CN220387394U

CN220387394U - Wafer box cleaning device and cleaning equipment

Info

Publication number: CN220387394U
Application number: CN202321945236.3U
Authority: CN
Inventors: 方周翔; 邵树宝; 陈国才
Original assignee: Jiangsu Xinmeng Semiconductor Equipment Co ltd
Current assignee: Jiangsu Xinmeng Semiconductor Equipment Co ltd
Priority date: 2023-07-24
Filing date: 2023-07-24
Publication date: 2024-01-26
Anticipated expiration: 2033-07-24

Abstract

The utility model discloses a wafer box cleaning device and wafer box cleaning equipment comprising the same. The cleaning device comprises a cleaning tank, a first transmission mechanism and a second transmission mechanism, wherein the cleaning tank is used for cleaning a wafer box in a carrier and is provided with an inner cavity capable of accommodating the carrier; the first transmission mechanism is used for transmitting the carrier above the inner cavity along the horizontal direction; the second transmission mechanism is used for transmitting the carrier in the up-down direction and comprises a bracket which can move relatively in the up-down direction between the inner cavity and the upper part of the inner cavity; the first and second transfer mechanisms are capable of handing over the transfer carrier over the interior cavity. According to the utility model, the first transmission mechanism and the second transmission mechanism only need to transmit in one direction respectively, the bearing requirement on the second transmission mechanism is low, the whole structure is simplified, the motion path of each group of transmission mechanisms is shorter, and the volume of the cleaning device is obviously reduced.

Description

Wafer box cleaning device and cleaning equipment

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a wafer box cleaning device and cleaning equipment.

Background

In the production process of semiconductor products, closed cassettes are often used for handling and storing wafers in order to simplify transportation and minimize the risk of contamination. Because of the small critical dimensions and dense patterns of semiconductors, the granularity requirements in production are very stringent, and the wafer cassette must ensure a highly clean environment for connection to the reaction chambers of the mini-environmental cassettes of different production tools. Along with the continuous development of the semiconductor process and the continuous improvement of the processing precision, the requirement on the cleanliness of chips is also higher and higher, so that the position of the wafer box cleaning equipment in the semiconductor manufacturing industry is also more and more important.

Common wafer box cleaning devices include spray type, ultrasonic type, pneumatic type, and the like. The ultrasonic cleaning device cleans the surface of the wafer box by utilizing tiny bubbles generated by ultrasonic vibration. In the prior art, when performing ultrasonic cleaning, a carrier loaded with a wafer box needs to be placed in a feeding unit, and then the carrier at the feeding unit is grabbed and moved by a manipulator to be placed in an ultrasonic cleaning tank of the ultrasonic cleaning unit. In this embodiment, the manipulator first moves to the upper side of the cleaning unit in the horizontal direction after grabbing the carrier from the feeding unit, then moves downward in the vertical direction, and places the carrier in the cleaning tank for cleaning. That is, the manipulator often has a horizontal and vertical movement path when gripping the carrier, and the carrier loaded with the wafer cassette has a weight, which has a high requirement on the gripping load of the manipulator, and the movement path of the manipulator is long, and the space correspondingly reserved for the movement path of the manipulator is also relatively large, so that the overall volume of the tank cleaning unit is relatively large.

Disclosure of Invention

The utility model aims to overcome the defects in the prior art and provides a novel wafer box cleaning device and cleaning equipment.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the wafer box cleaning device comprises a cleaning tank, a first transmission mechanism and a second transmission mechanism, wherein the wafer box to be cleaned is stored in a carrier,

the cleaning tank is used for cleaning the wafer box in the carrier and is provided with an inner cavity capable of accommodating the carrier;

the first transmission mechanism is used for transmitting the carrier above the inner cavity in the horizontal direction;

the second transmission mechanism is used for transmitting the carrier in the up-down direction and comprises a bracket which can move relatively in the up-down direction between the inner cavity and the upper part of the inner cavity;

the first transmission mechanism and the second transmission mechanism can transfer the carrier in a cross mode above the inner cavity.

In some embodiments, the first conveying mechanism includes a conveying assembly, the conveying assembly includes two groups disposed on two sides of the cleaning tank in a first direction, the two groups of conveying assemblies are respectively capable of conveying the carrier in a second direction, the first direction and the second direction respectively extend in a horizontal direction, and the first direction and the second direction are mutually perpendicular.

In some embodiments, one of the first direction and the second direction is a width direction of the cleaning tank, and the other is a length direction of the cleaning tank.

In some embodiments, each set of the transport assemblies is disposed to be relatively movable in the first direction, and the carriage is disposed to be relatively movable in the up-down direction between the two sets of the transport assemblies; each group of transmission assemblies is provided with a working position and an avoidance position, and the working positions are positioned at the inner sides of the avoidance positions along the first direction; when the two groups of transmission assemblies are both positioned at the working positions, the two groups of transmission assemblies can be respectively connected with the carrier in a matched manner; when the two groups of transmission assemblies are located at the avoiding positions, the two groups of transmission assemblies are respectively separated from the carrier, and the carrier can move relatively between the two groups of transmission assemblies along the up-down direction.

In some embodiments, each group of the transmission assemblies includes a plurality of transmission members, the plurality of transmission members are disposed at intervals along the second direction, each transmission member is capable of transmitting the carrier along the second direction, and each group of the transmission assemblies includes a first driving mechanism for driving the plurality of transmission members to move synchronously.

In some embodiments, each group of the transmission assemblies includes a connection seat, the transmission member is a roller, each roller is connected with the connection seat in a manner of relatively rotating around its own axis, and the axis of the roller extends along the first direction; in the same group of transmission components, the axial leads of a plurality of rollers are parallel to each other, the rollers can jointly support the carrier, and the first driving mechanism is used for driving the rollers to synchronously rotate around the respective axial leads.

In some embodiments, the first transmission mechanism further comprises a second drive mechanism for driving each of the connection pads to move relative to each other in the first direction.

In some embodiments, the second transmission mechanism includes a connection member and a lifting driving mechanism, the lifting driving mechanism is used for driving the bracket to move relatively along an up-down direction, the lifting driving mechanism is arranged above the transmission assembly, the connection member extends along the up-down direction, the connection member is connected between the lifting driving mechanism and the bracket, and the connection member can pass through a gap between the two transmission members along the up-down direction.

In some embodiments, the lifting driving mechanism includes a lifting seat, the lifting seat is relatively movably disposed above the transmission assembly along an up-down direction, the connecting pieces are respectively disposed on two sides of the first direction, and each group of connecting pieces can pass through a gap between two transmission pieces on the same side along the up-down direction.

The wafer box cleaning equipment comprises a feeding unit, a cleaning unit and a discharging unit, wherein the cleaning unit comprises at least one cleaning device, the feeding unit is used for conveying a carrier filled with a wafer box to be cleaned into the cleaning unit, and the carrier filled with the wafer box with the cleaned wafer box is conveyed into the discharging unit from the cleaning unit.

In some embodiments, the cleaning unit further includes a drying device, the feeding unit, the cleaning device, and the drying device are sequentially disposed along a second horizontal direction, and the first conveying mechanism is configured to convey the carrier along the second direction.

Due to the application of the technical scheme, the first transmission mechanism and the second transmission mechanism are respectively used for transmitting the carrier along the horizontal direction and the vertical direction, and only the first transmission mechanism and the second transmission mechanism need to move and transmit in one direction, so that the overall structural complexity of the transmission mechanism of the cleaning device is greatly simplified, the bearing requirement on the second transmission mechanism is low, the movement path of each group of transmission mechanisms is shorter, and the overall size of the cleaning device is obviously reduced. The wafer box cleaning equipment provided with the cleaning device can correspondingly simplify the structure of the core cleaning unit, reduce the volume and reduce the manufacturing and running cost.

Drawings

In order to more clearly illustrate the technical solution of the present utility model, the drawings used in the description of the embodiments will be briefly described.

FIG. 1 is a schematic perspective view of a wafer cassette cleaning apparatus according to an embodiment of the present utility model;

fig. 2 is a schematic perspective view of a cleaning device in this embodiment;

fig. 3 is a schematic perspective view of a hidden cleaning tank of the cleaning device in this embodiment;

FIG. 4 is a schematic perspective view of a group of transmission assemblies according to the present embodiment;

fig. 5 is a schematic perspective view of a second transmission mechanism in the present embodiment;

wherein: 10. a feeding unit; 20. a cleaning unit; 21. a cleaning device; 22. a drying device; 23. a spraying device; 30. a blanking unit;

100. a cleaning tank; 101. an inner cavity;

200. a first transmission mechanism; 210. a transmission assembly; 211. a transmission member; 212. a connecting seat; 213. a first driving mechanism; 220. a second driving mechanism; 230. an extension seat;

300. a second transmission mechanism; 310. a bracket; 320. a connecting piece; 330. a lifting driving mechanism; 331. a lifting seat; 332. a lifting driving motor; 333. lifting rails; 340. a mounting frame;

1001. the axial lead of the roller; x, a first direction; y, second direction; z, up-down direction.

Detailed Description

Preferred embodiments of the present utility model will be described in detail below with reference to the attached drawings so that the advantages and features of the present utility model can be more easily understood by those skilled in the art.

Referring to fig. 1 to 5, the present embodiment provides a wafer cassette cleaning apparatus, which includes a loading unit 10, a cleaning unit 20, a discharging unit 30, and the like. The loading unit 10 is used for transferring a carrier (not shown) containing a wafer cassette to be cleaned into the cleaning unit 20, the carrier containing the wafer cassette is subjected to cleaning, drying, and other processes in the cleaning unit 20, and the carrier containing the wafer cassette after cleaning is transferred from the cleaning unit 20 into the unloading unit 30. The cleaning apparatus further includes a transfer module (not shown in the figure) for driving the carriers to transfer between the loading unit 10, the cleaning unit 20, and the unloading unit 30, and the transfer module may specifically adopt a transfer structure such as a drum, a transfer belt, or the like.

For convenience of description and understanding, in this embodiment, the cleaning apparatus is used as a reference to establish an XYZ three-dimensional coordinate system, where the first direction X, the second direction Y, and the up-down direction Z are perpendicular to each other, and the first direction X and the second direction Y extend along the horizontal direction respectively. Referring to fig. 1, in this embodiment, the feeding unit 10, the cleaning unit 20, and the discharging unit 30 are sequentially arranged along the second direction Y, so that the carrier with the wafer cassette can be transported along the second direction Y in the cleaning apparatus, and sequentially undergo the steps of feeding, cleaning, discharging, and the like. It should be noted that, the carrier of the wafer box may specifically be a cuboid basket, a bracket, etc., and the carrier has a hollowed-out open structure, so that the wafer box therein can exchange substances such as liquid, gas, etc. with the space outside the carrier.

Referring to fig. 1, in the present embodiment, the cleaning unit 20 includes at least one cleaning device 21. The cleaning device 21 may be a tank type ultrasonic cleaner, and the cleaning device 21 may clean the wafer box immersed in the cleaning solution by using micro bubbles generated by ultrasonic vibration, so as to remove particles smaller on the surface of the wafer box. The cleaning unit 20 further comprises a drying device 22 and a spraying device 23. Wherein the shower device 23 is capable of spraying high-speed water and/or cleaning liquid from a plurality of angles to the wafer cassette positioned in the shower chamber to remove dirt and impurities from the surface of the wafer cassette. The drying apparatus 22 is capable of spraying a drying air stream from multiple angles to a wafer cassette positioned in a drying chamber to achieve rapid drying. In this embodiment, the cleaning unit 20 specifically includes two groups of cleaning devices 21, two groups of spraying devices 23 and two groups of drying devices 22, where the two groups of cleaning devices 21 and the two groups of spraying devices 23 are staggered along the second direction Y, so as to clean the wafer box more thoroughly; along the second direction Y, two sets of drying devices 22 are disposed downstream of the cleaning device 21 and the spraying device 23, for drying the cleaned wafer cassettes. In other embodiments, the specific arrangement of the cleaning unit 20 is not limited to the above structure, and the cleaning devices and the drying devices of the required types and numbers can be arranged according to the actual cleaning requirements.

In this embodiment, the two sets of cleaning devices 21 have the same structure, and one set of cleaning devices 21 will be described in detail as a routine. Referring to fig. 2 to 5, the cleaning apparatus 21 includes a cleaning tank 100, a first conveying mechanism 200 and a second conveying mechanism 300, wherein the cleaning tank 100 is used for cleaning a wafer cassette in a carrier, and the cleaning tank 100 has an inner cavity 101 capable of accommodating the carrier; the first conveying mechanism 200 is used for conveying the carrier above the inner cavity 101 along the horizontal direction; the second transfer mechanism 300 is used for transferring carriers in the up-down direction Z, and the first transfer mechanism 200 and the second transfer mechanism 300 can transfer carriers over the inner chamber 101.

Referring to fig. 2 to 4, in the present embodiment, the first conveying mechanism 200 specifically includes a conveying assembly 210, the conveying assembly 210 has two groups disposed on two sides of the first direction X of the cleaning tank 100, and the two groups of conveying assemblies 210 can respectively convey the carriers along the second direction Y. Here, one of the first direction X and the second direction Y is the width direction of the cleaning tank 100, and the other is the length direction of the cleaning tank 100. For example, as shown in the drawing, the cleaning tank 100 has a substantially rectangular parallelepiped shape, and the first direction X is the longitudinal direction of the cleaning tank 100, and the second direction Y is the width direction of the cleaning tank 100. In other embodiments, the cleaning tank 100 may take a cylindrical shape, a polygonal column shape, or other shapes.

Referring to fig. 2 to 4, in the present embodiment, the two sets of transmission assemblies 210 are substantially identical in structure and symmetrically disposed along the first direction X, and each set of transmission assemblies 210 is disposed so as to be capable of moving relatively along the first direction X. Specifically, each of the transmission assemblies 210 includes a plurality of transmission members 211, the plurality of transmission members 211 are disposed at intervals along the second direction Y, each of the transmission members 211 is capable of transmitting a carrier along the second direction Y, and each of the transmission assemblies 210 includes a first driving mechanism 213 for driving the plurality of transmission members 211 to move synchronously. In this embodiment, each group of the transmission components 210 includes a connection base 212, the transmission member 211 is specifically a roller, each roller can be connected to the connection base 212 in a relatively rotatable manner around its own axis 1001, and the axis 1001 of the roller extends along the first direction X. In the same group of the conveying assembly 210, the axes 1001 of the plurality of rollers are parallel to each other, and the plurality of rollers can support the carrier together. In this embodiment, the outer diameters of the rollers in the two-side transmission assemblies 210 are the same, and the axes 1001 of the rollers are all located in the same horizontal plane, so that the tops of the rollers are always located in the same horizontal plane during the rotation process of the rollers, and the carrier can be stably supported and/or transmitted from the bottom. In this embodiment, each of the first driving mechanisms 213 includes a driving belt connected between the plurality of rollers of the same group, and a motor for driving the driving belt to rotate, so that the first driving mechanism 213 can drive the plurality of rollers of the same side to rotate synchronously about the respective axes at the same rotation speed. In other embodiments, other arrangements of the first drive mechanism 213 may be employed.

Referring to fig. 2 to 4, in the present embodiment, two sides of the cleaning tank 100 in the first direction X are respectively provided with a horizontally and outwardly extending seat 230, and a group of transmission assemblies 210 are correspondingly disposed on each side of the extending seat 230. The first transmission mechanism 200 further comprises a second driving mechanism 220 for driving each of the connection seats 212 to move relatively in the first direction X. Specifically, a set of second driving mechanisms 220 is disposed on each extending seat 230, and the second driving mechanisms 220 can specifically be a device that is matched with the rail by adopting a motor or an air cylinder. The first driving mechanism 213 on each side is disposed on the corresponding connection seat 212, so that each set of second driving mechanisms 220 can drive the connection seat 212 on the same side and the first driving mechanisms 213, the plurality of transmission members 211 and the like connected with the connection seat 212 to synchronously move relatively along the first direction X. In this embodiment, by means of program control, the two sets of transmission assemblies 210 of the first transmission mechanism 200 can move synchronously, the two sets of transmission assemblies 210 can move synchronously toward or away from each other along the first direction X, and the plurality of transmission members 211 of the two sets of transmission assemblies 210 can also rotate synchronously or stop rotating. Thus, in this embodiment, each group of the transmission assemblies 210 has a working position and an avoidance position, and the working position is located at the inner side of the avoidance position along the first direction X. When the two sets of transmission assemblies 210 are both in the working position, the two sets of transmission assemblies 210 can be respectively connected with the carrier in a matched manner, and the two sets of transmission assemblies 210 can jointly support and/or transmit the carrier along the second direction Y; when the two sets of transmission assemblies 210 are at the avoiding positions, the two sets of transmission assemblies 210 are respectively disengaged from the carrier, and all the transmission members 211 are far away from the carrier along the first direction X, so that the carrier can relatively move between the two sets of transmission assemblies 210 along the up-down direction Z.

Referring to fig. 2, 3 and 5, in the present embodiment, the second transmission mechanism 300 includes a bracket 310, a connector 320, a lifting driving mechanism 330, and the like. Wherein the bracket 310 is disposed to be capable of relative movement in the up-down direction Z between the two sets of transfer assemblies 210, and the bracket 310 is capable of relative movement in the up-down direction Z between the interior cavity 101 and the upper side of the interior cavity 101. The lifting driving mechanism 330 is used for driving the bracket 310 to move relatively along the up-down direction Z, and the lifting driving mechanism 330 is disposed above the transmission assembly 210. The connection member 320 extends in the up-down direction Z, the connection member 320 is connected between the lift driving mechanism 330 and the bracket 310, and the connection member 320 can pass through a gap between the two transmission members 211 in the up-down direction Z. In this embodiment, the lifting driving mechanism 330 specifically includes a lifting seat 331, a lifting driving motor 332, a lifting rail 333, and the like, one side of the second direction Y of the cleaning tank 100 is provided with a mounting frame 340 extending along the up-down direction Z, the lifting rail 333 has two lifting rails fixedly arranged on the mounting frame 340, and each lifting rail 333 extends along the up-down direction Z. The lifting base 331 is disposed above the transmission assembly 210 in a manner capable of moving relatively along the up-down direction Z, and specifically, the lifting base 331 is connected to two lifting rails 333 in a manner capable of moving relatively along the up-down direction Z, and the lifting driving motor 332 is used for driving the lifting base 331 to move up and down along the lifting rails 333. In this embodiment, the connecting members 320 may specifically adopt a structure such as an elongated connecting rod or a traction cable, and the connecting members 320 have two groups respectively disposed on two sides of the cleaning tank 100 in the first direction X, and each group of connecting members 320 can pass through a gap between two conveying members 211 on the same side along the up-down direction Z. Here, two connectors 320 disposed at intervals along the second direction Y are connected to each side of the bracket 310 in the first direction X, that is, four connectors 320 are connected between the lifting base 331 and the bracket 310, and each connector 320 can pass through a gap between two conveying members 211, so that horizontal conveying of the conveying assembly 210 does not interfere with lifting movement of the bracket 310.

Based on the above cleaning device 21, the present embodiment further provides a wafer cassette cleaning method, which includes the following steps:

s1, a first transmission mechanism 200 is matched with a carrier, and the first transmission mechanism 200 transmits the carrier to the upper part of the cleaning tank 100 along the horizontal direction;

s2, the second transmission mechanism 300 is matched with the carrier, and the first transmission mechanism 200 is separated from the carrier;

s3, the second transmission mechanism 300 transmits the carrier downwards to the inner cavity 101 of the cleaning tank 100;

s4, the wafer box in the carrier is cleaned in the inner cavity 101;

s5, the second transmission mechanism 300 lifts the carrier, so that the carrier leaves the inner cavity 101 upwards;

s6, the first transmission mechanism 200 is matched with the carrier, and the second transmission mechanism 300 is disengaged from the carrier;

s7, the first transmission mechanism 200 transmits the carrier along the horizontal direction.

In the embodiment, in S1, the two sets of conveying assemblies 210 are both in the working position, and the two sets of conveying assemblies 210 simultaneously convey the carriers along the second direction Y under the driving of the two sets of first driving mechanisms 213, so that the carriers located at the upstream of the cleaning device 21 can be conveyed to the position directly above the cleaning tank 100.

In S2, the two sets of transmission assemblies 210 are driven by the two sets of second driving mechanisms 220 to move away from the carrier along the first direction X, so that the two sets of transmission assemblies 210 are both converted into the avoidance positions, and the carrier can be handed over downwards to the bracket 310.

In S6, the two sets of transmission assemblies 210 are driven by the two sets of second driving mechanisms 220 to move along the first direction X near the carrier, so that the two sets of transmission assemblies 210 are both converted into working positions, the carrier can be stably supported by the plurality of transmission members 211, and the carrier 310 can be separated from the carrier after being lowered.

In S7, the two sets of transmission assemblies 210 are both in the working position, and the two sets of transmission assemblies 210 simultaneously transmit the carrier along the second direction Y under the driving of the two sets of first driving mechanisms 213, so that the carrier can be continuously transmitted to other downstream mechanisms to receive the next process.

In summary, in this embodiment, by arranging two sets of the first transmission mechanism 200 and the second transmission mechanism 300, the horizontal movement and the lifting movement required by the transmission carrier are decomposed, the movement of each set of the transmission mechanism is simpler, the movement path is shorter, and the problems of complex mechanical arm transmission structure and large movement space are solved in the prior art, so that the overall occupied space of the cleaning device 21 is significantly reduced. In addition, the bracket 310 in the second transmission mechanism 300 of the present embodiment only involves the movement in the up-down direction Z, so that the load bearing requirement on the lifting driving motor 332 is low, the structure and performance requirement on the lifting driving mechanism 330 are simple, and the overall construction, operation and maintenance costs of the cleaning apparatus can be reduced.

The above embodiments are only for illustrating the technical concept and features of the present utility model, and are intended to enable those skilled in the art to understand the content of the present utility model and to implement the same, but are not intended to limit the scope of the present utility model, and all equivalent changes or modifications made according to the spirit of the present utility model should be included in the scope of the present utility model.

Claims

1. Wafer box belt cleaning device, the wafer box that waits to wash deposits in the carrier, its characterized in that: the cleaning device comprises a cleaning tank, a first transmission mechanism and a second transmission mechanism, wherein,

2. The wafer cassette cleaning apparatus of claim 1, wherein: the first transmission mechanism comprises transmission components, the transmission components are provided with two groups which are arranged on two sides of the cleaning tank in the first direction, the two groups of transmission components can respectively transmit the carrier in the second direction, the first direction and the second direction respectively extend in the horizontal direction, and the first direction and the second direction are mutually perpendicular.

3. The wafer cassette cleaning apparatus according to claim 2, wherein: each group of the transmission components can be arranged in a relative motion along the first direction, and the bracket can be arranged between the two groups of the transmission components in a relative motion along the up-down direction; each group of transmission assemblies is provided with a working position and an avoidance position, and the working positions are positioned at the inner sides of the avoidance positions along the first direction;

when the two groups of transmission assemblies are both positioned at the working positions, the two groups of transmission assemblies can be respectively connected with the carrier in a matched manner;

when the two groups of transmission assemblies are located at the avoiding positions, the two groups of transmission assemblies are respectively separated from the carrier, and the carrier can move relatively between the two groups of transmission assemblies along the up-down direction.

4. The wafer cassette cleaning apparatus according to claim 2, wherein: every group transmission assembly all includes a plurality of transmission spare, and is a plurality of transmission spare is followed the second direction interval sets up, every transmission spare all can be followed the second direction transmission the carrier, every group transmission assembly all includes and is used for driving a plurality of transmission spare synchronous motion's first actuating mechanism.

5. The wafer cassette cleaning apparatus of claim 4, wherein: each group of transmission components comprises a connecting seat, the transmission component is a roller, each roller can be connected with the connecting seat in a relatively rotating manner around the own axial lead, and the axial lead of the roller extends along the first direction; in the same group of transmission components, the axial leads of a plurality of rollers are parallel to each other, the rollers can jointly support the carrier, and the first driving mechanism is used for driving the rollers to synchronously rotate around the respective axial leads.

6. The wafer cassette cleaning apparatus of claim 5, wherein: the first transmission mechanism further comprises a second driving mechanism for driving each connecting seat to relatively move along the first direction.

7. The wafer cassette cleaning apparatus of claim 4, wherein: the second transmission mechanism comprises a connecting piece and a lifting driving mechanism, the lifting driving mechanism is used for driving the bracket to move relatively along the up-down direction, the lifting driving mechanism is arranged above the transmission assembly, the connecting piece extends along the up-down direction, the connecting piece is connected between the lifting driving mechanism and the bracket, and the connecting piece can pass through a gap between the two transmission pieces along the up-down direction.

8. The wafer cassette cleaning apparatus of claim 7, wherein: the lifting driving mechanism comprises a lifting seat, the lifting seat can be arranged above the transmission assembly in a relative motion along the up-down direction, the connecting pieces are provided with two groups which are respectively arranged at two sides of the first direction, and each group of connecting pieces can pass through gaps between the two transmission pieces at the same side along the up-down direction.

9. Wafer box cleaning equipment, its characterized in that: the cleaning equipment comprises a feeding unit, a cleaning unit and a discharging unit, wherein the cleaning unit comprises at least one cleaning device as claimed in any one of claims 1 to 8, the feeding unit is used for conveying a carrier with a wafer box to be cleaned into the cleaning unit, and the carrier with the wafer box which is cleaned is conveyed into the discharging unit from the cleaning unit.

10. The wafer cassette cleaning apparatus of claim 9, wherein: the cleaning unit further comprises a drying device, the feeding unit, the cleaning device and the drying device are sequentially arranged along a horizontal second direction, and the first conveying mechanism is used for conveying the carrier along the second direction.