CN220321983U - Novel air inlet and exhaust system for main cavity cargo inlet and outlet areas of vertical furnace - Google Patents

Abstract

The utility model discloses a novel air inlet and exhaust system of a main cavity cargo inlet and outlet area of a vertical furnace, which comprises a vertical furnace body, an air inlet side air door and an exhaust mechanism, wherein the air inlet side air door is fixedly connected to the inner wall of one side of the vertical furnace body, the exhaust mechanism is fixedly connected to the inner wall of the other side of the vertical furnace body, the exhaust mechanism comprises a diversion grid plate, an exhaust power fan, an exhaust runner and an exhaust outlet, the diversion grid plate is distributed relative to the air inlet side air door and is fixedly connected with the inner wall of the vertical furnace body, the inner wall of the diversion grid plate is fixedly connected with an air guide box, the air guide box is fixedly connected with the exhaust power fan, the air guide box is communicated with the exhaust runner, and the exhaust outlet is fixedly connected to the tail end of the exhaust runner. According to the utility model, the exhaust mechanism is fixedly connected in the vertical furnace body, so that the unified collection and discharge of gas are conveniently carried out by matching with the air inlet side air door, the aim of advection can be realized in the gas discharge process in the whole main cavity cargo inlet and outlet area, and the influence on wafer production is avoided.

Description

Novel air inlet and exhaust system for main cavity cargo inlet and outlet areas of vertical furnace

Technical Field

The utility model relates to the technical field of semiconductor vertical furnaces, in particular to a novel air inlet and exhaust system for a main cavity cargo inlet and outlet area of a vertical furnace.

Background

The main cavity in the current semiconductor vertical furnace is used for loading and unloading goods in a traditional air inlet and exhaust mode, air inlet (N2 or filtered air) is introduced from a side door in the equipment, and exhaust is exhausted from an opening of an air cylinder at the bottom or the top of the equipment. Under the traditional design scheme, during the switching process of the exhaust channel and after the back door is opened and closed, turbulence is easily caused by the change of the exhaust position, so that the problem of low yield caused by adhesion of particles or other pollutants on the surface of the wafer is caused. For this reason, a new solution needs to be designed to solve.

Disclosure of Invention

The utility model aims to provide a novel air inlet and exhaust system for a main cavity cargo inlet and outlet area of a vertical furnace, which solves the problem that particles or other pollutants are attached to the surface of a wafer due to turbulence caused by the switching process of an exhaust channel and the opening and closing of a rear door in the prior art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a new vertical furnace main cavity advances goods area exhaust system that admits air, includes vertical furnace body, air inlet side air door and exhaust mechanism, one side inner wall fixedly connected with air inlet side air door of vertical furnace body, the opposite side inner wall fixedly connected with exhaust mechanism of vertical furnace body, exhaust mechanism includes water conservancy diversion grid board, the power fan of airing exhaust, runner and air exit of airing exhaust, water conservancy diversion grid board and air inlet side air door relative distribution and with vertical furnace body inner wall fixed connection, the inner wall fixedly connected with wind-guiding box of water conservancy diversion grid board, the inside fixedly connected with power fan of airing exhaust of wind-guiding box, the wind-guiding box is linked together with the runner of airing exhaust, air exit fixed connection is at the end of runner of airing exhaust.

As an improvement of the technical scheme, the air guide box is formed by fixedly connecting a plurality of independent separated exhaust chambers side by side, and air outlets of the air guide box are respectively communicated with the exhaust runners.

As an improvement of the technical scheme, the exhaust outlet consists of a plurality of exhaust pipes, and the end parts of the exhaust pipes are respectively and fixedly connected with a pneumatic valve.

As an improvement of the technical scheme, a plurality of sub-runners are arranged in the exhaust runners, and the sub-runners are correspondingly distributed with the exhaust pipes and are communicated with the exhaust pipes.

As an improvement of the technical scheme, the surface of the diversion grid plate is fixedly connected with a plurality of grid blades.

Compared with the prior art, the utility model has the following beneficial effects:

according to the utility model, the exhaust mechanism is fixedly connected in the vertical furnace body, so that the air inlet side air door is matched to uniformly collect and discharge air, the air supply opening and the air return opening are planned again, waste heat in the cavity is eliminated uniformly and stably in the process of gas diffusion and mixing, and meanwhile, the exhaust openings in different positions are summarized in the same exhaust runner, so that the aim of advection can be realized in the process of discharging air in the whole main cavity cargo inlet and outlet area, and the influence on the production of wafers is avoided.

Drawings

FIG. 1 is a schematic diagram of an air intake and exhaust system in a loading and unloading area of a main cavity of a conventional vertical furnace according to the present utility model;

FIG. 2 is a schematic diagram of an air intake and exhaust system of a main cavity of the improved vertical furnace in the loading and unloading area;

FIG. 3 is a schematic view of the structure of the exhaust mechanism according to the present utility model;

fig. 4 is a schematic structural diagram of the air guiding grid plate and the air guiding box according to the present utility model.

In the figure: the vertical furnace body-1, an air inlet side air door-2, an air exhaust mechanism-3, a diversion grid plate-4, an air exhaust power fan-5, an air exhaust runner-6, an air outlet-7, an air guide box-8, a separation exhaust chamber-9, an air exhaust pipe-10, a pneumatic valve-11, a diversion channel-12 and grid blades-13.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.

Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a new vertical furnace main cavity advances goods area exhaust system that admits air, including vertical furnace body 1, intake side air door 2 and exhaust mechanism 3, the one side inner wall fixedly connected with intake side air door 2 of vertical furnace body 1, the opposite side inner wall fixedly connected with exhaust mechanism 3 of vertical furnace body 1, exhaust mechanism 3 includes water conservancy diversion grid plate 4, the power fan that airs exhaust 5, runner 6 and air exit 7 of airing exhaust, water conservancy diversion grid plate 4 and intake side air door 2 relative distribution and with vertical furnace body 1 inner wall fixed connection, the inner wall fixedly connected with wind-guiding box 8 of water conservancy diversion grid plate 4, the inside fixedly connected with power fan that airs exhaust 5 of wind-guiding box 8, wind-guiding box 8 is linked together with runner 6 of airing exhaust, air exit 7 fixed connection is at the end of runner 6 of airing exhaust.

Further improved, the air guide box 8 is formed by fixedly connecting a plurality of independent separated exhaust chambers 9 side by side, the air outlets of the air guide box 8 are respectively communicated with the exhaust flow channels 6, and a plurality of separated exhaust chambers 9 distributed side by side are arranged in the air guide box 8, so that different areas and different gases are conveniently collected and fed into the exhaust flow channels 6, and the exhaust working efficiency is improved.

Further improved, the exhaust outlet 7 is composed of a plurality of exhaust pipes 10, the end parts of the exhaust pipes 10 are respectively and fixedly connected with a pneumatic valve 11, the exhaust outlet 7 is composed of the exhaust pipes 10, the exhaust channels 6 are matched conveniently to exhaust different airflows, and the end parts of the exhaust pipes 10 are fixedly connected with the pneumatic valves 11, so that the exhaust is controlled conveniently.

Further improved, the inside of the exhaust runner 6 is provided with a plurality of sub runners 12, the sub runners 12 are correspondingly distributed with the exhaust pipe 10 and are communicated with the exhaust pipe 10, and the exhaust runner 6 is internally provided with the plurality of sub runners 12, so that the exhaust flow direction is conveniently unified, the gas diffusion in the exhaust process is avoided, and the influence of the exhaust process on the production of wafers is reduced.

Specifically, improve, the fixed surface of water conservancy diversion grid board 4 is connected with a plurality of grid blades 13, through being equipped with grid blade 13 at the surface of water conservancy diversion grid board 4, conveniently control the air current direction, cooperate air exhaust power fan 5, conveniently adjust the flow direction of air current, be convenient for take away the heat in the vertical furnace body 1.

According to the utility model, the exhaust mechanism 3 is fixedly connected in the vertical furnace body 1, so that the air inlet side air door 2 is matched to collect and discharge air uniformly, the air supply opening and the air return opening are planned again, waste heat in the cavity is eliminated uniformly and stably in the process of gas diffusion and mixing, and meanwhile, the exhaust openings 7 at different positions are collected in the same exhaust runner 6, so that the purpose of advection can be realized in the process of discharging air in the whole main cavity cargo inlet and outlet area, and the influence on the production of wafers is avoided.

When the utility model works, gas enters the vertical furnace body 1 through the air inlet side air door 2, the inside of the vertical furnace body 1 dissipates heat after the entering gas is diffused, the diffused gas is converged into the separated exhaust by the exhaust power fan, the gas collected in the corresponding separated exhaust chamber 9 is sent into the corresponding split flow channel 12 in the exhaust flow channel 6, and the gas passes through the exhaust flow channel 6 and then reaches the outlet of the exhaust outlet 7, and the opening and closing of the independent exhaust pipe 10 are controlled by controlling the pneumatic valve 11, so that the gas is conveniently discharged under different use conditions.

While the fundamental and principal features of the utility model and advantages of the utility model have been shown and described, it will be apparent to those skilled in the art that the utility model is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims (5)

1. The utility model provides a new vertical furnace main cavity advances regional exhaust system that admits air of goods shipment, includes vertical furnace body (1), intake side air door (2) and exhaust mechanism (3), its characterized in that: one side inner wall fixedly connected with side air door (2) that admits air of vertical furnace body (1), the opposite side inner wall fixedly connected with mechanism of airing exhaust (3) of vertical furnace body (1), mechanism of airing exhaust (3) are including water conservancy diversion grid board (4), power fan (5) of airing exhaust, runner (6) and air exit (7) of airing exhaust, water conservancy diversion grid board (4) and side air door (2) relative distribution and with vertical furnace body (1) inner wall fixedly connected, the inner wall fixedly connected with wind-guiding box (8) of water conservancy diversion grid board (4), the inside fixedly connected with power fan (5) of airing exhaust of wind-guiding box (8), wind-guiding box (8) are linked together with runner (6) of airing exhaust, the end of runner (6) of airing exhaust (7) fixedly connected with.

2. A new vertical furnace main cavity shipment area air intake and exhaust system according to claim 1, characterized in that: the air guide box (8) is formed by fixedly connecting a plurality of independent separated exhaust chambers (9) side by side, and air outlets of the air guide box (8) are respectively communicated with the exhaust runners (6).

3. A new vertical furnace main cavity shipment area air intake and exhaust system according to claim 1, characterized in that: the exhaust outlet (7) is composed of a plurality of exhaust pipes (10), and the end parts of the exhaust pipes (10) are respectively and fixedly connected with a pneumatic valve (11).

4. A new vertical furnace main cavity loading and unloading area air intake and exhaust system according to claim 3, characterized in that: the inside of exhaust runner (6) is equipped with a plurality of branch runner (12), branch runner (12) are distributed with exhaust pipe (10) correspondence and are linked together with exhaust pipe (10).

5. A new vertical furnace main cavity shipment area air intake and exhaust system according to claim 1, characterized in that: the surface of the diversion grid plate (4) is fixedly connected with a plurality of grid blades (13).