CN220305547U - Multi-point flexible supporting structure for lens - Google Patents
Multi-point flexible supporting structure for lens Download PDFInfo
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- CN220305547U CN220305547U CN202320752900.6U CN202320752900U CN220305547U CN 220305547 U CN220305547 U CN 220305547U CN 202320752900 U CN202320752900 U CN 202320752900U CN 220305547 U CN220305547 U CN 220305547U
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- lens
- reed
- supporting structure
- frame
- elastic
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- 235000014676 Phragmites communis Nutrition 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 19
- 238000003825 pressing Methods 0.000 claims description 7
- 238000001259 photo etching Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 6
- 230000008859 change Effects 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 238000001459 lithography Methods 0.000 description 6
- 230000032683 aging Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Lens Barrels (AREA)
Abstract
The utility model discloses a lens multipoint flexible supporting structure, belongs to the technical field of photoetching objective lenses, and solves the problem that a photoetching objective lens of a photoetching machine is easy to generate thermal deformation in use of the lens, so that the performance of the photoetching machine is affected. The utility model can slowly release the deformation of the lens caused by environmental change in the actual use process through the multi-point flexible supporting structure.
Description
Technical Field
The utility model belongs to the technical field of photoetching objective lenses, and particularly relates to a lens multipoint flexible supporting structure.
Background
Photolithography, the most critical process in the fabrication of large-scale integrated circuits, is a technique for imaging a mask pattern onto a substrate such as a silicon wafer using a laser. In order to better meet the industrial production requirements, the lithography technology is continuously developed towards higher resolution, larger exposure area and higher yield. The projection lithography objective is a heart of a lithography machine, and the performance of the projection lithography objective directly influences three core indexes of resolution, overlay accuracy and yield of the lithography machine. The stability and consistency of the support of the lenses has a direct influence on the shape of the lenses and the gap between the lenses, which plays a decisive role in the imaging quality of the final objective. During use, the lens may thermally deform under the influence of ambient temperature, which requires the lens support to accommodate such uncertain deformation during actual use, maintaining uniformity and stability of the lens force. Therefore, the stress-free support of the projection lithography objective lens not only needs to meet the requirements of being convenient to assemble and adjust and high in consistency, but also needs to ensure high stability and high adaptability in the actual use process.
Disclosure of Invention
The utility model aims at:
in order to solve the problem that the photoetching machine projection photoetching objective lens in the prior art is easy to generate thermal deformation in the use of the lens, thereby influencing the performance of the photoetching machine, the lens multipoint flexible supporting structure is provided.
The technical scheme adopted by the utility model is as follows:
the utility model provides a lens multiple spot flexible supporting structure, includes the lens, the periphery of lens is connected with the picture frame, be connected with a plurality of briquetting between the upper surface of picture frame and lens, be connected with multiunit elastic supporting mechanism between the lower surface of picture frame and lens, elastic supporting mechanism evenly arranges along the circumference of lens, is provided with the boss that is used for installing elastic supporting mechanism on the lower surface of lens.
Further, the elastic supporting mechanism comprises a reed and a top nail, the reed is connected with the top nail through threads, one end of the reed is fixedly connected with the lens frame through a screw, the top nail is arranged at the other end of the reed and extends into the lower part of the lens, and the top nail is in contact installation with the lower surface of the boss of the lens.
Further, 3 pressing blocks are uniformly arranged along the circumferential direction of the lens frame, and gaps are formed between the pressing blocks and the lenses.
Further, the elastic supporting mechanisms are uniformly provided with 3n pieces along the circumferential direction of the lens, wherein n=1, 2,3 … … n.
Further, the lens barrel is connected to the outside of the lens frame and is fixedly connected with the lens frame and the elastic supporting mechanism through screws.
In summary, due to the adoption of the technical scheme, the beneficial effects of the utility model are as follows:
the flexible supporting structure of the lens adopts a full-elastic supporting structure, so that the deformation of the lens caused by environmental change in the actual use process can be slowly released; the supporting force of the elastic supporting structure is adjustable, and the lens can be ensured to be in a balanced supporting state through assembly and adjustment; the elastic supporting structure material can ensure the stability of supporting force in the whole use process through aging treatment; the utility model can be suitable for lenses with various calibers and masses and high-precision lens supports except for projection photoetching objective lenses by adjusting the number of the elastic supporting mechanisms and the rigidity of the reeds, and has universality.
Drawings
FIG. 1 is a front cross-sectional view of a multi-point flexible support structure for a lens of the present utility model;
FIG. 2 is a top view of the multi-point flexible support structure of the lens of the present utility model;
FIG. 3 is a bottom view of the multi-point flexible support structure of the lens of the present utility model;
FIG. 4 is a schematic view of a resilient support structure;
FIG. 5 is a graph showing the relationship between the supporting force and the deformation of the elastic supports with different thicknesses.
The marks in the figure: 1-lens, 2-picture frame, 3-lens cone, 4-briquetting, 5-elastic supporting mechanism, 6-reed, 7-top nail.
Detailed Description
The present utility model will be described in further detail with reference to the following examples in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
Example 1
As shown in fig. 1-3, a multi-point flexible supporting structure for lenses comprises a lens 1, wherein a lens frame 2 is connected to the periphery of the lens 1, a plurality of pressing blocks 4 are connected between the lens frame 2 and the upper surface of the lens 1, a plurality of groups of elastic supporting mechanisms 5 are connected between the lens frame 2 and the lower surface of the lens 1, the elastic supporting mechanisms 5 are uniformly arranged along the circumference of the lens 1, and a boss for installing the elastic supporting mechanisms 5 is arranged on the lower surface of the lens 1.
The surface of the pressing block 4 contacted with the upper surface of the boss of the lens 1 needs to ensure the flatness during processing.
Example 2
On the basis of embodiment 1, as shown in fig. 4, the elastic supporting mechanism 5 comprises a reed 6 and a top nail 7, the reed 6 and the top nail 7 are connected through threads, one end of the reed 6 is fixedly connected with the lens frame 2 through a screw, the top nail 7 is arranged at the other end of the reed 6 and extends into the lower part of the lens 1, and the top nail 7 is arranged in contact with the lower surface of a boss of the lens 1.
The spring 6 is connected with the top nail 7 through threads, and the height of the top nail 7 can be adjusted through adjusting the threads, so that the deformation of the spring 6 is adjusted, and the supporting force of a single elastic support is adjusted. During assembling and adjusting, the screw threads of the spring 6 and the top nails 7 are adjusted, and the mounting surfaces of the lens frame 2 and the lens barrel 3 are used as references, so that the surfaces of all the top nails 7, which are in contact with the lower surfaces of the bosses of the lens 1, are positioned on the same plane and are parallel to the reference surfaces.
The height position of the top nail 7 is in linear relation with the supporting force generated by the deformation of the reed 6, and the relation between the height position of the top nail 7 and the supporting force is shown in fig. 5 under different thicknesses of the reed 6. By modifying the thickness of the reed 6, the stiffness value of the reed 6 can be adjusted.
The reed 6 is made of material with better elasticity, preferably beryllium bronze can be used. The reed 6 should be subjected to aging treatment to ensure the stability of the reed 6.
Example 3
On the basis of example 1, 3 press blocks 4 are uniformly arranged along the circumferential direction of the lens frame 2, and gaps are arranged between the press blocks 4 and the lenses 1, and the gaps are micro gaps. In the embodiment, 3 pressing blocks 4 are uniformly distributed along the circumference, so that the limit of the upper surface of the lens 1 can be realized.
Example 4
On the basis of embodiment 1, the elastic supporting mechanisms 5 are uniformly provided with 3n numbers in the circumferential direction of the lens 1, where n=1, 2,3 … … n. Preferably, as shown in fig. 3, the elastic support means 5 are provided with 3×4=12. The multiple n is determined according to the mass and caliber of the actual lens 1, and the number of the elastic supports uniformly distributed can be determined according to the final deformation of the lens 1 through finite element simulation analysis.
Example 5
On the basis of the embodiments 1-4, the lens barrel 3 is connected to the outside of the lens frame 2, and the lens barrel 3 is fixedly connected with the lens frame 2 and the elastic supporting mechanism 5 through screws.
The principle of the utility model is as follows: the utility model utilizes the elastic mechanics principle, and the deformation of the slow-release lens 1 caused by environmental change in the actual use process is realized through the multi-point flexible supporting structure; the adjustment of the supporting force is realized by adjusting the deformation of the flexible supporting structure, so that the lens 1 is in an equilibrium supporting state; according to the influence factors of elastic deformation, the thickness of the reed 6 is adjusted to realize different rigidities of the reed 6, so that the support of the lens 1 with different quality and caliber is adapted; finally, according to the caliber and the number of the lenses 1, reasonable supporting points are selected, and the high-uniformity, high-stability and high-adaptability stress-free supporting of the lenses 1 is realized.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (5)
1. The utility model provides a lens multiple spot flexible supporting structure, its characterized in that, includes lens (1), the periphery of lens (1) is connected with picture frame (2), be connected with a plurality of briquetting (4) between the upper surface of picture frame (2) and lens (1), be connected with multiunit elastic supporting mechanism (5) between the lower surface of picture frame (2) and lens (1), elastic supporting mechanism (5) evenly arrange along the circumference of lens (1), are provided with the boss that is used for installing elastic supporting mechanism (5) on the lower surface of lens (1).
2. The multi-point flexible supporting structure for lenses according to claim 1, wherein the elastic supporting mechanism (5) comprises a reed (6) and a top nail (7), the reed (6) and the top nail (7) are connected through threads, one end of the reed (6) is fixedly connected with the lens frame (2) through a screw, the top nail (7) is arranged at the other end of the reed (6) and extends into the lower part of the lens (1), and the top nail (7) is arranged in contact with the lower surface of a boss of the lens (1).
3. The multi-point flexible supporting structure for lenses according to claim 1, wherein 3 pressing blocks (4) are uniformly arranged along the circumferential direction of the lens frame (2), and gaps are formed between the pressing blocks (4) and the lenses (1).
4. A multi-point flexible support structure for lenses according to claim 1, in which the elastic support means (5) are uniformly provided with 3n in the circumferential direction of the lens (1), where n=1, 2,3 … … n.
5. A multi-point flexible support structure for lenses according to any of claims 1-4, in which the lens frame (2) is externally connected with a lens barrel (3), and the lens barrel (3) is fixedly connected with the lens frame (2) and the elastic support mechanism (5) by screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320752900.6U CN220305547U (en) | 2023-04-07 | 2023-04-07 | Multi-point flexible supporting structure for lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320752900.6U CN220305547U (en) | 2023-04-07 | 2023-04-07 | Multi-point flexible supporting structure for lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220305547U true CN220305547U (en) | 2024-01-05 |
Family
ID=89350244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320752900.6U Active CN220305547U (en) | 2023-04-07 | 2023-04-07 | Multi-point flexible supporting structure for lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220305547U (en) |
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2023
- 2023-04-07 CN CN202320752900.6U patent/CN220305547U/en active Active
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