CN220348767U - Adsorption equipment and processing equipment - Google Patents
Adsorption equipment and processing equipment Download PDFInfo
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- CN220348767U CN220348767U CN202322034467.5U CN202322034467U CN220348767U CN 220348767 U CN220348767 U CN 220348767U CN 202322034467 U CN202322034467 U CN 202322034467U CN 220348767 U CN220348767 U CN 220348767U
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 190
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 17
- 238000005520 cutting process Methods 0.000 claims description 15
- 230000000149 penetrating effect Effects 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 description 12
- 239000000919 ceramic Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the technical field of semiconductor processing, in particular to an adsorption device and processing equipment. The adsorption device comprises a bearing assembly and a suction nozzle assembly, wherein the bearing assembly comprises an adsorption carrier plate, a cover plate and a reinforcing rib plate, the adsorption carrier plate and the cover plate are fastened and fixed to form a vacuum adsorption cavity in a clamping mode, the reinforcing rib plate is arranged in the vacuum adsorption cavity, the reinforcing rib plate is clamped between the adsorption carrier plate and the cover plate, the suction nozzle assembly comprises a plurality of suction nozzles, the suction nozzles are arranged on the adsorption carrier plate at intervals, and each suction nozzle is communicated with the vacuum adsorption cavity. The adsorption device is simple in structure and convenient to process, and can ensure that a plurality of suction nozzles jointly realize the adsorption of products by extracting vacuum from the vacuum adsorption cavity. In addition, the arrangement of the reinforcing rib plate also provides support for the adsorption carrier plate, and the rigidity of the adsorption carrier plate is ensured. The processing equipment is convenient to process by applying the adsorption device, and the reliability of the processing equipment is also ensured.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing, in particular to an adsorption device and processing equipment.
Background
When processing equipment processes a semiconductor device, one step needs to cut a film layer on an LED ceramic substrate so as to facilitate the subsequent process to tear off the cut film layer, and when cutting the film layer on the LED ceramic substrate, an adsorption device is usually required to adsorb and fix the LED ceramic substrate so as to facilitate the cutting operation of the cutting device. The existing adsorption device is usually in the form of an adsorption disc, a plurality of suction nozzles are arranged on the upper end face of the adsorption disc at intervals, penetrating holes are formed in the side portions of the adsorption disc, the penetrating holes extend to the position right below the corresponding suction nozzles, so that air inlets of the suction nozzles are communicated with the corresponding penetrating holes, vacuum is extracted through the penetrating holes, and the suction nozzles can be used for adsorbing and fixing the LED ceramic substrate. The arrangement mode enables the extension length of the penetrating hole to be longer, and the processing difficulty of the penetrating hole is greatly increased. In addition, each suction nozzle corresponds to one penetrating hole, so that the processing difficulty is further increased, and the structure of the adsorption disc is complex. In addition, the structural strength of the adsorption disc cannot be guaranteed even in the existing structural form of the adsorption disc.
Therefore, there is a need for an adsorption device and a processing apparatus to solve the above problems.
Disclosure of Invention
The utility model aims to provide an adsorption device and processing equipment, which have the advantages of simple structure, convenience in processing and reliable structure.
To achieve the purpose, the utility model adopts the following technical scheme:
an adsorption apparatus, comprising:
the bearing assembly comprises an adsorption carrier plate, a cover plate and reinforcing rib plates, wherein the adsorption carrier plate and the cover plate are fastened and fixed and clamped to form a vacuum adsorption cavity, the reinforcing rib plates are arranged in the vacuum adsorption cavity, and the reinforcing rib plates are clamped between the adsorption carrier plate and the cover plate; and
the suction nozzle assembly comprises a plurality of suction nozzles, the suction nozzles are arranged on the suction carrier plate at intervals, and each suction nozzle is communicated with the vacuum suction cavity.
As a preferable scheme, the absorption carrier plate is provided with an avoidance groove towards one of the end face of the cover plate and the end face of the cover plate towards the absorption carrier plate, the other one of the two end faces and the avoidance groove jointly form the vacuum absorption cavity, and the bottom wall of the avoidance groove is provided with the reinforcing rib plate.
Preferably, the bearing assembly further comprises:
the sealing ring is arranged around the periphery of the suction nozzles in the vacuum adsorption cavity, and is clamped between the adsorption carrier plate and the cover plate.
As the preferred scheme, adsorb the support plate and include the adsorption platform, the adsorption platform is located adsorb the up end of support plate, a plurality of the suction nozzle interval sets up on the adsorption platform, and a plurality of the suction nozzle adsorb the face with the up end looks parallel and level of adsorption platform.
As a preferable scheme, a plurality of accommodating grooves are arranged on the adsorption platform at intervals, penetrating holes communicated with the vacuum adsorption cavity are formed in the bottom wall of each accommodating groove, the suction nozzles are accommodated in the accommodating grooves, and the conducting pipes of the suction nozzles are inserted into the penetrating holes and are communicated with the vacuum adsorption cavity.
Preferably, the size of the adsorption platform is not larger than the size of the product adsorbed by the adsorption platform.
Preferably, the adsorption device further comprises:
the positioning assembly is arranged on the adsorption carrier plate and is configured to position the product adsorbed by the adsorption platform.
As a preferred scheme, the locating component includes a plurality of locating pins, and is a plurality of the locating pins all set up on the absorption support plate, a plurality of the locating pins is around absorption platform's periphery interval is arranged, and the locating pin can with absorption platform absorptive lateral part looks butt of product.
As a preferred scheme, the adsorption carrier plate further comprises a tool setting platform, wherein the tool setting platform is positioned on the upper end face of the adsorption carrier plate, and the upper end face of the tool setting platform is flush with the upper end face of the adsorption platform.
A processing apparatus comprising a cutting device configured to cut a product adsorbed by the adsorption device, and an adsorption device as described above.
The utility model has the beneficial effects that:
the utility model provides an adsorption device, wherein an adsorption carrier plate and a cover plate of the adsorption device are buckled and fixed and clamped to form a vacuum adsorption cavity, a plurality of suction nozzles are arranged on the adsorption carrier plate at intervals, each suction nozzle is communicated with the vacuum adsorption cavity, and the suction nozzles can be guaranteed to jointly adsorb products by pumping vacuum to the vacuum adsorption cavity. And when processing adsorption equipment, set up downwards on adsorbing the support plate run through to vacuum adsorption chamber the hole can, realize the intercommunication of suction nozzle and vacuum adsorption chamber, reduced the length that the hole was worn to establish for simple structure is convenient for process adsorption equipment. In addition, be provided with deep floor in the vacuum adsorption chamber, the deep floor presss from both sides and establishes between absorption carrier plate and apron, and the setting of deep floor provides the support for absorption carrier plate, has guaranteed the rigidity of absorption carrier plate to the reliability of whole adsorption equipment has been guaranteed.
The utility model also provides processing equipment, which has simple structure, is convenient for processing and ensures the reliability of the processing equipment by applying the adsorption device.
Drawings
FIG. 1 is an isometric view of an adsorption device provided by an embodiment of the present utility model;
FIG. 2 is a cross-sectional view of an adsorption apparatus according to an embodiment of the present utility model;
FIG. 3 is an exploded view of an adsorption device according to an embodiment of the present utility model;
fig. 4 is a top view of an adsorption device according to an embodiment of the present utility model.
In the figure:
1. a carrier assembly; 11. adsorbing a carrier plate; 111. an adsorption platform; 1111. a receiving groove; 1112. penetrating holes; 112. a mounting hole; 113. a tool setting platform; 12. a cover plate; 121. avoiding the groove; 13. reinforcing rib plates; 14. a vacuum adsorption chamber; 15. a seal ring; 16. a screw;
2. a suction nozzle assembly; 21. a suction nozzle;
3. a positioning assembly; 31. and (5) positioning pins.
Detailed Description
In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
As shown in fig. 1 and 2, the present embodiment provides an adsorption apparatus, which includes a carrier assembly 1 and a suction nozzle assembly 2, wherein the carrier assembly 1 includes an adsorption carrier plate 11, a cover plate 12 and a reinforcing rib plate 13, the adsorption carrier plate 11 and the cover plate 12 are fastened and clamped to form a vacuum adsorption cavity 14, the reinforcing rib plate 13 is disposed in the vacuum adsorption cavity 14, the reinforcing rib plate 13 is clamped between the adsorption carrier plate 11 and the cover plate 12, the suction nozzle assembly 2 includes a plurality of suction nozzles 21, the suction nozzles 21 are disposed on the adsorption carrier plate 11 at intervals, and each suction nozzle 21 is communicated with the vacuum adsorption cavity 14. When the adsorption device is required to adsorb products, the vacuum adsorption cavity 14 is vacuumized, so that each suction nozzle 21 is in a negative pressure state, and the suction nozzles 21 jointly realize the adsorption fixation of the products. This adsorption equipment is through pressing from both sides adsorption carrier plate 11 and apron 12 and establishing formation vacuum adsorption chamber 14 for when processing adsorption equipment, offer downwards and run through to vacuum adsorption chamber 14's hole on adsorption carrier plate 11 can realize the intercommunication of suction nozzle 21 and vacuum adsorption chamber 14, reduced the length that the hole was worn to establish, make simple structure, be convenient for process adsorption equipment. In addition, be provided with deep floor 13 in the vacuum adsorption chamber 14, deep floor 13 presss from both sides and establishes between absorption carrier plate 11 and apron 12, and the setting of deep floor 13 provides the support for absorption carrier plate 11, has guaranteed the rigidity of absorption carrier plate 11 to the reliability of whole adsorption equipment has been guaranteed. In this embodiment, the product adsorbed by the adsorption device may be an LED ceramic substrate.
In this embodiment, as shown in fig. 2 and 3, the bearing assembly 1 further includes a screw 16, and the screw 16 passes through the cover plate 12 and is in threaded connection with the adsorption carrier plate 11, so as to achieve fastening fixation between the adsorption carrier plate 11 and the cover plate 12. The screw 16 is detachably connected, and the screw 16 has the advantages of simple structure and reliable connection. In this embodiment, the screws 16 may be countersunk screws, and the screws 16 are provided in plurality, and the plurality of screws 16 are arranged at intervals around the circumference of the cover plate 12, so that the reliability and stability of the connection between the adsorption carrier plate 11 and the cover plate 12 are ensured.
In this embodiment, as shown in fig. 3, an avoidance groove 121 is formed on an end surface of the cover plate 12 facing the adsorption carrier plate 11, the end surface of the adsorption carrier plate 11 facing the cover plate 12 and the avoidance groove 121 together form a vacuum adsorption cavity 14, and a reinforcing rib plate 13 is arranged on a bottom wall of the avoidance groove 121. The vacuum adsorption cavity 14 can be formed in the assembled bearing assembly 1 by arranging the avoidance groove 121 on the cover plate 12, so that the structure is simple, and the processing is convenient. In other embodiments, the end surface of the adsorption carrier plate 11 facing the cover plate 12 may be provided with the avoiding groove 121, and the end surface of the cover plate 12 facing the adsorption carrier plate 11 and the avoiding groove 121 together form the vacuum adsorption cavity 14.
In order to ensure the sealing effect of the vacuum adsorption chamber 14, as shown in fig. 2 and 3, in the present embodiment, the carrier assembly 1 further includes a sealing ring 15, the sealing ring 15 is disposed around the outer circumferences of the plurality of suction nozzles 21 in the vacuum adsorption chamber 14, and the sealing ring 15 is interposed between the adsorption carrier plate 11 and the cover plate 12. Specifically, the sealing ring 15 is an O-ring, which has a good sealing effect and is convenient to install.
In this embodiment, as shown in fig. 1 to 3, the adsorption carrier plate 11 includes an adsorption platform 111, the adsorption platform 111 is located on an upper end surface of the adsorption carrier plate 11, the plurality of suction nozzles 21 are disposed on the adsorption platform 111 at intervals, and the adsorption surfaces of the plurality of suction nozzles 21 are flush with the upper end surface of the adsorption platform 111. Because the adsorption surfaces of the plurality of suction nozzles 21 are flush with the upper end surface of the adsorption platform 111, the upper end surface of the adsorption platform 111 forms an adsorption plane, thereby ensuring that the product is more smoothly adsorbed on the adsorption plane and ensuring the adsorption effect of the adsorption platform 111.
In this embodiment, a plurality of adsorption platforms 111 are disposed at intervals on the upper end surface of the adsorption carrier plate 11, so that the adsorption carrier plate 11 can adsorb and fix a plurality of products simultaneously, and the adsorption efficiency of the products is improved. In this embodiment, two adsorption platforms 111 are disposed at intervals on the upper end surface of the adsorption carrier plate 11.
Preferably, in this embodiment, the size of the adsorption platform 111 is not greater than the size of the product adsorbed by the adsorption platform 111, so that each suction nozzle 21 on the adsorption platform 111 is ensured to be covered by the product when adsorbing the product, thereby avoiding vacuum leakage of the suction nozzle 21 at the edge of the adsorption platform 111, and further ensuring the adsorption effect on the product.
In this embodiment, as shown in fig. 2, a plurality of accommodating grooves 1111 are spaced apart from each other on the adsorption platform 111, through holes 1112 which are communicated with the vacuum adsorption cavity 14 are formed in the bottom wall of the accommodating groove 1111, the suction nozzles 21 are accommodated in the accommodating groove 1111, and the conducting pipes of the suction nozzles 21 are inserted into the through holes 1112 and are communicated with the vacuum adsorption cavity 14, so that not only is the communication between the suction nozzles 21 and the vacuum adsorption cavity 14 ensured, but also the adsorption surface of the suction nozzles 21 is flush with the upper end surface of the adsorption platform 111.
In this embodiment, as shown in fig. 3 and 4, the adsorption carrier plate 11 further includes a tool setting platform 113, where the tool setting platform 113 is located on an upper end surface of the adsorption carrier plate 11, and the upper end surface of the tool setting platform 113 is flush with the upper end surface of the adsorption platform 111. By arranging the tool setting platform 113, the height of the cutting tool in the cutting device is convenient to measure, and the reliability of the cutting tool for cutting the product adsorbed on the adsorption platform 111 is ensured. Preferably, in the present embodiment, a plurality of tool setting platforms 113 are arranged at intervals around the circumference of the adsorption carrier plate 11, and in the actual use process, only one of the tool setting platforms 113 is needed, and the rest of the tool setting platforms 113 can be used as spare tool setting platforms. In the present embodiment, the surface roughness of the setting bed 113 is 0.8 μm.
As shown in fig. 3 and 4, in this embodiment, the adsorption device further includes a positioning component 3, the positioning component 3 is disposed on the adsorption carrier plate 11, and the positioning component 3 is used for positioning the product adsorbed by the adsorption platform 111, thereby realizing accurate positioning of the product on the adsorption carrier plate 11, facilitating the subsequent cutting device to cut the positioned product according to the preset path, reducing the working difficulty, improving the production efficiency, and facilitating the semi-automatic cutting processing of the subsequent cutting device.
Specifically, the positioning assembly 3 includes a plurality of positioning pins 31, the plurality of positioning pins 31 are all disposed on the adsorption carrier plate 11, the plurality of positioning pins 31 are arranged around the outer circumference of the adsorption platform 111 at intervals, and the positioning pins 31 can be abutted against the side portions of the product adsorbed by the adsorption platform 111, so that the positioning of the product adsorbed by the adsorption platform 111 is realized. By designing the positioning assembly 3 in the form of a plurality of positioning pins 31, the structure is simple and the installation is convenient.
The adsorption carrier plate 11 is provided with mounting holes 112, and the positioning pins 31 are mounted in the mounting holes 112. In the present embodiment, 10 mounting holes 112 are provided at intervals on the outer periphery of the adsorption platform 111, the positioning pins 31 can be mounted in part of the mounting holes 112, and the remaining mounting holes 112 can serve as spare holes as long as it is ensured that the respective mounting pins 31 mounted can achieve positioning in the lateral and longitudinal directions of the product.
The embodiment also provides a processing device, including cutting device and above-mentioned adsorption equipment, cutting device is used for cutting the absorptive product of adsorption equipment, and the processing device that this embodiment provided for through applying above-mentioned adsorption equipment for simple structure, be convenient for process, and also guaranteed the reliability of processing device.
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.
Claims (10)
1. An adsorption apparatus, comprising:
the bearing assembly (1), the bearing assembly (1) comprises an adsorption carrier plate (11), a cover plate (12) and a reinforcing rib plate (13), the adsorption carrier plate (11) and the cover plate (12) are fastened and fixed, a vacuum adsorption cavity (14) is formed in a clamping mode, the reinforcing rib plate (13) is arranged in the vacuum adsorption cavity (14), and the reinforcing rib plate (13) is clamped between the adsorption carrier plate (11) and the cover plate (12); and
the suction nozzle assembly (2), the suction nozzle assembly (2) comprises a plurality of suction nozzles (21), the suction nozzles (21) are arranged on the adsorption carrier plate (11) at intervals, and each suction nozzle (21) is communicated with the vacuum adsorption cavity (14).
2. The adsorption device according to claim 1, wherein an avoidance groove (121) is formed in one of an end face of the adsorption carrier plate (11) facing the cover plate (12) and an end face of the cover plate (12) facing the adsorption carrier plate (11), the other one of the two forms the vacuum adsorption cavity (14) together with the avoidance groove (121), and the reinforcing rib plate (13) is arranged on the bottom wall of the avoidance groove (121).
3. The adsorption device according to claim 1, wherein the carrier assembly (1) further comprises:
the sealing ring (15) is arranged around the periphery of the suction nozzles (21) in the vacuum adsorption cavity (14), and the sealing ring (15) is clamped between the adsorption carrier plate (11) and the cover plate (12).
4. A suction device according to any one of claims 1 to 3, wherein the suction carrier plate (11) comprises a suction platform (111), the suction platform (111) is located on the upper end surface of the suction carrier plate (11), a plurality of suction nozzles (21) are arranged on the suction platform (111) at intervals, and the suction surfaces of the suction nozzles (21) are flush with the upper end surface of the suction platform (111).
5. The adsorption device according to claim 4, wherein a plurality of accommodating grooves (1111) are formed in the adsorption platform (111) at intervals, penetrating holes (1112) communicated with the vacuum adsorption cavity (14) are formed in the bottom wall of the accommodating groove (1111), the suction nozzle (21) is accommodated in the accommodating groove (1111), and a conducting pipe of the suction nozzle (21) is inserted into the penetrating holes (1112) and is communicated with the vacuum adsorption cavity (14).
6. The adsorption apparatus of claim 4 wherein the size of the adsorption platform (111) is no greater than the size of the product adsorbed by the adsorption platform (111).
7. The adsorption device of claim 4, further comprising:
positioning assembly (3), positioning assembly (3) set up on adsorbing carrier plate (11), positioning assembly (3) are configured to the location adsorb product of platform (111).
8. The adsorption device according to claim 7, wherein the positioning assembly (3) comprises a plurality of positioning pins (31), the positioning pins (31) are all arranged on the adsorption carrier plate (11), the positioning pins (31) are arranged at intervals around the periphery of the adsorption platform (111), and the positioning pins (31) can be abutted against the side part of the product adsorbed by the adsorption platform (111).
9. The adsorption device according to claim 4, wherein the adsorption carrier plate (11) further comprises a tool setting platform (113), the tool setting platform (113) is located on the upper end face of the adsorption carrier plate (11), and the upper end face of the tool setting platform (113) is flush with the upper end face of the adsorption platform (111).
10. A processing apparatus comprising a cutting device configured to cut a product adsorbed by the adsorption device, and an adsorption device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322034467.5U CN220348767U (en) | 2023-07-31 | 2023-07-31 | Adsorption equipment and processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322034467.5U CN220348767U (en) | 2023-07-31 | 2023-07-31 | Adsorption equipment and processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220348767U true CN220348767U (en) | 2024-01-16 |
Family
ID=89501846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322034467.5U Active CN220348767U (en) | 2023-07-31 | 2023-07-31 | Adsorption equipment and processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220348767U (en) |
-
2023
- 2023-07-31 CN CN202322034467.5U patent/CN220348767U/en active Active
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