CN220382058U

CN220382058U - Novel three-needle assembly body circulation protective tool

Info

Publication number: CN220382058U
Application number: CN202321479024.0U
Authority: CN
Inventors: 陈慕尧; 游利; 管明月; 孙屹; 袁洋
Original assignee: Jiangsu Xianfeng Precision Technology Co ltd
Current assignee: Jiangsu Xianfeng Precision Technology Co ltd
Priority date: 2023-06-12
Filing date: 2023-06-12
Publication date: 2024-01-23
Anticipated expiration: 2033-06-12

Abstract

The utility model discloses a novel three-pin assembly circulation protective tool, which comprises a circular mounting plate, mounting blocks, 3 thimbles and 3 mounting holes, wherein the mounting blocks and the thimbles are uniformly arranged on the periphery side of the mounting plate and extend along the radial direction, 1 thimble is vertically inserted into each mounting block, 3 mounting holes penetrating along the axial direction of the mounting blocks are formed in the mounting plate, the tool comprises a positioning plate for mounting the mounting plate, at least 1 protection plate and 3 positioning columns, the protection plate is arranged along the outer edge of the positioning plate and used for protecting the thimbles, the positioning columns are arranged on one side of the positioning plate facing the mounting plate, the protection plate is perpendicular to the positioning plate and used for shielding the thimbles, the positioning columns are correspondingly arranged with the mounting holes, and the positioning columns are inserted into the mounting holes. The tool provided by the utility model has the advantages that the three-needle assembly in the tool is not easy to damage in the circulation and transportation process, and the purpose of protecting the three-needle assembly is achieved.

Description

Novel three-needle assembly body circulation protective tool

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a novel three-pin assembly body circulation protective tool.

Background

In the semiconductor manufacturing process, the manufacturing of the three-pin assembly has very high process requirements, and the three lower electrode thimbles are made of ceramic. The whole process can be divided into a plurality of processes, each process can involve three-needle circulation, and the three-needle circulation is usually carried out by being placed on a tray to directly circulate, so that parts are exposed in a working environment, and the three-needle circulation is extremely easy to collide.

And part of enterprises adopt an epoxy glue fixing method, the lower electrode thimble is inserted into the supporting base, and is fixed by solidification after high-temperature-resistant epoxy glue is filled, and the lower electrode thimble is extremely fragile because the lower electrode thimble is bonded by epoxy glue, so that the lower electrode thimble is broken due to collision easily generated in the process of circulation and transportation, and the residual broken lower electrode thimble is required to be taken out and then a new lower electrode thimble is reinstalled, so that the product cost is increased and the process efficiency is reduced. And because the lower electrode thimble is required to be inserted into the supporting base, the thickness of the supporting base is larger, and the production cost is increased. Therefore, a new solution is needed to solve at least one of the above technical problems.

Disclosure of Invention

The utility model aims to provide a novel three-needle assembly circulation protective tool, so that the three-needle assembly in the tool is not easy to damage in the circulation transportation process, and the purpose of protecting the three-needle assembly is achieved.

In order to achieve the technical purpose and meet the technical requirements, the utility model adopts the technical scheme that: the utility model provides a novel three-pin assembly circulation protective tooling, its characterized in that, three-pin assembly includes circular shape mounting panel, 3 circumference evenly set up mounting panel periphery side along radial extension's installation piece, 3 thimble, every install and be equipped with 1 perpendicularly on the piece the thimble, be provided with 3 along its axial mounting hole that runs through on the mounting panel, the frock is including being used for installing the locating plate of mounting panel, follow at least 1 that the locating plate outward flange set up is used for protecting the protection shield of thimble, 3 setting are in the locating plate orientation the reference column of mounting panel one side, the protection shield perpendicular to the locating plate, and shelter from the thimble, the reference column with the mounting hole corresponds the setting, just the reference column is inserted and is established in the mounting hole.

As the preferable technical scheme, the locating plate is square, and the 4 outer edges of the locating plate are respectively provided with 1 protecting plate, and the adjacent 2 protecting plates are fixedly connected.

As the preferable technical scheme, the positioning plate is circular, the protection plate is annular, and the inner wall of the protection plate is fixedly connected with the outer periphery of the positioning plate.

As the preferable technical scheme, the length, the width and the height of the locating plate are 134mm.

As a preferable technical scheme, the thickness of the locating plate and the protective plate is 2mm.

As the preferable technical scheme, 3 positioning columns are arranged according to a triangular structure, and the length of each positioning column is greater than the thickness of the mounting plate.

As a preferable technical scheme, the positioning plate and the protection plate are of an integrated structure.

As an optimal technical scheme, the positioning plate and the protection plate are made of polypropylene.

The beneficial effects of the utility model are as follows:

1) The positioning column positions and limits the three-needle assembly, and the three-needle assembly is protected by the protection plate arranged along the outer edge of the positioning plate, so that the safety of the three-needle assembly during transportation is obviously improved, and the production speed of the three-needle assembly is improved.

2) The square locating plate is easy to place during circulation and transportation, good in supporting stability and easy to process.

3) The circular locating plate is matched with the annular protecting plate, so that the whole tool is of a wheel type structure, can roll slowly, is convenient to circulate, and is time-saving and labor-saving.

4) The polypropylene has light weight, high strength and low cost.

Drawings

Fig. 1 is a structural diagram of a tooling according to an embodiment of the present utility model.

Fig. 2 is a structural diagram of a tooling of a preferred embodiment provided by the present utility model.

Fig. 3 is a working diagram of a three-needle assembly according to one embodiment of the present utility model.

Fig. 4 is a working state diagram of a tool according to an embodiment of the present utility model.

In fig. 1-4, 1, a positioning plate; 2. a protective plate; 3. positioning columns; 4. a three-needle assembly; 401. a mounting plate; 4011. a mounting hole; 402. a mounting block; 403. and (5) a thimble.

Detailed Description

The utility model is further described below with reference to the accompanying drawings.

The same or similar reference numbers in the drawings of embodiments of the utility model correspond to the same or similar components; in the description of the present utility model, it should be understood that, if the terms "head", "tail", "top", "bottom", "left", "right", "front", "rear", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, they are merely for convenience in describing the present utility model, and do not indicate or imply that the devices or elements to be referred to must have a specific orientation, be constructed and operated in a specific orientation, so that the terms describing the positional relationships in the drawings are merely for exemplary illustration, and are not to be construed as limitations of the present patent, and specific meanings of the terms described above may be understood by those of ordinary skill in the art according to specific circumstances.

Referring to fig. 1-4, an embodiment of the present utility model provides a novel three-needle assembly circulation protective tool, where the three-needle assembly 4 includes a circular mounting plate 401, 3 mounting blocks 402 with circumferences uniformly arranged on the outer circumference side of the mounting plate 401 and extending along the radial direction, and 3 ejector pins 403, each mounting block 402 is vertically inserted with 1 ejector pin 403, 3 mounting holes 4011 penetrating along the axial direction of the mounting plate 401 are provided on the mounting plate 401, the tool includes a positioning plate 1 for mounting the mounting plate 401, at least 1 protection plate 2 and 3 arranged along the outer edge of the positioning plate 1 for protecting the ejector pins 403 are arranged on the positioning plate 1 towards a positioning column 3 on one side of the mounting plate 401, the protection plate 2 is perpendicular to the positioning plate 1 and shields the ejector pins 403, the positioning column 3 is arranged corresponding to the mounting holes 4011, and the positioning column 3 is inserted into the mounting holes 4011, and positions and limits the three-needle assembly 4, and when the three-needle assembly 4 is transported by the protection plate 2 arranged along the outer edge of the positioning plate 1, the three-needle assembly 4 is obviously and the three-needle assembly 4 is transported and the three-needle assembly speed is remarkably improved.

As shown in fig. 1-4, in some embodiments, the positioning plate 1 is square, the 4 outer edges of the positioning plate 1 are respectively provided with 1 protection plate 2, and the adjacent 2 protection plates 2 are fixedly connected, so that the 4 directions of the three-needle assembly 4 can be protected from collision, and the whole tool is of a hollow structure, thereby being convenient for taking and placing the three-needle assembly 4.

As shown in fig. 1-4, in some embodiments, the positioning plate 1 is circular, the protecting plate 2 is annular, the inner wall of the protecting plate 2 is fixedly connected with the outer peripheral side of the positioning plate 1, and the whole tool is of a wheel type structure, so that the periphery of the three-needle assembly 4 can be protected, an operator can slowly roll the tool, the circulation is facilitated, and time and labor are saved.

In some embodiments, as shown in fig. 1-4, the length, width and height of the locating plate 1 are 134mm, and the locating plate is set according to the size of the three-needle assembly 4 to prevent mutual interference.

As shown in fig. 1 to 4, in some embodiments, the thickness of the locating plate 1 and the protecting plate 2 is 2mm, so as to realize the light weight of the tool.

As shown in fig. 1-4, in some embodiments, 3 positioning columns 3 are arranged according to a triangle structure, the length of each positioning column 3 is greater than the thickness of the mounting plate 401, the three-needle assembly 4 is not easy to fall off in the circulation transportation process, and threads can be arranged on the outer periphery side of each positioning column 3, so that the fixing effect is further improved through matching with a nut.

As shown in fig. 1-4, in some embodiments, the locating plate 1 and the protecting plate 2 are of a unitary structure, so that the integrity is better and the strength is higher.

In some embodiments, as shown in fig. 1-4, the positioning plate 1 and the protecting plate 2 are made of polypropylene, and have light weight, high strength and low cost.

The above examples are provided for the purpose of clearly illustrating the utility model and are not to be construed as limiting the utility model, and other variants and modifications of the various forms may be made by those skilled in the art based on the description, which are not intended to be exhaustive of all embodiments, and obvious variants or modifications of the utility model may be found within the scope of the utility model.

Claims

1. Novel three-pin assembly circulation protective tooling is characterized in that the three-pin assembly (4) comprises a circular mounting plate (401) and 3 circular evenly arranged mounting blocks (402) and 3 ejector pins (403) which extend along the radial direction on the outer periphery side of the mounting plate (401), 1 ejector pin (403) is vertically inserted on each mounting block (402), 3 mounting holes (4011) penetrating along the axial direction of the mounting plate (401) are formed in the mounting plate (401), the tooling comprises a positioning plate (1) used for mounting the mounting plate (401), at least 1 protective plate (2) used for protecting the ejector pins (403) and 3 positioning columns (3) arranged on the outer edge of the positioning plate (1) and oriented to one side of the mounting plate (401), the protective plate (2) is perpendicular to the positioning plate (1), the protective plate (2) is shielded from the ejector pins (403), the positioning columns (3) are correspondingly arranged in the mounting holes (4011), and the positioning columns (3) are inserted in the mounting holes (4011).

2. The novel three-pin assembly body circulation protective tool according to claim 1, wherein the positioning plate (1) is square, and the 4 outer edges of the positioning plate (1) are respectively provided with 1 protection plate (2), and the adjacent 2 protection plates (2) are fixedly connected.

3. The novel three-pin assembly body circulation protective tool according to claim 1, wherein the positioning plate (1) is circular, the protection plate (2) is annular, and the inner wall of the protection plate (2) is fixedly connected with the outer periphery side of the positioning plate (1).

4. The novel three-pin assembly circulation protective tooling according to claim 2, wherein the length, width and height of the positioning plate (1) are 134mm.

5. The novel three-wire assembly circulation protective tooling according to claim 1, wherein the thickness of the locating plate (1) and the protective plate (2) is 2mm.

6. The novel three-wire assembly circulation protective tooling according to claim 1, wherein 3 positioning posts (3) are arranged in a triangular structure, and the length of the positioning posts (3) is greater than the thickness of the mounting plate (401).

7. The novel three-wire assembly circulation protective tool according to claim 2, wherein the positioning plate (1) and the protection plate (2) are of an integrated structure.

8. The novel three-wire assembly circulation protective tool according to any one of claims 1 to 7, wherein the positioning plate (1) and the protection plate (2) are made of polypropylene.