CN220312878U - Quartz crucible polishing device - Google Patents

Quartz crucible polishing device Download PDF

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Publication number
CN220312878U
CN220312878U CN202321692307.3U CN202321692307U CN220312878U CN 220312878 U CN220312878 U CN 220312878U CN 202321692307 U CN202321692307 U CN 202321692307U CN 220312878 U CN220312878 U CN 220312878U
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China
Prior art keywords
quartz crucible
electric control
seat
polishing
fixedly connected
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CN202321692307.3U
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Chinese (zh)
Inventor
嵇亚明
嵇文
张松
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Xinyi Zhongxin Photoelectric Technology Co ltd
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Xinyi Zhongxin Photoelectric Technology Co ltd
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Abstract

The utility model discloses a polishing device for a quartz crucible, and relates to the technical field of quartz crucible polishing. The device comprises a support base, wherein a control panel is arranged on the surface of the support base, a processing box is fixedly connected to the top of the support base, a groove is formed in the processing box, a quartz crucible body is arranged in the groove, an outer clamping mechanism is arranged in the processing box, a polishing mechanism is arranged in the processing box, and a lifting mechanism is arranged in the processing box; the clamping and polishing device can clamp and polish the quartz crucible, is favorable for clamping and fixing the outer surface of the quartz crucible, can set off the inner surface of the quartz crucible, is favorable for improving the stability of the quartz crucible in the polishing process, improves the polishing quality of the quartz crucible, reduces the possibility of displacement of the quartz crucible in the polishing process, and improves the practicability of the polishing device.

Description

Quartz crucible polishing device
Technical Field
The utility model relates to the technical field of quartz crucible polishing, in particular to a polishing device for a quartz crucible.
Background
The quartz crucible has the advantages of high purity, strong temperature resistance, large size, high precision, good heat preservation, energy conservation, stable quality and the like, and is widely applied. The quartz crucible can be used below 1450 degrees, and is transparent and opaque. The semitransparent quartz crucible prepared by the arc method is an essential basic material for drawing large-diameter monocrystalline silicon and developing large-scale integrated circuits. Today, the developed world of the semiconductor industry has replaced this crucible with a small vitreous silica crucible. He has the advantages of high purity, strong temperature resistance, large size, high precision, good heat preservation, energy conservation, stable quality and the like.
At present, the Chinese patent with the publication number of CN201821135508.2 discloses a quartz crucible polishing device, in the polishing process, a crucible is placed on an anti-slip pad, an inner plate is pulled out through a second handle, a hydraulic cylinder is utilized to enable a hydraulic rod to drive a clamping plate to move downwards, the crucible is fixed between the clamping plate and the anti-slip pad, and the offset in the polishing process is avoided.
The device can fix the crucible between the clamping plate and the anti-slip pad when polishing the quartz crucible, so that the anti-slip effect of the crucible is improved, but the crucible is limited and clamped only through the clamping plate and the anti-slip pad, the situation that the stress of the crucible is offset easily occurs in the polishing process of the quartz crucible, so that the effect of limiting and clamping the quartz crucible is affected, the follow-up polishing quality of the quartz crucible is reduced, and therefore, a polishing device for the quartz crucible is needed.
Disclosure of Invention
The utility model provides a polishing device for a quartz crucible, which has the advantage of being capable of clamping and polishing the quartz crucible more stably, so that the problems in the background technology are solved.
In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a grinding device of quartz crucible, includes the support base, the surface mounting who supports the base has control panel, the top fixedly connected with processing case of support base, the inside of processing case is seted up flutedly, the inside of recess is provided with quartz crucible body, the internally mounted of processing case has outer clamp mechanism, the internally mounted of processing case has grinding machanism, the internally mounted of processing case has elevating system, and elevating system is located under the recess, lining mechanism is installed on elevating system's top.
As the polishing device for the quartz crucible, the external clamping mechanism comprises a first servo motor, a transmission rotating rod, a forward thread ring, a first thread seat, a first support column, a first mounting seat, a first connecting rod, a first clamping plate, a reverse thread ring, a second thread seat, a second support column, a second mounting seat, a second connecting rod and a second clamping plate, wherein the first servo motor is mounted in a processing box, the transmission rotating rod is mounted in the processing box, one end of the transmission rotating rod is fixedly connected with the output end of the first servo motor, the forward thread ring is fixedly connected to the transmission rotating rod, the first thread seat is in threaded connection with the forward thread ring, the first support column is fixedly connected to the first thread seat, the first mounting seat is fixedly mounted on the first support column, the first connecting rod is fixedly connected to the first mounting seat, one end of the first connecting rod penetrates through a groove, the first clamping plate is fixedly mounted on the first connecting rod, the reverse thread ring is fixedly connected to the transmission rotating rod, the second thread seat is fixedly connected to the second support column, the second support column is fixedly connected to the second clamping plate, and the second support column is fixedly mounted on the second support column.
As the polishing device for the quartz crucible, the lifting mechanism comprises the second servo motor, the threaded rod and the threaded cylinder, wherein the second servo motor is arranged in the processing box, the threaded rod is fixedly connected to the output end of the second servo motor, and the threaded cylinder is in threaded connection with the threaded rod.
As the polishing device for the quartz crucible, the lining mechanism comprises a fixed seat, a double-end electric control telescopic rod, a first lining plate, a second lining plate and a controller, wherein the fixed seat is fixedly arranged on a threaded cylinder, the double-end electric control telescopic rod is arranged in the fixed seat, the first lining plate is fixedly arranged at one end of the double-end electric control telescopic rod, the second lining plate is fixedly arranged at the other end of the double-end electric control telescopic rod, the controller is arranged in the fixed seat, and the controller is matched with the double-end electric control telescopic rod for use.
As the polishing device for the quartz crucible, the polishing mechanism comprises a longitudinal electric control slide rail, a transverse electric control slide rail, a servo electric cylinder, a polisher and a polishing roller, wherein the longitudinal electric control slide rail is fixedly arranged on a processing box, the transverse electric control slide rail is arranged on the longitudinal electric control slide rail, the servo electric cylinder is fixedly arranged on the transverse electric control slide rail, the polisher is fixedly arranged at the output end of the servo electric cylinder, and the polishing roller is arranged on the polisher.
As the polishing device for the quartz crucible, the surfaces of the first clamping plate and the second clamping plate are fixedly provided with the first anti-slip pad.
As the polishing device for the quartz crucible, the surface of the processing box is provided with the protective door, and the surface of the protective door is provided with the observation window.
As the polishing device for the quartz crucible, the surfaces of the first lining plate and the second lining plate are fixedly provided with the second anti-slip pad.
The utility model provides a polishing device for a quartz crucible. The beneficial effects are as follows:
this quartz crucible's grinding device through supporting base, control panel, processing case, recess, quartz crucible body, outer clamp mechanism, grinding machanism, elevating system and lining mechanism's setting, can carry out the centre gripping to quartz crucible and polish the processing, is favorable to carrying out the centre gripping to quartz crucible's surface fixedly to can set off quartz crucible's internal surface, be favorable to improving quartz crucible surface and polish the stability in-process, promote quartz crucible and polish the quality of processing, reduce quartz crucible and appear shifting the possibility in polishing the in-process, promote grinding device's practicality.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
FIG. 2 is a perspective cross-sectional view of a first partial structure of the present utility model;
FIG. 3 is a perspective cross-sectional view of a second partial structure of the present utility model;
FIG. 4 is a schematic cross-sectional view of a first partial structure of the present utility model;
FIG. 5 is a perspective view of a first partial structure of the present utility model;
FIG. 6 is a perspective view of a second partial structure of the present utility model;
FIG. 7 is a schematic cross-sectional view of a first partial structure of the present utility model.
In the figure: 1. a support base; 2. a control panel; 3. a processing box; 4. a protective door; 5. an observation window; 6. a groove; 7. a quartz crucible body; 8. an outer clip mechanism; 801. a first servo motor; 802. a transmission rotating rod; 803. a forward thread ring; 804. a first screw seat; 805. a first support column; 806. a first mount; 807. a first connecting rod; 808. a first clamping plate; 809. a reverse thread ring; 810. a second screw seat; 811. a second support; 812. a second mounting base; 813. a second connecting rod; 814. a second clamping plate; 9. a polishing mechanism; 901. a longitudinal electric control slide rail; 902. a transverse electric control slide rail; 903. a servo electric cylinder; 904. a sander; 905. a grinding roller; 10. a lining mechanism; 1001. a fixing seat; 1002. double-end electric control telescopic rod; 1003. a first inner liner; 1004. a second inner liner; 1005. a controller; 11. a lifting mechanism; 1101. a second servo motor; 1102. a threaded rod; 1103. a thread cylinder; 12. a first cleat; 13. and a second non-slip mat.
Detailed Description
The technical solutions of the present embodiments will be clearly and completely described below with reference to the drawings in the present embodiments, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, based on the embodiments herein, which would be within the purview of one of ordinary skill in the art without the creative effort, are contemplated as falling within the scope of the present utility model.
Referring to fig. 1-7, the present utility model provides a technical solution: the utility model provides a grinding device of quartz crucible, including supporting base 1, the surface mounting who supports base 1 has control panel 2, the top fixedly connected with processing case 3 of supporting base 1, recess 6 has been seted up to the inside of processing case 3, the inside of recess 6 is provided with quartz crucible body 7, the internally mounted of processing case 3 has outer clamp mechanism 8, the internally mounted of processing case 3 has grinding machanism 9, the internally mounted of processing case 3 has elevating system 11, and elevating system 11 is located under the recess 6, lining mechanism 10 is installed on the top of elevating system 11.
In this embodiment, through supporting base 1, control panel 2, processing case 3, recess 6, quartz crucible body 7, outer clamp mechanism 8, grinding machanism 9, elevating system 11 and lining mechanism 10's setting, can carry out the centre gripping to quartz crucible and polish the processing, be favorable to carrying out the centre gripping to quartz crucible's surface fixedly to can set off quartz crucible's internal surface, be favorable to improving quartz crucible surface and polish the stability in-process, promote quartz crucible and polish the quality of processing, reduce quartz crucible and appear shifting the possibility in polishing the in-process, promote grinding device's practicality.
Specifically, the external clamping mechanism 8 includes a first servo motor 801, a transmission rotating rod 802, a forward thread ring 803, a first thread seat 804, a first support column 805, a first mounting seat 806, a first connecting rod 807, a first clamping plate 808, a reverse thread ring 809, a second thread seat 810, a second support column 811, a second mounting seat 812, a second connecting rod 813 and a second clamping plate 814, wherein the first servo motor 801 is mounted in the processing box 3, the transmission rotating rod 802 is mounted in the processing box 3, one end of the transmission rotating rod 802 is fixedly connected with the output end of the first servo motor 801, the forward thread ring 803 is fixedly connected to the transmission rotating rod 802, the first thread seat 804 is in thread connection with the forward thread ring 803, the first support column 805 is fixedly connected to the first thread seat 804, the first mounting seat 806 is fixedly mounted on the first support column 805, the first connecting rod 807 is fixedly connected to the first mounting seat 806, one end of the first connecting rod 807 is inserted into the groove 6, the first clamping plate 808 is fixedly mounted on the first connecting rod, the reverse thread ring 809 is fixedly connected to the transmission rotating rod 802 is fixedly connected to the second clamping plate 814, the second end of the second connecting rod is inserted into the second connecting rod 813 is fixedly connected to the second support column 813, and the second end of the second connecting rod is fixedly mounted on the second clamping plate 810.
In this embodiment, through the setting of first servo motor 801, transmission bull stick 802, forward thread circle 803, first screw thread seat 804, first pillar 805, first mount pad 806, head rod 807, first grip block 808, reverse thread circle 809, second screw thread seat 810, second pillar 811, second mount pad 812, second connecting rod 813 and second grip block 814, can conveniently carry out the centre gripping spacing to quartz crucible body 7, be favorable to carrying out the centre gripping to quartz crucible body 7's outside, be convenient for keep quartz crucible body 7's stability, improve quartz crucible body 7 follow-up polishing's effect, reduce quartz crucible body 7 and appear the possibility of shifting.
Specifically, the lifting mechanism 11 includes a second servo motor 1101, a threaded rod 1102 and a threaded cylinder 1103, the second servo motor 1101 is installed in the processing box 3, the threaded rod 1102 is fixedly connected to the output end of the second servo motor 1101, and the threaded cylinder 1103 is in threaded connection with the threaded rod 1102.
In this embodiment, through the setting of second servo motor 1101, threaded rod 1102 and screw thread section of thick bamboo 1103, can go up and down the operation to lining mechanism 10, be favorable to adjusting lining mechanism 10's height, the position of use of lining mechanism 10 is convenient for control, improves quartz crucible body 7 and places the effect of polishing positively and negatively, increases lining mechanism 10's practicality.
Specifically, the lining mechanism 10 includes a fixing base 1001, a double-end electric control telescopic rod 1002, a first lining board 1003, a second lining board 1004 and a controller 1005, the fixing base 1001 is fixedly mounted on the threaded cylinder 1103, the double-end electric control telescopic rod 1002 is mounted in the fixing base 1001, the first lining board 1003 is fixedly mounted at one end of the double-end electric control telescopic rod 1002, the second lining board 1004 is fixedly mounted at the other end of the double-end electric control telescopic rod 1002, the controller 1005 is mounted in the fixing base 1001, and the controller 1005 is used in pairing with the double-end electric control telescopic rod 1002.
In this embodiment, through setting up of fixing base 1001, the automatically controlled telescopic link 1002 of bi-polar, first interior welt 1003, second interior welt 1004 and controller 1005, can conveniently carry out spacing propping to the inside of quartz crucible body 7, stability when being favorable to keeping quartz crucible body 7 to polish improves the quality that quartz crucible body 7 polished, promotes the effect of the spacing centre gripping of quartz crucible body 7.
Specifically, the polishing mechanism 9 includes a longitudinal electric control slide rail 901, a transverse electric control slide rail 902, a servo electric cylinder 903, a polisher 904 and a polishing roller 905, the longitudinal electric control slide rail 901 is fixedly mounted on the processing box 3, the transverse electric control slide rail 902 is mounted on the longitudinal electric control slide rail 901, the servo electric cylinder 903 is fixedly mounted on the transverse electric control slide rail 902, the polisher 904 is fixedly mounted at the output end of the servo electric cylinder 903, and the polishing roller 905 is mounted on the polisher 904.
In this embodiment, through the setting of vertical automatically controlled slide rail 901, horizontal automatically controlled slide rail 902, servo electric cylinder 903, sander 904 and grinding roller 905, can conveniently polish the surface of quartz crucible body 7 and handle, be favorable to polishing the processing to the positive and negative of quartz crucible body 7, for the staff provides convenience, save time improves work efficiency.
Specifically, the first cleat 12 is fixedly mounted to the surface of each of the first clamping plate 808 and the second clamping plate 814.
In this embodiment, through the setting of the first non-slip mat 12, the quartz crucible body 7 can be protected during clamping, the abrasion degree of the first clamping plate 808 and the second clamping plate 814 when clamping the quartz crucible body 7 is reduced, and the outer surface of the quartz crucible body 7 is protected conveniently.
Specifically, the surface mounting of processing case 3 has guard gate 4, and guard gate 4's surface mounting has observation window 5.
In this embodiment, through the setting of guard gate 4 and observation window 5, can protect when processing to quartz crucible body 7 polishing, reduce quartz crucible body 7 and polish the degree that sweeps splashed to can be convenient for the staff observe quartz crucible body 7's the condition of polishing, promote grinding device's practicality.
Specifically, the second anti-slip pad 13 is fixedly mounted on the surface of each of the first and second inner liners 1003 and 1004.
In this embodiment, through the setting of second slipmat 13, can protect when lining quartz crucible body 7, be favorable to reducing the wearing and tearing of first interior welt 1003 and second interior welt 1004 to quartz crucible body 7 internal surface, the protection effect when improving quartz crucible body 7 lining spacing.
When the quartz crucible polishing device is used, firstly, a worker rotates the protective door 4 to open, then places the quartz crucible body 7 to be processed in the groove 6, then starts the external clamping mechanism 8 to carry out limit clamping on the quartz crucible body 7 through the control panel 2, at the moment, the first servo motor 801 drives the transmission rotating rod 802 to rotate, then the transmission rotating rod 802 drives the forward thread ring 803 and the reverse thread ring 809 to simultaneously rotate, then the first thread seat 804 and the second thread seat 810 slide in opposite directions, then the first thread seat 804 drives the first support column 805, the first mounting seat 806, the first connecting rod 807 and the first clamping plate 808 to move towards the quartz crucible body 7, then the second thread seat 810 drives the second support column 811, the second mounting seat 812, the second connecting rod 813 and the second clamping plate 814 to move towards the quartz crucible body 7, so that the first anti-slip pad 1103 on the surfaces of the first clamping plate 808 and the second clamping plate 814 is stably attached to the outer surface of the quartz crucible body 7, then the worker closes the protective door 4, then starts the polishing mechanism 9 through the control panel 2 to slide in opposite directions, then the first thread seat 804 drives the first support column 805, the first connecting rod 807 and the first clamping plate 808 move towards the quartz crucible body 7, then the second clamping plate 814 moves the second clamping plate 814 towards the external clamping mechanism, then the second clamping plate 11 is turned up through the second clamping mechanism 10 to rotate towards the external surface of the quartz crucible body 7, then the threaded rod 10 is screwed on the surface is controlled by the control panel 2, and then the external clamping mechanism is screwed on the threaded rod 11 to rotate on the surface of the quartz crucible body 7, and finally the surface is screwed on the surface is screwed down, then, the lining mechanism 10 is restarted to pad the inside of the quartz crucible body 7, at this time, the controller 1005 controls the double-end electric control telescopic rod 1002 to extend, then the two ends of the double-end electric control telescopic rod 1002 drive the first lining plate 1003 and the second lining plate 1004 to move towards the inner wall of the quartz crucible body 7, then the second anti-slip pads 13 on the surfaces of the first lining plate 1003 and the second lining plate 1004 are attached to the inner wall of the quartz crucible body 7, thereby the quartz crucible body 7 is subjected to lining clamping, then a worker restarts the polishing mechanism 9 to polish the bottom of the quartz crucible body 7, in the process, the vertical electric control slide rail 901 and the horizontal electric control slide rail 902 drive the polisher 904 and the polishing roller 905 to move, then the heights of the polisher 904 and the polishing roller 905 are adjusted through the servo electric cylinder, then the polisher 905 is driven to polish the quartz crucible body 7, and finally the worker takes the polished quartz crucible body 7 out of the groove 6.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims (8)

1. A grinding device of quartz crucible, its characterized in that: including supporting base (1), the surface mounting who supports base (1) has control panel (2), the top fixedly connected with processing case (3) of supporting base (1), recess (6) have been seted up to the inside of processing case (3), the inside of recess (6) is provided with quartz crucible body (7), the internally mounted of processing case (3) has outer clamp mechanism (8), the internally mounted of processing case (3) has grinding machanism (9), the internally mounted of processing case (3) has elevating system (11), and elevating system (11) are located under recess (6), lining mechanism (10) are installed on the top of elevating system (11).
2. The polishing apparatus for a quartz crucible as recited in claim 1, wherein: the external clamping mechanism (8) comprises a first servo motor (801), a transmission rotating rod (802), a forward thread ring (803), a first thread seat (804), a first support column (805), a first mounting seat (806), a first connecting rod (807), a first clamping plate (808), a reverse thread ring (809), a second thread seat (810), a second support column (811), a second mounting seat (812), a second connecting rod (813) and a second clamping plate (814), wherein the first servo motor (801) is mounted in a processing box (3), the transmission rotating rod (802) is mounted in the processing box (3), one end of the transmission rotating rod (802) is fixedly connected with the output end of the first servo motor (801), the forward thread ring (803) is fixedly connected to the transmission rotating rod (802), the first thread seat (804) is in threaded connection to the forward thread ring (810), the first support column (805) is fixedly connected to the first thread seat (804), the first mounting seat (806) is fixedly mounted on the first support column (803) is fixedly mounted on the first threaded seat (806), one end of the first support column (803) is fixedly mounted on the first connecting rod (807) is fixedly connected to the first connecting rod (807), one end of the first support column (803) is fixedly connected to the first connecting rod (807), the reverse thread circle (809) is fixedly connected to the transmission rotating rod (802), the second thread seat (810) is in threaded connection to the reverse thread circle (809), the second support column (811) is fixedly connected to the second thread seat (810), the second mounting seat (812) is fixedly mounted on the second support column (811), the second connecting rod (813) is fixedly connected to the second mounting seat (812), one end of the second connecting rod (813) penetrates into the groove (6), the second clamping plate (814) is fixedly mounted on the second connecting rod (813), and the second clamping plate (814) is matched with the first clamping plate (808).
3. The polishing apparatus for a quartz crucible as recited in claim 1, wherein: elevating system (11) are including second servo motor (1101), threaded rod (1102) and screw thread section of thick bamboo (1103), second servo motor (1101) are installed in processing case (3), threaded rod (1102) fixed connection is in the output of second servo motor (1101), screw thread section of thick bamboo (1103) threaded connection is on threaded rod (1102).
4. A polishing apparatus for a quartz crucible as defined in claim 3, wherein: the lining mechanism (10) comprises a fixing seat (1001), a double-end electric control telescopic rod (1002), a first lining plate (1003), a second lining plate (1004) and a controller (1005), wherein the fixing seat (1001) is fixedly installed on a threaded cylinder (1103), the double-end electric control telescopic rod (1002) is installed in the fixing seat (1001), the first lining plate (1003) is fixedly installed at one end of the double-end electric control telescopic rod (1002), the second lining plate (1004) is fixedly installed at the other end of the double-end electric control telescopic rod (1002), the controller (1005) is installed in the fixing seat (1001), and the controller (1005) is matched with the double-end electric control telescopic rod (1002).
5. The polishing apparatus for a quartz crucible as recited in claim 1, wherein: the polishing mechanism (9) comprises a longitudinal electric control sliding rail (901), a transverse electric control sliding rail (902), a servo electric cylinder (903), a sander (904) and a polishing roller (905), wherein the longitudinal electric control sliding rail (901) is fixedly installed on a processing box (3), the transverse electric control sliding rail (902) is installed on the longitudinal electric control sliding rail (901), the servo electric cylinder (903) is fixedly installed on the transverse electric control sliding rail (902), the sander (904) is fixedly installed at the output end of the servo electric cylinder (903), and the polishing roller (905) is installed on the sander (904).
6. The polishing apparatus for a quartz crucible as recited in claim 2, wherein: the surfaces of the first clamping plate (808) and the second clamping plate (814) are fixedly provided with a first anti-slip pad (12).
7. The polishing apparatus for a quartz crucible as recited in claim 1, wherein: the surface mounting of processing case (3) has guard gate (4), the surface mounting of guard gate (4) has observation window (5).
8. The polishing apparatus for a quartz crucible as recited in claim 4, wherein: the surfaces of the first lining plate (1003) and the second lining plate (1004) are fixedly provided with a second anti-slip pad (13).
CN202321692307.3U 2023-06-30 2023-06-30 Quartz crucible polishing device Active CN220312878U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321692307.3U CN220312878U (en) 2023-06-30 2023-06-30 Quartz crucible polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321692307.3U CN220312878U (en) 2023-06-30 2023-06-30 Quartz crucible polishing device

Publications (1)

Publication Number Publication Date
CN220312878U true CN220312878U (en) 2024-01-09

Family

ID=89422018

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202321692307.3U Active CN220312878U (en) 2023-06-30 2023-06-30 Quartz crucible polishing device

Country Status (1)

Country Link
CN (1) CN220312878U (en)

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