CN220419794U - Precious metal surface micro-nano pattern manufacturing device - Google Patents
Precious metal surface micro-nano pattern manufacturing device Download PDFInfo
- Publication number
- CN220419794U CN220419794U CN202321792080.XU CN202321792080U CN220419794U CN 220419794 U CN220419794 U CN 220419794U CN 202321792080 U CN202321792080 U CN 202321792080U CN 220419794 U CN220419794 U CN 220419794U
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- fixedly connected
- fixed
- metal surface
- precious metal
- fixed block
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- 239000010970 precious metal Substances 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title abstract description 10
- 229910000510 noble metal Inorganic materials 0.000 claims abstract description 21
- 238000010030 laminating Methods 0.000 claims abstract description 15
- 238000009434 installation Methods 0.000 claims abstract description 8
- 238000005452 bending Methods 0.000 claims description 11
- 238000000609 electron-beam lithography Methods 0.000 claims description 8
- 238000000059 patterning Methods 0.000 claims 5
- 238000000034 method Methods 0.000 abstract description 14
- 238000001259 photo etching Methods 0.000 abstract description 5
- 230000001360 synchronised effect Effects 0.000 abstract description 3
- 230000008569 process Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000005381 potential energy Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The utility model relates to the technical field of precious metal surface micro-nano pattern manufacturing, and discloses a precious metal surface micro-nano pattern manufacturing device which comprises an equipment main body and a bonding positioning rod, wherein an installation block is fixedly installed at the top of the equipment main body. This pattern making devices is received a little on noble metal surface, the telescopic link of the fixed column side of fixed connection through fixed block bottom fixed stay simultaneously is in fixed frame side fixed connection's telescopic tube's inside slip, thereby form spacingly to pivoted fixed block, guarantee that the fixed block is in the removal of horizontal position, the laminating locating lever of the extension branch fixed mounting of rethread fixed block side forms the laminating around to noble metal and corrects the centre gripping, thereby accomplish noble metal's horizontal position adjustment fixedly, the in-process of whole operation can effectually realize synchronous four sides laminating centre gripping, thereby guarantee to put the pattern that the position can not influence photoetching a little receive and produce the skew, and then improve lithograph quality.
Description
Technical Field
The utility model relates to the technical field of precious metal surface micro-nano pattern manufacturing, in particular to a precious metal surface micro-nano pattern manufacturing device.
Background
The noble metal mainly refers to 8 metal elements such as gold, silver, platinum group metal and the like, the metals have beautiful color and luster, have stronger chemical stability, and the surface of the noble metal is required to be patterned by utilizing electron beam lithography equipment in the process of processing the noble metal, so that the overall attractiveness of the noble metal is improved, and meanwhile, marks can be formed on the noble metal.
However, in the process of carrying out micro-nano pattern manufacturing on noble metal by utilizing electron beam lithography equipment, the noble metal is put and then is subjected to lithography micro-nano of the electron beam lithography equipment in the prior art, the pattern of the lithography micro-nano is offset due to the influence of the arrangement position of the noble metal, the aesthetic degree of the pattern is influenced, and meanwhile, in the process of lithography micro-nano of the electron beam lithography equipment, the offset is caused due to the difference of the thickness of the noble metal and further due to vibration generated by processing, so that the utility model provides the noble metal surface micro-nano pattern manufacturing device.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides a precious metal surface micro-nano pattern manufacturing device which has the advantages of ensuring four-side fitting clamping and horizontal self-adaptive thickness clamping, and solves the problems in the background art.
The utility model provides the following technical scheme: the utility model provides a pattern making devices is received a little on noble metal surface, includes equipment main part and laminating locating lever, the top fixed mounting of equipment main part has the installation piece, the inside of installation piece is provided with driving motor, and driving motor's output fixedly connected with drive shaft, the top fixedly connected with rotor plate of drive shaft, four grooves have been seted up at the top of rotor plate, and the inside in four grooves all rotates to be connected with first connecting axle, the bottom fixedly connected with bending rod of first connecting axle, the other end fixedly connected with connection square of bending rod, the circular slot has been seted up at the top of connection square, and the inside rotation of circular slot is connected with the second connecting axle, the surface laminating of second connecting axle has the fixed block.
Preferably, the first connecting plate of top fixedly connected with of laminating locating lever, the side fixedly connected with second connecting plate of first connecting plate, the through-hole has been seted up at the top of second connecting plate, and the inside sliding connection of through-hole has the slide bar, the top fixedly connected with anticreep board of slide bar, the bottom fixedly connected with pressfitting board of slide bar, the top fixedly mounted of pressfitting board has the spring, the top fixedly connected with second connecting plate of spring.
Preferably, the top of the device main body is fixedly connected with four supporting rods, and the top of each supporting rod is provided with an electron beam lithography machine.
Preferably, the side of the fixed block is fixedly connected with an extension supporting rod, and the other side of the extension supporting rod is fixedly provided with a fitting positioning rod.
Preferably, the fixed frame is clamped on the surface of the mounting block, telescopic sleeves are fixedly mounted around the fixed frame respectively, telescopic rods are connected inside the telescopic sleeves in a sliding mode, and fixing columns are fixedly connected to the other sides of the telescopic rods.
Preferably, the bottom fixedly connected with fixed branch of fixed block, the empty slot has been seted up to fixed branch's side, and the inside fixedly connected with fixed column of empty slot.
Compared with the prior art, the utility model has the following beneficial effects:
1. this precious metal surface receives pattern making devices a little, the rotating plate at drive shaft top is controlled through the driving motor of installation piece inside forms rotatoryly, along with the change of rotating plate rotation angle at rotatory in-process, and then the bent rod of the inside first connecting axle bottom of groove that the rotating plate control rotating plate offered, and then the fixed block that the inside second connecting axle control laminating of square was connected to the bent rod other end rotates, the telescopic link of fixed column side through fixed branch fixed connection in fixed block bottom slides in fixed frame side fixed connection's telescopic tube's inside, thereby form spacingly to pivoted fixed block, guarantee the fixed block and be in the removal of horizontal position, the laminating locating lever of rethread fixed mounting of fixed block side forms the laminating correction centre gripping around to precious metal, thereby accomplish the horizontal position adjustment of precious metal and fix, the in-process of whole operation can effectually realize synchronous four sides laminating centre gripping, thereby guarantee that the position can not influence the photo-etching and receive a little pattern and produce the skew, and then improve the quality of photo-etching.
2. This pattern making devices is received a little on noble metal surface, through the pressfitting board of anticreep board control slide bar bottom fixed mounting upwards slide, press the board to the spring formation extrusion at gliding in-process, the rethread is placed noble metal in the below of four pressfitting boards, rethread loosens the resilience of anticreep board back under the effect of spring fast, utilize the elastic potential energy of spring to form simple and easy centre gripping location, the in-process of whole operation can carry out the centre gripping to noble metal of different thickness, avoid can leading to producing the skew under the vibration that processing produced, can reach the effect of self-adaptation thickness centre gripping.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the device of the present utility model;
FIG. 2 is a schematic view of the partial structure of FIG. 1 according to the present utility model;
fig. 3 is a schematic view of the bottom structure of fig. 1 according to the present utility model.
In the figure: 1. an apparatus main body; 2. a first connecting shaft; 3. an electron beam lithography machine; 4. a support rod; 5. a mounting block; 6. bending the rod; 7. a telescoping tube; 8. a telescopic rod; 9. fixing the column; 10. fixing the support rod; 11. a fixed block; 12. an extension strut; 13. attaching a positioning rod; 14. a first connection plate; 15. a second connecting plate; 16. an anti-drop plate; 17. a slide bar; 18. a spring; 19. pressing the plate; 20. a rotating plate; 21. a fixed frame; 22. a drive shaft; 23. connecting the square blocks; 24. and a second connecting shaft.
Detailed Description
Referring to fig. 1-3, a precious metal surface micro-nano pattern manufacturing device comprises a device main body 1 and a bonding positioning rod 13, wherein a mounting block 5 is fixedly mounted at the top of the device main body 1, a driving motor is arranged in the mounting block 5, the output end of the driving motor is fixedly connected with a driving shaft 22, the top of the driving shaft 22 is fixedly connected with a rotating plate 20, four grooves are formed in the top of the rotating plate 20, a first connecting shaft 2 is rotatably connected in the four grooves, a bending rod 6 is fixedly connected to the bottom of the first connecting shaft 2, a connecting block 23 is fixedly connected to the other end of the bending rod 6, a round groove is formed in the top of the connecting block 23, a second connecting shaft 24 is rotatably connected in the round groove, the surface of the second connecting shaft 24 is bonded with a fixing block 11 rotating plate 20 to control the bending rod 6 at the bottom of the first connecting shaft 2 in the groove formed in the rotating plate 20, the second connecting shaft 24 at the other end of the bending rod 6 is connected with the inside of the square 23 to control the attached fixed block 11 to rotate, the attached positioning rod 13 fixedly installed through the extending support rod 12 at the side surface of the fixed block 11 forms attaching correction clamping on the periphery of the noble metal, so that the horizontal position adjustment and fixation of the noble metal are completed, synchronous four-side attached clamping can be effectively realized in the whole operation process, the arrangement position is ensured not to influence the pattern of photoetching micro-nano to generate offset, the photoetching quality is improved, the top of the attached positioning rod 13 is fixedly connected with the first connecting plate 14, the side surface of the first connecting plate 14 is fixedly connected with the second connecting plate 15, the top of the second connecting plate 15 is provided with a through hole, the inside of the through hole is slidably connected with the sliding rod 17, the top of the sliding rod 17 is fixedly connected with the anti-falling plate 16, quick resilience under the effect of spring 18 after loosening anticreep board 16 utilizes the elastic potential energy of spring 18 to form simple and easy centre gripping location, the in-process of whole operation can carry out the centre gripping to the noble metal of different thickness, avoid can leading to producing the skew under the vibration that processing produced, can reach the effect of self-adaptation thickness centre gripping, the bottom fixedly connected with pressfitting board 19 of sliding rod 17, the top fixedly mounted of pressfitting board 19 has spring 18, the top fixedly connected with second connecting plate 15 of spring 18, the top fixedly connected with four bracing pieces 4 of equipment main part 1, the top of four bracing pieces 4 is provided with electron beam lithography machine 3, the side fixedly connected with extension branch 12 of fixed block 11, the opposite side fixedly mounted of extension branch 12 has laminating locating lever 13, the fixed frame 21 of fixed block 5's fixed surface joint, fixed frame 21's all around fixed frame 7 fixed respectively fixed mounting has telescopic tube 7, telescopic tube 7's inside sliding connection has telescopic link 8, the opposite side fixedly connected with fixed column 9, the bottom fixedly connected with fixed column 10 of fixed column 10, the side of fixed column 10 has the groove, and the inside fixed column 9 of fixed column 10 has the empty connection.
In the operation process, the driving motor inside through the installation piece 5 controls the rotating plate 20 at the top of the driving shaft 22 to form the rotation, the change along with the rotation angle of the rotating plate 20 in the rotation process, and then the rotating plate 20 controls the bending rod 6 at the bottom of the groove formed by the rotating plate 20, and then the bending rod 6 is connected with the second connecting shaft 24 inside the square 23, and controls the attached fixed block 11 to rotate, and meanwhile, the telescopic rod 8 fixedly connected with the side surface of the fixed column 9 through the fixed support rod 10 at the bottom of the fixed block 11 slides in the telescopic sleeve 7 fixedly connected with the side surface of the fixed frame 21, so that the rotating fixed block 11 is limited, the attached positioning rod 13 fixedly mounted on the extending support rod 12 at the side surface of the fixed block 11 forms attached correction clamping on the periphery of precious metal, meanwhile, the pressing plate 19 fixedly mounted at the bottom of the sliding rod 17 is controlled to slide upwards through the anti-release plate 16, the pressing plate 19 forms extrusion on the spring 18 in the sliding process, and the precious metal is placed below the four pressing plates 19, and then the elastic clamping can be carried out in the whole process by utilizing the elastic potential energy of the spring 18 after the action of the anti-release plate 16.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a pattern making devices is received a little on noble metal surface, its characterized in that, including equipment main part (1) and laminating locating lever (13), the top fixed mounting of equipment main part (1) has installation piece (5), the inside of installation piece (5) is provided with driving motor, and driving motor's output fixedly connected with drive shaft (22), the top fixedly connected with rotor plate (20) of drive shaft (22), four grooves have been seted up at the top of rotor plate (20), and the inside in four grooves all rotates and be connected with first connecting axle (2), the bottom fixedly connected with bending rod (6) of first connecting axle (2), the other end fixedly connected with connection square (23) of bending rod (6), the circular slot has been seted up at the top of connection square (23), and the inside rotation of circular slot is connected with second connecting axle (24), the surface laminating of second connecting axle (24) has fixed block (11).
2. The precious metal surface micro-nano patterning device according to claim 1, wherein: the utility model discloses a laminating locating lever, including laminating locating lever (13), first connecting plate (14) of top fixedly connected with, side fixedly connected with second connecting plate (15) of first connecting plate (14), through-hole has been seted up at the top of second connecting plate (15), and the inside sliding connection of through-hole has slide bar (17), the top fixedly connected with anticreep board (16) of slide bar (17), the bottom fixedly connected with pressfitting board (19) of slide bar (17), the top fixedly mounted of pressfitting board (19) has spring (18), the top fixedly connected with second connecting plate (15) of spring (18).
3. The precious metal surface micro-nano patterning device according to claim 1, wherein: four supporting rods (4) are fixedly connected to the top of the equipment main body (1), and an electron beam lithography machine (3) is arranged at the top of each supporting rod (4).
4. The precious metal surface micro-nano patterning device according to claim 1, wherein: the side of the fixed block (11) is fixedly connected with an extension supporting rod (12), and the other side of the extension supporting rod (12) is fixedly provided with a fitting positioning rod (13).
5. The precious metal surface micro-nano patterning device according to claim 1, wherein: the surface fixing joint of installation piece (5) has fixed frame (21), fixed frame (21) all around respectively fixed mounting have telescopic tube (7), the inside sliding connection of telescopic tube (7) has telescopic link (8), the opposite side fixedly connected with fixed column (9) of telescopic link (8).
6. The precious metal surface micro-nano patterning device according to claim 1, wherein: the bottom fixedly connected with fixed branch (10) of fixed block (11), the empty slot has been seted up to the side of fixed branch (10), and the inside fixedly connected with fixed column (9) in empty slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321792080.XU CN220419794U (en) | 2023-07-10 | 2023-07-10 | Precious metal surface micro-nano pattern manufacturing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321792080.XU CN220419794U (en) | 2023-07-10 | 2023-07-10 | Precious metal surface micro-nano pattern manufacturing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220419794U true CN220419794U (en) | 2024-01-30 |
Family
ID=89653991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321792080.XU Active CN220419794U (en) | 2023-07-10 | 2023-07-10 | Precious metal surface micro-nano pattern manufacturing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220419794U (en) |
-
2023
- 2023-07-10 CN CN202321792080.XU patent/CN220419794U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |