CN220437124U

CN220437124U - Water-cooled furnace door and diffusion furnace

Info

Publication number: CN220437124U
Application number: CN202320955320.7U
Authority: CN
Inventors: 朱太荣; 肖阳; 万林; 林佳继
Original assignee: Laplace New Energy Technology Co ltd
Current assignee: Laplace New Energy Technology Co ltd
Priority date: 2023-04-25
Filing date: 2023-04-25
Publication date: 2024-02-02
Anticipated expiration: 2033-04-25

Abstract

The utility model belongs to the technical field of photovoltaic semiconductor equipment, and discloses a water-cooling furnace door and a diffusion furnace. The arrangement ensures that the cooling medium can cool the sealing element arranged on the periphery of the furnace door body when flowing along the cooling flow channel, can avoid the problem of excessive aging of the sealing element, prolongs the service life of the sealing element, ensures the sealing effect of the water-cooling furnace door and ensures the quality of the silicon wafer.

Description

Water-cooled furnace door and diffusion furnace

Technical Field

The utility model relates to the technical field of photovoltaic semiconductor equipment, in particular to a water-cooling furnace door and a diffusion furnace.

Background

In the prior art, in order to ensure the tightness of the diffusion furnace, a sealing ring is usually arranged on the furnace door, and the quality of the sealing effect of the furnace door can directly influence the stability of the temperature in the furnace, thereby influencing the quality of the silicon wafer. However, the process environment of the diffusion furnace has certain specificity, the temperature of the furnace tube is very high in the diffusion process, and the sealing ring is in a high-temperature environment for a long time, so that the aging can be accelerated, the sealing failure is caused, and even the functions of the diffusion furnace and the quality of the silicon wafer are affected. At present, the existing furnace door has no water cooling function, sealing strips are easy to deform and damage in a high-temperature environment for a long time, and are seriously aged, so that the sealing effect is affected, the temperature in the furnace is unstable, the quality of silicon wafers is reduced, and the production efficiency is reduced when the sealing strips are replaced frequently.

Therefore, a water-cooled furnace door and a diffusion furnace are needed to solve the above problems.

Disclosure of Invention

The utility model aims to provide a water-cooling furnace door and a diffusion furnace, which can sufficiently cool a sealing element, avoid ageing of the sealing element caused by long-term high-temperature environment, ensure the air pressure in the diffusion furnace and further ensure the quality of silicon wafers.

To achieve the purpose, the utility model adopts the following technical scheme:

the water-cooling furnace door comprises a furnace door body, the furnace door body is provided with a cooling flow passage, the furnace door body is provided with a water inlet and a water outlet which are both communicated with the cooling flow passage, a cooling medium flows in the cooling flow passage, and the cooling medium cools a sealing element arranged on the periphery of the furnace door body when flowing in the cooling flow passage.

As an optional technical scheme, the furnace door body is further provided with a cooling cavity, the water inlet end of the cooling cavity is communicated with the water outlet end of the cooling flow channel, the water outlet end of the cooling cavity is communicated with the water outlet, and the cooling medium enters the furnace door body from the water inlet and then sequentially passes through the cooling flow channel and the cooling cavity and then leaves the furnace door body from the water outlet.

As an optional technical scheme, the furnace door body comprises a front cover and a rear cover which are connected with each other, one of the front cover and the rear cover is provided with a first recess, the front cover and the rear cover are in butt joint, and the first recess and the other of the front cover and the rear cover form the cooling flow channel.

As an alternative solution, one of the front cover and the rear cover has a second recess, and the second recess forms the cooling cavity with the other of the front cover and the rear cover.

As an alternative technical solution, a water-stop plate is arranged in the cooling cavity, and a plurality of water-stop plates divide the cooling cavity and form a water channel for passing the cooling medium.

As an optional technical scheme, a water-proof ring is further disposed in the cooling cavity, a plurality of water-proof plates are circumferentially arranged around the water-proof ring, one end of at least part of the water-proof plates is connected to the inner wall of the cooling cavity, and the water-proof plates connected to the water-proof rings and the water-proof plates connected to the inner wall of the cooling cavity are alternately disposed.

As an optional technical scheme, a guide plate is arranged at a position, close to the water outlet, of the cooling water cavity, two ends of the guide plate are respectively connected to the water-proof ring and the inner wall of the cooling cavity, and the guide plate is used for guiding the cooling medium in the cooling cavity to the water outlet.

As an optional technical scheme, the rear cover is integrally arc-shaped, and bulges along a direction away from the front cover;

or, the rear cover is provided with an arc-shaped surface, wherein the arc-shaped surface is a surface of the rear cover away from the front cover, and the arc-shaped surface is a convex surface.

As an optional technical scheme, the water inlet and the water outlet are both arranged at the bottom of the furnace door body.

The utility model adopts the following technical scheme:

the diffusion furnace further comprises a water-cooled furnace door as described above.

The utility model has the beneficial effects that:

the utility model discloses a water-cooling furnace door, which comprises a furnace door body, wherein the furnace door body is provided with a cooling flow passage, the furnace door body is provided with a water inlet and a water outlet, a cooling medium flows in the cooling flow passage, and the cooling medium cools a sealing element arranged at the periphery of the furnace door body when flowing in the cooling flow passage. The arrangement ensures that the cooling medium can cool the sealing element arranged on the periphery of the furnace door body when flowing along the cooling flow channel, can avoid the problem of excessive aging of the sealing element, prolongs the service life of the sealing element, ensures the sealing effect of the water-cooling furnace door and ensures the quality of the silicon wafer.

The utility model also discloses a diffusion furnace, which also comprises the water-cooling furnace door, wherein the water-cooling furnace door is used for cooling the sealing element. The diffusion furnace can prolong the service life of the sealing element and ensure the quality of the silicon wafer.

Drawings

FIG. 1 is an isometric view of a water cooled oven door of an embodiment of the present utility model;

FIG. 2 is a side view of a water cooled oven door of an embodiment of the present utility model;

FIG. 3 is an enlarged view of a portion of FIG. 2A;

FIG. 4 is a schematic view of the structure of the front cover according to the embodiment of the present utility model;

FIG. 5 is a schematic view of the structure of the rear cover according to the embodiment of the present utility model;

FIG. 6 is a schematic view of the seal groove of the front cover in accordance with an embodiment of the present utility model;

FIG. 7 is a schematic diagram of a cooling medium flow path according to an embodiment of the present utility model.

In the figure:

1. a furnace door body; 101. an adjusting seat; 102. a furnace door paddle cylinder flange; 2. a seal;

10. a front cover; 11. a first recess; 12. a second recess; 13. a partition plate; 131. a first opening; 132. a second opening; 14. a water-stop plate; 15. a water-blocking ring; 16. a guide plate; 17. sealing grooves;

20. a rear cover; 21. a water inlet; 22. and a water outlet.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1 to 7, the present embodiment provides a water-cooled oven door comprising an oven door body 1, the oven door body 1 having a cooling flow passage, the oven door body 1 being provided with a water inlet 21 and a water outlet 22 both communicating with the cooling flow passage, a cooling medium flowing in the cooling flow passage, the cooling medium cooling a sealing member 2 provided at an outer periphery of the oven door body 1 when flowing in the cooling flow passage. Specifically, in this embodiment, the inside of furnace gate body 1 is provided with the cooling runner along the periphery direction of furnace gate body 1, and furnace gate body 1 is provided with water inlet 21 and delivery port 22 towards outside one side, and water inlet 21 is used for the coolant to get into the cooling runner, and delivery port 22 is used for accomplishing refrigerated coolant outflow in the cooling runner, because the cooling runner sets up along the outside limit of furnace gate body 1, when coolant flows in the cooling runner, can cool off the sealing member 2 that sets up in furnace gate body 1 periphery, avoids sealing member 2 to influence the leakproofness of diffusion furnace because of the overage that high temperature leads to. Optionally, the cooling medium in this embodiment is water, and in other embodiments, the cooling medium may be a cooling liquid, which is not described herein.

Further, as shown in fig. 4, the furnace door body 1 is further provided with a cooling cavity, the water inlet end of the cooling cavity is communicated with the water outlet end of the cooling channel, the water outlet end of the cooling cavity is communicated with the water outlet 22, and the cooling medium enters the furnace door body 1 from the water inlet 21 and then leaves the furnace door body 1 from the water outlet 22 after passing through the cooling channel and the cooling cavity in sequence. Specifically, in this embodiment, because the temperature in the diffusion furnace is higher in the working process, although be provided with the insulating layer between furnace gate body 1 and the furnace, but inevitably can lead to the temperature of furnace gate body 1 higher, if furnace gate body 1 only is provided with round cooling runner, the cooling effect of cooling medium of cooling runner can produce certain offset effect by the high temperature of furnace gate body 1 itself for reduce the cooling effect to sealing member 2, consequently, still be provided with the cooling chamber in furnace gate body 1's inside, cooling chamber and cooling runner interval set up, and the cooling chamber sets up in the inside of cooling runner, cooling runner and cooling chamber pass through first passageway intercommunication, cooling chamber and delivery port 22 pass through the second passageway intercommunication, cooling medium gets into the cooling runner through water inlet 21, cooling medium in the cooling runner gets into the cooling chamber after the first passageway, cooling medium in the cooling chamber gets into delivery port 22 through the second passageway, and flow out through delivery port 22, this kind of setting can make cooling medium carry out the cooling effect to furnace gate body 1 around sealing member 2 earlier, and then cool down to sealing member 2, with cooling medium in the cooling runner and cooling runner to cooling member 1's cooling chamber, and cooling member 1 are more evenly, and the cooling member 1 is compared to the cooling member is carried out to the cooling member 1, and the cooling effect is more evenly can be avoided to the whole, and the cooling member is compared to the cooling member 1.

Further, as shown in fig. 4 to 6, the oven door body 1 includes a front cover 10 and a rear cover 20 connected to each other, one of the front cover 10 and the rear cover 20 has a first recess 11, the front cover 10 and the rear cover 20 are butt-fitted, and the first recess 11 forms a cooling flow passage with the other of the front cover 10 and the rear cover 20. Specifically, in this embodiment, the front cover 10 is provided with the first recess 11, the width of the first recess 11 is unchanged, the shape of the first recess 11 is similar to the shape of the outer periphery of the front cover 10, the first recess 11 is disposed near the outer periphery of the front cover 10, the front cover 10 is buckled and attached with the rear cover 20, and the end surfaces of the first recess 11 and the rear cover 20 form a cooling flow channel. In this embodiment, the front cover 10 and the rear cover 20 are connected by welding, so that not only the stability of the connection between the front cover 10 and the rear cover 20 can be ensured, but also the cooling medium in the cooling flow passage can be prevented from flowing out along the gap between the front cover 10 and the rear cover 20, and the cooling effect is prevented from being affected. Alternatively, in the present embodiment, the cross section of the first recess 11 is rectangular, and in other embodiments, the cross section of the first recess 11 may be other shapes, such as a semicircle, etc., which will not be described herein. The water inlet 21 and the water outlet 22 in this embodiment are both disposed on the rear cover 20.

Further, one of the front cover 10 and the rear cover 20 has a second recess 12, and the second recess 12 forms a cooling cavity with the other of the front cover 10 and the rear cover 20. Specifically, in the present embodiment, the middle part of the front cover 10 has the second recess 12, the shape of the second recess 12 is similar to the shape of the front cover 10, the partition plate 13 is provided between the second recess 12 and the first recess 11, when the front cover 10 is attached to the rear cover 20, the end face of the partition plate 13 is abutted against the rear cover 20, the second recess 12 and the rear cover 20 form a cooling cavity, the partition plate 13 has the first opening 131, the first opening 131 and the rear cover 20 form a first channel for communicating the end of the cooling flow channel with the start end of the cooling cavity, and the partition plate 13 also has the second opening 132, the second opening 132 and the rear cover 20 form a second channel for communicating the end of the cooling cavity with the water outlet 22. The cooling cavity can provide further cooling for the front cover 10 and the rear cover 20, and the cooling effect of the water-cooling furnace door is improved.

Further, a water-stop plate 14 is provided in the cooling chamber, and a plurality of water-stop plates 14 divide the cooling chamber and form a water channel for passing a cooling medium. Specifically, in this embodiment, the water-stop plate 14 is disposed in the second recess 12 of the front cover 10, and the water-stop plate 14 is attached to the rear cover 20, so that a water channel can be formed in the cooling cavity, and the water channel can facilitate the passage of the cooling medium, so as to avoid the unsmooth operation of the cooling medium in the cooling cavity, and further ensure the cooling effect. Optionally, in this embodiment, the water-stop plate 14 is connected to the front cover by welding, so that stability of the water-stop plate 14 can be improved, and cooling effect of the water-cooling furnace door on the sealing member 2 can be ensured.

Further, as shown in fig. 4, a water-proof ring 15 is further provided in the cooling chamber, a plurality of water-proof plates 14 are arranged around the circumference of the water-proof ring 15, at least one end of a part of the water-proof plates 14 is connected to the inner wall of the cooling chamber, and the water-proof plates 14 connected to the water-proof ring 15 are alternately arranged with the water-proof plates 14 connected to the inner wall of the cooling chamber. Specifically, in this embodiment, this arrangement makes a plurality of cooling areas that communicate with each other formed in the cooling chamber, and makes the distance of the communication port between cooling area and the cooling area longer for the water channel that cooling medium can flow is as long as possible, and then guarantees that the distance that cooling medium flows is also longer, promotes the cooling effect.

Further, a guide plate 16 is disposed at a position of the cooling water cavity near the water outlet 22, two ends of the guide plate 16 are respectively connected to the water-proof ring 15 and the inner wall of the cooling cavity, and the guide plate 16 is used for guiding the cooling medium in the cooling cavity to the water outlet 22. Specifically, in this embodiment, the guide plate 16 is provided to enable the cooling medium in the last cooling area along the flowing direction of the cooling medium not to flow to the first cooling area, but to the water outlet 22, so as to facilitate the flow of the cooling medium and improve the cooling effect.

Further, the rear cover 20 is entirely arc-shaped, and the rear cover 20 bulges in a direction away from the front cover 10; or the rear cover 20 has an arcuate surface, which is a surface of the rear cover 20 away from the front cover 10, and which is a convex surface. Specifically, in this embodiment, since the water-cooling furnace door is further provided with the adjusting seat 101 and the front cover 102 of the furnace door paddle, in actual use, some components installed on the adjusting seat 101 and the front cover 102 of the furnace door paddle will have a certain acting force on the rear cover 20, the whole rear cover 20 is set to be arc-shaped, and the water-stop plate 14 and the water-stop ring 15 on the front cover 10 are set to be arc-shaped, so that the rear cover 20 has better strength, the bearing capacity of the rear cover 20 is improved, and the service life of the water-cooling furnace door is prolonged. In other embodiments, the surface of the rear cover 20 far away from the front cover 10 may be set to be an arc surface, so that the strength of the rear cover 20 is improved, and the service life of the water-cooled furnace door is further improved, which is not described herein.

Further, the water inlet and the water outlet are both arranged at the bottom of the furnace door body. Specifically, in this embodiment, since the oven door body 1 is vertically disposed in use, the water inlet 21 and the water outlet 22 in this embodiment are both disposed at the bottom of the oven door body 1, so that the open end and the tail end of the cooling flow channel are both located at the lower portion, and when the cooling medium enters from the water inlet 21, the cooling medium can squeeze the gas in the cooling flow channel, thereby improving the cooling effect. Optionally, the water inlet 21 is connected with a water pump, and the water pump is used for providing power to the cooling medium, so that the cooling medium can smoothly flow along the cooling flow channel, the flow speed of the cooling medium is improved, and the cooling effect is improved.

Optionally, as shown in fig. 6, a sealing groove 17 is formed on the outer periphery of the front cover 10, and the sealing groove 17 is used for accommodating the sealing member 2. Specifically, in this embodiment, seal groove 17 is seted up to the periphery of protecgulum 10, and sealing member 2 is the sealing washer, and seal groove 17 is used for holding the sealing washer, and this kind of setting can be convenient for fix a position sealing member 2, avoids shifting at the in-process of closing the water-cooling furnace gate sealing member 2, leads to the sealing performance of water-cooling furnace gate relatively poor, and then causes the influence to the silicon chip.

The embodiment also discloses a diffusion furnace, and this diffusion furnace includes foretell water-cooling furnace gate, and water-cooling furnace gate can cool down sealing member 2, promotes sealing member 2's life and avoids ageing of sealing member 2, ensures the diffusion effect of diffusion furnace to the silicon chip, ensures the silicon chip performance.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. The water-cooling furnace door is characterized by comprising a furnace door body (1), wherein the furnace door body (1) is provided with a cooling flow channel, the furnace door body (1) is provided with a water inlet (21) and a water outlet (22) which are communicated with the cooling flow channel, a cooling medium flows in the cooling flow channel, and the cooling medium cools a sealing piece (2) arranged on the periphery of the furnace door body (1) when flowing in the cooling flow channel;

the furnace door body (1) is also provided with a cooling cavity, the water inlet end of the cooling cavity is communicated with the water outlet end of the cooling flow channel, the water outlet end of the cooling cavity is communicated with the water outlet (22), and the cooling medium enters the furnace door body (1) from the water inlet (21) and then sequentially passes through the cooling flow channel and the cooling cavity and then leaves the furnace door body (1) from the water outlet (22);

the furnace door body (1) comprises a front cover (10) and a rear cover (20) which are connected with each other, one of the front cover (10) and the rear cover (20) is provided with a first concave (11), the front cover (10) and the rear cover (20) are in butt joint, and the first concave (11) and the other of the front cover (10) and the rear cover (20) form the cooling flow channel.

2. The water-cooled oven door according to claim 1, characterized in that one of the front cover (10) and the rear cover (20) has a second recess (12), the second recess (12) forming the cooling cavity with the other of the front cover (10) and the rear cover (20).

3. The water-cooled oven door according to claim 1, characterized in that a water-stop plate (14) is provided in the cooling cavity, a plurality of said water-stop plates (14) dividing the cooling cavity and forming a water channel for passing the cooling medium.

4. The water-cooled furnace door according to claim 3, characterized in that a water-proof ring (15) is further provided in the cooling cavity, a plurality of the water-proof plates (14) are arranged around the circumference of the water-proof ring (15), at least part of one ends of the water-proof plates (14) are connected to the inner wall of the cooling cavity, and the water-proof plates (14) connected to the water-proof ring (15) are alternately arranged with the water-proof plates (14) connected to the inner wall of the cooling cavity.

5. The water-cooled furnace door according to claim 4, characterized in that a guide plate (16) is arranged at a position of the cooling cavity close to the water outlet (22), two ends of the guide plate (16) are respectively connected to the water-proof ring (15) and the inner wall of the cooling cavity, and the guide plate (16) is used for guiding the cooling medium in the cooling cavity to the water outlet (22).

6. The water-cooled oven door according to claim 1 or 2, characterized in that the rear cover (20) is entirely arc-shaped, the rear cover (20) bulging in a direction away from the front cover (10);

or, the rear cover (20) is provided with an arc-shaped surface, wherein the arc-shaped surface is a surface of the rear cover (20) away from the front cover (10), and the arc-shaped surface is a convex surface.

7. The water-cooled oven door according to claim 1, characterized in that the water inlet (21) and the water outlet (22) are both arranged at the bottom of the oven door body (1).

8. Diffusion furnace, characterized in that it further comprises a water-cooled furnace door according to any one of claims 1 to 7.