CN220265937U

CN220265937U - Double-heating mechanism of single crystal furnace

Info

Publication number: CN220265937U
Application number: CN202322151273.3U
Authority: CN
Inventors: 戴炜炜
Original assignee: Fujian Zhongwei Semiconductor Material Co ltd
Current assignee: Fujian Zhongwei Semiconductor Material Co ltd
Priority date: 2023-08-11
Filing date: 2023-08-11
Publication date: 2023-12-29
Anticipated expiration: 2033-08-11

Abstract

The utility model discloses a double heating mechanism of a single crystal furnace, which relates to the technical field of single crystal furnaces and comprises a box body, wherein the interior of the box body is rotationally connected with a furnace body through a bearing, the interior of the box body is rotationally connected with a first rotating shaft, the first rotating shaft is rotationally connected with the furnace body and extends to the inner cavity of the furnace body, the outer side of the first rotating shaft is fixedly connected with a plurality of stirring rods, the outer side of the furnace body is fixedly provided with an outer gear ring near the lower position, and the interior of the box body is fixedly connected with a motor, and the double heating mechanism has the beneficial effects that: through the motor that sets up, the second gear of control third pivot and one end rotates, through under the meshing connection effect of the outer ring gear in second gear and the furnace body outside, can drive the furnace body and rotate to under the transmission effect through the belt, realized that the puddler in first pivot and the outside rotates, thereby can carry out intensive mixing to the material, make the material be heated evenly, improved the heating effect of device.

Description

Double-heating mechanism of single crystal furnace

Technical Field

The utility model relates to the technical field of single crystal furnaces, in particular to a double heating mechanism of a single crystal furnace.

Background

The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by using a graphite heater to melt polycrystalline materials such as polysilicon. The existing process for heating the material is to manually put the material into the single crystal furnace directly, and then a heating mechanism in the single crystal furnace heats the material. However, the existing heating mechanism has poor heating effect and can not uniformly heat materials, so we propose a double heating mechanism of a single crystal furnace.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model provides a double heating mechanism of a single crystal furnace, which solves the problems in the background art.

In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a two heating mechanism of single crystal growing furnace, includes the box, the inside of box is connected with the furnace body through the bearing rotation, the inside of box is rotated and is connected with first pivot, first pivot is rotated with the furnace body and is connected and extend to the inner chamber of furnace body, the outside fixedly connected with puddler of first pivot, the outside of furnace body just is close to below position fixed mounting has outer ring gear, the inside fixedly connected with motor of box, the output fixedly connected with third pivot of motor, the one end fixedly connected with second gear of third pivot, second gear and outer ring gear meshing are connected, the outside fixedly connected with second band pulley of third pivot, the outside fixedly connected with first band pulley of first pivot, first band pulley passes through belt and second band pulley drive connection.

Preferably, a first heater is arranged in the box body, and a second heater is arranged in the furnace body.

Preferably, the top of the furnace body is movably connected with a sealing cover, and the bottom of the furnace body is fixedly connected with a first discharging pipe.

Preferably, the outside fixedly connected with supporting seat of first pivot, the inside rotation of supporting seat is connected with the second pivot, the outside fixedly connected with scraper blade of second pivot.

Preferably, one end of the second rotating shaft is fixedly connected with a first gear, an inner gear ring is fixedly connected in the furnace body, and the first gear is meshed with the inner gear ring.

Preferably, a second discharging pipe is fixedly connected to one side of the box body and close to the lower position.

The utility model provides a double-heating mechanism of a single crystal furnace, which has the following beneficial effects:

1. this two heating mechanism of single crystal growing furnace, through the motor that sets up, the second gear of control third pivot and one end rotates, through under the meshing connection effect of the outer ring gear in second gear and the furnace body outside, can drive the furnace body and rotate to under the transmission effect through the belt, realized that the puddler in first pivot and the outside rotates, thereby can carry out intensive mixing to the material, mutually support through first heater and second heater, make the material be heated evenly, improved the heating effect of device.

2. This two heating mechanism of single crystal growing furnace, in the stirring, first pivot can drive supporting seat and inside second pivot and rotate for the second pivot removes, through the meshing connection effect of first gear and ring gear, has realized that the second pivot rotates in the time of moving along the inner wall of the furnace body, thereby utilizes the scraper blade to clear up the inner wall of furnace body, prevents that the impurity in the raw materials from adhering to the inner wall of furnace body.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is an enlarged view of the utility model at A in FIG. 1;

fig. 3 is an enlarged view of the utility model at B in fig. 1.

In the figure: 1. a case; 2. a first heater; 3. a furnace body; 4. a second heater; 5. a belt; 6. a first pulley; 7. a first discharge pipe; 8. a second discharge pipe; 9. a support base; 10. sealing cover; 11. a first rotating shaft; 12. a stirring rod; 13. a scraper; 14. a second rotating shaft; 15. a first gear; 16. an inner gear ring; 17. a motor; 18. a third rotating shaft; 19. a second pulley; 20. a second gear; 21. an outer gear ring.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.

Embodiment one:

referring to fig. 1 to 3, a dual heating mechanism of a single crystal furnace comprises a box 1, wherein the interior of the box 1 is rotatably connected with a furnace body 3 through a bearing, the interior of the box 1 is rotatably connected with a first rotating shaft 11, the first rotating shaft 11 is rotatably connected with the furnace body 3 and extends to the inner cavity of the furnace body 3, the outer side of the first rotating shaft 11 is fixedly connected with a plurality of stirring rods 12, an outer gear ring 21 is fixedly arranged at the outer side of the furnace body 3 and near the lower position, a motor 17 is fixedly connected with the interior of the box 1, the output end of the motor 17 is fixedly connected with a third rotating shaft 18, one end of the third rotating shaft 18 is fixedly connected with a second gear 20, the second gear 20 is meshed with the outer gear ring 21, the outer side of the third rotating shaft 18 is fixedly connected with a second belt wheel 19, the outer side of the first rotating shaft 11 is fixedly connected with a first belt wheel 6, the first belt wheel 6 is in transmission connection with the second belt wheel 19 through a belt 5, the first heater 2 is arranged in the box body 1, the second heater 4 is arranged in the furnace body 3, the third rotating shaft 18 and the second gear 20 at one end are controlled to rotate through the arranged motor 17, the furnace body 3 can be driven to rotate under the meshing connection effect of the second gear 20 and the outer gear ring 21 at the outer side of the furnace body 3, the first rotating shaft 11 and the stirring rod 12 at the outer side are rotated under the transmission effect of the belt 5, so that materials can be fully stirred, the materials are heated uniformly through the mutual matching of the first heater 2 and the second heater 4, the heating effect of the device is improved, the sealing cover 10 is movably connected at the top of the furnace body 3, the sealing cover 10 can be opened to feed materials into the inner side of the furnace body 3, the first discharging pipe 7 is fixedly connected at the bottom of the furnace body 3, one side of the box body 1 is fixedly connected with a second discharging pipe 8 close to the lower position, and the heated material is discharged into the inner cavity of the box body 1 through the first discharging pipe 7 and then is discharged outside through the second discharging pipe 8.

Embodiment two:

the outside fixedly connected with supporting seat 9 of first pivot 11, the inside rotation of supporting seat 9 is connected with second pivot 14, the outside fixedly connected with scraper blade 13 of second pivot 14, the one end fixedly connected with first gear 15 of second pivot 14, the inside fixedly connected with ring gear 16 of furnace body 3, first gear 15 and ring gear 16 meshing are connected, in the time of the stirring, first pivot 11 can drive supporting seat 9 and inside second pivot 14 and rotate, make second pivot 14 remove, under the meshing connection effect of first gear 15 and ring gear 16, it carries out the rotation to have realized that second pivot 14 removes along the inner wall of furnace body 3 simultaneously, thereby utilize scraper blade 13 to clear up the inner wall of furnace body 3, prevent impurity in the raw materials from adhering to the inner wall of furnace body 3.

In summary, when the single crystal furnace dual heating mechanism is used, firstly, the material is added into the inner cavity of the furnace body 3, and the sealing cover 10 is covered on the surface of the furnace body 3, at this time, the motor 17 is started, the third rotating shaft 18 and the second gear 20 at one end are controlled to rotate, the furnace body 3 can be driven to rotate under the meshing connection effect of the second gear 20 and the outer gear ring 21 outside the furnace body 3, and the first rotating shaft 11 and the stirring rod 12 outside the furnace body are realized to rotate under the transmission effect of the belt 5, so that the material can be fully stirred, the material is uniformly heated through the mutual matching of the first heater 2 and the second heater 4, the heated material is discharged into the inner cavity of the box body 1 through the first discharging pipe 7, the second discharging pipe 8 is discharged outside, and the first rotating shaft 11 can drive the supporting seat 9 and the second rotating shaft 14 inside to rotate while stirring, the second rotating shaft 14 can move along the inner wall 3 under the meshing connection effect of the first gear 15 and the inner gear ring 16, and the furnace body 13 is cleaned by the self-rotation of the scraping plate 3.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims

1. The utility model provides a single crystal growing furnace double heating mechanism, includes box (1), its characterized in that: the inside of box (1) is connected with furnace body (3) through the bearing rotation, the inside rotation of box (1) is connected with first pivot (11), first pivot (11) rotate with furnace body (3) and extend to the inner chamber of furnace body (3), the outside fixedly connected with puddler (12) of first pivot (11), the outside of furnace body (3) just is close to below position fixed mounting and has outer ring gear (21), the inside fixedly connected with motor (17) of box (1), the output fixedly connected with third pivot (18) of motor (17), the one end fixedly connected with second gear (20) of third pivot (18), second gear (20) and outer ring gear (21) meshing are connected, the outside fixedly connected with second band pulley (19) of third pivot (18), the outside fixedly connected with first band pulley (6) of first pivot (11), first band pulley (6) are connected with second band pulley (19) through belt (5).

2. The dual heating mechanism of a single crystal furnace of claim 1, wherein: the inside of box (1) is provided with first heater (2), the inside of furnace body (3) is provided with second heater (4).

3. The dual heating mechanism of a single crystal furnace of claim 1, wherein: the top of furnace body (3) swing joint has sealed lid (10), the bottom fixedly connected with first discharging pipe (7) of furnace body (3).

4. The dual heating mechanism of a single crystal furnace of claim 1, wherein: the outer side of the first rotating shaft (11) is fixedly connected with a supporting seat (9), the inside of the supporting seat (9) is rotatably connected with a second rotating shaft (14), and the outer side of the second rotating shaft (14) is fixedly connected with a scraping plate (13).

5. The dual heating mechanism of a single crystal furnace of claim 4, wherein: one end of the second rotating shaft (14) is fixedly connected with a first gear (15), an inner gear ring (16) is fixedly connected inside the furnace body (3), and the first gear (15) is meshed with the inner gear ring (16).

6. The dual heating mechanism of a single crystal furnace of claim 1, wherein: and a second discharging pipe (8) is fixedly connected to one side of the box body (1) and close to the lower position.