CN220364627U - Gas replacement system - Google Patents

Abstract

The utility model relates to a gas replacement system, which comprises a glove box and a transfer bin, wherein the glove box is communicated with the transfer bin through an air inflation pipeline, and the transfer bin is communicated with a vacuum pump through an air exhaust pipeline; the gas replacement system does not need to manually operate the valve to open/close, is simple, convenient and efficient to operate, can effectively reduce the waste of manpower and cost, can not cause the problem that the incomplete gas replacement generates water oxygen alarm due to the error counting and pumping and charging times, and can reduce the loss caused by human misoperation.

Description

Gas replacement system

Technical Field

The utility model relates to the technical field of gas replacement, in particular to a gas replacement system.

Background

In the semiconductor epitaxial process, a lower water oxygen value environment is required, so that a set of gas replacement system is generally configured in the prior art, and a glove box and a transfer bin are configured in the gas replacement system so as to operate in the glove box; when the crystal (or wafer) is transferred, air in the transfer bin and nitrogen in the glove box are subjected to gas replacement, so that the water oxygen value in the transfer bin is reduced to the PPM level, and the requirement on the water oxygen value environment is met.

In the existing gas replacement system, a transfer bin is communicated with a glove box through an inflation pipeline, the inflation pipeline is provided with an inflation valve, and meanwhile, the transfer bin is communicated with a vacuum pump through an air extraction pipeline, and the air extraction pipeline is provided with an extraction valve. In the use, after materials such as crystal put into the transmission storehouse, need close the inflation valve and carry out the extraction through opening the extraction valve earlier to take out the gas in the transmission storehouse, then close the extraction valve and aerify through opening the inflation valve, make the nitrogen gas in the glove box can fill in the transmission storehouse, thereby accomplish once and take out and fill the action. When the gas replacement is carried out, at least 3 pumping and filling actions are usually needed, the water oxygen value in the transfer bin can be reduced to the PPM level, and then the bin gate of the transfer bin can be opened from the glove box, so that crystals can be transferred from the transfer bin to the glove box, and the transfer work of materials is completed.

However, in the existing gas replacement system, the air charging valve and the air extracting valve are manual valves, and in the gas replacement process, an operator is required to continuously perform at least 3 times of air extracting and charging actions in sequence, so that the operation is troublesome, and the problem that the operator records the times of air extracting and charging by mistake, so that the incomplete gas replacement generates an oxygen water alarm exists.

Disclosure of Invention

The first aspect of the present utility model provides a gas replacement system, which solves the problems of the existing gas replacement system that the operation is troublesome, the operator easily records the wrong pumping and charging times, and the incomplete gas replacement generates the water oxygen alarm, and the gas replacement system can simply, conveniently and efficiently complete the gas replacement, and the problem of the incomplete gas replacement generating the water oxygen alarm due to the wrong pumping and charging times is avoided, and the main concept is that:

the utility model provides a gas replacement system, includes glove box and transmission storehouse, and the glove box is linked together with transmission storehouse through the pneumatic line, and transmission storehouse is linked together with the vacuum pump through the pipeline of bleeding, still includes the controller, the pneumatic line is provided with the inflation control valve, the pipeline of bleeding is provided with the control valve of bleeding, inflation control valve and the control valve of bleeding respectively with the controller electricity is connected. In this scheme, through configuration controller in gas replacement system to set up the inflation control valve at the gas filling pipeline, the gas extraction pipeline sets up the gas extraction control valve, simultaneously with inflation control valve and gas extraction control valve respectively with the controller electricity be connected, so that utilize controller control inflation control valve and gas extraction control valve automatic opening and closing, can carry out at least 3 times in proper order automatically and take out the action of filling in proper order, do not need operating personnel manual operation valve to open/close, not only easy operation, convenience, high-efficient, can effectively reduce the waste of manpower, reduce cost, can not lead to the incomplete problem that takes place the water oxygen warning of gas replacement because of taking out the number of times by the note, can reduce the loss because of manual operation error causes moreover.

In order to solve the problem of being convenient for the operation of operators, the intelligent control system further comprises a touch screen, wherein the touch screen is electrically connected with the controller. The operating personnel can set parameters such as pumping and charging times, pumping and charging time and the like through the touch screen, different pumping and charging requirements can be met, the universality can be improved, and the operation is simpler and more convenient.

Preferably, the inflation control valve is a solenoid valve or an electric valve, or the air extraction control valve is a solenoid valve or an electric valve.

Preferably, the controller adopts a PLC.

In order to solve the problem of improving the gas replacement effect, further, the device also comprises a pressure sensor, wherein the pressure sensor is arranged in the transmission bin and is electrically connected with the controller and used for collecting the air pressure in the transmission bin. The air pressure data in the transmission bin can be collected by the pressure sensor in the air extraction process of the vacuum pump and fed back to the controller, the controller can control the air extraction control valve to be closed when the air pressure data reach a set threshold value so as to complete the air extraction action.

The second aspect of the utility model aims to solve the problems of improving the reliability of the system and ensuring the productivity, and further comprises a manual inflation valve and a manual extraction valve, wherein the manual inflation valve and the inflation control valve are arranged in parallel in an inflation pipeline, and the manual extraction valve and the extraction control valve are arranged in parallel in an extraction pipeline. In this scheme, through configuration manual inflation valve to set up manual inflation valve and inflation control valve in parallel in the gas-filled pipeline, make under the condition that inflation control valve breaks down or damages, the operating personnel can be through the break-make of manual inflation valve manual control gas-filled pipeline, so that use manual inflation valve manual operation temporarily. Meanwhile, the manual extraction valve is configured, and the manual extraction valve and the extraction control valve are arranged in parallel on the extraction pipeline, so that under the condition that the extraction control valve is faulty or damaged, an operator can manually control the on-off of the extraction pipeline through the manual extraction valve, so that the manual operation of the manual extraction valve is temporarily used, the reliability of the system can be effectively improved, the productivity risk caused by the fault or damage of the inflation control valve and the extraction control valve is reduced, and the productivity can be ensured.

Further, the vacuum pump is arranged in the cabinet body. Through the configuration cabinet body, can play the effect that supports glove box and transfer storehouse, not only can set up glove box and transfer storehouse in required altitude department to operating personnel operates, and relevant equipment such as vacuum pump can set up and accomodate in the cabinet body moreover, so that the outside of entire system is more clean and tidy, pleasing to the eye.

In order to solve the problem of improving the stability of the delivery bin, the automatic cabinet further comprises a support cover, wherein the support cover is arranged at the top of the cabinet body, and the delivery bin is supported by the support cover. The supporting cover is used for supporting the transmission bin in a suspended mode, stress conditions of the transmission bin can be effectively improved, and stability of the transmission bin is improved.

In order to solve the problem of convenient assembly, further, the top of the cabinet body is provided with an assembly port, the assembly port is covered by the supporting cover, the cabinet body is communicated with the inside of the supporting cover through the assembly port,

the top of the supporting cover is provided with a notch which is matched with the transmission bin, the transmission bin is clamped in the notch,

the air exhaust pipeline comprises a first air exhaust pipeline, a second air exhaust pipeline and a third air exhaust pipeline, the second air exhaust pipeline is arranged outside the supporting cover, the first air exhaust pipeline and the third air exhaust pipeline are respectively arranged inside the supporting cover, one end of the first air exhaust pipeline is communicated with the vacuum pump through the assembly port, one end of the third air exhaust pipeline is communicated with the transmission bin through the notch, the other end of the first air exhaust pipeline and the other end of the third air exhaust pipeline are respectively communicated with two ends of the second air exhaust pipeline, and the air exhaust control valve and the manual air exhaust valve are connected in parallel with the second air exhaust pipeline. In the scheme, the first air exhaust pipeline communicated with the vacuum pump is convenient to arrange by configuring the assembly port; the notch of the transmission bin is matched with the top of the supporting cover, and the transmission bin is clamped in the notch, so that the transmission bin can be stably supported, and the third air exhaust pipeline can be communicated with the transmission bin in the supporting cover; through arranging the second pipeline of bleeding outside the support cover to make first pipeline of bleeding and third pipeline of bleeding be linked together with the second pipeline of bleeding respectively, so that with the parallelly connected setting of bleed control valve and manual bleeder valve outside the support cover, both be convenient for the wiring of bleed control valve, the manual operation manual bleeder valve of being convenient for operating personnel again, convenience very.

Preferably, the transmission bin is of a cylindrical structure, and the notch is an arc notch.

The third aspect of the utility model aims to solve the problem of convenient and efficient assembly and maintenance, and further comprises two connectors, wherein the two ends of the connectors are respectively provided with a first interface and a second interface,

the support cover is provided with two through holes, two connectors are respectively arranged in the two through holes, a first interface is positioned in the support cover and used for connecting a first air exhaust pipeline or a third air exhaust pipeline, and a second interface is positioned outside the support cover and used for connecting a second air exhaust pipeline. Through configuration joint to be fixed in the support cover through the through-hole with the joint, make the first interface that connects be located the support cover, thereby connect first bleed pipeline or third bleed pipeline that can be convenient, the second interface that connects is located the support cover outward, thereby connect the second bleed pipeline that can be convenient, when assembly and maintenance, can carry out relevant operation from the inside and the outside of support cover respectively, very convenient, high-efficient.

In order to solve the problem of being convenient for detecting the concentration of water and oxygen in the system, the device further comprises a water and oxygen detection device, wherein the water and oxygen detection device comprises a display screen and a detection host, the detection host is communicated with the exhaust pipeline,

the detection host is arranged in the support cover or the cabinet body, the display screen is arranged in the support cover, the detection host is electrically connected with the display screen, the detection host is used for detecting the water oxygen amount, and the display screen is used for displaying the water oxygen amount. By configuring the water and oxygen detection device, the water and oxygen amount can be detected by utilizing a detection host in the water and oxygen detection device, so that whether the water and oxygen value in the transmission bin meets the requirement can be accurately judged; the detection host is arranged in the supporting cover or the cabinet body, so that the detection host is prevented from being exposed outside, and the detection host can be effectively protected; through arranging the display screen of water oxygen detection device in supporting cover, more be convenient for operating personnel to look over.

Further, the support housing includes a side plate disposed obliquely, the side plate being configured with a mounting hole adapted to the display screen, the display screen being fitted to the mounting hole.

Further, the detection host is electrically connected with the controller.

Compared with the prior art, the gas replacement system provided by the utility model does not need an operator to manually operate the valve to open/close, is simple, convenient and efficient in operation, can effectively reduce the waste of manpower and cost, can not cause the problem of incomplete water oxygen alarm due to the fact that the number of times of pumping and filling is wrongly recorded, and can reduce the loss caused by manual misoperation.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a front view of a gas displacement system according to embodiment 1 of the present utility model.

Fig. 2 is a schematic three-dimensional structure of a gas displacement system according to embodiment 1 of the present utility model.

Fig. 3 is a front view of a gas displacement system according to embodiment 2 of the present utility model.

Fig. 4 is a schematic three-dimensional structure of a gas displacement system according to embodiment 3 of the present utility model.

Fig. 5 is a partial front view of fig. 4.

Fig. 6 is a cross-sectional view at A-A in fig. 5.

Fig. 7 is a schematic view of a partial three-dimensional structure of a gas displacement system according to embodiment 4 of the present utility model.

Fig. 8 is a right side view of fig. 7, with the outer door in an open position.

Description of the drawings

Glove box 1

The delivery bin 2, the internal cavity 21, the supporting table 22, the angle steel 23, the guide rail 24 and the sliding block 25

The outer bin gate 3, the gate body 31, the lugs 32, the first guide post 321, the annular clamping groove 322, the second guide post 323, the screw 33, the rotary handle 34, the cross beam 35, the second guide hole 351 and the bayonet 352

Inflation line 4, inflation control valve 41, and manual inflation valve 42

The air extraction pipeline 5, the air extraction control valve 51, the manual air extraction valve 52, the first air extraction pipeline 53, the second air extraction pipeline 54 and the third air extraction pipeline 55

Cabinet 6, inner cavity 61, top support plate 62, fitting opening 63

A supporting cover 7, a top plate 71, a through hole 72, a side plate 73, a circular arc groove 74, a mounting hole 75,

Joint 8, first interface 81, second interface 82

And a display 9.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present utility model.

Example 1

In this embodiment, a gas displacement system is provided, comprising a glove box 1, a delivery bin 2, and a controller, wherein,

the glove box 1 may employ an existing glove box 1, for example, in the present embodiment, the glove box 1 employs an N2 glove box 1 in order to perform a process operation within the glove box 1.

The transfer bin 2 is internally provided with an internal cavity 21 for placing materials such as crystals, one end of the transfer bin 2 is connected to one side of the glove box 1, two ends of the transfer bin 2 are respectively provided with an inlet and an outlet which are communicated with the internal cavity 21, and the inlet and the outlet are respectively provided with an outer bin gate 3 and an inner bin gate, as shown in fig. 1 and 2, wherein the outer bin gate 3 is positioned outside the glove box 1 so that an operator can open the transfer bin 2 outside and place the materials such as crystals into the internal cavity 21, and the inner bin gate is positioned inside the glove box 1 so that the operator can open the inner bin gate of the transfer bin 2 from inside the glove box 1 so as to transfer the crystals in the transfer bin 2 into the glove box 1.

In the present embodiment, the glove box 1 is communicated with the transfer bin 2 through the inflation pipeline 4, so that the transfer bin 2 and the glove box 1 can be subjected to gas replacement through the inflation pipeline 4, and meanwhile, as shown in fig. 1 and 2, the inflation pipeline 4 is provided with an inflation control valve 41, so that the inflation control valve 41 is used for controlling the on-off of the inflation pipeline 4.

In this embodiment, the delivery bin 2 is communicated with a vacuum pump through an air extraction pipeline 5, so that the air in the delivery bin 2 is extracted by the vacuum pump, and meanwhile, as shown in fig. 1 and 2, the air extraction pipeline 5 is further provided with an air extraction control valve 51, so that the air extraction pipeline 5 is controlled to be opened or closed by the air extraction control valve 51.

In this embodiment, the inflation control valve 41 and the air extraction control valve 51 are electrically connected to the controller respectively, and the controller may preferably adopt a PLC, a single chip microcomputer, a PC, etc., so that the inflation control valve 41 and the air extraction control valve 51 are controlled by the controller to be opened and closed automatically, and at least 3 times of air extraction and charging actions can be performed automatically and sequentially in sequence, without the need of an operator to manually operate the valve to open/close, so that the operation is simple, convenient and efficient, the waste of manpower can be effectively reduced, the cost is reduced, the problem that the water oxygen alarm is not completely generated due to incomplete gas replacement caused by error counting and air extraction and charging times can be reduced, and the loss caused by human misoperation can be reduced.

In practice, the inflation control valve 41 may preferably be a solenoid valve or an electric valve, and similarly, the suction control valve 51 may preferably be a solenoid valve or an electric valve. In the present embodiment, solenoid valves are used for both the inflation control valve 41 and the suction control valve 51.

In more perfect scheme, still include the touch-sensitive screen, the touch-sensitive screen is connected with the controller electricity for operating personnel can set up through the touch-sensitive screen and take out and fill parameters such as number of times, take out and fill time, not only can satisfy different take out and fill demands, can improve the commonality, and the operation is simpler, convenient moreover. In the implementation, the touch screen may be disposed above the delivery bin 2, so that an operator may operate the touch screen, or may be disposed below the delivery bin 2, or may be directly disposed on the delivery bin 2.

In order to improve the replacement effect of the gas, in a further embodiment, the system further comprises a pressure sensor, the pressure sensor is arranged in the transmission bin 2 and is electrically connected with the controller, the pressure sensor can collect the air pressure data in the transmission bin 2 in the air extraction process of the vacuum pump and feed back to the controller, the controller can control the air extraction control valve 51 to be closed when the air pressure data reach a set threshold value so as to complete air extraction once air extraction action, the air extraction action is controlled by monitoring the air pressure in the transmission bin 2, and the closing time of the air extraction control valve 51 can be controlled more accurately, so that better gas replacement effect is realized.

For the operation of being convenient for, in more perfect scheme, this gas replacement system still includes cabinet body 6, glove box 1 and transmission storehouse 2 set up respectively in the top of cabinet body 6, as shown in fig. 1 and 2, glove box 1 can be fixed in the top of cabinet body 6, and transmission storehouse 2 can be connected in one side of glove box 1 to be located the top of cabinet body 6, simultaneously, the vacuum pump can set up in the cabinet body 6. In this embodiment, the cabinet 6 can play a role in supporting the glove box 1 and the transfer bin 2, not only can set the glove box 1 and the transfer bin 2 at a required height so that an operator can operate, but also related equipment such as a vacuum pump can be arranged and stored in the cabinet 6, so that the outside of the whole system is tidier and more attractive.

In practice, the cabinet 6 includes a framework, a top support plate 62 disposed on the framework, a side plate disposed on the framework, and a bottom plate disposed on the framework, as shown in fig. 1 and 2, where the top support plate 62, the side plate, and the bottom plate may together define a relatively closed cavity 61 for mounting equipment or devices such as a vacuum pump into the cabinet 6. Of course, in a more sophisticated version, the cabinet 6 is also provided with a door to open and close the cavity.

It will be appreciated that in this embodiment, the controller may utilize existing control circuitry to control the inflation control valve 41 and the deflation control valve 51, which is not illustrated herein.

Example 2

In order to solve the problem of improving the reliability of the system and ensuring the productivity, the main difference between the embodiment 2 and the embodiment 1 is that the gas replacement system provided in the present embodiment further includes a manual inflation valve 42 and a manual air extraction valve 52, wherein the manual inflation valve 42 and the inflation control valve 41 are arranged in parallel on the inflation pipeline 4, as shown in fig. 3, and similarly, the manual air extraction valve 52 and the air extraction control valve 51 are arranged in parallel on the air extraction pipeline 5, as shown in fig. 3.

In this embodiment, by configuring the manual inflation valve 42 and arranging the manual inflation valve 42 and the inflation control valve 41 in parallel to the inflation pipeline 4, an operator can manually control the on-off of the inflation pipeline 4 through the manual inflation valve 42 under the condition that the inflation control valve 41 is failed or damaged, so that the manual inflation valve 42 is temporarily used for manual operation. Meanwhile, by configuring the manual extraction valve 52 and arranging the manual extraction valve 52 and the extraction control valve 51 in parallel in the extraction pipeline 5, an operator can manually control the on-off of the extraction pipeline 5 through the manual extraction valve 52 under the condition that the extraction control valve 51 is failed or damaged, so that the manual operation of the manual extraction valve 52 is temporarily used, the reliability of the system can be effectively improved, the productivity risk caused by the failure or damage of the inflation control valve 41 and the extraction control valve 51 is reduced, the productivity can be ensured, and the reliability is improved.

Example 3

Because the delivery bin 2 is in a suspended state, the stability of the delivery bin 2 is not facilitated, and in order to solve the technical problem, in one embodiment, a bracket can be further arranged between the delivery bin 2 and the cabinet body 6 below, so that the delivery bin 2 is supported by the bracket, the stress condition of the delivery bin 2 can be effectively improved, and the stability of the delivery bin 2 is improved.

In another embodiment, the gas replacement system provided in this embodiment further includes a support cover 7, where the support cover 7 is disposed on the top of the cabinet 6, as shown in fig. 4 and 5, the support cover 7 may be installed on a top support plate 62 of the cabinet 6, and the transfer bin 2 is supported on the support cover 7, so that the support cover 7 is used to support the transfer bin 2 in a suspended arrangement in an auxiliary manner, which can effectively improve the stress condition of the transfer bin 2 and is beneficial to improving the stability of the transfer bin 2.

For ease of assembly, in a further embodiment, the top support plate 62 at the top of the cabinet 6 is configured with an assembly port 63, and as shown in fig. 4-6, the support housing 7 covers the assembly port 63 such that the cabinet 6 can communicate with the interior of the support housing 7 through the assembly port 63 for assembly. Meanwhile, as shown in fig. 6, the top of the supporting cover 7 is constructed with a notch adapted to the transfer cartridge 2, and the transfer cartridge 2 is caught in the notch so as to stably support the transfer cartridge 2. In practice, the shape and size of the recess can be adapted to the transfer chamber 2, for example, in some embodiments, the transfer chamber 2 has a cylindrical structure, as shown in fig. 4 and 6, and correspondingly, the recess is also configured as a circular recess, so that the transfer chamber 2 can be snapped into the recess. In practice, as shown in fig. 4-6, the supporting cover 7 may include two sets of side plates and two top plates 71, where the two sets of side plates include two opposite side plates 73, respectively, one set of side plates is configured with a circular arc groove 74, and the two top plates 71 are located on two sides of the two circular arc grooves 74, respectively, as shown in fig. 6, so that the circular arc notch may be formed.

In this embodiment, the air extraction pipeline 5 includes a first air extraction pipeline 535, a second air extraction pipeline 545 and a third air extraction pipeline 555, wherein, as shown in fig. 5 and 6, the second air extraction pipeline 545 is disposed outside the supporting cover 7, the first air extraction pipeline 535 and the third air extraction pipeline 555 are respectively disposed inside the supporting cover 7, one end of the first air extraction pipeline 535 is communicated with the vacuum pump via the assembly opening 63, one end of the third air extraction pipeline 555 is communicated with the transfer bin 2 via the notch, and the other end of the first air extraction pipeline 535 and the other end of the third air extraction pipeline 555 are respectively communicated with two ends of the second air extraction pipeline 545, as shown in fig. 5 and 6, and accordingly, the air extraction control valve 51 and the manual air extraction valve 52 are connected in parallel with the second air extraction pipeline 545. In the present embodiment, by configuring the fitting port 63, it is convenient to arrange the first suction line 535 communicating with the vacuum pump; the transmission bin 2 is stably supported by constructing a notch which is matched with the transmission bin 2 at the top of the supporting cover 7 and clamping the transmission bin 2 in the notch, and the third air suction pipeline 555 can be communicated with the transmission bin 2 in the supporting cover 7; by arranging the second air extraction pipeline 545 outside the supporting cover 7 and enabling the first air extraction pipeline 535 and the third air extraction pipeline 555 to be respectively communicated with the second air extraction pipeline 545, the air extraction control valve 51 and the manual air extraction valve 52 are arranged outside the supporting cover 7 in parallel, as shown in fig. 5 and 6, the wiring of the air extraction control valve 51 is facilitated, and the manual operation of the manual air extraction valve 52 by an operator is facilitated.

In practice, corresponding through-holes 72 can be formed in the support hood 7 in order to arrange the suction line 5. In a more sophisticated version, the system further comprises two connectors 8, the connectors 8 being configured with flow channels extending through both ends, and both ends of the connectors 8 being provided with a first interface 81 and a second interface 82, respectively, as shown in fig. 4-6. Correspondingly, the supporting cover 7 is provided with two through holes 72, and the two connectors 8 are respectively arranged in the two through holes 72, wherein the first connector 81 is positioned in the supporting cover 7, as shown in fig. 6, so that the first air suction pipeline 535 or the third air suction pipeline 555 can be conveniently connected; meanwhile, as shown in fig. 6, the second port 82 is located outside the supporting cover 7, so that the second air exhaust pipeline 545 can be conveniently connected, and related operations can be respectively performed from the inside and the outside of the supporting cover 7 during assembly and maintenance, which is very convenient and efficient.

In implementation, the through hole 72 may be preferentially disposed on the top plate 71 of the supporting cover 7, as shown in fig. 4-6, the joint 8 may be welded and welded at the through hole 72, or a section of external thread may be formed on the outer side of the joint 8, so that two nuts adapted to the external thread may be used to clamp the joint 8 to the supporting cover 7, thereby achieving the purpose of fixing the supporting cover 7. In practice, the first port 81 may be an external thread formed on one end of the fitting 8 or an internal thread formed on one end of the fitting 8 for threadably engaging the second bleed line 545. Similarly, in practice, the second port 82 may be an external or internal thread formed on one end of the fitting 8 to threadably couple the first or third bleed lines 535, 555 for efficient assembly and maintenance.

In order to facilitate the detection of the water-oxygen concentration in the system, in a more sophisticated solution, a water-oxygen detection device is further included, and in implementation, the water-oxygen detection device may adopt an existing water-oxygen detection device, for example, the water-oxygen detection device includes a display screen 9 and a detection host, and the detection host is communicated with the air extraction pipeline 5 so as to implement a detection function. In the implementation, the detection host can be arranged in the supporting cover 7 or the cabinet body 6, meanwhile, the display screen 9 can be arranged in the supporting cover 7, the detection host is electrically connected with the display screen 9, the detection host is mainly used for detecting the water oxygen amount, and the display screen 9 can at least display the detected water oxygen amount. By configuring the water and oxygen detection device, the water and oxygen amount can be detected by utilizing a detection host in the water and oxygen detection device, so that whether the water and oxygen value in the transmission bin 2 meets the requirement can be accurately judged; the detection host is arranged in the supporting cover 7 or the cabinet body 6, so that the detection host can be prevented from being exposed outside, and the detection host can be effectively protected; by arranging the display screen 9 of the water oxygen detection device on the supporting cover 7, the water oxygen detection device is more convenient for operators to check.

In a more preferred embodiment, one of the side plates 73 of the support cover 7 may be arranged obliquely, as shown in fig. 4-6, which side plate 73 is configured with mounting holes 75 adapted to the display screen 9, so that the display screen 9 may be fitted to the mounting holes 75.

In the implementation, the detection host can also be electrically connected with the controller so as to automatically control the times of pumping and charging actions according to the water oxygen concentration detected by the detection host.

Example 4

In order to solve the problem of improving the reliability of the system and ensuring the productivity, the main difference between the embodiment 4 and the above embodiment is that, in the gas replacement system provided in this embodiment, the transfer bin 2 adopts a cylindrical structure, and a support table 22 for placing materials such as crystals is disposed in the inner cavity 21 of the transfer bin 2, as shown in fig. 7 and 8, the support table 22 may be fixed in the inner cavity 21 and be in a horizontal state, and the support table 22 may also be slidably mounted in the inner cavity 21 so as to pull out the inner cavity 21 and push into the inner cavity 21, thereby facilitating the taking and placing of the materials such as crystals on the support table 22. In implementation, the support platform 22 may be connected to the internal cavity 21 through a linear slide rail, for example, angle steel 23 is symmetrically arranged in the internal cavity 21, and the angle steel 23 is arranged along the axial direction of the delivery bin 2, as shown in fig. 8, so that one surface of the angle steel 23 is in a horizontal state, and the other surface is in a vertical state, so as to assemble the support platform 22, at this time, the two angle steel 23 may respectively arrange the guide rails 24, two sides of the support platform 22 are respectively connected with the slide blocks 25 of the adaptive guide rails 24, and the slide blocks 25 are movably constrained to the guide rails 24, so that the support platform 22 may linearly move. Furthermore, it is also possible to arrange symmetrically guide grooves in the inner cavity 21, which are arranged in the axial direction of the transfer bin 2, and to which both sides of the support table 22 are respectively movably restrained, so that the support table 22 has a degree of freedom of movement with respect to the transfer bin 2.

In implementation, the structure of the outer door 3 may be the same as or different from that of the inner door. In order to more conveniently take and put materials such as crystals, when the external bin gate 3 comprises a gate body 31 with a circular structure, a cross beam 35 and a rotary handle 34, wherein, as shown in fig. 7 and 8, a screw rod 33 is arranged at the central position of the gate body 31, a first guide hole for adapting the screw rod 33 is arranged at the middle position of the cross beam 35, the cross beam 35 is sleeved on the screw rod 33 through the first guide hole, and the rotary handle 34 is provided with a threaded hole for adapting the screw rod 33, so that the rotary handle 34 can be connected with the screw rod 33 in a threaded manner, and the cross beam 35 is positioned between the gate body 31 and the rotary handle 34 as shown in fig. 7; meanwhile, one end of the beam 35 is provided with a bayonet 352, and the other end is provided with a second guide hole 351.

As shown in fig. 7, two lugs 32 are symmetrically disposed along the center of the outer side of the transfer bin 2, the two lugs 32 are respectively provided with a first guide post 321 and a second guide post 323, the first guide post 321 and the second guide post 323 are respectively disposed along the axial direction of the transfer bin 2, and the cross beam 35 is sleeved on the second guide post 323 through a second guide hole 351, as shown in fig. 7 and 8, so that the whole outer bin door 3 can rotate relative to the second guide post 323.

Meanwhile, the first guide post 321 is configured with an annular clamping groove 322 adapted to the clamping opening 352, as shown in fig. 7, so that when the outer bin door 3 is in a closed state, the clamping opening 352 of the cross beam 35 can be clamped in the annular clamping groove 322, and the rotary handle 34 can be rotated forward, so that the door body 31 can be driven to press the end part of the transmission bin 2, and the purpose of sealing the transmission bin 2 is achieved. When the outer bin gate 3 needs to be opened, the door body 31 can be unlocked only by reversely rotating the rotary handle 34, and then the door body 31 can be rotated to a position completely deviating from the end part of the transmission bin 2 only by driving the outer bin gate 3 to rotate along the central axis of the second guide post 323, as shown in fig. 8, so that the whole inlet can be completely exposed, and materials such as crystals can be more conveniently taken and placed.

In the implementation, the structure of the inner bin gate can be the same as that of the outer bin gate 3, so that the whole outlet can be completely exposed in the opening state, and materials such as crystals can be more conveniently transferred into the glove box 1.

The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present utility model.

Claims (10)

1. The utility model provides a gas replacement system, includes glove box and transmission storehouse, and the glove box is linked together with transmission storehouse through the pneumatic line, and transmission storehouse is linked together with the vacuum pump through the pipeline of bleeding, a serial communication port, still include the controller, the pneumatic line is provided with the inflation control valve, the pipeline of bleeding is provided with the control valve of bleeding, inflation control valve and the control valve of bleeding respectively with the controller electricity is connected.

2. The gas displacement system of claim 1, further comprising a touch screen electrically connected to the controller;

and/or, the device further comprises a pressure sensor, wherein the pressure sensor is arranged in the transmission bin and is electrically connected with the controller and used for collecting air pressure in the transmission bin.

3. The gas replacement system of claim 1, wherein the inflation control valve is a solenoid valve or an electrically operated valve, or wherein the bleed control valve is a solenoid valve or an electrically operated valve, or wherein the controller is a PLC.

4. The gas replacement system of claim 1, further comprising a manual inflation valve and a manual extraction valve, the manual inflation valve and the inflation control valve being disposed in parallel with the inflation line, the manual extraction valve and the extraction control valve being disposed in parallel with the extraction line.

5. The gas substitution system of any of claims 1-4, further comprising a cabinet, wherein the glove box and the delivery bin are disposed above the cabinet, respectively, and the delivery bin is connected to one side of the glove box, and the vacuum pump is disposed in the cabinet.

6. The gas replacement system of claim 5, further comprising a support hood disposed on top of the cabinet, the transfer chamber being supported by the support hood.

7. The gas substitution system of claim 6, wherein the top of the cabinet is constructed with a fitting opening, the support housing covers the fitting opening, the cabinet communicates with the inside of the support housing through the fitting opening,

the top of the supporting cover is provided with a notch which is matched with the transmission bin, the transmission bin is clamped in the notch,

the air exhaust pipeline comprises a first air exhaust pipeline, a second air exhaust pipeline and a third air exhaust pipeline, the second air exhaust pipeline is arranged outside the supporting cover, the first air exhaust pipeline and the third air exhaust pipeline are respectively arranged inside the supporting cover, one end of the first air exhaust pipeline is communicated with the vacuum pump through the assembly port, one end of the third air exhaust pipeline is communicated with the transmission bin through the notch, the other end of the first air exhaust pipeline and the other end of the third air exhaust pipeline are respectively communicated with two ends of the second air exhaust pipeline, and the air exhaust control valve and the manual air exhaust valve are connected in parallel with the second air exhaust pipeline.

8. The gas displacement system of claim 7, further comprising two connectors, the connectors having first and second connectors at opposite ends,

the support cover is provided with two through holes, two connectors are respectively arranged in the two through holes, a first interface is positioned in the support cover and used for connecting a first air exhaust pipeline or a third air exhaust pipeline, and a second interface is positioned outside the support cover and used for connecting a second air exhaust pipeline.

9. The gas displacement system of claim 7, further comprising a water-oxygen detection device comprising a display screen and a detection host, the detection host in communication with the extraction line,

the detection host is arranged in the support cover or the cabinet body, the display screen is arranged in the support cover, the detection host is electrically connected with the display screen, the detection host is used for detecting the water oxygen amount, and the display screen is used for displaying the water oxygen amount.

10. The gas substitution system of claim 9, wherein said support housing includes a side plate disposed obliquely, said side plate configured with mounting holes for fitting said display screen, said display screen being fitted to said mounting holes;

and/or the transmission bin is of a cylindrical structure, and the notch is an arc notch.