CN220415619U - Connecting device applied to semiconductor cryopump air inlet and outlet and motor - Google Patents
Connecting device applied to semiconductor cryopump air inlet and outlet and motor Download PDFInfo
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- CN220415619U CN220415619U CN202322094041.9U CN202322094041U CN220415619U CN 220415619 U CN220415619 U CN 220415619U CN 202322094041 U CN202322094041 U CN 202322094041U CN 220415619 U CN220415619 U CN 220415619U
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- piston
- frame body
- air inlet
- connecting device
- frame
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 239000007789 gas Substances 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model discloses a connecting device applied to an air inlet and an air outlet of a semiconductor cryopump and a motor, which comprises a device body, wherein the device body comprises a conveying cavity frame and an air inlet adjusting and connecting device, and the air inlet adjusting and connecting device is arranged in the conveying cavity frame; the air inlet adjusting and connecting device comprises a driving rod and a piston, one end of the driving rod is arranged at the left end inside the conveying cavity frame, the piston is arranged at the right end of the driving rod, the driving rod and the piston are of cylindrical structures, and a piston fixing block is arranged at the front end of the piston. The device can be used for effectively facilitating connection of the motor and the exhaust, so that the motor can be conveniently used for opening or closing the exhaust port, and the device is simple in structure, convenient to operate and convenient for workers to use.
Description
Technical Field
The utility model relates to the technical field of cryopumps, in particular to a connecting device applied to an air inlet and an air outlet of a semiconductor cryopump and a motor.
Background
In the fabrication of semiconductor components, many environments requiring high vacuum, high cleanliness or low temperature are of great advantage to semiconductor cryopumps. The semiconductor cryopump has no moving parts inside the vacuum chamber of the apparatus, no lubrication and sealing are required, and no foreign substances are brought into the vacuum chamber, so that a vacuum environment with high cleanliness can be obtained.
The existing cryopump apparatus has the following drawbacks:
in the existing semiconductor cryopump equipment, helium gas inlet and outlet are fully matched with compressed and expanded gas when a piston moves, the movement of the piston is driven by a motor, connection between an inlet and an outlet and the motor is inconvenient, and the stability of integral operation and the smoothness of inlet and outlet are affected.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the utility model provides a connecting device applied to an air inlet and an air outlet of a semiconductor low-temperature pump and a motor, so as to solve the problems in the background art.
(II) technical scheme
In order to achieve the above purpose, the utility model is realized by the following technical scheme: the device comprises a device body, wherein the device body comprises a conveying cavity frame and an air inlet adjusting and connecting device, and the air inlet adjusting and connecting device is arranged in the conveying cavity frame;
preferably, the air inlet adjusting and connecting device comprises a driving rod and a piston, one end of the driving rod is arranged at the left end inside the conveying cavity frame, the piston is arranged at the right end of the driving rod, the driving rod and the piston are both in cylindrical structures, and a piston fixing block is arranged at the front end of the piston.
Preferably, the conveying cavity frame comprises a first frame body and a second frame body, the first frame body and the second frame body are distributed in an up-down symmetrical mode, the rear end of the first frame body is fixed with the rear end of the second frame body, a movable channel is arranged between the first frame body and the second frame body, and scissor blocks are arranged at the right ends of the first frame body and the second frame body.
Preferably, the fixed port is formed in the rear side of the conveying cavity frame, the fixed block is arranged in the fixed port, and the fixed block is of a cylindrical structure and is of a through structure.
(III) beneficial effects
The utility model provides a connecting device applied to an air inlet and an air outlet of a semiconductor cryopump and a motor. The beneficial effects are as follows:
the connecting device applied to the air inlet and the air outlet of the semiconductor cryopump and the motor can effectively facilitate connection of the motor and the air exhaust, so that the motor can be conveniently opened or closed to the air outlet.
Drawings
FIG. 1 is a schematic view of the overall structure of the present utility model;
FIG. 2 is a schematic view of the overall rear end of the present utility model;
fig. 3 is a schematic structural diagram of a side face of the present utility model.
In the figure, 1, a device body; 2. a transport chamber rack; 3. an air inlet adjusting and connecting device; 4. a driving rod; 5. a piston; 6. a piston fixing block; 7. a first frame body; 8. a second frame body; 9. a movable channel; 10. a scissors block; 11. a fixed port; 12. and a fixed block.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-3, the embodiment of the utility model provides a technical scheme: the device comprises a device body 1, wherein the device body 1 comprises a conveying cavity frame 2 and an air inlet adjusting and connecting device 3, and the air inlet adjusting and connecting device 3 is arranged inside the conveying cavity frame 2;
preferably, the air inlet adjusting and connecting device 3 comprises a driving rod 4 and a piston 5, one end of the driving rod 4 is arranged at the left end inside the conveying cavity frame 2, the piston 5 is arranged at the right end of the driving rod 4, the driving rod 4 and the piston 5 are of cylindrical structures, a piston fixing block 6 is arranged at the front end of the piston 5, when the air inlet adjusting and connecting device is used, a worker can install the driving device at the left end of the conveying cavity frame 2, when the air inlet adjusting and connecting device is used for conveying air, the driving rod 4 is driven by a driving component to move rightwards when the driving rod 4 is used for driving the piston 5, a movable channel 9 between the first frame 7 and the second frame 8 can be opened, when the movable channel 9 is closed, the driving component drives the driving rod 4 to move leftwards, and the piston 5 is further blocked for the movable channel 9, so that the closing effect is achieved.
Further, the conveying cavity frame 2 comprises a first frame body 7 and a second frame body 8, the first frame body 7 and the second frame body 8 are distributed in an up-down symmetrical mode, the rear end of the first frame body 7 is fixed with the rear end of the second frame body 8, a movable channel 9 is arranged between the first frame body 7 and the second frame body 8, the right ends of the first frame body 7 and the second frame body 8 are respectively provided with a scissor block 10, the movable channel 9 between the first frame body 7 and the second frame body 8 is convenient for gas to pass through, and the scissor blocks 10 at the right ends of the first frame body 7 and the second frame body 8 form a funnel-shaped structure, so that the piston 5 can further conveniently open or close the movable channel 6.
The fixed mouth 11 has been seted up to the delivery chamber frame 2 rear side, installs fixed block 12 in the fixed mouth 11, and fixed block 12 is cylindric structure and inside is the penetration structure fixed mouth 11 in order to be convenient for the penetration of fixed block 12 to fixed block 12 is convenient for penetrate the dead lever, thereby fixes device body 1.
Working principle: during operation, the operator can install drive arrangement in the left end of conveying chamber frame 2, when carrying gas, drive assembly drive actuating lever 4, actuating lever 4 moves right at drive piston 5, and movable passageway 9 between first support body 7 and the second support body 8 just can open, when closing movable passageway 9, drive assembly drives actuating lever 4 and moves left, further makes piston 5 block up movable passageway 9 to reach the effect of closing.
The utility model relates to a device body, in particular to a device body; 2. a transport chamber rack; 3. an air inlet adjusting and connecting device; 4. a driving rod; 5. a piston; 6. a piston fixing block; 7. a first frame body; 8. a second frame body; 9. a movable channel; 10. a scissors block; 11. a fixed port; 12. the utility model solves the problems that in the existing semiconductor low-temperature pump equipment, helium gas inlet and outlet are fully matched with compressed and expanded gas when a piston moves, and the movement of the piston is driven by a motor, so that the connection between an air inlet and an air outlet and the motor is inconvenient, and the stability of integral operation is influenced.
While the fundamental and principal features of the utility model and advantages of the utility model have been shown and described, it will be apparent to those skilled in the art that the utility model is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (3)
1. The utility model provides a be applied to semiconductor cryopump inlet and outlet and connecting device of motor which characterized in that: the device comprises a device body (1), wherein the device body (1) comprises a conveying cavity frame (2) and an air inlet adjusting and connecting device (3), and the air inlet adjusting and connecting device (3) is arranged inside the conveying cavity frame (2);
the air inlet adjusting and connecting device (3) comprises a driving rod (4) and a piston (5), one end of the driving rod (4) is arranged at the left end inside the conveying cavity frame (2), the piston (5) is arranged at the right end of the driving rod (4), the driving rod (4) and the piston (5) are of cylindrical structures, and a piston fixing block (6) is arranged at the front end of the piston (5).
2. The connection device for the semiconductor cryopump exhaust port and the motor according to claim 1, wherein: the conveying cavity frame (2) comprises a first frame body (7) and a second frame body (8), wherein the first frame body (7) and the second frame body (8) are distributed in an up-down symmetrical mode, the rear end of the first frame body (7) is fixed with the rear end of the second frame body (8), a movable channel (9) is arranged between the first frame body (7) and the second frame body (8), and scissor blocks (10) are arranged at the right ends of the first frame body (7) and the second frame body (8).
3. The connection device for the semiconductor cryopump exhaust port and the motor according to claim 1, wherein: the conveying cavity frame is characterized in that a fixing opening (11) is formed in the rear side of the conveying cavity frame (2), a fixing block (12) is arranged in the fixing opening (11), and the fixing block (12) is of a cylindrical structure and is of a through structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322094041.9U CN220415619U (en) | 2023-08-06 | 2023-08-06 | Connecting device applied to semiconductor cryopump air inlet and outlet and motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322094041.9U CN220415619U (en) | 2023-08-06 | 2023-08-06 | Connecting device applied to semiconductor cryopump air inlet and outlet and motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220415619U true CN220415619U (en) | 2024-01-30 |
Family
ID=89647245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322094041.9U Active CN220415619U (en) | 2023-08-06 | 2023-08-06 | Connecting device applied to semiconductor cryopump air inlet and outlet and motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220415619U (en) |
-
2023
- 2023-08-06 CN CN202322094041.9U patent/CN220415619U/en active Active
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