CN220388302U - Anti-slip clamping and fixing structure - Google Patents

Anti-slip clamping and fixing structure Download PDF

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Publication number
CN220388302U
CN220388302U CN202321042125.1U CN202321042125U CN220388302U CN 220388302 U CN220388302 U CN 220388302U CN 202321042125 U CN202321042125 U CN 202321042125U CN 220388302 U CN220388302 U CN 220388302U
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China
Prior art keywords
workbench
supporting ring
fixing structure
clamping
laser cutting
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CN202321042125.1U
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Chinese (zh)
Inventor
张晓星
冯建炜
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Suzhou Semitec Semiconductor Technology Co ltd
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Suzhou Semitec Semiconductor Technology Co ltd
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Abstract

The utility model provides an anti-slip clamping and fixing structure, which comprises a workbench and a crystal cylinder, wherein a laser cutting assembly is arranged on one side of the workbench, a total support is fixed on one side of the workbench, a rotatable three-jaw chuck is arranged on one side of the total support, a plurality of groups of clamping assemblies are arranged on the workbench at intervals, each clamping assembly comprises a first supporting ring, a second supporting ring, a sliding rod and an arc plate, the surface of each first supporting ring is arranged on the surface of the workbench through a vertical seat.

Description

Anti-slip clamping and fixing structure
Technical Field
The utility model relates to the field of wafer processing, in particular to an anti-slipping clamping and fixing structure.
Background
Wafer refers to a silicon wafer used for manufacturing silicon semiconductor circuits, the original material of which is silicon. The high-purity polycrystalline silicon is dissolved and then doped with silicon crystal seed, and then slowly pulled out to form cylindrical monocrystalline silicon. The silicon ingot is ground, polished, and sliced to form a silicon wafer, i.e., a wafer. The wafer is then diced into individual sheet crystals for further processing to form semiconductor elements.
The existing wafer cutting machine adopts a blade as a cutting tool, the cutting is not smooth enough, the cutting effect is poor, in addition, the existing fixing structure of the wafer cylinder is simple, the longer wafer cylinder cannot be fixed, the wafer cylinder is required to be pre-cut by manpower before formal cutting, the error rate is high, the product quality is reduced, and the production efficiency is low.
Therefore, it is necessary to provide a new anti-slip clamping and fixing structure to solve the above technical problems.
Disclosure of Invention
In order to solve the technical problems, the utility model provides an anti-slip clamping and fixing structure, which solves the problems that the prior wafer cutting machine adopts a blade as a cutting tool, the cutting is not smooth enough, the cutting effect is poor, in addition, the prior fixing structure for a crystal cylinder is simpler, a longer crystal cylinder cannot be fixed, the wafer cylinder is required to be pre-cut manually before formal cutting, the error rate is high, the product quality is reduced, and the production efficiency is low.
The anti-slip clamping and fixing structure comprises a workbench and a crystal cylinder, wherein a laser cutting assembly is arranged on one side of the workbench, a main support is fixed on one side of the workbench, a rotatable three-jaw chuck is arranged on one side of the main support, and a plurality of groups of clamping assemblies are arranged on the workbench at intervals;
the clamping assembly comprises a first supporting ring, a second supporting ring, a sliding rod and an arc plate, wherein the surface of the first supporting ring is arranged on the surface of the workbench through a vertical seat, the second supporting ring is arranged inside the first supporting ring in a sliding mode, a plurality of groups of sliding grooves are formed in the surface of the first supporting ring in the circumferential direction, the sliding rod is arranged inside the sliding grooves in a sliding mode, the arc plate is fixed on the sliding rod, and the crystal cylinders are located among the arc plates in a plurality of groups.
In a preferred embodiment, a vortex-shaped track is fixed on the surface of the second support ring, a plurality of driving blocks are fixed at intervals at the bottom of the sliding rod, and the driving blocks are positioned inside the vortex-shaped track.
In a preferred embodiment, a gear is mounted at the bottom of the second support ring, a cylinder is fixed on the workbench, and a rack is mounted at the output end of the cylinder and meshed with the gear.
In a preferred embodiment, the laser cutting assembly comprises a laser cutting machine, a placing groove is formed in the surface of the workbench, a threaded rod is arranged in the placing groove in a rotating mode through a bearing, a movable seat is arranged above the workbench, the bottom of the movable seat is slidably connected with the placing groove, the movable seat is in threaded connection with the threaded rod, the laser cutting machine is arranged above the movable seat, and the cutting end of the laser cutting machine is right opposite to one side of the crystal cylinder.
In a preferred embodiment, a motor is mounted on one side of the table, and the motor output is connected to the threaded rod via a coupling.
In a preferred embodiment, a collection box is placed above the workbench, and a protective cushion is arranged on the surface of the collection box.
The utility model has the beneficial effects that:
1. when the clamping and fixing structure is used for fixing the longer crystal cylinder, a pre-cutting process is not needed manually, a worker can put one end of the longer crystal cylinder into the three-jaw chuck to fix through the inner diameters of the plurality of groups of second supporting rings, after the crystal cylinder is fixed, the three groups of arc plates can be opened to fix the crystal cylinder, and the fixing effect is very stable due to multi-face contact positioning;
2. after the crystal cylinder is fixed, the laser cutting machine is opened to cut the crystal cylinder by the cutting end, after one part is cut, the laser cutting machine can be closed, the cylinder is opened to cancel the limitation on the position of the crystal cylinder, and the three-jaw chuck at the position of the total support can be rotated to drive the crystal cylinder to rotate, so that the laser cutting machine can cut different positions of the crystal cylinder, and the cutting effect is further enhanced.
Drawings
Fig. 1 is a schematic perspective view of a clamping assembly according to the present utility model;
FIG. 2 is an enlarged schematic view of the structure A shown in FIG. 1;
FIG. 3 is a plan view of the entire structure of the anti-slip clip-on fastening structure provided by the present utility model;
fig. 4 is a schematic perspective view of a clamping assembly according to the second embodiment of the present utility model;
fig. 5 is a schematic perspective view of a clamping assembly according to the present utility model.
Reference numerals in the drawings: 1. a work table; 2. a total support; 3. a three-jaw chuck; 4. a first support ring; 5. a second support ring; 6. a slide bar; 7. an arc-shaped plate; 8. a chute; 9. a crystal cylinder; 10. a vortex-like orbit; 11. a driving block; 12. a gear; 13. a cylinder; 14. a rack; 15. a vertical seat; 16. a placement groove; 17. a threaded rod; 18. a laser cutting machine; 19. a movable seat; 20. a motor; 21. and (5) collecting a box.
Detailed Description
The utility model will be further described with reference to the drawings and embodiments.
Referring to fig. 1, fig. 2, fig. 3, fig. 4, and fig. 5 in combination, fig. 1 is a schematic perspective view of a clamping assembly according to the present utility model; FIG. 2 is an enlarged schematic view of the structure A shown in FIG. 1;
FIG. 3 is a plan view of the entire structure of the anti-slip clip-on fastening structure provided by the present utility model; fig. 4 is a schematic perspective view of a clamping assembly according to the second embodiment of the present utility model; fig. 5 is a schematic perspective view of a clamping assembly according to the present utility model.
In the specific implementation process, as shown in fig. 1-5, a workbench 1 and a crystal cylinder 9, a laser cutting assembly is arranged on one side of the workbench 1, a main support 2 is fixed on one side of the workbench 1, a rotatable three-jaw chuck 3 is arranged on one side of the main support 2, a plurality of groups of clamping assemblies are arranged on the workbench 1 at intervals, the clamping assemblies comprise a first support ring 4, a second support ring 5, a sliding rod 6 and an arc-shaped plate 7, the surface of the first support ring 4 is arranged on the surface of the workbench 1 through a vertical seat 15, the second support ring 5 is arranged in the first support ring 4 in a sliding manner, a plurality of groups of sliding grooves 8 are circumferentially arranged on the surface of the first support ring 4, sliding rods 6 are arranged in the sliding grooves 8 in a sliding manner, arc-shaped plates 7 are fixed on the sliding rods 6, the crystal cylinder 9 is positioned among the plurality of groups of arc-shaped plates 7, vortex-shaped rails 10 are fixed on the surface of the second support ring 5, a plurality of driving blocks 11 are fixed at intervals on the bottom of the sliding rods 6, the driving block 11 is positioned in the vortex-shaped track 10, the gear 12 is arranged at the bottom of the second supporting ring 5, the air cylinder 13 is fixed on the workbench 1, the rack 14 is arranged at the output end of the air cylinder 13, the rack 14 is meshed with the gear 12, a worker can put one end of a longer crystal cylinder 9 into the three-jaw chuck 3 to fix through the inner diameters of a plurality of groups of second supporting rings 6, after the crystal cylinder 9 is fixed, the rack 14 can be driven to move by opening the air cylinder 13, the gear 12 can be driven to move when the rack 14 moves, the second supporting ring 5 is driven to rotate, when the second supporting ring 5 and the first supporting ring 4 relatively rotate, the vortex-shaped track 10 on the second supporting ring also can rotate and drive the driving block 11 to move, the three sliding rods 6 can slide along the sliding grooves 8 when the driving block 11 moves, finally, the three groups of arc plates 7 fix the crystal column 9, and the fixing effect is very stable because of multi-surface contact positioning.
The laser cutting assembly comprises a laser cutting machine 18, a placing groove 16 is formed in the surface of the workbench 1, a threaded rod 17 is arranged in the placing groove 16 through bearing rotation, a movable seat 19 is arranged above the workbench 1, the bottom of the movable seat 19 is slidably connected with the placing groove 16, the movable seat 19 is in threaded connection with the threaded rod 17, the laser cutting machine 18 is arranged above the movable seat 19, the cutting end of the laser cutting machine 18 is right opposite to one side of the crystal cylinder 9, when the crystal cylinder 9 is cut, the crystal cylinder 9 positioned in the first support ring 4 is a cutting dead point, but the cutting dead point can be ignored for the whole crystal cylinder 9, and a part of the crystal cylinder 9 which is positioned in the first support ring 4 and is very short can be taken out by workers to be independently processed.
A motor 20 is arranged on one side of the workbench 1, the output end of the motor 20 is connected with the threaded rod 17 through a coupler, and the motor 20 can be opened to drive the movable seat 19 to move, so that the laser cutting machine 18 is driven to cut different positions of the crystal cylinder 9.
The collecting box 21 is placed above the workbench 1, a protection soft cushion is arranged on the surface of the collecting box 21, workers can place the collecting box 21 under the crystal column 9 to collect the crystal column in the cutting process, and the protection soft cushion in the collecting box 21 is specifically a high-temperature-resistant soft cushion and can play a buffering protection role on dropped wafers.
The working principle of the utility model is as follows: when the clamping and fixing structure is used, a worker can put one end of a longer crystal cylinder 9 into the three-jaw chuck 3 to fix the crystal cylinder 9 through the inner diameters of a plurality of groups of second support rings 6, after the crystal cylinder 9 is fixed, a rack 14 can be driven to move by opening a cylinder 13, a gear 12 can be moved when the rack 14 moves, the second support ring 5 is driven to rotate, when the second support ring 5 and the first support ring 4 relatively rotate, a vortex-shaped track 10 on the second support ring 5 also can rotate and drive a driving block 11 to move, and three slide bars 6 slide along a slide groove 8 when the driving block 11 moves, so that the three groups of arc plates 7 finally fix the crystal cylinder 9;
after the crystal cylinder 9 is fixed, the laser cutting machine 18 is opened, the cutting end of the laser cutting machine is used for cutting the crystal cylinder 9, after one part is cut, the laser cutting machine 18 can be closed, the cylinder 13 is opened again to cancel the limitation on the position of the crystal cylinder 9, the position of the three-jaw chuck 3 at the position of the total support 2 can be rotated at the moment to drive the crystal cylinder 9 to rotate, the laser cutting machine 18 can be used for cutting different positions of the crystal cylinder 9, the cutting effect is enhanced, in the cutting process, a worker can place the collecting box 21 under the crystal cylinder 9 to collect the crystal cylinder 9, and a protection cushion in the collecting box 21 is particularly a high-temperature-resistant cushion, so that a buffer protection effect can be played on dropped wafers.
The circuits and control involved in the present utility model are all of the prior art, and are not described in detail herein.
The foregoing description is only illustrative of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present utility model.

Claims (6)

1. The anti-slip clamping and fixing structure comprises a workbench (1) and a crystal cylinder (9), wherein a laser cutting assembly is arranged on one side of the workbench (1), and the anti-slip clamping and fixing structure is characterized in that a total support (2) is fixed on one side of the workbench (1), a rotatable three-jaw chuck (3) is arranged on one side of the total support (2), and a plurality of groups of clamping assemblies are arranged on the workbench (1) at intervals;
the clamping assembly comprises a first supporting ring (4), a second supporting ring (5), a sliding rod (6) and an arc-shaped plate (7), wherein the surface of the first supporting ring (4) is installed on the surface of the workbench (1) through a vertical seat (15), the second supporting ring (5) is arranged inside the first supporting ring (4) in a sliding mode, a plurality of groups of sliding grooves (8) are formed in the surface of the first supporting ring (4) in the circumferential direction, the sliding rods (6) are arranged in the sliding grooves (8) in a sliding mode, the arc-shaped plate (7) is fixed on the sliding rod (6), and the crystal cylinders (9) are located in a plurality of groups of the arc-shaped plates (7).
2. The anti-slip clamping and fixing structure according to claim 1, wherein a vortex-shaped track (10) is fixed on the surface of the second supporting ring (5), a plurality of driving blocks (11) are fixed at intervals at the bottom of the sliding rod (6), and the driving blocks (11) are located inside the vortex-shaped track (10).
3. The anti-slip clamping and fixing structure according to claim 2, wherein a gear (12) is installed at the bottom of the second supporting ring (5), an air cylinder (13) is fixed on the workbench (1), a rack (14) is installed at the output end of the air cylinder (13), and the rack (14) is meshed with the gear (12).
4. The anti-slip clamping and fixing structure according to claim 3, wherein the laser cutting assembly comprises a laser cutting machine (18), a placing groove (16) is formed in the surface of the workbench (1), a threaded rod (17) is arranged in the placing groove (16) through bearing rotation, a movable seat (19) is arranged above the workbench (1), the bottom of the movable seat (19) is in sliding connection with the placing groove (16), the movable seat (19) is in threaded connection with the threaded rod (17), the laser cutting machine (18) is arranged above the movable seat (19), and the cutting end of the laser cutting machine (18) is right opposite to one side of the crystal cylinder (9).
5. The anti-slip clamping and fixing structure according to claim 4, wherein a motor (20) is installed on one side of the workbench (1), and the output end of the motor (20) is connected with the threaded rod (17) through a coupler.
6. The anti-slip clamping and fixing structure according to claim 5, wherein a collecting box (21) is arranged above the workbench (1), and a protective soft cushion is arranged on the surface of the collecting box (21).
CN202321042125.1U 2023-05-05 2023-05-05 Anti-slip clamping and fixing structure Active CN220388302U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321042125.1U CN220388302U (en) 2023-05-05 2023-05-05 Anti-slip clamping and fixing structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321042125.1U CN220388302U (en) 2023-05-05 2023-05-05 Anti-slip clamping and fixing structure

Publications (1)

Publication Number Publication Date
CN220388302U true CN220388302U (en) 2024-01-26

Family

ID=89598669

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202321042125.1U Active CN220388302U (en) 2023-05-05 2023-05-05 Anti-slip clamping and fixing structure

Country Status (1)

Country Link
CN (1) CN220388302U (en)

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