CN220452770U

CN220452770U - Ball valve

Info

Publication number: CN220452770U
Application number: CN202321473707.5U
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Xi'an Xinhui Equipment Technology Co ltd
Current assignee: Xi'an Xinhui Equipment Technology Co ltd
Priority date: 2023-06-09
Filing date: 2023-06-09
Publication date: 2024-02-06
Anticipated expiration: 2033-06-09

Abstract

The utility model discloses a ball valve for use in a single crystal silicon growing apparatus, the ball valve comprising a valve seat and a ball, the valve seat comprising a cavity portion accommodating the ball and inlet and outlet passages communicating with the cavity portion at both ends of the cavity portion, the ball valve further comprising: and the sealing device is arranged between the inner surface of the cavity part and the sphere, and the inner surface of the sealing device wraps the sphere on the area of the sphere corresponding to the inner surface of the cavity part. The ball body is wrapped by the sealing device in a fully-enclosed mode, so that the problem of dust deposition is solved, and the tightness of the ball valve is ensured.

Description

Ball valve

Technical Field

The utility model relates to the technical field of semiconductor-grade monocrystalline silicon growth equipment, in particular to a ball valve.

Background

In the process of drawing a crystal by using a semiconductor-grade single crystal silicon growth apparatus, a large amount of silicon oxide volatile matters are generated in the growth apparatus, and in order to ensure that the drawing environment of the crystal generally cleans volatile gases in the growth apparatus by a vacuum pump, specifically, a dry vacuum pump is used for sucking air flow in the growth apparatus so as to drive the volatile gases to leave the growth apparatus and enter a dust remover. When the volatile gas enters the dust remover after being pumped by the vacuum pump to the growth equipment, the volatile gas is blocked on the outer side of the filter element by a metal filter element arranged in the dust remover, so that the dry vacuum pump is protected from damaging the internal parts of the dry vacuum pump due to the excessive volatile gas.

Because of long-time use, after each crystal drawing is finished, dust filtered by the metal filter element needs to be cleaned, so that the filter element is ensured not to cause insufficient ventilation due to dust accumulation and blockage, and the air extraction efficiency is influenced. The general cleaning mode is to automatically clean in a back blowing mode, accumulated dust can be separated from the metal filter element in the back blowing mode and falls into the bottom of the dust remover, and then leaves the dust remover through a slag discharging port arranged at the bottom of the dust remover. The ball valve is arranged at the slag discharging port to control the communication or closing of the slag discharging port and the high vacuum pipeline, when the ball valve is opened, the high vacuum pipeline pumps away accumulated dust through strong suction, the automatic cleaning of the dust remover is completed, and the evacuation smoothness of equipment during each production is ensured. However, after long use, dust can be deposited inside the ball valve, wearing the sealing surface of the ball, causing deformation of the gasket inside the ball valve, thus causing the ball valve to become less efficient and leak.

Disclosure of Invention

In order to solve the above technical problems, it is desirable in the embodiments of the present utility model to provide a ball valve, where the ball valve wraps a region of the ball body corresponding to an inner surface of a cavity portion of the valve seat in a fully enclosed manner by a sealing device, so as to solve the problem of dust deposition, thereby ensuring tightness of the ball valve.

The technical scheme of the utility model is realized as follows:

an embodiment of the present utility model provides a ball valve for use in a single crystal silicon growing apparatus, the ball valve including a valve seat and a ball, the valve seat including a cavity portion accommodating the ball and an inlet passage and an outlet passage communicating with the cavity portion at both ends of the cavity portion, the ball valve further including: and the sealing device is arranged between the inner surface of the cavity part and the sphere, and the inner surface of the sealing device wraps the sphere on the area of the sphere corresponding to the inner surface of the cavity part.

Preferably, the sealing means is a gasket filled between the inner surface of the cavity portion and the ball.

Preferably, the sealing means comprises a sealing portion for wrapping the sphere over the region of the sphere and a support portion for supporting the sealing portion between the sealing portion and an inner surface of the cavity portion.

Preferably, the support portion is an elastic material filled between the sealing portion and an inner surface of the cavity portion.

Preferably, the sealing means comprises separate first and second seals symmetrical about a central axis of the ball perpendicular to the axial direction of the ball valve for splicing into a wrap around the ball.

Preferably, a seal gland is further included in the form of a flange to closely fit the seal device with the ball from both ends of the seal device in the axial direction of the ball valve.

Preferably, the ball valve is a pneumatic ball valve.

Preferably, the gasket is made of an RTFE material.

Preferably, the sealing part is made of RTFE material.

The embodiment of the utility model provides a ball valve, which is characterized in that a sealing device made of RTFE materials is used for wrapping a ball body to prevent dust from accumulating in the ball valve, so that the service time of the ball valve is greatly prolonged, the leakage probability of the ball valve is greatly reduced, and the long-term running stability of equipment is ensured.

Drawings

FIG. 1 is a schematic view of a ball valve in accordance with the prior art;

FIG. 2 is a schematic view of a ball valve according to an embodiment of the present utility model;

fig. 3 is a schematic top view of a ball valve according to an embodiment of the present utility model.

Detailed Description

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the prior art, a general ball valve for opening or closing a slag discharge port of a dust collector mostly adopts a partial sealing mode, specifically, referring to fig. 1, the general ball valve comprises a ball valve base 1 and a spherical valve core 2 for opening or closing the general ball valve, the valve core 2 comprises a channel penetrating through the valve core 2, the valve core 2 rotates in the ball valve base 1 so that the channel is communicated with a fluid flow channel connected to the general ball valve, thus opening the general ball valve, and in addition, the valve core 2 rotates so that a spherical surface A of the valve core 2 seals the fluid flow channel, thus closing the general ball valve. When the valve core 2 seals the flow passage, in order to enhance the tightness of the general ball valve, the general ball valve further comprises a sealing ring 3, the sealing ring 3 is generally arranged on the ball valve base 1, specifically, the sealing ring 3 is arranged at an opening where the ball valve base 1 is connected with the fluid flow passage 4, in this configuration, the contact area between the sealing ring 3 and the valve core 2 is smaller, a gap area T exists between the sealing ring 3 and the valve core 2, and dead angles exist in the gap area T, so that dust easily enters the gap area T and accumulates in the gap area during the use of the general ball valve, the accumulated dust is pushed by the rotation of the valve core 2 to generate a force, so that the sealing ring 3 is deformed by the dust extrusion, thereby causing the poor sealing effect or failure of the general ball valve, and in addition, after long-time use, the dust passing through the general ball valve repeatedly wears the spherical surface of the general ball valve, so that the probability of failure and leakage of the general ball valve is increased.

Based on this, the embodiment of the present disclosure provides a ball valve 100 for single crystal silicon growth, the ball valve 100 being used in a dust remover for discharging volatiles in semiconductor growth equipment, the ball valve 100 improving sealability inside the ball valve 100 by changing an internal sealing structure, avoiding dust accumulation inside the ball valve 100. Referring to fig. 2 and 3, the ball valve 100 includes a valve seat 20 and a ball 40, the valve seat 20 includes a cavity portion accommodating the ball 40 and inlet and outlet passages communicating with the cavity portion at both ends of the cavity portion, wherein, referring to fig. 2 and 3, the cavity portion refers to a hollow portion of the valve seat 20, the ball valve 100 further includes a sealing device 10, the sealing device 10 is disposed between an inner surface of the cavity portion and the ball 40, and an inner surface of the sealing device 10 wraps the ball 40 on a region of the ball 40 corresponding to the inner surface of the cavity portion, the sealing device 10 being configured such that the sealing device 10 maintains contact with a region of the ball 40 corresponding to the inner surface of the cavity portion when the ball valve 100 is switched between an open state and a closed state such that the sealing device 10 wraps the ball 40.

Referring to fig. 2 and 3, the ball valve 100 further includes a sealing cover 30, a rotation shaft 50, and an actuating device 60, two ports of the valve seat 20 are provided at both ends in an axial direction as the inlet passage and the outlet passage to connect external pipes to enable dust to enter and leave the ball valve, the sealing cover 30 is in a flange form to tightly fit the sealing device 10 with the ball 40 from both ends of the sealing device 10 in the axial direction of the ball valve, the sealing device 10 and the ball 40 are both installed in the cavity portion of the valve seat 20, the ball 40 has a passage penetrating in the axial direction of the ball valve 40, the passage is the same as the ports, the rotation shaft 50 penetrates the ball 40 in an axial direction perpendicular to the ball valve, the rotation shaft 50 passes through a center of the ball 40 and serves as a center axis of rotation of the ball 40, a part of the rotation shaft 50 located at an upper end of the ball 40 is installed with a sealing ring to ensure sealing between the rotation shaft 50 and the valve seat 20, the rotation shaft 50 is connected to the actuating device 60 through the ball valve seat 40 to realize opening of the ball valve seat 40. Preferably, the actuator 60 is a pneumatic actuator.

The ball 40 has an open state and a closed state under the actuation of the actuator 60, when the ball 40 is in the open state, the passageway inside the ball 40 is aligned with the two ports so that the passageway is in full communication with the inlet and outlet passages, when the fluid flow through the ball valve per unit time is maximum; when the ball 40 is in the closed state, the ball 40 rotates, and a portion of the ball 40 exits the cavity into the interface until the ball 40 completely closes both of the interfaces. The sealing device 10 is configured such that, during the switching of the ball 40 between the open state and the closed state, the area of the ball 40 corresponding to the inner surface of the cavity is always in contact with the inner surface of the sealing device 10, i.e. the sealing device 10 can completely wrap the area of the ball 40 corresponding to the inner surface of the cavity to achieve the maximum sealing area of the ball 40, and no gap capable of containing dust exists between the inner surface of the sealing device 10 and the area of the ball 40 corresponding to the inner surface of the cavity, so that the influence of dust on the sealing pad is reduced.

The sealing device 10 includes a sealing portion for wrapping an area of the ball 40 corresponding to the inner surface of the cavity portion such that the inner surface of the sealing portion always contacts the area of the ball 40 corresponding to the inner surface of the cavity portion, and a supporting portion disposed between the sealing portion and the cavity portion and simultaneously abutting the outer surface of the sealing portion and the inner surface of the cavity portion to support the sealing portion. Preferably, the support portion is an elastic material filled between an outer surface of the sealing portion and an inner surface of the cavity portion.

Referring to fig. 2 and 3, the sealing device 10 is a gasket filled between the inner surface of the cavity and the ball 40, preferably, the sealing device 10 includes a first sealing member 11 and a second sealing member 12, the first sealing member 11 and the second sealing member 12 are symmetrically disposed on an inlet channel and an outlet channel of the ball valve about a central axis of the ball perpendicular to the axial direction of the ball valve, referring to fig. 2 and 3, the central axis of the ball perpendicular to the axial direction of the ball valve is a rotation axis 50, and the first sealing member 11 and the second sealing member 12 are oppositely mounted at the interface, so that the first sealing member 11 and the second sealing member 12 can be spliced to wrap an area on the ball 40 corresponding to the inner surface of the cavity, and the first sealing member 11 and the second sealing member 12 can be completely wrapped on the area on the ball 40 corresponding to the inner surface of the cavity so that there is no gap between the first sealing member 11 and the second sealing member 12 on the ball 40 and the inner surface of the cavity.

Wherein, corresponding to the sealing portion of the sealing device 10, the first sealing member 11 and the second sealing member 12 each comprise an annular body, and when the first sealing member 11 and the second sealing member 12 are spliced, the two annular bodies are spliced into a complete spherical shell, and in order to completely fit the outline of the region of the sphere 40 corresponding to the inner surface of the cavity portion so as to reduce the clearance space between the sealing device 10 and the region of the sphere 40 corresponding to the inner surface of the cavity portion, the annular bodies are configured to be reduced in diameter in the axial direction. The above configuration also reduces the deposition of dust inside the annular body, avoiding deformation or failure of the sealing device 10 caused by the balls 40 pressing the sealing device 10 by dust. The spherical shell can isolate the ball 40 from the cavity portion, so that dust is prevented from entering the ball valve, and in addition, the spherical structure of the spherical shell can further prevent dust from staying on the spherical surface of the spherical shell, so that dust in the ball valve 100 is further reduced.

The end with the largest diameter on the annular main body is used for realizing the splicing of the first sealing element 11 and the second sealing element 12 to form the spherical shell, the sealing gland 30 abuts against the end with the smallest diameter on the annular main body to fix the sealing device 10 on the valve seat 20, so that the sealing device 10 is tightly contacted with the ball body 40, and two ends of the sealing device 10 in the axial direction of the ball valve 100 are the ends with the smallest diameters on the annular main bodies of the first sealing element 11 and the second sealing element 12. Meanwhile, since dust enters and leaves the ball valve 100 from the inlet channel and the outlet, the first sealing member 11 and the second sealing member 12 are respectively installed at the two interfaces, so that the sealing device 10 can completely wrap the area corresponding to the inner surface of the cavity portion on the ball body 40 and isolate the space intersection of the dust flow path and the cavity portion, dust is prevented from entering between the ball body 40 and the cavity portion of the valve seat 20, and dust is prevented from accumulating in the cavity portion of the valve seat 20.

Meanwhile, in order to enhance the structural strength of the sealing device 10, the first and second sealing members 11 and 12 each further include a supporting unit provided at the outer circumference of the annular body to support the annular body, corresponding to the supporting portion of the sealing device 10, the supporting unit being constructed to fill the entire space between the annular body and the cavity portion by simultaneously abutting against the inner surface of the cavity portion and the outer surface of the annular body to provide the annular body with a supporting force toward the center of the spherical shell, see fig. 2 and 3, preferably, both the supporting units are made of an elastic material. In this configuration, the support unit can uniformly support the annular body and prevent a gap from being present between the annular body and the cavity, further preventing dust from falling between the annular body and the cavity, thereby affecting the stability of the internal components of the ball valve 100. In another embodiment of the utility model, the annular body and the support unit are constructed as one piece.

In another embodiment of the present utility model, the first seal member 11 and the second seal member 12 constituting the gasket are integrally formed as a single body, thereby enhancing the protection of the sealing surface of the ball 40 and further enhancing the sealability and structural strength of the sealing device 10.

Preferably, the first sealing member 11 and the second sealing member 12 constituting the gasket are made of reinforced polytetrafluoroethylene (RTFE) material having high chemical stability, excellent high and low temperature resistance, outstanding non-tackiness, good lubricity, extremely strong insulation resistance, aging resistance, extremely small water absorption, etc., and excellent mechanical properties, and can remarkably improve the service lives of the first sealing member 11 and the second sealing member 12, thereby reducing the investment of the later cost.

The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present utility model should be included in the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A ball valve for use in a single crystal silicon growing apparatus, the ball valve comprising a valve seat and a ball, the valve seat comprising a cavity portion housing the ball and inlet and outlet passages communicating with the cavity portion at both ends of the cavity portion, the ball valve further comprising:

and the sealing device is arranged between the inner surface of the cavity part and the sphere, and the inner surface of the sealing device wraps the sphere on the area of the sphere corresponding to the inner surface of the cavity part.

2. A ball valve according to claim 1, wherein the sealing means is a gasket filled between the inner surface of the cavity portion and the ball.

3. A ball valve according to claim 2, wherein the sealing means comprises a sealing portion for wrapping the ball over the region of the ball and a support portion for supporting the sealing portion between the sealing portion and an inner surface of the cavity portion.

4. A ball valve according to claim 3, wherein the support portion is an elastic material filled between the sealing portion and an inner surface of the cavity portion.

5. The ball valve according to any one of claims 1 to 4, wherein the sealing means comprises separate first and second seals symmetrical about a central axis of the ball perpendicular to the axial direction of the ball valve for splicing into a package around the ball.

6. The ball valve according to any one of claims 1 to 4, further comprising a seal gland in the form of a flange to tightly fit the seal device with the ball from both ends of the seal device in an axial direction of the ball valve.

7. A ball valve according to any one of claims 1 to 3, wherein the ball valve is a pneumatic ball valve.

8. The ball valve of claim 2, wherein the gasket is made of an RTFE material.

9. A ball valve according to claim 3 or 4, wherein the seal is made of an RTFE material.