CN220251766U

CN220251766U - Wafer conveying detection device

Info

Publication number: CN220251766U
Application number: CN202321443093.6U
Authority: CN
Inventors: 盛小艳; 沈明达; 韩芬芬
Original assignee: Wuxi Aokosi Semiconductor Equipment Co ltd
Current assignee: Wuxi Aokosi Semiconductor Equipment Co ltd
Priority date: 2023-06-07
Filing date: 2023-06-07
Publication date: 2023-12-26
Anticipated expiration: 2033-06-07

Abstract

The application relates to a wafer passes piece detection device, including detection case and chamber door, the roof is fixed with the measuring lamp in the detection case, and the diapire rotates and is connected with the montant in the detection case, and first slope subassembly is installed to the montant upper end, and first slope subassembly includes first U-shaped board, first motor, first pivot and first rotating block, and surface mounting has the second slope subassembly on the first rotating block, and the second slope subassembly includes second U-shaped board, second motor, second pivot and second rotating block, and surface mounting has the mounting panel on the second rotating block, installs drive assembly in the detection case. When the wafer needs to be detected, a worker fixes the wafer on the mounting plate and starts the detection lamp, drives the vertical rod to rotate through the driving component, adjusts the rotation angle of the mounting plate and the wafer, drives the first rotating shaft and the second rotating shaft to rotate through the first motor and the second motor, and enables the second U-shaped plate and the mounting plate to incline, so that the multi-directional angle of the mounting plate is adjusted, and the wafer multi-angle detection is facilitated.

Description

Wafer conveying detection device

Technical Field

The utility model relates to the technical field of wafer detection, in particular to a wafer transfer detection device.

Background

Wafer refers to a silicon wafer used for manufacturing silicon semiconductor circuits, the original material of which is silicon. The high-purity polycrystalline silicon is dissolved and then doped with silicon crystal seed, and then slowly pulled out to form cylindrical monocrystalline silicon. The silicon ingot is ground, polished, and sliced to form a silicon wafer, i.e., a wafer. Domestic wafer lines are mainly 8 inches and 12 inches.

The utility model discloses quick detection equipment for appearance defects of wafers, which comprises a base, a frame and a wafer seat, wherein the base is provided with a lamp groove and a control panel, an LED lamp group is arranged in the lamp groove, the frame and the wafer seat are respectively arranged on the base, a detection lens and an XY movable shaft are arranged on the frame, the detection lens is arranged on the XY movable shaft, the wafer seat is arranged above the LED lamp group and below the detection lens, the wafer seat is provided with two slide rails, two connecting seats and two clamping seats, the slide rails are arranged on the base at two sides of the lamp groove, the two connecting seats are connected with two slide rails, the two clamping seats are respectively arranged on the two connecting seats and are used for fixing wafer plates, wafers to be detected are arranged on the wafer plates, and the control panel is respectively connected with the LED lamp group, the detection lens and the XY movable shaft.

With respect to the related art in the above, the inventors consider that there are the following drawbacks: the wafer to be detected cannot be inclined or rotated, so that the wafer cannot be detected at multiple angles, and the accuracy of wafer detection is reduced.

Disclosure of Invention

In order to solve the above problems, the present utility model provides a wafer transfer inspection apparatus.

The technical aim of the utility model is realized by the following technical scheme: the wafer conveying detection device comprises a detection box with an opening at one side and a box door hinged to the side wall of the detection box and used for closing the opening of the detection box, wherein a detection lamp is fixed on the inner top wall of the detection box, the inner bottom wall of the detection box is rotationally connected with a vertical rod, a first inclination assembly is arranged at the upper end of the vertical rod and comprises a first U-shaped plate fixed with the upper end of the vertical rod, a first motor fixed with the side wall of the first U-shaped plate, a first rotating shaft fixed with the end part of an output shaft of the first motor and a first rotating block fixedly sleeved on the first rotating shaft;

the first rotating block upper surface mounting has the second tilting subassembly, the second tilting subassembly include with first rotating block upper surface fixed's second U-shaped board, with the fixed second motor of second U-shaped board lateral wall, with the fixed second pivot of second motor output shaft tip and the fixed cover locate the epaxial second rotating block of second, second U-shaped board and first U-shaped board mutually perpendicular set up, second rotating block upper surface is fixed with the mounting panel that is used for fixed wafer, install the drive assembly who is used for driving montant pivoted in the detection case.

Through adopting above-mentioned technical scheme, when needs detect the wafer, the staff is fixed the wafer on the mounting panel and is opened the inspection lamp, drives the montant through drive assembly and rotates to adjust the rotation angle of mounting panel and wafer, and drive first pivot and second pivot through first motor and second motor and rotate, thereby make second U-shaped board and mounting panel slope, thereby adjust the multidirectional angle of mounting panel, be convenient for detect the wafer multi-angle, be favorable to improving the accuracy to the wafer detection.

Further, the driving assembly comprises a third motor fixed with the inner bottom wall of the detection box, a driving gear fixed with the end part of an output shaft of the third motor and a driven gear fixedly sleeved on the vertical rod and meshed with the driving gear.

Through adopting above-mentioned technical scheme, when needs order about the montant and rotate, the staff only need order about the driving gear rotation through the third motor, because driving gear and driven gear meshing, driven gear fixed cover is established on the montant, consequently makes the montant rotate and drives the mounting panel rotation, is convenient for adjust the rotation angle of wafer.

Further, the side wall of the detection box is fixed with a controller, and the first motor, the second motor, the third motor and the detection lamp are all electrically connected with the controller.

Through adopting above-mentioned technical scheme, through first motor, second motor, third motor and inspection lamp of controller control, the direction and the angle of the wafer of staff's quick regulation of being convenient for have improved the efficiency to the wafer detection.

Furthermore, a plurality of hollowed-out holes are formed in the mounting plate in a penetrating mode.

Through adopting above-mentioned technical scheme, the setting in a plurality of fretwork holes has alleviateed the weight of mounting panel, has reduced the kinetic energy loss of first motor, second motor and third motor.

Further, the inner wall of the detection box is provided with a light absorption coating.

By adopting the technical scheme, the light absorption coating has stronger light absorption performance, and the probability of inaccurate wafer detection caused by light reflected by the inner wall of the detection box is reduced.

Further, the spout has been seted up to the mounting panel upper surface, install the fixed subassembly that is used for fixed wafer on the mounting panel, fixed subassembly includes the fixed block of being connected with the spout that slides and sets up the spring in the spout, spring one end is fixed with the spout inner wall, the spring other end is fixed with the fixed block lateral wall.

Through adopting above-mentioned technical scheme, the fixed block supports tightly the wafer under the elasticity effect of spring to fix the wafer on the mounting panel, reduced the probability that the wafer rocked on the mounting panel.

Further, the side wall of the fixed block is provided with a yielding inclined plane matched with the wafer.

Through adopting above-mentioned technical scheme, the setting of the inclined plane of stepping down is favorable to placing the in-process of wafer on the mounting panel downwards with the fixed block outside extrusion, is convenient for install the wafer.

Further, the fixed block is fixed with the sheet rubber away from the lateral wall of detecting case inner wall one side.

Through adopting above-mentioned technical scheme, the rubber sheet adopts rubber material to make, and its material is rich in elasticity, and the fixed block cooperates with the wafer and supports tight rubber sheet, has reduced the wearing and tearing between fixed block and the wafer.

In summary, the utility model has the following beneficial effects:

1. in the application, when the wafer is required to be detected, a worker fixes the wafer on the mounting plate and turns on the detection lamp, the driving assembly drives the vertical rod to rotate, so that the rotation angles of the mounting plate and the wafer are adjusted, the first rotating shaft and the second rotating shaft are driven to rotate through the first motor and the second motor, the second U-shaped plate and the mounting plate are inclined, the multidirectional angle of the mounting plate is adjusted, the wafer is detected at multiple angles conveniently, and the accuracy of detecting the wafer is improved;

2. in the application, when the vertical rod is required to be driven to rotate, a worker only needs to drive the driving gear to rotate through the third motor, and the driving gear is meshed with the driven gear which is fixedly sleeved on the vertical rod, so that the vertical rod rotates to drive the mounting plate to rotate, and the rotation angle of the wafer is convenient to adjust;

3. in this application, the fixed block supports tightly the wafer under the elasticity effect of spring to fix the wafer on the mounting panel, reduced the probability that the wafer rocked on the mounting panel.

Drawings

FIG. 1 is a schematic overall structure of an embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view of an embodiment of the present utility model;

fig. 3 is an enlarged schematic view at a in fig. 2.

In the figure: 1. a detection box; 2. a door; 3. a detection lamp; 4. a vertical rod; 5. a first tilt assembly; 51. a first U-shaped plate; 52. a first motor; 53. a first rotating shaft; 54. a first rotating block; 6. a second tilt assembly; 61. a second U-shaped plate; 62. a second motor; 63. a second rotating shaft; 64. a second rotating block; 7. a mounting plate; 71. a hollowed hole; 72. a chute; 8. a drive assembly; 81. a third motor; 82. a drive gear; 83. a driven gear; 9. a controller; 10. a fixing assembly; 101. a fixed block; 1011. a yielding inclined plane; 102. a spring; 11. a rubber sheet.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application; it is apparent that the described embodiments are only a part of the embodiments of the present application, not all of the embodiments, and all other embodiments obtained by a person having ordinary skill in the art without making creative efforts based on the embodiments in the present application are within the scope of protection of the present application.

As shown in fig. 1-3, an embodiment of the present application discloses a wafer transfer detection device, which includes a detection box 1, a box door 2, a detection lamp 3, a vertical rod 4, a first tilting assembly 5, a second tilting assembly 6, a mounting plate 7, and a driving assembly 8.

The detection box 1 has a rectangular structure with a hollow interior, and one side of the detection box 1 is open. The box door 2 is of a rectangular plate-shaped structure, and the box door 2 is hinged to the cost of the detection box 1 and is used for closing the opening of the detection box 1. The detection lamp 3 is a detection lamp 3 commonly used in the prior art and applicable to the embodiment, and the detection lamp 3 is fixed on the inner top wall of the box body. The vertical rod 4 is of a round rod-shaped structure which is vertically arranged, and the vertical rod 4 is rotationally connected to the inner bottom wall of the detection box 1.

The first tilting assembly 5 is installed at the upper end of the vertical rod 4, and the first tilting assembly 5 includes a first U-shaped plate 51, a first motor 52, a first rotating shaft 53, and a first rotating block 54. The first U-shaped plate 51 is of a plate-shaped structure with a U-shaped section, and the first U-shaped plate 51 is fixed at the upper end of the vertical rod 4. The first motor 52 is fixed on the side wall of the first U-shaped plate 51, and an output shaft of the first motor 52 penetrates through the first U-shaped plate 51 and is connected in a rotating mode. The first rotating shaft 53 is of a round rod-shaped structure which is horizontally arranged, the first rotating shaft 53 is fixed with the output shaft of the first motor 52, and the axis of the first rotating shaft 53 is overlapped with the axis of the output shaft of the first motor 52. The first rotating block 54 has a block-shaped structure with a rectangular cross section, and the first rotating block 54 is fixedly sleeved on the first rotating shaft 53.

The second tilting assembly 6 is mounted on the upper surface of the first rotating block 54, and the second tilting assembly 6 includes a second U-shaped plate 61, a second motor 62, a second rotating shaft 63, and a second rotating block 64. The second U-shaped plate 61 is a plate-shaped structure with a U-shaped section, the second U-shaped plate 61 is fixed on the upper surface of the first rotating block 54, and the second U-shaped plate 61 and the first U-shaped plate 51 are mutually perpendicular. The second motor 62 is fixed on the side wall of the second U-shaped plate 61, and an output shaft of the second motor 62 penetrates the second U-shaped plate 61 and is rotatably connected. The second rotating shaft 63 is a round rod-shaped structure which is horizontally arranged, the second rotating shaft 63 is fixed with the output shaft of the second motor 62, and the axis of the second rotating shaft 63 is coincident with the axis of the output shaft of the second motor 62. The second rotating block 64 has a rectangular block-shaped cross section, and the second rotating block 64 is fixedly sleeved on the second rotating shaft 63.

The mounting plate 7 is of a circular plate structure, the mounting plate 7 is fixed on the upper surface of the second rotating block 64 and is used for fixing a wafer, and the axis of the mounting plate 7 is coincident with the axis of the vertical rod 4. The driving assembly 8 is installed in the detection box 1 and is used for driving the vertical rod 4 to rotate, and the driving assembly 8 comprises a third motor 81, a driving gear 82 and a driven gear 83. The third motor 81 is fixed to the inner bottom wall of the detection box 1, and an output shaft of the third motor 81 extends vertically upward. The driving gear 82 is fixed to an output shaft end portion of the third motor 81, and an axis of the driving gear 82 coincides with an axis of an output shaft of the third motor 81. The driven gear 83 is fixedly sleeved on the vertical rod 4, the driven gear 83 is meshed with the driving gear 82, and the axis of the driven gear 83 is coincident with the axis of the vertical rod 4.

When the wafer is required to be detected, a worker fixes the wafer on the mounting plate 7 and turns on the detection lamp 3, drives the driving gear 82 to rotate through the third motor 81, and because the driving gear 82 is meshed with the driven gear 83, the driven gear 83 is fixedly sleeved on the vertical rod 4, the vertical rod 4 is enabled to rotate, so that the rotation angle of the mounting plate 7 and the wafer is adjusted, and drives the first rotating shaft 53 and the second rotating shaft 63 to rotate through the first motor 52 and the second motor 62, so that the second U-shaped plate 61 and the mounting plate 7 incline, the multidirectional angle of the mounting plate 7 is adjusted, the detection of the wafer at multiple angles is facilitated, and the accuracy of the wafer detection is improved.

In order to improve the efficiency of detecting the wafer, the side wall of the detecting box 1 is fixed with a controller 9, the first motor 52, the second motor 62, the third motor 81 and the detecting lamp 3 are electrically connected with the controller 9, and the first motor 52, the second motor 62, the third motor 81 and the detecting lamp 3 are controlled by the controller 9, so that the operator can conveniently and quickly adjust the direction and the angle of the wafer, and the efficiency of detecting the wafer is improved.

In order to reduce the kinetic energy loss of a plurality of motors, a plurality of hollow holes 71 are formed in the mounting plate 7 in a penetrating manner, and the weight of the mounting plate 7 is reduced due to the plurality of hollow holes 71, so that the kinetic energy loss of the first motor 52, the second motor 62 and the third motor 81 is reduced.

In order to reduce the probability of light reflected by the inner wall of the detection box 1, the inner wall of the detection box 1 is provided with a light absorption coating (not shown in the figure), and the light absorption coating has strong light absorption performance, so that the probability of inaccurate wafer detection caused by light reflected by the inner wall of the detection box 1 is reduced.

In order to fix the wafer, the upper surface of the mounting plate 7 is provided with a chute 72, and the mounting plate 7 is provided with a fixing assembly 10 for fixing the wafer, wherein the fixing assembly 10 comprises a fixing block 101 and a spring 102. The fixed block 101 is of a block-shaped structure with a rectangular section, and the fixed block 101 is connected in the chute 72 in a sliding manner. The spring 102 is arranged in the chute 72, one end of the spring 102 is fixed with the inner wall of the chute 72, and the other end of the spring 102 is fixed with the side wall of the fixed block 101. The fixing block 101 abuts against the wafer under the action of the elastic force of the spring 102, so that the wafer is fixed on the mounting plate 7, and the probability of shaking of the wafer on the mounting plate 7 is reduced.

In order to facilitate the installation of the wafer, the side wall of the fixing block 101 is provided with an abdication inclined plane 1011 matched with the wafer, and the arrangement of the abdication inclined plane 1011 is beneficial to the outward extrusion of the fixing block 101 in the process of placing the wafer on the mounting plate 7 downwards, so that the installation of the wafer is facilitated.

In order to reduce the abrasion between the fixing block 101 and the wafer, the side wall of the fixing block 101, which is far away from the inner wall of the detection box 1, is fixed with the rubber sheet 11, the rubber sheet 11 is made of rubber materials, the materials are elastic, and the fixing block 101 is matched with the wafer and abuts against the rubber sheet 11, so that the abrasion between the fixing block 101 and the wafer is reduced.

The use principle of the wafer transfer detection device in the embodiment is as follows: when the wafer is required to be detected, a worker fixes the wafer on the mounting plate 7 and turns on the detection lamp 3, drives the driving gear 82 to rotate through the third motor 81, and because the driving gear 82 is meshed with the driven gear 83, the driven gear 83 is fixedly sleeved on the vertical rod 4, the vertical rod 4 is enabled to rotate, so that the rotation angle of the mounting plate 7 and the wafer is adjusted, and drives the first rotating shaft 53 and the second rotating shaft 63 to rotate through the first motor 52 and the second motor 62, so that the second U-shaped plate 61 and the mounting plate 7 incline, the multidirectional angle of the mounting plate 7 is adjusted, the detection of the wafer at multiple angles is facilitated, and the accuracy of the wafer detection is improved.

The above description is only a preferred embodiment of the present utility model, and the protection scope of the present utility model is not limited to the above examples, and all technical solutions belonging to the concept of the present utility model belong to the protection scope of the present utility model. It should be noted that modifications and adaptations to the present utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be within the scope of the present utility model.

Claims

1. The utility model provides a wafer passes piece detection device, includes one side open-ended detection case (1) and articulates at detection case (1) lateral wall and be used for closed detection case (1) open-ended chamber door (2), characterized by: the detection box comprises a detection box body (1), wherein a detection lamp (3) is fixed on the inner top wall of the detection box body (1), a vertical rod (4) is rotatably connected to the inner bottom wall of the detection box body (1), a first inclination assembly (5) is arranged at the upper end of the vertical rod (4), and the first inclination assembly (5) comprises a first U-shaped plate (51) fixed with the upper end of the vertical rod (4), a first motor (52) fixed with the side wall of the first U-shaped plate (51), a first rotating shaft (53) fixed with the end part of an output shaft of the first motor (52) and a first rotating block (54) fixedly sleeved on the first rotating shaft (53);

the first rotating block (54) is provided with a second tilting assembly (6) on the upper surface, the second tilting assembly (6) comprises a second U-shaped plate (61) fixed with the upper surface of the first rotating block (54), a second motor (62) fixed with the side wall of the second U-shaped plate (61), a second rotating shaft (63) fixed with the end part of an output shaft of the second motor (62) and a second rotating block (64) fixedly sleeved on the second rotating shaft (63), the second U-shaped plate (61) and the first U-shaped plate (51) are mutually perpendicular, the upper surface of the second rotating block (64) is fixedly provided with a mounting plate (7) for fixing a wafer, and a driving assembly (8) for driving the vertical rod (4) to rotate is arranged in the detection box (1).

2. The wafer transfer inspection apparatus of claim 1, wherein: the driving assembly (8) comprises a third motor (81) fixed on the bottom in the detection box (1), a driving gear (82) fixed on the end part of an output shaft of the third motor (81) and a driven gear (83) fixedly sleeved on the vertical rod (4) and meshed with the driving gear (82).

3. The wafer transfer inspection apparatus of claim 2, wherein: the side wall of the detection box (1) is fixedly provided with a controller (9), and the first motor (52), the second motor (62), the third motor (81) and the detection lamp (3) are electrically connected with the controller (9).

4. The wafer transfer inspection apparatus of claim 2, wherein: a plurality of hollowed-out holes (71) are formed in the mounting plate (7) in a penetrating mode.

5. The wafer transfer inspection apparatus of claim 1, wherein: the inner wall of the detection box (1) is provided with a light absorption coating.

6. The wafer transfer inspection apparatus of claim 1, wherein: the wafer fixing device is characterized in that a sliding groove (72) is formed in the upper surface of the mounting plate (7), a fixing assembly (10) for fixing a wafer is mounted on the mounting plate (7), the fixing assembly (10) comprises a fixing block (101) connected with the sliding groove (72) in a sliding mode and a spring (102) arranged in the sliding groove (72), one end of the spring (102) is fixed with the inner wall of the sliding groove (72), and the other end of the spring (102) is fixed with the side wall of the fixing block (101).

7. The wafer transfer inspection apparatus of claim 6, wherein: the side wall of the fixed block (101) is provided with a yielding inclined surface (1011) matched with the wafer.

8. The wafer transfer inspection apparatus of claim 7, wherein: the side wall of the fixed block (101) far away from one side of the inner wall of the detection box (1) is fixed with a rubber sheet (11).