CN220464364U - Crystal support clamping mechanism and turnover device - Google Patents

Abstract

The utility model provides a crystal support clamping mechanism and a turnover device, belongs to the technical field of crystal silicon processing, and solves the problem that the surface of a crystal support is easy to damage in the prior art. The utility model comprises a base; the first clamping unit is rotatably arranged on the base and is provided with a first action surface capable of being rotatably switched, and the first action surface acts on the first surface of the crystal support; the second clamping unit is rotatably arranged on the base and is provided with a second action surface capable of being rotatably switched, and the second action surface acts on the second surface of the crystal support; the first acting surface and the second acting surface are arranged in a relatively inclined manner, and the first acting surface and the second acting surface can clamp the crystal support under the combined action.

Description

Crystal support clamping mechanism and turnover device

Technical Field

The utility model belongs to the technical field of crystal silicon processing, and particularly relates to a crystal support clamping mechanism and a turnover device.

Background

The crystal bar is generally adhered to the crystal support through an adhesive machine, and then the whole crystal support and the crystal bar are pushed into a slicing machine to clamp the crystal support so as to fix the crystal bar. In the process from the process of sticking the crystal bar to the process of feeding the wafer into the slicing machine and the process of feeding the cut silicon wafer into the degumming machine, a device capable of integrally turning the crystal support and the crystal bar by 180 degrees (namely, turning the crystal support up, the crystal bar down to the crystal bar up, the crystal support down, or turning the crystal support down and the crystal bar up to the crystal support up and the crystal bar down) is often needed to meet different adaptation requirements of the sticking machine, the slicing machine, the degumming machine and various tooling trolleys.

The prior patent CN116214747A discloses a bar turning device, which drives a gear to engage and drive through a servo motor so as to realize the turning of a crystal bar, but a guide rail for supporting a crystal support in the scheme is in surface contact with the crystal support, the surface of the crystal support is easily scratched in the process of pushing the crystal bar, and the crystal bar and the crystal support can be pushed into the turning device by overcoming the friction force by a large pushing force.

Therefore, the technical problem to be solved by the application is as follows: provides a bar turnover structure which is not easy to damage the surface of the crystal support.

Disclosure of Invention

The utility model aims to solve the problems in the prior art, and provides a crystal support clamping mechanism and a turnover device, which solve the problem that the surface of a crystal support is easy to damage in the prior art. The technical effect of this application scheme is: the friction force of the crystal support clamping state can be reduced, and further the damage to the surface of the crystal support is reduced.

The aim of the utility model can be achieved by the following technical scheme: a crystal holder clamping mechanism comprising: a base; the first clamping unit is rotatably arranged on the base and is provided with a first action surface capable of being rotatably switched, and the first action surface acts on the first surface of the crystal support; the second clamping unit is rotatably arranged on the base and is provided with a second action surface capable of being rotatably switched, and the second action surface acts on the second surface of the crystal support; the first acting surface and the second acting surface are arranged in a relatively inclined manner, and the first acting surface and the second acting surface can clamp the crystal support under the combined action.

It can be understood that the dovetail-shaped crystal support is provided with an inclined side surface and a bottom surface, and if clamping forces in the horizontal direction are used on two sides, clamping can be completed by using clamping forces in the vertical direction. The structure applies forces in the oblique directions on two sides, and the clamping is realized by matching with the upward force on the bottom of the crystal support, so that the force application structure is optimized. Through adopting rotatable first clamping unit and second clamping unit, replace current plane clamping structure, static surface friction changes rolling friction into, can show the damage that reduces clamping structure to brilliant support, and then when brilliant support gets into the later process, in cutting equipment's the cutting chamber promptly, can be realized hugging closely with the clamping seat, be difficult for leaping up when the crystal bar is cut and move, guaranteed the cutting quality of crystal bar. For example, the first acting surface of the first clamping unit and the second acting surface of the second clamping unit may be made of a material with hardness smaller than that of the crystal support, so that damage to the crystal support may be further reduced.

In the above crystal support clamping mechanism, the base has: the first clamping seat is provided with the first clamping unit; the second clamping seats are at least two and are respectively arranged on two sides of the first clamping seat, and a second clamping unit is arranged on the second clamping seat; the first clamping seat is higher than/lower than the second clamping seat, so that the first clamping unit and the second clamping unit respectively correspond to two surfaces of the crystal support.

It can be understood that the bottom surface of the dovetail-shaped crystal support is a plane, only one direction of force is needed for clamping, and two sides of the dovetail-shaped crystal support respectively need one force for clamping, so that at least two second clamping seats are arranged, and at least 1 first clamping seat is arranged.

In the above crystal support clamping mechanism, the base is divided into a first clamping area and a second clamping area, the first clamping area is arranged at the end part of the base, and the second clamping area is adjacent to or connected with the first clamping area; the distribution density of the first clamping units in the first clamping area is greater than that of the first unit stations in the second clamping area, and/or the distribution density of the second clamping units in the first clamping area is greater than that of the second clamping units in the second clamping area.

It can be understood that the first clamping area can be used for the crystal support to enter, when the crystal support enters, the stress area is shorter, and larger clamping force needs to be ensured to counteract the gravity of the crystal support of the part which does not enter, so that the distribution density of the first clamping unit and the second clamping unit of the first clamping area is larger than that of the second clamping area.

In the above crystal support clamping mechanism, the first clamping unit is a follower wheel, and the follower wheel is hinged on the base, or the first clamping unit is an electric wheel, and an electric driving mechanism is arranged on the base and is provided with an output end, and the output end is connected with the electric wheel.

It can be understood that when the first clamping unit is a follower wheel, the crystal support needs to be continuously pushed onto the base by a manipulator or manually, and when the first clamping unit is configured as an electric wheel, the crystal support can be driven to rotate by the electric driving mechanism so as to be driven to be automatically sent onto the base. The electric driving mechanism is electrically or communicatively connected with a speed control unit, so that the rotating speed of the output end can be controlled, and the crystal support can be prevented from being damaged due to too fast conveying.

In the above crystal support clamping mechanism, the second clamping unit extends obliquely upward and/or downward relative to the base, or the second acting surface of the second clamping unit is an inclined surface.

The second clamping unit may be a driven wheel extending obliquely or a driven wheel extending horizontally, and in particular, the driven wheel extending horizontally needs to be provided with an inclined second acting surface, and the section of the driven wheel is isosceles trapezoid.

In the above crystal support clamping mechanism, the base is provided with an angle adjusting structure, the second clamping unit is connected to the angle adjusting structure, and the angle can be adjusted to act on the crystal support with different inclination angles.

It can be understood that by setting the angle adjusting structure, the second clamping unit can be driven to rotate for adjusting the angle so as to adapt to the crystal support with different inclined side surfaces. The angle adjusting structure comprises a mounting groove, a movable shaft, an elastic piece and a propping piece, wherein the movable shaft is hinged to the mounting groove and can be connected with the second clamping unit, two sides of the movable shaft are propped against the propping piece and the elastic piece respectively, the propping piece can be connected to the base through threads, the movable shaft is propped against the movable shaft through rotation, the movable shaft is propped against a rotatable angle, the elastic piece is used for elastic reset of the movable shaft, and when the propping piece rotates in a direction away from the movable shaft, the elastic piece can prop against an angle rotated by reversion of the movable shaft to realize reset.

In the above crystal support clamping mechanism, the base is provided with a telescopic structure, and the second clamping unit is connected to the telescopic structure and can be telescopic to act on crystal supports of different sizes.

The telescopic structure comprises a rotating shaft, the rotating shaft is in threaded connection with the movable shaft or the base, the end part of the rotating shaft is also in relative rotation connection with the second clamping unit, the position of the rotating shaft relative to the base is adjusted by rotating the rotating shaft, and the second clamping unit is driven to move in a telescopic mode. In other embodiments, a telescopic column with a spring may be used instead of the rotating shaft, and the telescopic column is rotatably connected to the second clamping unit, so that telescopic adjustment may be achieved.

In the above crystal support clamping mechanism, the second clamping unit is a plurality of follower wheels coaxially arranged, so that a plurality of action points are arranged in a single action direction. It will be appreciated that when the sides of some susceptors are wide, the size of the single follower wheel is difficult to meet the force, and therefore the second clamping unit is configured as a plurality of follower wheels coaxially to achieve multi-point support clamping.

In the above crystal support clamping mechanism, the base is further provided with a limiting mechanism, and the limiting mechanism acts on the end part of the crystal support. The front and rear limiting of the crystal support is realized by arranging the limiting mechanism. Illustratively, the spacing mechanism includes: the first limiting unit is arranged on the base and acts on the third surface of the crystal support; the second limiting unit is arranged at one end of the base far away from the first limiting unit, and acts on the fourth surface of the crystal support. The first limiting unit is of a fixed limiting structure, and the second limiting unit is of a detachable/movable/rotatable limiting structure.

Another object of the present utility model is to provide a turning device, a drum; the crystal support clamping mechanism is arranged in the rotary drum; and the driving mechanism acts on the rotary drum and can drive the rotary drum to rotate.

It can be understood that the rotary drum is driven to rotate through the driving mechanism, and the rotary drum rotates to drive the base to rotate, so that the crystal support on the base is driven to turn over.

Further, the outside of the rotary drum is provided with a supporting component, the supporting component comprises a plurality of limiting wheels, and the limiting wheels are coupled with the rotary drum. It will be appreciated that the spacing wheel is coupled to the drum to both support the drum and limit the deflection of the drum without increasing the driving force.

In the turnover device, the center of gravity adjusting module is arranged on the rotary drum and can adjust the center of gravity of the rotary drum to the axis of the rotary drum. Specifically, focus adjustment module is including setting up the balancing weight on the rotary drum, the quality trend of balancing weight or equal to brilliant support fixture's quality, the balancing weight can rotate along with the rotary drum, the rotary drum outside has the district of stepping down that can supply balancing weight pivoted.

Compared with the prior art, the utility model has the following beneficial effects:

1. by adopting the rotatable first clamping unit and the rotatable second clamping unit to replace the conventional planar clamping structure, static surface friction is converted into rolling friction, so that the damage of the clamping structure to the crystal support can be obviously reduced, and further, when the crystal support enters the subsequent working procedure, namely the cutting chamber of the cutting equipment, the crystal support can be tightly attached to the clamping seat, the crystal bar is not easy to move during cutting, and the cutting quality of the crystal bar is ensured;

2. by arranging the electric second clamping unit, the crystal support can be automatically sent to the base without applying continuous pushing force outside the base;

3. the clamping angle of the second clamping unit can be adjusted by arranging an angle adjusting structure so as to be suitable for crystal supports with different inclined planes;

4. the second clamping unit is driven to stretch out and draw back through the telescopic structure so as to be suitable for crystal supports with different sizes.

Drawings

FIG. 1 is a schematic perspective view of a crystal support clamping mechanism of the present utility model;

FIG. 2 is a schematic view of the structure of FIG. 1 from another perspective;

FIG. 3 is a schematic perspective view of the mounting bracket of FIG. 1;

FIG. 4 is a schematic diagram of a perspective structure of a turnover device of the present utility model after assembling a susceptor and a ingot;

100, a base; 110. a first clamping seat; 120. a second clamping seat; 130. an angle adjusting structure; 131. a mounting groove; 132. a movable shaft; 133. an elastic member; 134. a pressing piece; 140. a telescopic structure; 200. a first clamping unit; 210. a first active surface; 300. a second clamping unit; 310. a second active surface; 400. a rotating drum; 500. a driving mechanism; 600. a center of gravity adjustment module; A. a first clamping zone; B. a second clamping region; C. and a crystal support.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Referring to fig. 1-3 of the drawings, a crystal support clamping mechanism of the present application specifically includes: the base 100, the first clamping unit 200, and the second clamping unit 300. The base 100 is used for carrying a crystal support C, the first clamping unit 200 is rotatably arranged on the base 100, the first clamping unit 200 is provided with a first action surface 210 which can be rotatably switched, the first action surface 210 acts on the first surface of the crystal support C, the second clamping unit 300 is rotatably arranged on the base 100, the second clamping unit 300 is provided with a second action surface 310 which can be rotatably switched, and the second action surface 310 acts on the second surface of the crystal support C; the first acting surface 210 and the second acting surface 310 are disposed obliquely relative to each other, and the first acting surface 210 and the second acting surface 310 cooperate to clamp the crystal support C.

It can be understood that the dovetail-shaped crystal support C is provided with an inclined side surface and a bottom surface, and if clamping forces in the horizontal direction are used on two sides, clamping can be completed by using clamping forces in the vertical direction. The structure applies forces in the oblique directions on two sides, and the clamping is realized by matching with the upward force on the bottom of the crystal support C, so that the force application structure is optimized. Through adopting rotatable first clamping unit 200 and second clamping unit 300, replace current planar clamping structure, still face friction changes rolling friction, can show the damage that reduces clamping structure to brilliant support C, and then when brilliant support C gets into the subsequent process, in cutting equipment's the cutting chamber promptly, can realize hugging closely with the clamping seat, difficult leaping when the crystal bar cuts has guaranteed the cutting quality of crystal bar. For example, the first acting surface 210 of the first clamping unit 200 and the second acting surface 310 of the second clamping unit 300 may be made of a material having a hardness smaller than that of the crystal support C, so as to further reduce the damage of the crystal support C.

Referring to fig. 1, the base 100 has a first clamping seat 110 and a second clamping seat 120, and the first clamping seat 110 is provided with a first clamping unit 200; at least two second clamping seats 120 are provided, the two second clamping seats 120 are respectively arranged at two sides of the first clamping seat 110, and the second clamping seats 120 are provided with second clamping units 300; the first clamping seat 110 is higher/lower than the second clamping seat 120, so that the first clamping unit 200 and the second clamping unit 300 respectively correspond to two surfaces of the crystal support C.

It can be understood that the bottom surface of the dovetail-shaped crystal support C is a plane, only one direction of force is needed for clamping, and two sides of the dovetail-shaped crystal support C need one force for clamping, so that at least two second clamping seats 120 are configured, and at least 1 first clamping seat 110 is configured.

Referring to fig. 1, a first clamping area a and a second clamping area B are defined on the base 100, where the first clamping area a is disposed at an end of the base 100; the distribution density of the first clamping units 200 in the first clamping area a is greater than the distribution density of the first unit stations in the second clamping area B, and/or the distribution density of the second clamping units 300 in the first clamping area a is greater than the distribution density of the second clamping units 300 in the second clamping area B. It can be understood that the first clamping area a can be used for the entrance of the crystal support C, when the crystal support C enters, the stress area is shorter, and a larger clamping force needs to be ensured to counteract the gravity of the crystal support C which does not enter the crystal support, so that the distribution density of the first clamping unit 200 and the second clamping unit 300 of the first clamping area a is larger than that of the second clamping area B.

The first clamping unit 200 is a follower wheel, and the follower wheel is hinged on the base 100, or the first clamping unit 200 is an electric wheel, and an electric driving mechanism is arranged on the base 100 and is provided with an output end, and the output end is connected with the electric wheel. It can be understood that when the first clamping unit 200 is a follower wheel, the crystal support C needs to be continuously pushed onto the base 100 by a manipulator or manually, and when the first clamping unit 200 is configured as an electric wheel, the crystal support C can be driven to rotate by an electric driving mechanism so as to be driven to be automatically sent onto the base 100. The electric driving mechanism is electrically or communicatively connected with a speed control unit, so that the rotating speed of the output end can be controlled, and the damage to the crystal support C caused by too fast conveying can be prevented.

The second clamping unit 300 protrudes obliquely upward and/or downward with respect to the base 100, or the second acting surface 310 of the second clamping unit 300 is an inclined surface. The second clamping unit 300 may be a diagonally extending follower wheel or a horizontally extending follower wheel, and in particular, the horizontally extending follower wheel needs to be provided with an inclined second acting surface 310, which has an isosceles trapezoid cross section.

Referring to fig. 2, the base 100 is provided with an angle adjusting structure 130, and the second clamping unit 300 is connected to the angle adjusting structure 130, and can adjust an angle to act on the crystal support C with different inclination angles. It can be appreciated that by providing the angle adjusting structure 130, the second clamping unit 300 can be driven to rotate to adjust the angle so as to adapt to the wafer support C having different inclined sides. The angle adjusting structure 130 includes a mounting groove 131, a movable shaft 132, an elastic member 133, and a pressing member 134, wherein the movable shaft 132 is hinged on the mounting groove 131 and can be connected with the second clamping unit 300, two sides of the movable shaft 132 are respectively pressed by the pressing member 134 and the elastic member 133, the pressing member 134 can be connected to the base 100 through threads, the movable shaft 132 is pressed by a rotatable angle through rotating the pressing member 132, the elastic member 133 is used for elastic reset of the movable shaft 132, and when the pressing member 134 rotates in a direction away from the movable shaft 132, the elastic member 133 can press the movable shaft 132 by a reversely rotated angle to realize reset.

With continued reference to fig. 2, the base 100 is provided with a telescopic structure 140, and the second clamping unit 300 is connected to the telescopic structure 140 and can be telescopic to act on different sizes of crystal holders C. The telescopic structure 140 includes a rotating shaft, which is screwed to the movable shaft 132 or the base 100, and the end of the rotating shaft is rotatably connected to the second clamping unit 300, and the position of the rotating shaft relative to the base 100 is adjusted by rotating the rotating shaft, so as to drive the second clamping unit 300 to perform telescopic motion. In other embodiments, a telescopic column with a spring may be used instead of the rotating shaft, and the telescopic column is rotatably connected to the second clamping unit 300, so that telescopic adjustment may be achieved.

In some embodiments, the second clamping unit 300 is a plurality of follower wheels coaxially arranged so as to have a plurality of action points in a single action direction. It will be appreciated that when the sides of some of the susceptors C are wide, it is difficult to meet the force with a single follower wheel, and therefore, the second clamping unit 300 is configured as a plurality of follower wheels coaxially to achieve multi-point support clamping.

In some embodiments, a limiting mechanism is further provided on the base 100, and acts on the end of the susceptor C. The front and rear limit of the crystal support C is realized by arranging the limit mechanism. Illustratively, the spacing mechanism includes: the first limiting unit is arranged on the base 100 and acts on the third surface of the crystal support C; the second limiting unit is disposed at one end of the base 100 far away from the first limiting unit, and acts on the fourth surface of the crystal support C. The first limiting unit is of a fixed limiting structure, and the second limiting unit is of a detachable/movable/rotatable limiting structure.

Referring to fig. 4, the turnover device of the present application includes a crystal support C clamping mechanism, a rotary drum 400 and a driving mechanism 500, wherein a base 100 is disposed in the rotary drum 400, the rotary drum 400 is connected with the base 100, and the driving mechanism 500 acts on the rotary drum 400 to drive the rotary drum 400 to rotate. It can be appreciated that the driving mechanism 500 drives the drum 400 to rotate, and the drum 400 rotates to drive the base 100 to rotate, so as to drive the crystal support C on the base 100 to turn over.

In some embodiments, a support assembly is provided outside the drum 400, including a plurality of spacing wheels coupled to the drum 400. It will be appreciated that the spacing wheel is coupled to the drum 400 to both support the drum 400 and limit the deflection of the drum 400 without increasing the driving force.

In some embodiments, the center of gravity adjusting module 600 is disposed on the drum 400, so as to adjust the center of gravity of the drum 400 to the center of the drum 400. Specifically, the gravity center adjusting module 600 includes a balancing weight disposed on the drum 400, the balancing weight tends to or equals to the crystal support C clamping mechanism, the balancing weight can rotate along with the drum 400, and a yielding area for the balancing weight to rotate is disposed outside the drum 400.

Working principle: the crystal support C is first sent to the first clamping area a on the base 100 by a manipulator, two sides of the crystal support C are along the second acting surface 310 of the second clamping unit 300, the bottom of the crystal support C is abutted against the first acting surface 210 of the first clamping unit 200 until two ends of the crystal support C are all located on the base 100, and a locking bolt is inserted to limit the ends of the crystal support C. Then, the driving mechanism 500 can be started, the drum 400 is driven to rotate by the driving mechanism 500, the drum 400 rotates to drive the base 100 to rotate, the base 100 rotates to drive the crystal support C to rotate, the turnover is finally realized, and the turned crystal support C is taken out and can be fed into the cutting time of the cutting equipment.

The beneficial effects are that: according to the utility model, the rotatable first clamping unit 200 and the rotatable second clamping unit 300 are adopted to replace the conventional planar clamping structure, static surface friction is converted into rolling friction, so that the damage of the clamping structure to the crystal support C can be remarkably reduced, and further, when the crystal support C enters the subsequent working procedure, namely the cutting chamber of the cutting equipment, the crystal support C can be tightly attached to the clamping seat, the crystal bar is not easy to jump during cutting, and the cutting quality of the crystal bar is ensured; by providing the electric second clamping unit 300, the wafer carrier C can be automatically transferred to the base 100 without applying a continuous pushing force outside the base 100; by providing the angle adjusting structure 130, the clamping angle of the second clamping unit 300 can be adjusted to be adapted to the wafer carrier C having different inclined surfaces; the second clamping unit 300 is driven to stretch and retract by arranging the stretching structure 140 so as to be suitable for crystal holders C with different sizes.

The specific embodiments described herein are offered by way of example only to illustrate the spirit of the utility model. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions thereof without departing from the spirit of the utility model or exceeding the scope of the utility model as defined in the accompanying claims.

Claims (10)

1. The utility model provides a crystal plate fixture which characterized in that includes:

a base (100);

the first clamping unit (200) is rotatably arranged on the base (100), the first clamping unit (200) is provided with a first action surface (210) capable of being rotatably switched, and the first action surface (210) acts on the first surface of the crystal support (C); and

the second clamping unit (300) is rotatably arranged on the base (100), the second clamping unit (300) is provided with a second action surface (310) which can be rotatably switched, and the second action surface (310) acts on the second surface of the crystal support (C);

the first acting surface (210) and the second acting surface (310) are arranged in a relatively inclined manner, and the first acting surface (210) and the second acting surface (310) can jointly act to clamp the crystal support (C).

2. The crystal holder clamping mechanism according to claim 1, wherein the base (100) has:

a first clamping seat (110), wherein the first clamping unit (200) is arranged on the first clamping seat (110);

the clamping device comprises at least two second clamping seats (120), wherein the second clamping seats (120) are respectively arranged on two sides of the first clamping seat (110), and a second clamping unit (300) is arranged on the second clamping seats (120);

the first clamping seat (110) is higher than/lower than the second clamping seat (120), so that the first clamping unit (200) and the second clamping unit (300) respectively correspond to two surfaces of the crystal support (C).

3. The crystal support clamping mechanism according to claim 1, wherein the base (100) is divided into a first clamping area (a) and a second clamping area (B), the first clamping area (a) is arranged at the end part of the base (100), and the second clamping area (B) is adjacent to or connected with the first clamping area (a);

the distribution density of the first clamping units (200) of the first clamping area (A) is greater than that of the first unit station of the second clamping area (B), and/or,

the distribution density of the second clamping units (300) of the first clamping area (A) is larger than that of the second clamping units (300) of the second clamping area (B).

4. The crystal support holding mechanism according to claim 1, wherein the first holding unit (200) is a follower wheel, the follower wheel being hinged to the base (100), or,

the first clamping unit (200) is an electric wheel, an electric driving mechanism is arranged on the base (100), the electric driving mechanism is provided with an output end, and the output end is connected with the electric wheel.

5. The crystal holder clamping mechanism according to claim 1, wherein the second clamping unit (300) protrudes obliquely upwards and/or downwards relative to the base (100), or the second active surface (310) of the second clamping unit (300) is an inclined surface.

6. The crystal support clamping mechanism according to claim 5, wherein the base (100) is provided with an angle adjusting structure (130), and the second clamping unit (300) is connected to the angle adjusting structure (130) and can adjust an angle to act on crystal supports (C) with different inclination angles.

7. The crystal holder clamping mechanism according to claim 5, wherein the base (100) is provided with a telescopic structure (140), and the second clamping unit (300) is connected to the telescopic structure (140) and can be telescopic to act on crystal holders (C) of different sizes.

8. The crystal holder clamping mechanism according to claim 5, wherein the second clamping unit (300) is a plurality of follower wheels coaxially arranged so as to have a plurality of action points in a single action direction.

9. A flipping device, comprising:

a drum (400);

the crystal holder clamping mechanism according to any of claims 1-8, which is arranged in a rotating drum (400); and

and the driving mechanism (500) acts on the rotary drum (400) and can drive the rotary drum (400) to rotate.

10. The turnover device as set forth in claim 9, wherein the drum (400) is provided with a center of gravity adjusting module (600) for adjusting the center of gravity of the drum (400) to the center of the drum (400).