and high-concentration multi-layer plate-type ozone generator can be achieved by stacking the low-voltage components 200 back to back, the high-purity and high-concentration multi-layer plate-type ozone generator combines the third structural components 212 of the two ozone generators into one, and the ozone pipeline is integrated in the third structural components 212, so that ozone can be uniformly output through the same pipeline, thereby saving space, improving the integration level of the ozone generators, reducing the welding branches of the ozone output manifold of the plate-type ozone generating system, and improving the safety of equipment.
In the embodiment of the present example, the cooling circuit 400 of the ozone generator is:
the first high-pressure side cooling unit 410 further comprises a first high-pressure side water inlet branch pipe 411 and a first high-pressure side water outlet branch pipe 412, and the first high-pressure side cooling unit 410 is used for cooling the first high-pressure assembly 110 based on the cooling liquid flowing into the first high-pressure side water inlet branch pipe 411 and flowing out of the first high-pressure side water outlet branch pipe 412;
the second high-pressure side cooling unit 420 further includes a second high-pressure side water inlet branch pipe 421 and a second high-pressure side water outlet branch pipe 422, and the second high-pressure side cooling unit 420 is configured to cool the second high-pressure assembly 120 based on the cooling liquid flowing into the second high-pressure side water inlet branch pipe 421 and flowing out of the second high-pressure side water outlet branch pipe 422;
the first low pressure side cooling unit 430 further includes a first low pressure side water inlet branch pipe 431 and a first low pressure side water outlet branch pipe 432, and the first low pressure side cooling unit 430 is configured to cool the first low pressure assembly 210 based on the coolant flowing into the first low pressure side water inlet branch pipe 431 and flowing out of the first low pressure side water outlet branch pipe 432;
the second low pressure side cooling unit 440 further comprises a second low pressure side water inlet branch 441 and a second low pressure side water outlet branch 442, and the second low pressure side cooling unit 440 is configured to cool the second low pressure assembly 220 based on the coolant flowing into the second low pressure side water inlet branch 441 and flowing out of the second low pressure side water outlet branch 442.
Further, in the present exemplary embodiment, as shown in fig. 3, there is also provided a high purity high concentration multi-layer plate type ozone generating system. The ozone generating system is formed by superposing a plurality of high-purity high-concentration multi-layer plate-type ozone generators, and comprises:
an oxygen inlet unit comprising an oxygen inlet manifold 316, oxygen branches respectively connected to the first oxygen inlet channel 314 and the second oxygen inlet channel 324 of the ozone generator;
an ozone gas outlet unit, wherein the ozone gas outlet unit comprises an ozone gas outlet main pipe 334 and ozone branch pipes 333, and the ozone branch pipes 333 are respectively connected with an ozone outlet channel 332 of an ozone generator;
the cooling liquid water inlet main pipe 401 and the cooling liquid water outlet main pipe 402 are respectively connected with the first high-pressure side water inlet branch pipe 411, the second high-pressure side water inlet branch pipe 421, the first low-pressure side water inlet branch pipe 431 and the second low-pressure side water inlet branch pipe 441 of the ozone generator, the cooling liquid water inlet main pipe 401 is used for providing cooling liquid water inlet for the ozone generating system, the cooling liquid water outlet main pipe 402 is respectively connected with the first high-pressure side water outlet branch pipe 412, the second high-pressure side water outlet branch pipe 422, the first low-pressure side water outlet branch pipe 432 and the second low-pressure side water outlet branch pipe 442 of the ozone generator, and the cooling liquid water outlet main pipe 402 is used for collecting cooling liquid backwater of the ozone generating system.
It should be noted that although in the above detailed description several modules or units of a high purity high concentration multi-layer plate ozone generator are mentioned, this division is not mandatory. Indeed, the features and functions of two or more modules or units described above may be embodied in one module or unit in accordance with embodiments of the utility model. Conversely, the features and functions of one module or unit described above may be further divided into a plurality of modules or units to be embodied.
Other embodiments of the utility model will be apparent to those skilled in the art from consideration of the specification and practice of the utility model disclosed herein. This application is intended to cover any variations, uses, or adaptations of the utility model following, in general, the principles of the utility model and including such departures from the present disclosure as come within known or customary practice within the art to which the utility model pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the utility model being indicated by the following claims.
It is to be understood that the utility model is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the utility model is limited only by the appended claims.
Claims (10)
1. The utility model provides a high purity high concentration multilayer board-like ozone generator which characterized in that, ozone generator includes high-voltage component, low-voltage component, oxygen ozone pipeline, wherein:
the high-pressure assembly comprises a first high-pressure assembly and a second high-pressure assembly which are of plate structures, wherein the first high-pressure assembly comprises a first structural component and a first sealing plate, the first structural component is fixedly connected with the first sealing plate, the second high-pressure assembly comprises a second structural component and a second sealing plate, and the second structural component is fixedly connected with the second sealing plate;
the low-voltage assembly comprises a first low-voltage assembly, a second low-voltage assembly and a third structural component which are of plate structures, the first low-voltage assembly comprises a third sealing plate, the second low-voltage assembly comprises a fourth sealing plate, the third sealing plate, the fourth sealing plate and the third structural component are fixedly connected, the third sealing plate is fixedly connected with the edge of the first sealing plate so that the first high-voltage assembly and the first low-voltage assembly are combined to form a first airtight discharge chamber, a preset interval is reserved between the first high-voltage assembly and the first low-voltage assembly so as to form a first discharge gap area, the fourth sealing plate is fixedly connected with the edge of the second sealing plate so that the second high-voltage assembly and the second low-voltage assembly are combined to form a second airtight discharge chamber, and a preset interval is reserved between the second high-voltage assembly and the second low-voltage assembly so as to form a second discharge gap area;
The oxygen ozone pipeline comprises a first oxygen pipeline, a second oxygen pipeline and an ozone pipeline, wherein the first oxygen pipeline is connected with a first structural component of the first high-voltage assembly, the first oxygen pipeline is used for inputting oxygen into the first airtight discharge chamber, the second oxygen pipeline is connected with a second structural component of the second high-voltage assembly, the second oxygen pipeline is used for inputting oxygen into the second airtight discharge chamber, the ozone pipeline is connected with a third structural component of the low-voltage assembly, and the ozone pipeline is used for outputting ozone generated in the first discharge gap area and the second discharge gap area.
2. The ozone generator of claim 1, further comprising a cooling circuit comprising a first high-pressure side cooling unit for cooling the first high-pressure assembly based on a cooling liquid flowing in the first high-pressure side cooling unit, a second high-pressure side cooling unit for cooling the second high-pressure assembly based on a cooling liquid flowing in the second high-pressure side cooling unit, a first low-pressure side cooling unit connected with a third structural member of the low-pressure assembly, a second low-pressure side cooling unit for cooling the second high-pressure assembly based on a cooling liquid flowing in the second high-pressure side cooling unit for cooling the second high-pressure assembly, the first low-pressure side cooling unit being connected with the third structural member of the low-pressure assembly, the first low-pressure side cooling unit being for cooling the first high-pressure assembly based on a cooling liquid flowing in the first low-pressure side cooling unit for cooling the low-pressure assembly based on a cooling liquid flowing in the second high-pressure side cooling unit;
The first high voltage assembly further comprises a first blocking dielectric ceramic plate, a first thermally conductive adhesive, a second thermally conductive adhesive, a first high voltage isolation insulator, a first high voltage electrically conductive element, a first electrically conductive thermally conductive adhesive, a second high voltage electrically conductive element, wherein:
the first high-voltage isolation insulator is connected with the first sealing plate through the second heat-conducting adhesive and is used for conducting heat conducted by the second heat-conducting adhesive to cooling liquid circulating in a first high-voltage side cooling unit in the first structural component through the first sealing plate;
the first high-voltage conductive element is a metal silver layer with a preset thickness, the first high-voltage conductive element is bonded with the second high-voltage conductive element through a first conductive and heat-conductive adhesive, and the first high-voltage conductive element is used for supplying power to the second high-voltage conductive element;
the second high-voltage conductive element is a metal silver layer with preset thickness;
the first heat conduction adhesive is adhered to the outer ring of the first electric conduction heat conduction adhesive, and the first heat conduction adhesive surrounds the outer rings of the first electric conduction heat conduction adhesive, the first high-voltage electric conduction element and the second high-voltage electric conduction element.
3. The ozone generator of claim 2, wherein the second high voltage assembly at the high voltage assembly further comprises a second blocking dielectric ceramic plate, a third thermally conductive adhesive, a fourth thermally conductive adhesive, a second high voltage isolation insulator, a third high voltage electrically conductive element, a second electrically and thermally conductive adhesive, a fourth high voltage electrically conductive element, wherein:
the second high-voltage isolation insulator is connected with the second sealing plate through the fourth heat conduction adhesive, and is used for conducting heat conducted by the fourth heat conduction adhesive to cooling liquid circulated in a second high-voltage side cooling unit in the second structural component through the second sealing plate;
the third high-voltage conductive element is a metal silver layer with preset thickness, is bonded with the fourth high-voltage conductive element through a second conductive and heat-conductive adhesive and is used for supplying power to the fourth high-voltage conductive element;
the fourth high-voltage conductive element is a metal silver layer with preset thickness;
and the third heat conduction adhesive is adhered to the outer ring of the second electric conduction heat conduction adhesive, and surrounds the outer rings of the second electric conduction heat conduction adhesive, the third high-voltage electric conduction element and the fourth high-voltage electric conduction element.
4. The ozone generator of claim 3, further comprising a first high voltage cable aperture, a second high voltage cable aperture, a third high voltage cable aperture, a fourth high voltage cable aperture, a fifth high voltage cable aperture, a sixth high voltage cable aperture, a seventh high voltage cable aperture, an eighth high voltage cable aperture, wherein:
the first high-voltage cable hole and the second high-voltage cable hole are holes in the first structural component, the third high-voltage cable hole is a hole in the second heat conduction adhesive layer, the fourth high-voltage cable hole is a hole in the first high-voltage isolation insulator, the second high-voltage cable hole, the third high-voltage cable hole and the fourth high-voltage cable hole are concentric holes, and a preset high-voltage cable is connected with the first high-voltage conductive element through the first high-voltage cable hole, the second high-voltage cable hole, the third high-voltage cable hole and the fourth high-voltage cable hole;
the fifth high-voltage cable hole and the sixth high-voltage cable hole are holes in the second structural component, the seventh high-voltage cable hole is a hole in the fourth heat conduction adhesive layer, the eighth high-voltage cable hole is a hole in the second high-voltage isolation insulator, the sixth high-voltage cable hole, the seventh high-voltage cable hole and the eighth high-voltage cable hole are concentric holes, and the preset high-voltage cable is connected with the third high-voltage conductive element through the fifth high-voltage cable hole, the sixth high-voltage cable hole, the seventh high-voltage cable hole and the eighth high-voltage cable hole.
5. The ozone generator of claim 4, wherein the first low voltage component of the ozone generator further comprises a fifth thermally conductive adhesive, a third electrically and thermally conductive adhesive, a first low voltage electrically conductive element, wherein:
the first low-voltage conductive element is bonded with a third sealing plate through the third conductive and heat-conductive adhesive;
the fifth heat conduction adhesive is adhered to the outer ring of the third electric conduction heat conduction adhesive, and the fifth heat conduction adhesive surrounds the third electric conduction heat conduction adhesive and the outer ring of the first low-voltage electric conduction element.
6. The ozone generator of claim 5, wherein the second low voltage component of the ozone generator further comprises a sixth thermally conductive adhesive, a fourth electrically and thermally conductive adhesive, a second low voltage electrically conductive element, wherein:
the second low-voltage conductive element is bonded with a fourth sealing plate through the fourth conductive and heat-conductive adhesive;
the sixth heat conduction adhesive is adhered to the outer ring of the fourth electric conduction heat conduction adhesive, and the sixth heat conduction adhesive surrounds the outer ring of the fourth electric conduction heat conduction adhesive and the outer ring of the second low-voltage electric conduction element.
7. The ozone generator of claim 6, wherein the oxygen ozone circuit of the ozone generator further comprises an oxygen inlet manifold:
The first oxygen pipeline further comprises a first oxygen input channel, a first oxygen branch pipe and a first restrictor, wherein after oxygen is input into the first oxygen branch pipe through the oxygen inlet main pipe, the oxygen is input into the first closed discharge chamber through the first oxygen input channel and after being restricted by the first restrictor;
the second oxygen pipeline further comprises a second oxygen input channel, a second oxygen branch pipe and a second restrictor, wherein after oxygen is input into the second oxygen branch pipe through the oxygen inlet main pipe, the oxygen is input into the first closed discharge chamber through the second oxygen input channel and after being restricted by the second restrictor;
the ozone pipeline also comprises an ozone outlet channel, an ozone branch pipe and an ozone air outlet main pipe, and ozone generated in the first discharge gap area and the second discharge gap area is output to the ozone air outlet main pipe through the ozone outlet channel and the ozone branch pipe.
8. The ozone generator of claim 7, further comprising a first low pressure side hole, a second low pressure side hole, a third low pressure side hole, a fourth low pressure side hole, wherein:
a first low voltage side hole in the first low voltage conductive element and a second low voltage side hole in the third electrically and thermally conductive adhesive are in communication with an ozone outlet channel of the third structural component such that ozone generated in the first discharge gap region flows out of the ozone outlet channel;
A third low voltage side hole in the second low voltage conductive element and a fourth low voltage side hole in the fourth electrically and thermally conductive adhesive are in communication with the ozone outlet channel of the third structural component such that ozone generated in the second discharge gap region flows out of the ozone outlet channel.
9. The ozone generator of claim 2, wherein the ozone generator is in a cooling circuit:
the first high-pressure side cooling unit further comprises a first high-pressure side water inlet branch pipe and a first high-pressure side water outlet branch pipe, and is used for cooling the first high-pressure component based on cooling liquid flowing in the first high-pressure side water inlet branch pipe and flowing out of the first high-pressure side water outlet branch pipe;
the second high-pressure side cooling unit further comprises a second high-pressure side water inlet branch pipe and a second high-pressure side water outlet branch pipe, and is used for cooling the second high-pressure component based on cooling liquid flowing in the second high-pressure side water inlet branch pipe and flowing out of the second high-pressure side water outlet branch pipe;
the first low-pressure side cooling unit further comprises a first low-pressure side water inlet branch pipe and a first low-pressure side water outlet branch pipe, and is used for cooling the first low-pressure component based on cooling liquid flowing in the first low-pressure side water inlet branch pipe and flowing out of the first low-pressure side water outlet branch pipe;
The second low-pressure side cooling unit further comprises a second low-pressure side water inlet branch pipe and a second low-pressure side water outlet branch pipe, and the second low-pressure side cooling unit is used for cooling the second low-pressure component based on cooling liquid flowing in the second low-pressure side water inlet branch pipe and flowing out of the second low-pressure side water outlet branch pipe.
10. A high purity high concentration multi-layer plate type ozone generating system composed of a plurality of high purity high concentration multi-layer plate type ozone generators as claimed in any one of claims 1 to 9, wherein said ozone generating system comprises:
the oxygen inlet unit comprises an oxygen inlet main pipe and an oxygen branch pipe, and the oxygen branch pipe is respectively connected with a first oxygen input channel and a second oxygen input channel of the ozone generator;
the ozone gas outlet unit comprises an ozone gas outlet main pipe and ozone branch pipes, and the ozone branch pipes are respectively connected with an ozone outlet channel of an ozone generator;
the cooling liquid water inlet main pipe and the cooling liquid water outlet main pipe are respectively connected with a first high-pressure side water inlet branch pipe, a second high-pressure side water inlet branch pipe, a first low-pressure side water inlet branch pipe and a second low-pressure side water inlet branch pipe of the ozone generator, the cooling liquid water inlet main pipe is used for providing cooling liquid water inlet for the ozone generating system, and the cooling liquid water outlet main pipe is respectively connected with a first high-pressure side water outlet branch pipe, a second high-pressure side water outlet branch pipe, a first low-pressure side water outlet branch pipe and a second low-pressure side water outlet branch pipe of the ozone generator, and the cooling liquid water outlet main pipe is used for collecting cooling liquid backwater of the ozone generating system.
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| CN202320775930.9U CN220467582U (en) | 2023-04-10 | 2023-04-10 | High-purity high-concentration multilayer plate-type ozone generator and system thereof |
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| CN202320775930.9U CN220467582U (en) | 2023-04-10 | 2023-04-10 | High-purity high-concentration multilayer plate-type ozone generator and system thereof |
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