CN220395967U - Vacuum filtration mechanism and PECVD device - Google Patents
Vacuum filtration mechanism and PECVD device Download PDFInfo
- Publication number
- CN220395967U CN220395967U CN202322048593.6U CN202322048593U CN220395967U CN 220395967 U CN220395967 U CN 220395967U CN 202322048593 U CN202322048593 U CN 202322048593U CN 220395967 U CN220395967 U CN 220395967U
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- pipe
- pipeline
- vacuum filtration
- filtration mechanism
- vacuum
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- 230000007246 mechanism Effects 0.000 title claims abstract description 43
- 238000003828 vacuum filtration Methods 0.000 title claims abstract description 32
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 22
- 238000007789 sealing Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 23
- 238000001914 filtration Methods 0.000 abstract description 16
- 239000013618 particulate matter Substances 0.000 abstract description 6
- 239000007888 film coating Substances 0.000 abstract description 2
- 238000009501 film coating Methods 0.000 abstract description 2
- 239000002245 particle Substances 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to the field of PECVD tail gas treatment, in particular to a vacuum filtration mechanism and a PECVD device. The vacuum filtering mechanism comprises a first pipeline connecting part which is connected with a first pipeline connected with the direction of the film coating cavity; a second pipe connection part connected with a second pipe connected in the vacuum pump direction; the vacuum filtration mechanism further comprises a collection portion located between the first conduit connection portion and the second conduit connection portion; the filter screen is positioned between the second pipeline connecting part and the collecting part; and the first pipeline connecting part and the second pipeline connecting part are arranged in a crossing way. The PECVD apparatus comprises a vacuum filtration mechanism. Through this vacuum filtration mechanism, alleviate current filtration mode and still had the technical problem of card dying or damaging the vacuum pump, when realizing filtering dust and particulate matter, still can store dust, the particulate matter after the filtration, guaranteed the unblocked of pipeline.
Description
Technical Field
The utility model relates to the field of PECVD tail gas treatment, in particular to a vacuum filtration mechanism and a PECVD device.
Background
PECVD (Plasma Enhanced Chemical Vapor Deposition) is a vapor deposition method of plasma enhanced chemistry, which is characterized in that a gas containing atoms of film components is locally formed into plasma by means of microwave or radio frequency, etc., and the chemical activity of the plasma is strong, so that the reaction is easy to occur, thereby depositing a desired film on a substrate; this may be achieved by means of a PECVD device.
In a PECVD apparatus, the apparatus comprises a cavity and a vacuum pump, wherein the cavity and the vacuum pump are communicated through a pipeline. When the vacuum pump is started, gas in the cavity can be pumped, and meanwhile, dust, particles and the like generated during the operation of the device can be pumped away, so that the normal operation of the vacuum pump is adversely affected. Currently, a solution to this problem is to provide a filter screen in the pipeline to filter dust and particulate matter, as shown in fig. 1. However, after a period of filtering, a build-up will occur in the pipe which, if not cleaned in time, may cause the vacuum pump to become stuck or damaged, thereby affecting the overall operation of the device.
Disclosure of Invention
The utility model aims to provide a vacuum filtration mechanism and a PECVD device, which are used for relieving the technical problem that the vacuum pump is still blocked or damaged in the existing filtration mode.
In order to solve the technical problems, the technical scheme provided by the utility model is as follows:
in a first aspect, the present utility model provides a vacuum filtration mechanism comprising: the first pipeline connecting part is connected with a first pipeline connected with the coating cavity in the direction; a second pipe connection part connected with a second pipe connected in the vacuum pump direction; the method is characterized in that:
the vacuum filtration mechanism further comprises a collecting part positioned between the first pipeline connecting part and the second pipeline connecting part;
the filter screen is positioned between the second pipeline connecting part and the collecting part;
and the first pipeline connecting part and the second pipeline connecting part are arranged in a crossing way.
Further, the first pipe connection portion and the second pipe connection portion are vertically disposed.
Further, the first pipeline connecting part is fixedly connected with the first pipeline through a connecting lock catch;
the second pipeline connecting part is fixedly connected with the second pipeline through a connecting lock catch.
Further, the second pipeline connecting part comprises a first end connected with the second pipeline and a second end connected with the collecting part, and the diameter of the second end is larger than or equal to that of the first end; the filter screen is disposed between the second end and the collection portion.
Further, the collecting part is also provided with a visual window.
Further, the filter screen is located between the second pipe connection and the second pipe.
Furthermore, a sealing ring is sleeved outside the filter screen.
In summary, the technical effects that the vacuum filtration mechanism provided by the utility model can realize are as follows:
the vacuum filtering mechanism comprises a first pipeline connecting part, a second pipeline connecting part and a first pipeline connecting part, wherein the first pipeline connecting part is connected with a first pipeline in the direction of a film coating cavity; a second pipe connection part connected with a second pipe connected in the vacuum pump direction; the vacuum filtration mechanism further comprises a collection portion located between the first conduit connection portion and the second conduit connection portion; the filter screen is positioned between the second pipeline connecting part and the collecting part; and the first pipeline connecting part and the second pipeline connecting part are arranged in a crossing way.
In the mechanism, the first pipeline and the second pipeline are communicated through the first pipeline connecting part, the collecting part and the second pipeline connecting part which are connected between the first pipeline and the second pipeline, so that the mixed gas from the coating chamber can enter the second pipeline from the first pipeline through the first pipeline connecting part, the collecting part and the second pipeline connecting part in sequence to realize exhaust; and because be provided with the filter screen between second pipeline connecting portion and the collecting portion, dust, particulate matter etc. in the miscellaneous gas will be filtered off, considers simultaneously that first pipeline connecting portion and second pipeline connecting portion two alternately set up, and dust, particulate matter etc. will stay in the collecting portion, and do not influence the intercommunication of two, so, then guaranteed the normal operating of vacuum pump.
Compared with the prior art, the vacuum filtering mechanism can filter dust and particles, can store the filtered dust and particles, avoids the blockage of a pipeline, and reduces the risk of blockage or damage of a vacuum pump.
In a second aspect, the utility model provides a PECVD device comprising a first pipeline, a second pipeline and the vacuum filtering mechanism;
the first pipeline is detachably connected with the first pipeline connecting part; the second pipeline is detachably connected with the second pipeline connecting part.
The PECVD device provided by the utility model has the beneficial effects that:
the PECVD device provided by the utility model comprises a vacuum filtering mechanism, so that the technical advantages and effects achieved by the PECVD device comprise the technical advantages and effects achieved by the vacuum filtering mechanism, and are not repeated herein.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a conventional PECVD apparatus;
FIG. 2 is a schematic view of a first embodiment of a vacuum filtration mechanism provided in accordance with an embodiment of the present utility model;
fig. 3 is a schematic view of a second embodiment of a vacuum filtration mechanism according to an embodiment of the present utility model.
Fig. 4 is a schematic view of a third embodiment of a vacuum filtration mechanism according to an embodiment of the present utility model.
Icon: 100-a first pipe connection; 200-a second pipe connection; 300-a collection section; 310-visual window; 400-filtering net; 500-a first pipe; 600-second pipeline; 700-connecting a lock catch; 800-sealing ring.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Some embodiments of the present utility model are described in detail below with reference to the accompanying drawings. The following embodiments and features of the embodiments may be combined with each other without conflict.
In a PECVD apparatus, the apparatus comprises a cavity and a vacuum pump, wherein the cavity and the vacuum pump are communicated through a pipeline. When the vacuum pump is started, gas in the cavity can be pumped, and meanwhile, dust, particles and the like generated during the operation of the device can be pumped away, so that the normal operation of the vacuum pump is adversely affected. Currently, a solution to this problem is to provide a filter screen in the pipeline to filter dust and particulate matter, as shown in fig. 1. However, after a period of filtering, a build-up will occur in the pipe which, if not cleaned in time, may cause the vacuum pump to become stuck or damaged, thereby affecting the overall operation of the device.
In view of this, the present utility model provides a vacuum filtration mechanism comprising a first pipe connection part 100 connected with a first pipe 500 connected in the direction of a coating chamber; a second pipe connection part 200 connected to a second pipe 600 connected in the vacuum pump direction; the vacuum filtration mechanism further comprises a collecting portion 300 located between the first pipe connection portion 100 and the second pipe connection portion 200; a filter screen 400, the filter screen 400 being located between the second pipe connection part 200 and the collecting part 300; and the first pipe connection part 100 and the second pipe connection part 200 are disposed to cross each other.
In this mechanism, the first pipe 500 and the second pipe 600 are communicated through the first pipe connection part 100, the collecting part 300 and the second pipe connection part 200 connected therebetween, so that the mixed gas from the coating chamber can enter the second pipe 600 from the first pipe 500 through the first pipe connection part 100, the collecting part 300 and the second pipe connection part 200 in order to realize the exhaust; and because the filter screen 400 is arranged between the second pipeline connecting part 200 and the collecting part 300, dust, particles and the like in the mixed gas are filtered, and meanwhile, the dust, the particles and the like are left in the collecting part 300 without influencing the communication of the two, considering that the first pipeline connecting part 100 and the second pipeline connecting part 200 are arranged in a crossing way, so that the normal operation of the vacuum pump is ensured.
Compared with the prior art, the vacuum filtering mechanism can filter dust and particles, can store the filtered dust and particles, avoids the blockage of a pipeline, and reduces the risk of blockage or damage of a vacuum pump.
The vacuum filtration mechanism provided in this embodiment is described in detail below with reference to fig. 2 to 4:
further, referring to fig. 2 to 4, the first pipe connection part 100 and the second pipe connection part 200 are vertically disposed.
Specifically, taking fig. 2 as an example, the collecting portion 300 is a cavity structure, and is provided with an inlet and an outlet, wherein the inlet is positioned on the side surface of the collecting portion 300 and is located at an upper position, and the outlet is positioned at the top end of the collecting portion 300; the right end of the first pipe connection part 100 is connected with the first pipe 500, and the left end is connected to the inlet of the collecting part 300; the second pipe connection part 200 has an upper end connected to the second pipe 600 and a lower end connected to the outlet of the collecting part 300.
When the vacuum is applied, the gas carrying dust and particles first enters the collecting part 300 from the first pipe 500 and the first pipe connecting part 100 through the inlet of the collecting part 300, then travels upward, passes through the outlet of the collecting part 300 and the filter screen 400, and in the process, the dust and the particles are filtered, are adhered to each other to form a block after being filtered for a period of time, fall into the bottom of the collecting part 300, and the filtered gas enters the second pipe connecting part 200 and is discharged from the second pipe 600. By the design, the vacuum filtering mechanism can not only play a role in filtering, but also store dust and particulate matters, and the smooth and unimpeded air exhaust pipeline is ensured.
Further, with continued reference to fig. 2 to 4, the first pipe connection part 100 and the first pipe 500 are fixedly connected by a connection locker 700; the second pipe connection part 200 and the second pipe 600 are fixedly connected by the connection locker 700. So design, convenient to detach vacuum filtration mechanism realizes its in time clearance.
Further, referring to fig. 4, the second pipe connection part 200 includes a first end connected to the second pipe 600, and a second end connected to the collecting part 300, the second end having a diameter larger than that of the first end; the filter screen 400 is disposed between the second end and the collecting portion 300.
Specifically, as shown in fig. 4, the upper section of the second pipe connection portion 200 has the same diameter as the second pipe 600, and the lower section thereof gradually increases in diameter from top to bottom. So designed, the filtered gas will be accelerated when passing through the second pipe connection part 200, so that the gas is conveniently pumped out, and the size of the filter screen 400 is increased, thereby reducing the cleaning times of the filter screen 400.
Further, referring to fig. 2 to 4, the collecting part 300 is further provided with a viewing window 310. Through the visual window 310, the filter screen 400 and dust collection condition can be observed in real time, so that the inspection and spot inspection are facilitated, and dust accumulation in the filter screen 400 and the collection part 300 can be cleaned in time.
In addition, it should be added here that, with respect to the diameter of the collecting portion 300, referring to fig. 2 and 3, it may be designed to coincide with the diameter of the pipe connection portion; preferably, referring to fig. 4, the diameter of the pipe connection portion may be designed to be larger than that of the pipe connection portion, and may be 2 times the diameter of the pipe connection portion, so that the pumping speed of the vacuum pump is not affected after the filter screen 400 is additionally arranged, and the working efficiency is ensured.
As for the filter screen 400, in addition to being disposed between the second pipe connection portion 200 and the collecting portion 300 as shown in fig. 2 and 4, it may be disposed between the second pipe connection portion 200 and the second pipe 600 as shown in fig. 3. In addition, a sealing ring 800 is sleeved outside the filter screen 400.
Specifically, the filter screen 400 is located in the ring of the sealing ring 800, and correspondingly, the sealing ring 800 is clamped between the second pipe connection portion 200 and the collecting portion 300, or between the second pipe connection portion 200 and the second pipe 600. When the gas carrying dust and particles passes through the filter screen 400 under the action of the vacuum pump, the filter screen 400 filters the gas, and only the residual gas is continuously discharged upwards, so that the normal operation of the vacuum pump is ensured; the sealing ring 800 ensures the tightness of the connection of the filter screen 400, avoids dust emission outside the collecting part 300, and ensures the effectiveness of the vacuum pump.
The working process of the vacuum filtration mechanism provided by the embodiment is as follows:
referring to fig. 2 to 4, the vacuum pump is first started, gas, dust and particles in the coating chamber enter the collecting part 300 through the inlet of the collecting part 300 under the action of negative pressure suction, then travel upwards, and when passing through the filter screen 400, the dust and the particles are filtered and fall into the bottom of the collecting part 300 freely after being bonded into a block, and the gas enters the second pipeline 600 and is discharged.
The present utility model also provides a PECVD apparatus, referring to FIGS. 2 to 4, comprising a first pipe 500, a second pipe 600 and a vacuum filtration mechanism; wherein one end of the first pipe 500 is communicated with the cavity, and the other end is detachably connected with the first pipe connection part 100; one end of the second pipe 600 is connected to the vacuum pump, and the other end is detachably connected to the second pipe connection part 200.
Specifically, the connection between the pipeline and the pipeline connection part can adopt a connection lock catch 700, a flange plate can also be arranged, and the flange plate is connected by bolts, and meanwhile, a sealing ring 800 can also be arranged at the connection part for sealing. So design, convenient to detach vacuum filtration mechanism realizes its in time clearance.
In addition, since the PECVD apparatus includes the vacuum filtration mechanism described above, the technical advantages and effects achieved by the PECVD apparatus include those achieved by the vacuum filtration mechanism described above, and will not be described herein.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.
Claims (8)
1. A vacuum filtration mechanism, comprising: a first pipe connection part (100) connected with a first pipe (500) connected in the direction of the film plating chamber; a second pipe connection unit (200) that is connected to a second pipe (600) connected in the direction of the vacuum pump; the method is characterized in that:
the vacuum filtration mechanism further comprises a collection portion (300) located between the first conduit connection portion (100) and the second conduit connection portion (200);
a filter screen (400), the filter screen (400) being located between the second pipe connection portion (200) and the collection portion (300);
and the first pipe connection part (100) and the second pipe connection part (200) are arranged in a crossing manner.
2. The vacuum filtration mechanism of claim 1, wherein the first conduit connection (100) and the second conduit connection (200) are disposed vertically.
3. The vacuum filtration mechanism of claim 1, wherein the first conduit connection (100) and the first conduit (500) are fixedly connected by a connection latch (700);
the second pipeline connecting part (200) is fixedly connected with the second pipeline (600) through a connecting lock catch (700).
4. The vacuum filtration mechanism of claim 1, wherein the second conduit connection (200) comprises a first end connected to the second conduit (600) and a second end connected to the collection portion (300), the second end having a diameter equal to or greater than the diameter of the first end; the filter screen (400) is disposed between the second end and the collection portion.
5. The vacuum filtration mechanism of claim 1, wherein the collection portion is further provided with a viewing window (310).
6. The vacuum filtration mechanism of claim 1, wherein the filter screen (400) is located between a second conduit connection (200) and the second conduit (600).
7. The vacuum filter mechanism of any of claims 1-6, wherein a sealing ring (800) is further sleeved outside the filter screen (400).
8. A PECVD apparatus comprising a first tube (500), a second tube (600) and a vacuum filtration mechanism according to any one of claims 1 to 7; the method is characterized in that:
the first pipeline (500) is detachably connected with the first pipeline connecting part (100); the second pipe (600) is detachably connected to the second pipe connection portion (200).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322048593.6U CN220395967U (en) | 2023-08-01 | 2023-08-01 | Vacuum filtration mechanism and PECVD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322048593.6U CN220395967U (en) | 2023-08-01 | 2023-08-01 | Vacuum filtration mechanism and PECVD device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220395967U true CN220395967U (en) | 2024-01-26 |
Family
ID=89603081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322048593.6U Active CN220395967U (en) | 2023-08-01 | 2023-08-01 | Vacuum filtration mechanism and PECVD device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220395967U (en) |
-
2023
- 2023-08-01 CN CN202322048593.6U patent/CN220395967U/en active Active
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