CN220418404U

CN220418404U - Measuring probe and three-coordinate measuring machine

Info

Publication number: CN220418404U
Application number: CN202321984141.2U
Authority: CN
Inventors: 姚力军; 潘杰; 王学泽; 陈文庆; 时晓旭
Original assignee: Ningbo Jiangfeng Electronic Material Co Ltd
Current assignee: Ningbo Jiangfeng Electronic Material Co Ltd
Priority date: 2023-07-26
Filing date: 2023-07-26
Publication date: 2024-01-30
Anticipated expiration: 2033-07-26

Abstract

The utility model relates to the technical field of product measurement, and particularly discloses a measuring probe and a three-coordinate measuring machine. The measuring probe comprises a fixed seat, a probe shell, a measuring head seat and a measuring needle main body; the fixing seat is provided with a containing groove, a plurality of blind holes are uniformly distributed on the side wall of the containing groove, the elastic piece is arranged in the blind holes, the two ends of the elastic piece are respectively and elastically connected with the hole bottom of the blind holes and the limiting piece, and the elastic piece is used for pushing the limiting piece to move away from the hole bottom of the blind holes; one end of the probe shell is inserted into the accommodating groove, the other end of the probe shell is provided with a fixing hole, the outer side wall of the probe shell is provided with an annular groove, and the limiting piece can be propped against the annular groove; one end of the measuring head seat is provided with a locking head, the other end of the measuring head seat is provided with a storage groove, and the locking head is in locking connection with the fixing hole; one end of the needle body is provided with a flat head measuring head, and the other end of the needle body is detachably inserted in the storage groove. Through the structure, the measuring probe improves the flexibility of disassembly and assembly, and the flat head measuring head can be used for pointing to the side face of a product to be measured, so that the specific detection requirement is met, and the qualification rate of detection is improved.

Description

Measuring probe and three-coordinate measuring machine

Technical Field

The utility model relates to the technical field of product measurement, in particular to a measuring probe and a three-coordinate measuring machine.

Background

The three-coordinate measuring machine is a novel high-efficiency precise measuring instrument developed in the 60 th century. On one hand, the high-efficiency machining of automatic machine tools and numerical control machine tools and the machining of more and more parts with complex shapes are required to be matched with quick and reliable measuring equipment; on the other hand, the development of electronic technology, computer technology, digital control technology and precision machining technology provides a technical basis for the generation of three-coordinate measuring machines.

The three-coordinate measuring machine is a generalized digital measuring device based on coordinate measurement. Firstly, the measurement of each measured geometric element is converted into the measurement of the coordinate positions of some point sets on the geometric elements, and after the coordinate positions of the points are measured, the size and shape errors of the geometric elements are calculated through mathematical operation according to the space coordinate values of the points.

In practical application, in order to adapt to detection needs of various semiconductor targets under different measurement conditions, a proper measuring needle is often selected according to practical conditions. In the prior art, a ball head measuring needle is usually selected as the three-coordinate measuring needle, the minimum diameter of the ball head measuring needle is 0.5mm, when the profile depth of a product to be measured is smaller than 0.5mm, a spherical point cannot reach the profile, only the spherical point can reach the chamfer angle, and the measured groove width is larger and is unqualified, so that the measuring probe cannot normally detect.

Disclosure of Invention

The utility model aims to provide a measuring probe and a three-coordinate measuring machine, so that a measuring needle can be used for pointing to the side surface of a product to be measured, the detection requirement of the product to be measured with the contour depth smaller than 0.5mm is met, and the qualification rate of detection data is improved.

To achieve the purpose, the utility model adopts the following technical scheme:

the measuring probe is used for measuring the groove structure of the product to be measured and comprises a fixed seat, a probe shell, a measuring head seat and a measuring needle main body; the fixing seat is provided with a containing groove, the side wall of the containing groove is uniformly provided with a plurality of blind holes, the elastic piece is arranged in the blind holes, two ends of the elastic piece are respectively and elastically connected with the hole bottoms of the blind holes and the limiting piece, and the elastic piece is used for pushing the limiting piece to move away from the hole bottoms of the blind holes; one end of the probe shell is inserted into the accommodating groove, the other end of the probe shell is provided with a fixing hole, the outer side wall of the probe shell is provided with at least one annular groove, and the limiting piece can be pressed in the annular groove; one end of the measuring head seat is provided with a locking head, the other end of the measuring head seat is provided with a storage groove, and the locking head is in locking connection with the fixing hole; one end of the probe body is provided with a flat-head measuring head, the other end of the probe body is detachably inserted into the accommodating groove, and the flat-head measuring head is used for measuring the product to be measured.

As the preferable technical scheme of the measuring probe, a plurality of elastic claws are circumferentially arranged at the groove top of the containing groove, and a contraction groove is arranged between every two adjacent elastic claws.

As the preferable technical scheme of the measuring probe, the elastic claw is convexly provided with a clamping protrusion towards one side of the containing groove.

As the preferable technical scheme of the measuring probe, the annular groove is an arc groove, the limiting piece is a spherical piece, and the surface of the limiting piece is matched with the groove wall of the arc groove.

As the preferable technical scheme of the measuring probe, the groove wall of the fixing hole is provided with an internal thread, the side surface of the locking head is provided with an external thread, and the locking head is in threaded fit with the fixing hole.

As a preferred solution of the measuring probe, the elastic element comprises a compression spring.

The three-coordinate measuring machine comprises a workbench, a clamping module, a driving module and the measuring probe, wherein the clamping module, the driving module and the measuring probe are arranged on the workbench; the clamping module is used for positioning the product to be measured, and the driving module is used for adjusting the coordinates of the measuring probe in a space coordinate system.

As a preferable technical scheme of the three-coordinate measuring machine, the clamping module comprises two clamping assemblies which are oppositely arranged, and the two clamping assemblies are used for clamping the product to be measured from two sides.

As the preferable technical scheme of the three-coordinate measuring machine, the clamping assembly comprises a driving unit fixedly connected to the workbench, the output end of the driving unit is connected with the clamping block in a direction through a clamping arm, and the driving unit is used for driving the clamping block to press the surface of the product to be measured.

As the preferred technical scheme of three-dimensional measuring machine, drive module including the rigid coupling in mount on the workstation, be equipped with the first slide rail that extends along first direction on the mount, sliding fit has first slider on the first slide rail, the rigid coupling has the second slide rail that extends along the second direction on the first slider, sliding fit has the second slider on the second slide rail, the second slider rigid coupling has the third slide rail that extends along the third direction, the rigid coupling has the probe slider on the fixing base, the probe slider with third slide rail sliding fit.

The utility model has the beneficial effects that:

the measuring probe can directly contact the side surface of the product to be measured by means of the flat-head measuring head by selecting the flat-head measuring head, so that the size of the product to be measured with the outline depth smaller than 0.5mm can be detected, and the problem that the outline of the product with the depth smaller than 0.5mm is difficult to detect is solved. The detachable plug-in design between the measuring needle main body and the measuring head seat, the design of locking connection of the measuring head seat and the probe shell and the design of plug-in mounting of the probe shell on the fixed seat reduce the replacement difficulty of each component, improve the overall flexibility of the measuring probe, effectively reduce the maintenance cost of the measuring probe and improve the working stability of the measuring probe. By means of the design that the limiting piece is propped against the annular groove, the purpose that the fixing seat limits the probe shell is achieved, the stability of connection is guaranteed, and meanwhile the disassembly and assembly difficulty of the probe shell is reduced.

The three-coordinate measuring machine ensures the positioning capability of the product to be measured by means of the arrangement of the clamping module, achieves the purpose of position adjustment of the measuring probe by means of the arrangement of the driving module, and ensures that the detection operation of adjustment measurement can be successfully completed.

Drawings

FIG. 1 is a schematic view of a measurement probe according to an embodiment of the present utility model;

FIG. 2 is an exploded view of a measurement probe provided by an embodiment of the present utility model;

FIG. 3 is a cross-sectional view of a measurement probe provided by an embodiment of the present utility model;

FIG. 4 is a cross-sectional exploded view of a measurement probe provided by an embodiment of the present utility model;

fig. 5 is a schematic structural diagram of a three-coordinate measuring machine according to an embodiment of the present utility model.

In the figure:

100. a measurement probe; 110. a stylus body; 111. a flat head measuring head; 120. a measuring head seat; 121. an elastic claw; 122. a shrink tank; 123. clamping the protrusion; 124. a locking head; 130. a probe housing; 131. a fixing hole; 132. an annular groove; 140. a fixing seat; 141. a receiving groove; 142. a blind hole; 143. an elastic member; 144. a limiting piece; 150. a probe slider;

200. a work table; 300. a fixing frame; 310. a first slide rail; 410. a second slide rail; 420. a first slider; 510. a third slide rail; 520. a second slider; 610. a driving unit; 620. a clamping arm; 630. a clamping block; 900. and (5) testing a product.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

As shown in fig. 1 to 4, the present embodiment provides a measuring probe 100 for measuring a groove structure of a product 900 to be measured, including a fixing base 140, a probe housing 130, a probe base 120, and a probe body 110; the fixing seat 140 is provided with a containing groove 141, a plurality of blind holes 142 are uniformly distributed on the side wall of the containing groove 141, the elastic piece 143 is arranged in the blind holes 142, two ends of the elastic piece 143 are respectively and elastically connected with the hole bottom of the blind holes 142 and the limiting piece 144, and the elastic piece 143 is used for pushing the limiting piece 144 to move away from the hole bottom of the blind holes 142; one end of the probe shell 130 is inserted into the accommodating groove 141, the other end is provided with a fixing hole 131, the outer side wall of the probe shell 130 is provided with at least one annular groove 132, and the limiting piece 144 can be propped against the annular groove 132; one end of the measuring head seat 120 is provided with a locking head 124, the other end is provided with a containing groove, and the locking head 124 is in locking connection with the fixing hole 131; one end of the probe body 110 is provided with a flat head measuring head 111, the other end of the probe body is detachably inserted into the accommodating groove, and the flat head measuring head 111 is used for measuring a product 900 to be measured.

The measuring probe 100 can directly point to the side surface of the product 900 to be measured by means of the flat-head measuring head 111 by selecting the flat-head measuring head 111, so that the size of the product 900 to be measured with the outline depth smaller than 0.5mm can be detected, and the problem that the outline of the product with the depth smaller than 0.5mm is difficult to detect is solved. The detachable plug-in design between the probe main body 110 and the probe seat 120, the design of locking connection between the probe seat 120 and the probe shell 130 and the design of plug-in mounting of the probe shell 130 on the fixing seat 140 reduce the replacement difficulty of each component, improve the overall flexibility of the measuring probe 100, effectively reduce the maintenance cost of the measuring probe 100 and improve the working stability of the measuring probe 100. By means of the design that the limiting piece 144 is propped in the annular groove 132, the purpose that the fixing seat 140 limits the probe shell 130 is achieved, the stability of connection is guaranteed, and meanwhile the disassembly and assembly difficulty of the probe shell 130 is reduced.

In this embodiment, the stylus body 110 is manufactured by selecting a conventional ball-point stylus and machining the stylus into a flat head by a precision knife grinder.

In this embodiment, a plurality of elastic claws 121 are circumferentially arranged at the top of the accommodating groove, and a contraction groove 122 is arranged between every two adjacent elastic claws 121. The cooperation of elastic claw 121 and shrink groove 122 makes elastic claw 121 possess the elasticity of certain degree to can follow the side of centre gripping probe main part 110 all around, above design has reduced the risk that probe main part 110 breaks away from the storage groove because of the accident, has improved the efficiency of probe main part 110 dismouting on gauge head seat 120.

Further, the elastic claw 121 is provided with a grip protrusion 123 protruding toward one side of the receiving groove. The arrangement of the clamping protrusions 123 ensures the contact effect between the elastic claw 121 and the side surface of the stylus body 110, ensures the positioning capability of the elastic claw 121 on the stylus body 110, and further reduces the risk of detachment of the stylus body 110.

In this embodiment, the annular groove 132 is an arc groove, the limiting member 144 is a spherical member, and the surface of the limiting member 144 is matched with the groove wall of the arc groove. The design ensures the matching effect of the limiting piece 144 and the annular groove 132, reduces the disassembly and assembly difficulty of the probe shell 130, reduces the risk of damage to the probe shell 130 and the fixing seat 140, and reduces the maintenance frequency of the measuring probe 100.

In this embodiment, the elastic member 143 includes a compression spring. The arrangement of the compression spring reduces the production cost of the elastic piece 143, ensures the working stability of the elastic piece 143 and ensures the pushing capacity of the limiting piece 144.

Illustratively, the groove wall of the fixing hole 131 is provided with an internal thread, the side surface of the locking head 124 is provided with an external thread, and the locking head 124 is in threaded engagement with the fixing hole 131. By means of the design, locking connection of the fixing holes 131 and the locking heads 124 is achieved, and the difficulty in dismounting the probe shell 130 and the probe seat 120 is reduced.

As shown in fig. 1 to 5, the present embodiment further provides a three-coordinate measuring machine, including a table 200, and a clamping module, a driving module and the measuring probe 100 mounted on the table 200; the clamping module is used for positioning the product 900 to be measured, and the driving module is used for adjusting the coordinates of the measuring probe 100 in a space coordinate system.

The three-coordinate measuring machine guarantees the positioning capability of the product 900 to be measured by means of the arrangement of the clamping module, achieves the purpose of adjusting the position of the measuring probe 100 by means of the arrangement of the driving module, and ensures that the detection operation of adjustment measurement can be successfully completed.

In this embodiment, the clamping module includes two oppositely disposed clamping assemblies for clamping the product 900 to be tested from both sides. Through the mode of centre gripping product 900 both sides that await measuring, reached the purpose of carrying out the location to product 900 that awaits measuring, above design is simple reliable, and location effect is good and positioning stability is high, can avoid the product 900 that awaits measuring to produce the condition of position offset because of the accident effectively.

Further, the clamping assembly includes a driving unit 610 fixedly connected to the workbench 200, an output end of the driving unit 610 is connected to the clamping block 630 through a clamping arm 620, and the driving unit 610 is used for driving the clamping block 630 to press against the surface of the product 900 to be tested. The clamping device is simple and reliable in structure, ensures the clamping capability of the clamping assembly on the product 900 to be tested, and reduces the occupied space of the clamping module. Specifically, the driving unit 610 is a cylinder.

The driving module includes a fixing frame 300 fixedly connected to the workbench 200, a first sliding rail 310 extending along a first direction is disposed on the fixing frame 300, a first sliding block 420 is slidably engaged with the first sliding rail 310, a second sliding rail 410 extending along a second direction is fixedly connected to the first sliding block 420, a second sliding block 520 is slidably engaged with the second sliding rail 410, a third sliding rail 510 extending along a third direction is fixedly connected to the second sliding block 520, a probe sliding block 150 is fixedly connected to the fixing seat 140, and the probe sliding block 150 is slidably engaged with the third sliding rail 510. Specifically, the first direction, the second direction and the third direction are perpendicular to each other. By means of the structure, the operation of adjusting the coordinates of the measuring probe 100 in the space coordinate system is achieved, the design is simple and reliable, the adjusting efficiency is high, the occupied space is small, and the smooth completion of the position adjusting operation of the measuring probe 100 is facilitated.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. The measuring probe for measure the recess structure of the product (900) to be measured, characterized by comprising:

the fixing seat (140) is provided with a containing groove (141), a plurality of blind holes (142) are uniformly distributed on the side wall of the containing groove (141), an elastic piece (143) is arranged in the blind holes (142), two ends of the elastic piece (143) are respectively and elastically connected with the bottoms of the blind holes (142) and the limiting pieces (144), and the elastic piece (143) is used for pushing the limiting pieces (144) to move away from the bottoms of the blind holes (142);

the probe shell (130) is inserted into the accommodating groove (141) at one end, the other end is provided with a fixing hole (131), the outer side wall of the probe shell (130) is provided with at least one annular groove (132), and the limiting piece (144) can be pressed in the annular groove (132);

a locking head (124) is arranged at one end of the measuring head seat (120), a containing groove is arranged at the other end of the measuring head seat, and the locking head (124) is in locking connection with the fixing hole (131);

the measuring needle comprises a measuring needle main body (110), wherein a flat-head measuring head (111) is arranged at one end of the measuring needle main body (110), the other end of the measuring needle main body is detachably inserted into the accommodating groove, and the flat-head measuring head (111) is used for measuring a product (900) to be measured.

2. Measuring probe according to claim 1, characterized in that the groove top of the receiving groove is circumferentially provided with a plurality of elastic claws (121), and a shrink groove (122) is provided between every two adjacent elastic claws (121).

3. Measurement probe according to claim 2, characterized in that the side of the elastic claw (121) facing the receiving groove is convexly provided with a clamping protrusion (123).

4. The measurement probe of claim 1, wherein the annular groove (132) is an arcuate groove, the stop (144) is a spherical element, and a surface of the stop (144) mates with a groove wall of the arcuate groove.

5. The measuring probe according to claim 1, characterized in that the groove wall of the fixing hole (131) is provided with an internal thread, the side surface of the locking head (124) is provided with an external thread, and the locking head (124) is in threaded fit with the fixing hole (131).

6. The measurement probe according to claim 1, characterized in that the elastic element (143) comprises a compression spring.

7. Three-coordinate measuring machine, characterized by comprising a table (200), and a clamping module, a driving module and a measuring probe according to any of claims 1-6 mounted on said table (200); the clamping module is used for positioning the product (900) to be measured, and the driving module is used for adjusting the coordinates of the measuring probe in a space coordinate system.

8. The machine according to claim 7, characterized in that the clamping module comprises two oppositely arranged clamping assemblies for clamping the product (900) to be measured from both sides.

9. The machine according to claim 8, wherein the clamping assembly comprises a driving unit (610) fixedly connected to the workbench (200), an output end of the driving unit (610) is connected with a clamping block (630) through a clamping arm (620), and the driving unit (610) is used for driving the clamping block (630) to press against the surface of the product (900) to be measured.

10. The three-coordinate measuring machine of claim 7, wherein the driving module comprises a fixing frame (300) fixedly connected to the workbench (200), a first sliding rail (310) extending along a first direction is arranged on the fixing frame (300), a first sliding block (420) is slidably matched with the first sliding rail (310), a second sliding rail (410) extending along a second direction is fixedly connected to the first sliding block (420), a second sliding block (520) is slidably matched with the second sliding rail (410), a third sliding rail (510) extending along a third direction is fixedly connected to the second sliding block (520), a probe sliding block (150) is fixedly connected to the fixing seat (140), and the probe sliding block (150) is slidably matched with the third sliding rail (510).