CN220376838U - Cooling pipeline system of single crystal furnace - Google Patents
Cooling pipeline system of single crystal furnace Download PDFInfo
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- CN220376838U CN220376838U CN202321724068.5U CN202321724068U CN220376838U CN 220376838 U CN220376838 U CN 220376838U CN 202321724068 U CN202321724068 U CN 202321724068U CN 220376838 U CN220376838 U CN 220376838U
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- 239000013078 crystal Substances 0.000 title claims abstract description 52
- 238000001816 cooling Methods 0.000 title claims abstract description 38
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 264
- 239000010865 sewage Substances 0.000 claims abstract description 20
- 238000011010 flushing procedure Methods 0.000 claims abstract description 14
- 238000004891 communication Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 9
- 239000000498 cooling water Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a cooling pipeline system of a single crystal furnace, which comprises the following components: the water inlet pipeline and the water return pipeline are respectively connected with a water inlet and a water outlet of the single crystal furnace in an openable/closable manner, and the water inlet pipeline is also provided with a first sewage outlet which can be opened and closed; the water inlet of the back flushing pipeline is connected with the water inlet end of the water inlet pipeline in an on-off manner, and the water outlet of the back flushing pipeline is connected with the water outlet end of the water return pipeline in an on-off manner. According to the cooling pipeline system of the single crystal furnace, disclosed by the embodiment of the utility model, the cleaning and backflushing can be conveniently carried out.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon preparation, in particular to a cooling pipeline system of a monocrystalline furnace.
Background
In the prior art, the cooling pipeline of the single crystal furnace is mostly in backflushing cleaning, namely, the water pipe is detached, the water pipe is reversely connected and washed, and then the cooling pipeline is connected again, but the method has a plurality of problems in the use process: 1. after the rubber tube is repeatedly disassembled, the rubber tube is damaged, the rubber tube needs to be cut off, the length is insufficient after cutting for many times, and the whole rubber tube needs to be replaced; 2. the waterway branches are more, the operation is neglected during the disassembly, and the loop is easy to be installed wrongly; 3. when the water pipe is disassembled, devices such as a dry pump, a pump station and the like are arranged beside the water pipe, and the water pipe is easy to spray water to cause faults due to careless operation.
Disclosure of Invention
In view of the above, the utility model provides a cooling pipeline system of a single crystal furnace, which is convenient for cleaning and backflushing.
In order to solve the technical problems, the utility model adopts the following technical scheme:
according to an embodiment of the utility model, a cooling pipeline system of a single crystal furnace comprises:
the water inlet pipeline and the water return pipeline are respectively connected with a water inlet and a water outlet of the single crystal furnace in an openable/closable manner, and the water inlet pipeline is also provided with a first sewage outlet which can be opened and closed;
the water inlet of the back flushing pipeline is connected with the water inlet end of the water inlet pipeline in an on-off manner, and the water outlet of the back flushing pipeline is connected with the water outlet end of the water return pipeline in an on-off manner.
Further, the water inlet pipeline comprises:
the inlet main pipe is provided with an opening at one end, which is formed as a water inlet end, and an opening at the other end, which is formed as the first sewage outlet which can be opened and closed;
the water inlet valve is arranged on the main water inlet pipeline close to the water inlet end side of the main water inlet pipeline;
the water inlet branch pipeline, the one end of water inlet branch pipeline is connected be close to first drain side on the water inlet trunk line, the other end of water inlet branch pipeline is used for connecting the water inlet of single crystal growing furnace.
Further, the water return line includes:
a main backwater pipe, wherein an opening at one end of the main backwater pipe is formed as a water outlet end, and the other end of the main backwater pipe is closed;
the water return valve is arranged on the water return main pipeline close to the water outlet end side of the water return main pipeline;
the water return branch pipeline, the one end of water return branch pipeline is connected be close to the water return main pipeline other end on the water return main pipeline, the other end of water return branch pipeline is used for connecting the delivery port of single crystal growing furnace.
Further, the water inlet branch pipe or the water return branch pipe includes one or more.
Further, the other end of the main backwater pipeline is provided with a second sewage outlet which can be opened and closed.
Further, the back flush pipeline comprises a back flush valve,
the water inlet of the recoil valve is connected with the water inlet end of the main water inlet pipeline and is arranged at the water inlet side of the water inlet valve;
the water outlet of the recoil valve is connected with the water outlet end of the main backwater pipeline and is arranged between the water inlet side of the backwater valve and the branched backwater pipeline.
Further, a first interface is arranged on the side wall of the main water inlet pipeline at the inlet side of the water inlet valve and is used for being communicated with the water inlet of the backflushing valve.
Further, a second interface is arranged on the side wall of the main backwater pipeline between the water inlet side of the backwater valve and the branch backwater pipeline, and the second interface is used for being communicated with the water outlet of the backflushing valve.
Further, the cooling pipeline system of the single crystal furnace further comprises a reservoir, and the water inlet of the main water inlet pipeline and the water outlet of the main water return pipeline are respectively communicated with the reservoir.
Further, the cooling pipeline system of the single crystal furnace further comprises a sewage disposal pond, and the first sewage disposal outlet and the second sewage disposal outlet are respectively communicated with the sewage disposal pond.
The technical scheme of the utility model has at least one of the following beneficial effects:
according to an embodiment of the utility model, a cooling pipeline system of a single crystal furnace comprises: the water inlet pipeline, the water return pipeline and the back flush pipeline, wherein the water outlet end of the water inlet pipeline and the water inlet end of the water return pipeline are respectively connected with the water inlet and the water outlet of the single crystal furnace in an openable/closable manner, the water inlet pipeline is also provided with a first sewage outlet capable of being opened and closed, the water inlet of the back flush pipeline is connected with the water inlet end of the water inlet pipeline in an openable manner, the water outlet of the back flush pipeline is connected with the water outlet end of the back flush pipeline in an openable manner, thereby controlling the water inlet end of the water inlet pipeline to stop water inlet into the water inlet pipeline and close the water outlet end of the back flush pipeline, controlling the water inlet end of the water inlet pipeline to enter the back flush pipeline through the water inlet of the back flush pipeline, enabling the water in the back flush pipeline to flow into the single crystal furnace through the water inlet end of the single crystal furnace, and finally being discharged through the first sewage outlet, the cleaning in the cooling pipeline can be conveniently and efficiently realized, the operation is convenient, the disassembly pipeline is omitted, and the service life of the pipeline is effectively prolonged.
Drawings
FIG. 1 is a schematic diagram of a cooling pipeline system of a single crystal furnace according to an embodiment of the present utility model.
Reference numerals: 100. a water inlet pipeline; 110. a main water inlet pipe; 120. a water inlet valve; 130. a water inlet branch pipe; 140. a first drain outlet; 150. a first interface;
200. a water outlet pipeline; 210. a main backwater pipe; 220. a backwater valve; 230. a water return branch pipe; 240. a second drain outlet; 250. a second interface;
300. a back flushing pipeline; 310. a recoil valve;
400. a single crystal furnace;
description of the embodiments
In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. It will be apparent that the described embodiments are some, but not all, embodiments of the utility model. All other embodiments, which are obtained by a person skilled in the art based on the described embodiments of the utility model, fall within the scope of protection of the utility model.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this utility model belongs. The terms "first," "second," and the like, as used herein, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate a relative positional relationship, which changes accordingly when the absolute position of the object to be described changes.
A cooling pipeline system of a single crystal furnace according to an embodiment of the present utility model will be described in detail with reference to the accompanying drawings.
According to an embodiment of the utility model, as shown in fig. 1, a cooling pipeline system of a single crystal furnace may include: water inlet line 100, water return line 200, and backwash line 300.
The water outlet end of the water inlet pipeline 100 and the water inlet end of the water return pipeline 200 are respectively connected with the water inlet and the water outlet of the single crystal furnace 400 in an openable/closable manner, and the water inlet pipeline 100 is further provided with a first sewage outlet 140 capable of being opened and closed.
The water inlet of the back flush pipeline 300 is connected with the water inlet end of the water inlet pipeline 100 in an on-off manner, and the water outlet of the back flush pipeline 300 is connected with the water outlet end of the water return pipeline 200 in an on-off manner.
Specifically, according to the cooling pipeline system for the single crystal furnace in the embodiment of the utility model, by controlling the water inlet end of the water inlet pipeline 100 to stop water inlet into the water inlet pipeline 100 and closing the water outlet end of the water return pipeline 200, the water inlet end of the water inlet pipeline 100 is controlled to enter the water return pipeline 300 through the water inlet of the back flush pipeline 300, water in the back flush pipeline 300 flows into the water return pipeline 200 from the water outlet of the back flush pipeline 300, flows into the single crystal furnace 400 from the water inlet end of the water return pipeline 200 and flows into the water inlet pipeline 100 from the single crystal furnace 400, and is finally discharged from the first drain outlet 140 in the water inlet pipeline 100, cleaning in the cooling pipeline can be conveniently and efficiently realized, the operation is convenient, the pipeline disassembly work is omitted, and the service life of the pipeline is effectively prolonged.
In addition, in normal operation of the cooling pipeline system of the single crystal furnace of the embodiment of the utility model, cooling water enters the single crystal furnace 400 from the water inlet pipeline 100 to cool the single crystal furnace 400, then flows out from the single crystal furnace 400 to enter the water return pipeline 200, and finally is guided into the recovery tank from the water return pipeline 200, thereby realizing the recovery and multiple utilization of the cooling water.
In some embodiments, as shown in fig. 1, the water intake line 100 may include: a main inlet pipe 110, a water inlet valve 120 and a water inlet branch pipe 130.
Wherein, one end opening of the main inlet pipe 110 is formed as a water inlet end, and the other end opening is formed as a first sewage outlet 140 which can be opened and closed.
The water inlet valve 120 is provided on the main water inlet pipe 110 near the water inlet end side of the main water inlet pipe 110.
One end of the water inlet branch pipe 130 is connected to the water inlet main pipe 110 at the side of the first sewage outlet 140, and the other end of the water inlet branch pipe 110 is connected to a water inlet of the single crystal furnace 400.
That is, in normal cooling, cooling water may enter the main inlet pipe 110 from the inlet end of the main inlet pipe 110 in the main inlet pipe 100, and the water flow in the main inlet pipe 110 is controlled to be turned on and off by the inlet valve 120 provided at the inlet end of the main inlet pipe 110, and cooling water entering the main inlet pipe 110 may flow out from the branch inlet pipe 130 into the single crystal furnace 400 for cooling.
In some embodiments, as shown in fig. 1, the water return line 200 may include: a main return water pipe 210, a return water valve 220 and a branch return water pipe 230.
Wherein, an opening of one end of the main backwater pipe 210 is formed as a water outlet end, and the other end is closed.
The return water valve 220 is provided on the return water main pipe 210 near the water outlet end side of the return water main pipe 210.
One end of the water return branch pipe 230 is connected to the water return main pipe 230 near the other end of the water return main pipe 210, and the other end of the water return branch pipe 230 is connected to the water outlet of the single crystal furnace 400.
That is, the cooling water entering the single crystal furnace 400 enters the main water return pipe 210 through the branch water return pipe 230 and is then discharged through the water outlet end of the main water return pipe 210, wherein the water return valve 220 can control the on-off of the water outlet end of the main water return pipe 210.
In some embodiments, as shown in fig. 1, the water intake branch conduit 130 or the water return branch conduit 230 includes one or more.
Specifically, the single crystal furnace 400 includes a crucible shaft, a furnace cover, an auxiliary chamber, a rotary valve, a heat shield, an auxiliary pump, and the like, and the number of the water inlet branch pipes 130 or the water return branch pipes 230 can be correspondingly selected according to the specific cooling area.
In some embodiments, as shown in fig. 1, the other end of the main water return pipe 210 is provided with a second drain 240 which can be switched on and off.
Thus, the second drain 240 is provided to allow for the opening of the drain under normal cooling conditions.
In some embodiments, as shown in FIG. 1, backwash line 300 may include a backwash valve 310.
The water inlet of the recoil valve 310 is connected to the water inlet end of the main water inlet pipe 110 and is disposed at the water inlet side of the water inlet valve 120.
The water outlet of the recoil valve 310 is connected to the water outlet end of the main backwater pipe 210 and is disposed between the water inlet side of the backwater valve 220 and the branched backwater pipe 230.
Therefore, when the cooling pipeline system of the single crystal furnace in the embodiment of the utility model performs back flushing after the cooling work is finished, only the water inlet valve 120 and the water return valve 220 are required to be closed and the first sewage outlet 140 is required to be opened, water is fed into the back flushing valve 310 from the water inlet end of the main water inlet pipeline 110, cleaning water flows into the main water return pipeline 210 through the back flushing valve 310 and into the single crystal furnace 400 through the water return branch pipeline 230, cleaning water flows in the single crystal furnace 400 then enters the main water inlet pipeline 110 through the water inlet branch pipeline 130, and finally back-cleaned sewage flows out through the first sewage outlet 140, so that the operation is simple and the cleaning efficiency is high.
In some embodiments, as shown in fig. 1, a first interface 150 is provided on a sidewall of the main water inlet pipe 110 at an inlet side of the water inlet valve 120, the first interface 150 is used for communicating with a water inlet of the back flushing valve 310, a second interface 250 is provided on a sidewall of the main water return pipe 210 between a water inlet side of the water return valve 220 and the water return branch pipe 230, and the second interface 250 is used for communicating with a water outlet of the back flushing valve 310.
That is, the first interface 150 and the second interface 250 are respectively arranged on the side walls of the main water inlet pipe 110 and the main water return pipe 210, so that the water inlet and the water outlet of the backflushing valve 310 are in butt joint to replace the cooling pipeline disassembling mode in the prior art, and the pipeline backflushing purpose is realized by controlling the on-off of the backflushing valve 310, so that the problems of water leakage, misplacement, rubber pipe cutting and the like in the disassembling process in the existing mode are effectively solved, and the control operation is more convenient and efficient, and the replacement and maintenance are facilitated.
In some embodiments, the single crystal furnace cooling piping system further includes a reservoir (not shown) in communication with the water inlet of the main water inlet conduit 110 and the water outlet of the main water return conduit 210, respectively.
Therefore, the cooling water can be recycled through the water reservoir, and the production cost is reduced.
In some embodiments, the single crystal furnace cooling piping system further includes a blowdown tank (not shown), the first blowdown port 140 and the second blowdown port 240 respectively communicating with the blowdown tank.
Therefore, the wastewater discharged in the cleaning process is collected and treated through the sewage disposal tank, so that the environmental pollution is effectively avoided.
While the foregoing is directed to the preferred embodiments of the present utility model, it will be appreciated by those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present utility model, and such modifications and adaptations are intended to be comprehended within the scope of the present utility model.
Claims (10)
1. A single crystal furnace cooling line system, comprising:
the water inlet pipeline and the water return pipeline are respectively connected with a water inlet and a water outlet of the single crystal furnace in an openable/closable manner, and the water inlet pipeline is also provided with a first sewage outlet which can be opened and closed;
the water inlet of the back flushing pipeline is connected with the water inlet end of the water inlet pipeline in an on-off manner, and the water outlet of the back flushing pipeline is connected with the water outlet end of the water return pipeline in an on-off manner.
2. The single crystal furnace cooling piping system according to claim 1, wherein said water intake piping comprises:
the inlet main pipe is provided with an opening at one end, which is formed as a water inlet end, and an opening at the other end, which is formed as the first sewage outlet which can be opened and closed;
the water inlet valve is arranged on the main water inlet pipeline close to the water inlet end side of the main water inlet pipeline;
the water inlet branch pipeline, the one end of water inlet branch pipeline is connected be close to first drain side on the water inlet trunk line, the other end of water inlet branch pipeline is used for connecting the water inlet of single crystal growing furnace.
3. The single crystal furnace cooling piping system according to claim 2, wherein the return piping comprises:
a main backwater pipe, wherein an opening at one end of the main backwater pipe is formed as a water outlet end, and the other end of the main backwater pipe is closed;
the water return valve is arranged on the water return main pipeline close to the water outlet end side of the water return main pipeline;
the water return branch pipeline, the one end of water return branch pipeline is connected be close to the water return main pipeline other end on the water return main pipeline, the other end of water return branch pipeline is used for connecting the delivery port of single crystal growing furnace.
4. A single crystal furnace cooling piping system according to claim 3, wherein said water inlet branch pipe or water return branch pipe comprises one or more.
5. The cooling pipeline system of the single crystal furnace according to claim 3, wherein the other end of the main backwater pipeline is provided with a second sewage outlet which can be opened and closed.
6. The cooling pipeline system of the single crystal furnace according to claim 3, wherein the back flushing pipeline comprises a back flushing valve,
the water inlet of the recoil valve is connected with the water inlet end of the main water inlet pipeline and is arranged at the water inlet side of the water inlet valve;
the water outlet of the recoil valve is connected with the water outlet end of the main backwater pipeline and is arranged between the water inlet side of the backwater valve and the branched backwater pipeline.
7. The cooling pipeline system of the single crystal furnace according to claim 6, wherein a first connector is arranged on the side wall of the main water inlet pipeline at the inlet side of the water inlet valve and is used for communicating with the water inlet of the backflushing valve.
8. The cooling pipeline system of the single crystal furnace according to claim 6, wherein a second interface is arranged on the side wall of the main water return pipeline between the water inlet side of the water return valve and the water return branch pipeline, and the second interface is used for communicating with the water outlet of the backflushing valve.
9. The cooling piping system for a single crystal furnace according to claim 3, further comprising a reservoir, wherein the water inlet of the main water inlet pipe and the water outlet of the main water return pipe are respectively communicated with the reservoir.
10. The single crystal furnace cooling piping system of claim 5, further comprising a blowdown tank, wherein the first blowdown port and the second blowdown port are in communication with the blowdown tank, respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321724068.5U CN220376838U (en) | 2023-07-03 | 2023-07-03 | Cooling pipeline system of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321724068.5U CN220376838U (en) | 2023-07-03 | 2023-07-03 | Cooling pipeline system of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220376838U true CN220376838U (en) | 2024-01-23 |
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ID=89564758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321724068.5U Active CN220376838U (en) | 2023-07-03 | 2023-07-03 | Cooling pipeline system of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220376838U (en) |
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2023
- 2023-07-03 CN CN202321724068.5U patent/CN220376838U/en active Active
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