CN220406541U - Photoresist supply pipeline cleaning device - Google Patents
Photoresist supply pipeline cleaning device Download PDFInfo
- Publication number
- CN220406541U CN220406541U CN202321934142.6U CN202321934142U CN220406541U CN 220406541 U CN220406541 U CN 220406541U CN 202321934142 U CN202321934142 U CN 202321934142U CN 220406541 U CN220406541 U CN 220406541U
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- Prior art keywords
- outlet pipe
- water outlet
- bottom plate
- sealing
- water
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- 238000004140 cleaning Methods 0.000 title claims abstract description 48
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 57
- 238000007789 sealing Methods 0.000 claims description 41
- 238000010438 heat treatment Methods 0.000 claims description 21
- 238000005485 electric heating Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to a photoresist supply pipeline cleaning device, which belongs to the technical field of integrated circuits and comprises a cleaning component and a drainage component, wherein the cleaning component and the drainage component both comprise a bottom plate, the periphery of the bottom plate is respectively provided with a movable wheel, the bottom of the bottom plate is provided with a mounting groove, the inside of the mounting groove is provided with a hydraulic rod, the telescopic end of the hydraulic rod is fixedly connected with a supporting block, the bottom plate of the cleaning component is provided with a water tank and an air pump, the bottom plate of the drainage component is provided with a drainage tank, and the air outlet end of the air pump is communicated with an air outlet pipe.
Description
Technical Field
The utility model relates to the technical field of integrated circuits, in particular to a photoresist supply pipeline cleaning device.
Background
Photoresist is one of key materials for micro pattern processing in microelectronic technology, especially the development of large-scale and ultra-large-scale integrated circuits in recent years, and the research, development and application of photoresist are greatly promoted; in the existing semiconductor photolithography process, the photoresist supply line needs to be cleaned with a cleaning solution before new photoresist is installed.
The utility model of citation application number CN202022439348.4 discloses a photoresist supply pipeline cleaning device, relates to integrated circuit technical field, has solved at present to after the photoresist supply pipeline washs, the inner wall of pipeline can adhere to remaining washing liquid to influence the problem that the supply pipeline washd the first time after, its technical scheme main points are: the cleaning device comprises a cleaning bin, wherein a water outlet pump is arranged in the cleaning bin, and the output end of the water outlet pump is provided with a cleaning pipe extending to the outside of the cleaning bin; the drying bin is internally provided with a hot air blower and an exhaust fan, and the output ends of the hot air blower and the exhaust fan are respectively provided with a hot air pipe and an exhaust fan; the ends of the hot air pipe and the exhaust pipe are respectively provided with a connecting structure; the effect of improving the practicability of the whole device is achieved.
The above prior art also has the following disadvantages:
the prior art can not uniformly and omnidirectionally heat the water inlet pipe, so that the cleaning effect is poor, the cleaning equipment is inconvenient to stably move, and the application range is limited.
Disclosure of Invention
The utility model aims to provide a photoresist supply pipeline cleaning device which is used for solving the problems in the background technology.
The technical scheme of the utility model is as follows: including cleaning module and drainage subassembly, cleaning module with drainage subassembly is all including the bottom plate, the removal wheel is installed respectively all around the bottom of bottom plate, the mounting groove has been seted up to the bottom of bottom plate, the internally mounted of mounting groove has the hydraulic stem, the flexible end fixedly connected with supporting shoe of hydraulic stem, cleaning module be provided with water tank and air pump on the bottom plate, drainage module be provided with the drain tank on the bottom plate, the end intercommunication of giving vent to anger of air pump has the outlet duct.
Further, the bottom plate of the cleaning assembly is provided with a water suction pump, a water suction end of the water suction pump is communicated with one side of the water tank, a water outlet end of the water suction pump is communicated with a water outlet pipe, and a first heating assembly is arranged on the water outlet pipe.
Further, the extension end of outlet pipe is provided with first sealing connection spare, the drain tank is close to one side of water tank is provided with the connecting pipe, threaded connection has the pipeline body on the connecting pipe.
Further, the first heating component comprises a fixed cover fixedly sleeved with the surface of the water outlet pipe, an electric heating wire is installed in the fixed cover, a heat conducting plate is installed on the other side of the electric heating wire, and the heat conducting plate is in surface contact with the water outlet pipe.
Further, the first sealing connector comprises a sealing cover communicated with the extension end of the water outlet pipe, a first sealing ring is arranged on one side, close to the water outlet pipe, of the inner portion of the sealing cover, an opening is formed in one side, far away from the water outlet pipe, of the sealing cover, a second sealing ring is arranged at the opening, and one side of the pipeline body penetrates through the second sealing ring and contacts with the water outlet end of the water outlet pipe.
Further, a second heating component is arranged on the air outlet pipe, a second sealing connecting piece is arranged at the extension end of the air outlet pipe, the second heating component is consistent with the first heating component in structure, and the second sealing connecting piece is consistent with the first sealing connecting piece in structure.
The utility model provides a photoresist supply pipeline cleaning device through improvement, which has the following improvement and advantages compared with the prior art:
according to the utility model, the first heating component and the second heating component are arranged, so that cleaning liquid and gas entering the pipeline body can be heated conveniently, and the cleaning effect is improved.
Drawings
The utility model is further explained below with reference to the drawings and examples:
FIG. 1 is a schematic elevational view of the present utility model;
FIG. 2 is an enlarged schematic view of the structure of FIG. 1A according to the present utility model;
FIG. 3 is a schematic diagram showing the front view of the air pump according to the present utility model;
FIG. 4 is a schematic view of the structure of the first heating element according to the present utility model.
Reference numerals illustrate: 1. cleaning the assembly; 2. a drainage assembly; 3. a bottom plate; 4. a moving wheel; 5. a mounting groove; 6. a hydraulic rod; 7. a support block; 8. a water tank; 9. a drain tank; 10. a water pump; 11. a water outlet pipe; 12. a first heating assembly; 13. a first sealing connection; 14. a sealing cover; 15. a second seal ring; 16. a first seal ring; 17. a pipeline body; 18. a connecting pipe; 19. an air pump; 20. a second heating assembly; 21. an air outlet pipe; 22. a second sealing connection; 23. a fixed cover; 24. an electric heating wire; 25. a heat conducting plate.
Detailed Description
The following detailed description of the present utility model will provide clear and complete description of the technical solutions of the embodiments of the present utility model, with reference to fig. 1 to 4, and it is obvious that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model provides a photoresist supply pipeline cleaning device through improvement, as shown in fig. 1-4, the photoresist supply pipeline cleaning device comprises a cleaning component 1 and a drainage component 2, wherein the cleaning component 1 and the drainage component 2 both comprise a bottom plate 3, the periphery of the bottom plate 3 is respectively provided with a movable wheel 4, the bottom of the bottom plate 3 is provided with a mounting groove 5, the inside of the mounting groove 5 is provided with a hydraulic rod 6, the telescopic end of the hydraulic rod 6 is fixedly connected with a supporting block 7, the bottom plate 3 of the cleaning component 1 is provided with a water tank 8 and an air pump 19, the bottom plate 3 of the drainage component 2 is provided with a drainage tank 9, the air outlet end of the air pump 19 is communicated with an air outlet pipe 21, the movement is facilitated by arranging the movable wheels 4, and the stabilization of the photoresist supply pipeline cleaning device is facilitated by arranging the hydraulic rod 6 and the supporting block 7.
Be provided with suction pump 10 on the bottom plate 3 of cleaning assembly 1, the water pumping end of suction pump 10 is linked together with one side of water tank 8, and the water outlet end intercommunication of suction pump 10 has outlet pipe 11, installs first heating assembly 12 on the outlet pipe 11, is convenient for dry pipeline body 17 inside.
The extension end of outlet pipe 11 is provided with first sealing connection spare 13, and the drain tank 9 is provided with connecting pipe 18 near the one side of water tank 8, is connected with pipeline body 17 on the connecting pipe 18 screw thread, is convenient for connect.
The first heating component 12 comprises a fixed cover 23 fixedly sleeved with the surface of the water outlet pipe 11, an electric heating wire 24 is arranged in the fixed cover 23, a heat conducting plate 25 is arranged on the other side of the electric heating wire 24, the heat conducting plate 25 is in surface contact with the water outlet pipe 11, heat conduction is carried out through the heat conducting plate 25 by starting the electric heating wire 24, and cleaning liquid in the water outlet pipe 11 is heated.
The first sealing connector 13 comprises a sealing cover 14 communicated with the extension end of the water outlet pipe 11, a first sealing ring 16 is arranged on one side, close to the water outlet pipe 11, of the inner portion of the sealing cover 14, an opening is formed in one side, far away from the water outlet pipe 11, of the sealing cover 14, a second sealing ring 15 is arranged at the opening, one side of the pipeline body 17 penetrates through the second sealing ring 15 to be contacted with the water outlet end of the water outlet pipe 11, and the sealing performance of connection is facilitated.
The second heating component 20 is arranged on the air outlet pipe 21, the second sealing connecting piece 22 is arranged at the extension end of the air outlet pipe 21, the second heating component 20 is consistent with the first heating component 12 in structure, and the second sealing connecting piece 22 is consistent with the first sealing connecting piece 13 in structure, so that the air can be heated conveniently.
Working principle: firstly, one end of a pipeline body 17 is connected with a connecting pipe 18, the other end penetrates into a second sealing ring 15 in a first sealing connecting piece 13 to be connected with a water outlet pipe 11 and is contacted with a first sealing ring 16, cleaning liquid in the water tank 8 is conveniently sucked into the pipeline body 17 by starting a water suction pump 10, meanwhile, an electric heating wire 24 in a first heating component 12 is started, the cleaning liquid is conveniently heated, the cleaning effect is improved, then the pipeline body is connected with a second sealing connecting piece 22, and the cleaning liquid in the pipeline body 17 is conveniently blown out to be dried by starting an air pump 19.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (6)
1. A photoresist supply line belt cleaning device, its characterized in that: including cleaning module (1) and drainage subassembly (2), cleaning module (1) with drainage subassembly (2) all are including bottom plate (3), remove round (4) are installed respectively all around the bottom of bottom plate (3), mounting groove (5) have been seted up to the bottom of bottom plate (3), internally mounted of mounting groove (5) has hydraulic stem (6), the flexible end fixedly connected with supporting shoe (7) of hydraulic stem (6), cleaning module (1) be provided with water tank (8) and air pump (19) on bottom plate (3), drainage subassembly (2) be provided with drain tank (9) on bottom plate (3), the end intercommunication of giving vent to anger of air pump (19) has outlet duct (21).
2. A photoresist feed line cleaning apparatus as set forth in claim 1, wherein: the cleaning device is characterized in that a water suction pump (10) is arranged on the bottom plate (3) of the cleaning assembly (1), a water suction end of the water suction pump (10) is communicated with one side of the water tank (8), a water outlet pipe (11) is communicated with a water outlet end of the water suction pump (10), and a first heating assembly (12) is arranged on the water outlet pipe (11).
3. A photoresist feed line cleaning apparatus as set forth in claim 2, wherein: the extension end of outlet pipe (11) is provided with first sealing connection spare (13), drainage tank (9) are close to one side of water tank (8) is provided with connecting pipe (18), threaded connection has pipeline body (17) on connecting pipe (18).
4. A photoresist feed line cleaning apparatus as set forth in claim 3, wherein: the first heating assembly (12) comprises a fixed cover (23) fixedly sleeved on the surface of the water outlet pipe (11), an electric heating wire (24) is arranged in the fixed cover (23), a heat conducting plate (25) is arranged on the other side of the electric heating wire (24), and the heat conducting plate (25) is in surface contact with the water outlet pipe (11).
5. A photoresist feed line cleaning apparatus as set forth in claim 4, wherein: the first sealing connector (13) comprises a sealing cover (14) communicated with the extension end of the water outlet pipe (11), a first sealing ring (16) is arranged on one side, close to the water outlet pipe (11), of the sealing cover (14), an opening is formed in one side, far away from the water outlet pipe (11), of the sealing cover (14), a second sealing ring (15) is arranged at the opening, and one side of the pipeline body (17) penetrates through the second sealing ring (15) and the water outlet end of the water outlet pipe (11) to be contacted.
6. A photoresist feed line cleaning apparatus as set forth in claim 3, wherein: be provided with second heating element (20) on outlet duct (21), the extension of outlet duct (21) is provided with second sealing connection spare (22), second heating element (20) with first heating element (12) structure is unanimous, second sealing connection spare (22) with first sealing connection spare (13) structure is unanimous.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321934142.6U CN220406541U (en) | 2023-07-21 | 2023-07-21 | Photoresist supply pipeline cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321934142.6U CN220406541U (en) | 2023-07-21 | 2023-07-21 | Photoresist supply pipeline cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220406541U true CN220406541U (en) | 2024-01-30 |
Family
ID=89644205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321934142.6U Active CN220406541U (en) | 2023-07-21 | 2023-07-21 | Photoresist supply pipeline cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220406541U (en) |
-
2023
- 2023-07-21 CN CN202321934142.6U patent/CN220406541U/en active Active
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